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4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 1 of 42
A Terahertz FMCW Comb Radar in
65nm CMOS with 100GHz Bandwidth
Xiang Yi1, Cheng Wang1, Muting Lu1, Jinchen Wang1,
Jesus Grajal1,2, and Ruonan Han1
1Massachusetts Institute of Technology, Cambridge, MA, USA2Universidad Politécnica de Madrid, Madrid, Spain
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 2 of 42
Outline
• Introduction
• Comb Radar
• Circuit Implementations
• Measurement Results
• Conclusion
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 3 of 42
Outline
• Introduction
• Comb Radar
• Circuit Implementations
• Measurement Results
• Conclusion
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 4 of 42
Wideband FMCW Radar Applications
[atap.google.com/soli]
Non-Ionizing/Destructive Imaging
• High resolution detection
∆𝑅 =𝑐
2 ∙ 𝐵𝑊 [Sheen, TMTT 2001]
[Mostajeran, TMTT 2019]
Localization
Recognition
• High resolution imaging
Security Imaging
Range Resolution
[humatics.com]
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 5 of 42
Defects
Material
D
BWFMCW
ΔR
ΔCR
R
Wideband THz FMCW Radar Example
• SAR 3D imaging
• Cross-range resolution ΔCR
– Relies on synthetic aperture D
– Mm resolution is readily available (e.g. R=3D, ΔCR=1.5mm)
• Range resolution ΔR
– Relies on bandwidth BW only
– Mm resolution: wideband (e.g. BW=100GHz, ΔR=1.5mm, )
300GHz Radar Imaging for Non-Destructive Detection of Material Defects
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 6 of 42
Integrated Radar Survey
• CMOS radar is desired
– Low cost
– Integration with analog and digital circuits
• Bandwidth of CMOS radars is limited
• Wideband FMCW radar issues– Performance fluctuation
– Chirp signal generation
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 7 of 42
Outline
• Introduction
• Comb Radar
• Circuit Implementations
• Measurement Results
• Conclusion
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 8 of 42
CH5
CH4
CH3
CH2
CH1t
f
Comb Radar Concept
• Divide a single wideband channel into N narrowband channels
• Make these N channels operate simultaneously
• Multi-tone operation looks like a comb
ΔT=Tm/N
N=5
ΔB=BW/N
TX
signal
Echo
t
f N=5
BW
t
f
ΔT
ΔBt
f
Tm
BW
TX signal
Echo
fCH1 CH5CH2 CH3 CH4
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 9 of 42
Comb Radar System Diagram
CH2TRX
÷2
CH1 TRX
÷2
IF1 IF2
10GHz
220~240GHz
55~60GHz
13.75~15GHz Multiplier(x4)
CH3TRX
÷2
IF3 CH4TRX
÷2
IF4TRX5
IF5
75~80GHz
300~320GHz
LO IQ (5GHz)SSB
Up-Mixer
Buffer
240~260GHz 260~280GHz 280~300GHz
Divider
External FMCW
Doubler1(x2)
Doubler2(x2)
SlotBalun
MatchingNetwork
SIFSquare-LawMixer
Amplifier
STX
SRXBPFLNA
Target
CH1TRX
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 10 of 42
Phase of IF Signals
• For Channel N, the TX signal is
𝑆𝑇𝑋 ,𝑁 𝑡 = cos 2𝜋𝑓𝑐,𝑁 +𝜋∆𝐵
𝛥𝑇𝑡 𝑡 +𝜑𝑁
𝑆𝑅𝑋,𝑁 𝑡 = cos 2𝜋𝑓𝑐,𝑁 +𝜋∆𝐵
𝛥𝑇 𝑡 −𝜏 (𝑡 −𝜏) +𝜑𝑁
𝑆𝐼𝐹,𝑁 𝑡 = cos(2𝜋∆𝐵
𝛥𝑇𝜏𝑡+2𝜋𝑓𝑐,𝑁𝜏)
• The echo signal (τ<<ΔT) is
• The band-pass-filtered IF signal is
• The phase of IF signal 𝜑𝐼𝐹,𝑁 has no initial RF phase 𝜑𝑁
= 𝜑𝐼𝐹,𝑁 𝑡
Initial RF phase
MN
SIF
STX
SRX
BPFLNA
Square-LawMixer
τ
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 11 of 42
Phase of IF Signals
• The phases of adjacent IF signals are continuous despite of their initial phases
CH N+1
TRX
CH N
TRX
IF N IF N+1
Target
τ
𝜑𝐼𝐹,𝑁+1 𝑡0 =2𝜋∆𝐵
𝛥𝑇𝜏𝑡0 + 2𝜋𝑓𝑐,𝑁+1𝜏
𝜑𝐼𝐹,𝑁 𝑡0 + ∆𝑇 =2𝜋∆𝐵
𝛥𝑇𝜏 𝑡0 + ∆𝑇 + 2𝜋𝑓𝑐,𝑁𝜏
𝜑𝐼𝐹,𝑁 𝑡0 + 𝛥𝑇 = 𝜑𝐼𝐹,𝑁+1 𝑡0
ΔB
ΔT
TX Echo
t
fRF
CH N
CH N+1
t
VIF
t
VIFCH N
CH N+1
fc,N
τ
t
Stitched IF
2ΔT
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 12 of 42
Stitching Process
• IF signals are directly stitched in time domain after calibrations
IF1Stitched IF
t
IF2
IF3
IF4
IF5
IF1 IF2 IF3 IF4 IF5De-Chirp
Tm
Calibration
ΔT=Tm/5
CH5
CH4
CH3
CH2
CH1t
RF
ΔT
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 13 of 42
Compared with Single Channel Radar
• More linear chirp signal
t
f
Tm=5ΔT
BW
ΔTt
f
5×
• SNR is improved
• Flatter frequency responses • Finer velocity resolution
∆𝑣 =λ
2𝑁𝑇𝑓𝑟𝑎𝑚𝑒
ferror
Chirp Signal
t
f
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 14 of 42
Outline
• Introduction
• Comb Radar
• Circuit Implementations
• Measurement Results
• Conclusion
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 15 of 42
Comb Radar System Diagram
• Total bandwidth:
5×20GHz=100GHz
• Scalable bandwidth
extension
• Single antenna
solution for each
transceiver: 5
antennas, coupling?
Doubler1(x2)
Doubler2(x2)
SlotBalun
MatchingNetwork
Square-LawMixer
Amplifier
BPFLNA
CH2TRX
÷2
CH1 TRX
÷2
IF1 IF2
10GHz
220~240GHz
55~60GHz
13.75~15GHz Multiplier(x4)
CH3TRX
÷2
IF3 CH4TRX
÷2
IF4TRX5
IF5
75~80GHz
300~320GHz
LO IQ (5GHz)SSB
Up-Mixer
Buffer
240~260GHz 260~280GHz 280~300GHz
Divider
External FMCW
CH1TRX
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 16 of 42
On-Chip Antenna Background
Slot Antenna Patch AntennaSubstrate Integrated
Waveguide (SIW)
Expensive Silicon Lens
Need No Need No Need
Bandwidth Wide Narrow Narrow
Inter-Antenna Coupling
Medium Large Small
Example
[R. Han, ISSCC 2012] [R. Han, JSSC 2013] [S. Hu, JSSC 2012]
Slot Antennas
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 17 of 42
SIW Cavity and Slot
• Eigenmode simulation
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 18 of 42
SIW Cavity with Orthogonal Slots
• Four modes
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 19 of 42
SIW Orthogonal Slot Antenna
• Multiple resonant modes due to orthogonal slots in SIW cavity
• Tune size parameters to arrange mode frequencies
220 240 260 280 300 320
-20
-15
-10
-5
0
Sim
ulat
ed S
11 w
ith M
N (
dB)
Frequency (GHz)
Lslot1
Lslot2
Feed
Wcav
Lcav
f
f
Size Tuning
Mode Frequencies
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 20 of 42
SIW Orthogonal Slot Antenna
• Wide bandwidth (~40GHz, 14.8%)
• 0dBi peak gain
• Linear polarization (axial ratio > 11.6dB)
250 260 270 280 29010
15
20
25
30
Pea
k G
ain
(dB
)
Axi
al R
atio
(dB
)
Effi
cien
cy (
%)
Frequency (GHz)
-20
-15
-10
-5
0
5
0
5
10
15
20
25
220 240 260 280 300-70
-60
-50
-40
-30
Sim
ulat
ed A
nten
na
(CH
2&C
H3)
Cou
plin
g (d
B)
Frequency (GHz)
• Low coupling (< -31dB)
• 20.5% efficiency
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 21 of 42
Input Multiplier, Buffer, and SSB Mixer
Buffer
Multiplier (X4)
Vb
OUT
LOI+ LOI- LOQ+ LOQ-I+
Q+
Q-
I-
To CH1 TRX
I+ Q+ Q-I-
SSB Up-Conversion Mixer
IF1
55~60GHz
13.75~15GHz IN
Multiplier(x4)
CH1 TRX
÷2
5GHz
10GHz
13.75~15GHz
IN
55~60GHz 60~65GHz
Multiplier (x4)
Buffer SSB Mixer
To CH1 TRX
OUT
OUT
IN
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 22 of 42
Doubler1 and Folded Slot Balun
Doubler1(x2)
Doubler2(x2)
SlotBalun
MatchingNetwork
Square-LawMixer
Doubler1Vb
IN
BPFLNA
Doubler1
Balun
ININT
INT OUTIN
INT
OUT
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 23 of 42
Folded Slot Balun
• Nearly perfect differential output
– 50GHz (45%) bandwidth
– 1.3dB insertion loss
– 0.05dB/0.5° amplitude/phase errors
λ/4 Resonator
IN
OUT
-3dB
IN
OUT
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 24 of 42
Cascaded Neutralized Amplifier
Doubler1(x2)
Doubler2(x2)
SlotBalun
MatchingNetwork
Cascaded Neutralized Amplifier
IN OUT
OUTIN
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 25 of 42
Doubler2
Doubler1(x2)
Doubler2(x2)
SlotBalun
MatchingNetwork
Doubler2
To RXTo MN
IN+ IN-
Output Frequency (GHz)200 210 220 230 240 250 260
Outp
ut P
ow
er
(dB
m)
2
0
-2
-4
-6
-8
Output Frequency (GHz)200 210 220 230 240 250 260
10
Conve
rsio
n L
oss
(dB
)9
8
7
6
5
4
IN
OUT
OUT
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 26 of 42
Multi-Stub Matching Network
Doubler1(x2)
Doubler2(x2)
SlotBalun
MatchingNetwork
Square-LawMixerL1
L1
L2
L2
L3
L3
L4
L4
L5
L5
L6
L6
L7
L7
IN OUT
Layout
Frequency (GHz)220 230 240 250 260 270210200190S
-Para
mete
rs (
dB
)
S21
S11
S22
0
-10
-5
-15
-20
BPFLNA
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 27 of 42
Receiver
• Square-law mixer for
single antenna solution,
passive circuit for
smaller flicker noise
• Self-biased LNA with
high-pass input to
suppress unwanted low
frequency components
Doubler1(x2)
Doubler2(x2)
SlotBalun
MatchingNetwork
IFSquare-LawMixer
IF
VDD
From TX & Antenna
Square-Law Mixer
Vb
BPFLNA
To External BPF, VGA, and ADC
Receiver BPFLNA
Cb
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 28 of 42
Outline
• Introduction
• Comb Radar
• Circuit Implementations
• Measurement Results
• Conclusion
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 29 of 42
Chip and PCB Photograph
• TSMC 65nm bulk CMOS
technology
• Area: 2.5mm by 2.0mm
• Total power consumption:
840mW
SIW Antenna
2.0
mm
2.5 mm
BufferSSB
Mixer
Divider
Doubler1Balun
Amplifier
Multiplier(X4)
RXDoubler2
Matching
Network
TPX Plastic Focus Lens
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 30 of 42
Transmitter Mode Measurement
• Total EIRP without lens: 0.6dBm
• Total EIRP with lens: 20dBm
• Fluctuations: within 8.8dB
200 220 240 260 280 300 320 340
-60
-40
-20
0
20
w/ lens
w/o lens
EIR
P(d
Bm
)
Frequency (GHz)
Fluctuations
VDI
Extender
(Receiver)
Signal
Generator
(E8257D)
Signal
Generator
(N5173B)
Horn
Antenna
LO
10GHz
13.75~15GHz
RF
PCB
Spectrum
Analyzer
(N9020A)
Signal
Generator
(83732B)
LO
IF
Lens
(w/, w/o)Setup is calibrated by PM5
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 31 of 42
Transmitter Mode Measurement
0.1 1 10 100 1000-120
-100
-80
-60
-40
-20
Mea
sure
d T
X P
hase
Noi
se (
dBc/
Hz)
Frequency Offset (kHz)
-90
-60
-300
30
60
90
E Plane
H Plane
Radiation Pattern (CH3, w/o Lens)
0dB-10dB
• Friis equation is met at far-field
• Antenna radiation pattern 3dB beamwidth: 90°
• Phase noise: better than -100dBc/Hz @1MHz
∝1/Distance2
Distance in log scale (cm)
Mea
sure
d P
ower
Pm
eas
(dB
m)
Calculated E
IRP
(dBm
)
0.5 1 2 4 8 16 32
-50
-40
-30
-20
-15
-10
-5
w/o lens
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 32 of 42
Receiver Mode Measurement
• Minimum SSB NF including antenna loss: 22.8dB
• Fluctuation of NF: 14.6dB
• Receiver gain: 22.2dB
200 220 240 260 280 300 320 340-50
-40
-30
-20
-10
0
10
20
30
Frequency (GHz)
Gai
n (d
B)
20
30
40
50
60
70
80
90
100
Noi
se F
igur
e (d
B)RX
Gai
n (d
B)
RX
Noise F
igure (dB)
w/o lens
VDI
Extender
(Transmitter)
Signal
Generator
(E8257D)
Signal
Generator
(N5173B)
Horn
Antenna
LO
10GHz
13.75~15GHz
RF
PCB
Signal
Generator
(83732B)
Spectrum
Analyzer
(N9020A)
IFRF
Setup is calibrated by PM5
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 33 of 42
FMCW Radar Measurement Setup
DDSAD9164
Multipliers(x4)
CombRadarChip
13.75~15GHz
NI PXI-5105
Digitizer
5 IFsSignal Generator
10GHz BPFsVGAs
FMCW
LO To PC
ΔB
ΔT
Useful signals
Over-chirping
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 34 of 42
Radar Signal Calibration
• Amplitude mismatch
– Gain mismatch among channels
• Phase mismatch
– Matching network delay mismatch: fixed
– Antenna off-axis: range should be large (>20cm)
• Calibration method [J. Grajal, TMTT 2015]
– Reference: one single-point like target
– One-time calibration
Amplitude/Phase
Calibration
Raw Data
Reference Target
Calibration Data
IF Stitching
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 35 of 42
Range Accuracy Measurement
• Measured distance matches real distance
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 36 of 42
Range Resolution Measurement
2.5mm
• Two targets with
2.5mm distance
• Hamming window
• One channel
• 20GHz
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 37 of 42
Range Resolution Measurement
2.5mm
• Three channels
• 60GHz
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 38 of 42
Range Resolution Measurement
2.5mm
• Five channels
• 100GHz
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 39 of 42
Comparison Table
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 40 of 42
Outline
• Introduction
• Comb Radar
• Circuit Implementations
• Measurement Results
• Conclusion
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 41 of 42
Conclusion
• Comb radar for wideband THz applications
– Flatter frequency responses
– More linear chirp signal
– Finer velocity resolution
– Improved SNR
– Scalable bandwidth extension
• A five channel comb radar with 100GHz bandwidth was
demonstrated in 65nm bulk CMOS technology
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 42 of 42
Acknowledgements
• Chip fabrication: TSMC University Shuttle Program
• Measurements: Prof. Charlie Sodini, Prof. Tomás Palacios,
Qingyu Yang, Mohamed I. Ibrahim, and Nathan Monroe (MIT);
Pu Wang, and Rui Ma (Mitsubishi Electric Research Labs)
• Funding: NSF CAREER award (ECCS-1653100), MIT Center of
Integrated Circuits and Systems (CICS), and a gift fund from
TSMC
4.8: A Terahertz FMCW Comb Radar in 65nm CMOS with 100GHz Bandwidth© 2020 IEEE International Solid-State Circuits Conference 43 of 42
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