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www.elsevier.com/locate/apsusc
Available online at www.sciencedirect.com
4 (2008) 5034–5038
Applied Surface Science 25A spectroscopic ellipsometric investigation of new critical
points of Zn1�xMnxS epilayers
D.-J. Kim a, J.-W. Lee b, Y.-M. Yu c, Y.D. Choi d,*a Institute of Science & Technology, Mokwon University, Daejeon 302-729, Republic of Korea
b Department of Materials Engineering, Hanbat National University, Daejeon 305-719, Republic of Koreac Process Reengineering Team, National Archives and Records Service, Daejeon 302-701, Republic of Korea
d Department of Optical & Electronic Physics, Mokwon University, Daejeon 302-729, Republic of Korea
Received 19 July 2007; received in revised form 30 January 2008; accepted 31 January 2008
Available online 8 February 2008
Abstract
Zn1�xMnxS epilayers were grown on GaAs (1 0 0) substrates by hot-wall epitaxy. X-ray diffraction (XRD) patterns revealed that all the
epilayers have a zincblende structure. The optical properties were investigated using spectroscopic ellipsometry at 300 K from 3.0 to 8.5 eV. The
obtained data were analyzed for determining the critical points of pseudodielectric function spectra, he(E)i = he1(E)i + ihe2(E)i, such as E0,
E0 + D0, and E1, and three E2 (S, D, G) structures at a lower Mn composition range. These critical points were determined by analytical line-shapes
fitted to numerically calculated derivatives of their pseudodielectric functions. The observation of new peaks, as well as the shifting and broadening
of the critical points of Zn1�xMnxS epilayers, were investigated as a function of Mn composition by ellipsometric measurements for the first time.
The characteristics of the peaks changed with increasing Mn composition. In particular, four new peaks were observed between 4.0 and 8.0 eV for
Zn1�xMnxS epilayers, and their characteristics were investigated in this study.
# 2008 Elsevier B.V. All rights reserved.
PACS : 78.20.�e; 78.40.Fy
Keywords: Zn1�xMnxS epilayer; Spectroscopic ellipsometry; Critical points
1. Introduction
Zn1�xMnxS has a wide band gap energy and hence is
considered a promising material for applications related to
optoelectronic devices and thin film electroluminescent devices
[1–4]. For the realization of such applications, it is essential to
grow high quality single crystal epilayers and to attain an
extensive understanding of the optical and electrical properties
of Zn1�xMnxS. However, the optical properties of this material
have yet to be thoroughly investigated. While some results have
been reported for the photon energy range below 6 eV [5–7],
few investigations have been conducted for photon energy
above 6 eV, which belongs to the high-energy range, for pure
ZnS without a Mn component [8]. Therefore, extensive study
on the optical response of Zn1�xMnxS at high photon energy is
* Corresponding author. Tel.: +82 42 829 7552; fax: +82 42 823 0639.
E-mail address: [email protected] (Y.D. Choi).
0169-4332/$ – see front matter # 2008 Elsevier B.V. All rights reserved.
doi:10.1016/j.apsusc.2008.01.153
required. In particular, studies on the S, D, G-transitions and
newly observed transitions originating in the Brillouin zone
need to be carried out.
Spectroscopic ellipsometery (SE) is a well-known, powerful
tool to study the optical dielectric properties of semiconductors.
Using SE, the critical points can be easily obtained from a
spectroscopic analysis of the pseudodielectric functions, which
are related closely with the energy band structure [5]. The
purpose of the present study is to determine the optical
properties of Zn1�xMnxS/GaAs (1 0 0) epilayers by SE
measurement for a wide photon energy range of 3.0–8.5 eV.
In particular, in this work, for the first time the spectral
dependence of pseudodielectric function spectra he(E)i= he1(E)i + ihe2(E)i of Zn1�xMnxS is described as a function
of the Mn composition. Shifting and broadening of the critical
points, such as E0/E0 + D0, E1, and E2 with increasing Mn
composition were also investigated. Further, the second
derivative spectra, d2e(E)/dE2, of the pseudodielectric function
of Zn1�xMnxS epilayers have been studied on the basis of
Fig. 1. XRD patterns as a function of the Mn composition of Zn1�xMnxS
epilayers.
D.-J. Kim et al. / Applied Surface Science 254 (2008) 5034–5038 5035
numerically calculated analytical line-shapes with two-dimen-
sional critical structures. Four new peaks were observed and
investigated for the energy range between 4.0 and 8.0 eV in
conjunction with increasing Mn composition of Zn1�xMnxS
epilayers.
2. Experiments
All Zn1�xMnxS epilayers investigated in this work were
grown on GaAs (1 0 0) substrates by hot-wall epitaxy. The
optimum substrate temperature, wall temperature, and
source temperature for the growth of the Zn1�xMnxS epilayers
were found to be 200, 580, and 750 8C, respectively. The
temperature for Mn was controlled from 720 to 790 8C.
The thickness of the Zn1�xMnxS epilayers was determined to
be approximately 1 mm from reflectance measurements
carried out using a spectrophotometer, and the growth rate
was identified as 1–3 A/s. The Mn composition x was
determined to range from 0 to 0.59 by energy dispersive X-
ray spectrometry measurements. The crystal structure and
lattice constant were examined by X-ray diffraction (XRD).
Prior to the SE measurements, the samples were rinsed via
flushing with methanol. During the SE measurements, dried
nitrogen gas of high purity was flowed continuously onto the
sample surface in order to prevent oxidation and contamination
by air. In order to investigate the optical properties of
Zn1�xMnxS epilayers, the pseudodielectric function spectra
were measured at 300 K between 3.0 and 8.5 eV using an
automatic spectroscopic rotating analyzer ellipsometer (Wool-
lam VUV-VASE system) with 300 W xenon and 70 W
deuterium lamps at an incident angle of 708. In this SE
experiment, the elliptical azimuth C and phase angle D
determined with respect to the polarized components, which
vibrate in directions perpendicular (s) and parallel (p) to the
incident plane, can be measured precisely. Therefore, the
complex pseudodielectric he(E)iof the epilayer can be
determined in the two-phase model by
heðEÞi ¼ easin2f
�1þ tan2f
�1� r
1þ r
�2�; (1)
where r = tan CeiD; ea = 1 and f are the pseudodielectric
function of the ambient medium and the incident angle of
the probing light, respectively. Since corrections to the over-
layers and surface roughness have not been made, the dielectric
spectra derived from the ellipsometric data can be treated as
‘pseudodielectric’, he(E)i.
3. Results and discussion
From Fig. 1, it has seen that the XRD patterns vary according
to the Mn composition x of the Zn1�xMnxS epilayers. All the
epilayers have a zincblende structure. Zn1�xMnxS (2 0 0) and
(4 0 0) peaks with GaAs (2 0 0) and (4 0 0) peaks can be clearly
observed. The separation between the Zn1�xMnxS and GaAs
peaks decreases with increasing Mn composition and the XRD
peak intensities of Zn1�xMnxS are also gradually weakened
with increasing Mn composition. The XRD spectra show that,
through the entire range of Mn composition x, no other peaks
exist except for a homogeneous zincblende ZnMnS phase. It
should be noted that the peak observed at 218 appears to be due
to an error originating in the measurement. For all the samples,
if Vegard’s law is assumed and the lattice constants of ZnS and
MnS are taken to be 5.410 and 5.559 A, respectively, as
indicated in our previous report, the positions of the X-ray peak
for the epilayers correspond to those of the fully relaxed film
[9].
Fig. 2 shows the real part of the pseudodielectric function
spectra he1(E)i of Zn1�xMnxS epilayers obtained from SE
measurements with increasing Mn composition x. The
structures in Fig. 2 are represented using the notation of
Cardona and Greenaway [10]. Although there have been many
reports on the optical properties of Zn1�xMnxS [11–13,3], data
measured by SE as a function of Mn composition x have not
been reported to date.
The strong interference patterns appearing at energy below
the energy band gap shown in Fig. 2, E0/E0 + D0, are due to
multiple internal reflections of the light beam in the transparent
epilayer. Kim and Sivananthan, and Dahmani et al. reported
that the E0 peak appears at the end of the right side of the
interference patterns for ZnSe [14,15]. As shown in Fig. 2, the
E0/E0 + D0 peaks of Zn1�xMnxS in this study also distinctly
appear at the end of the right side of the interference patterns.
The E0 and E0 + D0 peaks caused by the Gv15!Gc
1 transition
could not be readily distinguished, because the intrinsic spin
splitting energy D0 of ZnS is very small (�70 meV) [5]. Note
that this value is slightly smaller than that of other II–VI
semiconductors. Thus, the E0 and E0 + D0 peaks appeared as a
single peak in all the Zn1�xMnxS epilayers investigated in this
Fig. 2. Real parts he1(E)i of the pseudodielectric function spectra of
Zn1�xMnxS epilayers obtained from SE measurement as a function of Mn
composition. Spectra have been offset by amounts indicated in the parentheses.
Fig. 3. Imaginary parts he2(E)i of the pseudodielectric function spectra of
Zn1�xMnxS epilayers obtained from SE measurement as a function of Mn
composition. Spectra have been offset by amounts indicated in the parentheses.
D.-J. Kim et al. / Applied Surface Science 254 (2008) 5034–50385036
study. As shown in Fig. 2, the E0/E0 + D0 peak energy at x = 0
was obtained at about 3.81 eV, and thereafter it slowly
decreased with increasing Mn composition and approached
3.65 eV at x = 0.59.
The E1 (Lv3!Lc
1) peak due to the contribution of 2D
excitons at x = 0 was observed at 5.74 eV [16]. Note that the E1
peaks also red-shifted to lower energies with increasing Mn
composition. The E2 structure at x = 0 was divided into three
peaks according to the transition direction of the Brillouin zone
(BZ). These structures appeared at approximately 7.00 eV
(Sv2!S
c1), 7.25 eV (Dv
5!Dc1), and 7.80 eV (Gv
15!Gc15) [8].
The present experimental data on the E2 peak positions (7.00,
7.25, and 7.80 eV) are in good agreement with results reported
by Ghong et al. [17].
Note that a new peak positioned near 7.20 eV begins to
appear at x = 0.21, and becomes increasingly apparent with
increasing Mn composition. Thus, this peak can be ascribed to
the increase of Mn composition and, more specifically, may be
caused by Mn 3d+, as explained in our previous report on
Zn1�xMnxSe [18]. The peaks located at 8.35 eV will be
discussed in detail with the numerically calculated second
derivative spectra of Fig. 4.
Fig. 3 shows the imaginary part he2(E)i of the pseudodi-
electric function of Zn1�xMnxS epilayers. The E0/E0 + D0 peak
caused by the G-transition can be considered a 3D M0CP type
[5,16]. The E0/E0 + D0 peak is represented as a single peak, as
shown in Fig. 2. The E1 peak is located at 5.74 eV at lower Mn
composition, and it is known to be due to the 2D excitons. In
general, the 2D excitons in II–VI semiconductors act strongly
[5,19–21]. The excitonic effects are reported to be much
stronger in II–VI semiconductors than in III–V semiconductors
[19–21]. Therefore, the E1 peak is stronger and more distinct
than any other peaks, as shown in Fig. 3. As the Mn
composition was increased, the E1 peak showed red-shifting. In
our experimental results, all E1 peaks were weakened and
broadened because of the small contribution of 2D excitons [5],
which were strongly localized at high Mn composition. These
results could be attributed to an increase of the misfit
dislocation density in ternary compounds and the overlap of
some peaks, respectively. The overlapped peaks are comprised
of two peaks, which are further described in Fig. 5. Three E2
peaks clearly appeared at lower Mn composition (x � 0.10), but
these peaks completely disappeared at higher Mn composition.
Unlike the transition at the S-point, the transitions at the D and
G-points are relatively weak. When the Mn composition was
larger than x = 0.21, a new peak, attributed to Mn 3d+, was
generated at approximately 7.20 eV. This peak is also further
described in Fig. 5.
Fig. 4 illustrates the numerically calculated second
derivatives spectra, d2he(E)i/dE2, of the pseudodielectric
function spectra he(E)i of Zn1�xMnxS epilayers and data fitted
by the standard analytic critical points line shape for further
analysis of the critical points. The open squares and circles in
Fig. 4 denote the data obtained from SE measurement in the
present study and the solid and dotted curves represent the best
fits of e1(E) and e2(E), respectively. The fitted data are expressed
Fig. 4. The second derivative spectra d2 he(E)i/dE2 of the pseudodielectric
function spectra of Zn1�xMnxS epilayers. The open squares and circles repre-
sent the data measured by SE, and the solid and dotted lines represent the data
fitted by Eq. (2). Spectra have been offset by amounts indicated in the
parentheses.
Fig. 5. Shift of the peak position energy of Zn1�xMnxS epilayers obtained from
the results of Fig. 4. Open symbols and dotted lines represent the obtained
structures and guidelines, respectively, and filled symbols and dot-dashed lines
denote the four structures newly observed and the guidelines, respectively.
D.-J. Kim et al. / Applied Surface Science 254 (2008) 5034–5038 5037
as analytical line-shapes with two-dimensional critical points
[22,23],
eðEÞ ¼ C � A lnðE � Ei � iG Þ expðiFÞ: (2)
This numerical formula consists of four parameters for each
point: energy E, broadening G, amplitude A, and phase angle F.
We determined the critical points of the epilayers by taking the
zero-crossing of the second derivative spectra of the imaginary
parts of their pseudodielectric function spectra he(E)i. As
shown in Fig. 4, the second derivative spectra have a clearer
structure than no differentiated spectra shown in Figs. 2 and 3.
In particular, the structure located at 8.35 eV was reported as a
Lv3!Lc
3 transition by Walter and Cohen [24]. Note that they
obtained this structure at 8.35 eV, from reflectance spectra
measurement. We observed this structure via SE measurement,
for the first time, as a function of Mn composition. In Figs. 2
and 3, this peak is not clearly revealed because of its very weak
intensity. However, it is clearly shown in the numerically
calculated second derivative spectra of Fig. 4. Note that four
new peaks, (E(L), E(X), E(G), and Mn 3d+), are observed above
x = 0.21 for the Zn1�xMnxS epilayers investigated in this study.
It can be inferred that the respective peaks are generated with
broadening of critical point structures, as noted above. Detailed
descriptions of these peaks are provided in Fig. 5.
Fig. 5 shows the change of the respective peak position
energies obtained from the fitted second derivative spectra
shown in Fig. 4. Open symbols (v, ", D, *, &) represent the
structures obtained in this study, i.e., E0/E0 + D0, E1, and three
E2 (S, D, G) structures. The dotted lines are guidelines. Filled
symbols (!, ~, &, *) and dot-dashed lines designate the four
structures newly observed in this study with increasing Mn
composition and the guidelines, respectively. Through the
entire range of Mn composition, the peak position energies of
E0/E0 + D0 changed weakly. This finding is consistent with the
energy band gap of zincblende MnS (b-MnS), i.e., 3.6–3.8 eV
[25–27], as indicated by the guideline in Fig. 5. Lu et al.
reported that the absorption edge of zincblende MnS is near
340 nm (3.647 eV) [26]. The peak position energy of the E1
structure was not changed. However, with increasing Mn
composition, the peak position energy E2 (S) structures were
red-shifted and the peak position energies of the E2 (D) and E2
(G) structures were slightly blue-shifted, as indicated in Fig. 5.
As noted above, we observed four new peaks E(L), E(X), E(G),
and Mn 3d+, at Mn composition above x = 0.21. These peaks are
located near 4.43, 5.68, 6.53, and 7.20 eV, respectively, and
originate from the transition caused by interaction of the
excitons. Huffman and Wild suggested that these structures could
be generated by excitation from the Mn 3d2+ band to the Mn 3d
band [28]. In general, the dielectric behavior of compound
semiconductors is known to be strongly connected with their
electronic energy band structures. This study has discussed the
transition that is generated according to the respective transition
points. We have obtained an abundance of information from the
results of Huffman et al. Also, from the electronic energy band
structure of ZnS and MnS, it was determined that the Mn 3d band
is affected by increasing Mn composition.
D.-J. Kim et al. / Applied Surface Science 254 (2008) 5034–50385038
In II-Mn-VI semiconductors, the peak position energies of the
respective critical point structures decreased with increasing Mn
composition. A qualitative explanation of this behavior in the
presence of Mn 3d electrons in semiconductors, such as
Zn1�xMnxS, Zn1�xMnxSe, Zn1�xMnxTe, Cd1�xMnxTe, is as
follows. The relative locations of d states are very important,
because they determine the direction of the repulsion effect of
hybridization. The d states of ZnS exist at�10 eV, but the d states
of MnS are located between the 3 and 4 eV with increasing Mn
composition. Thus, the valence bands that contribute to the
respective critical point structures are repelled to higher energies
by interaction with the Mn 3d levels, while the conduction band is
pushed downward [29]. Consequently, the peak position energies
of the respective critical points are decreased.
The peak positioned at 4.43 eV is classified as an E(L)
structure, and is caused by a transition in the L-point of the
energy band structure. Also, the peak located at 5.68 eV is
considered to be an E(X) structure induced by a transition in the
X-point. Note that the E(L) (4.43 eV) and E(X) (5.68 eV)
structures positioned in the L-point and X-point are newly
observed at Mn composition x = 0.21 for the Zn1�xMnxS
epilayers investigated here. These two structures arise due to an
intraband transition with increasing Mn composition. They red-
shift to the lower energy side with increasing Mn composition,
as indicated by the dot-dashed lines in Fig. 5. As noted above,
two structures were observed between 6.0 and 8.0 eV. The
structure located at 6.53 eV is due to the contributions of the
excitons in the G-position between the valence band and
conduction band, and can be designated as E(G). This structure
was red-shifted, as represented by the guideline in Fig. 5. Also,
the structure positioned near 7.20 eV is due to Mn 3d+. These
peaks, which are red-shifted, were explained in detail in our two
previous reports [18,30]. As described above, in most cases, the
peak position energies of the critical point structures observed
in this study decreased with increasing Mn composition.
4. Conclusions
Zn1�xMnxS epilayers were grown on GaAs (1 0 0) substrates
by a hot-wall epitaxy method. From the XRD patterns, the
epilayers were found to have a homogeneous zincblende
structure that does not contain wurtzite or any other structures.
The optical properties of the epilayers were determined by
ellipsometric measurements in a range of 3.0–8.5 eV at 300 K.
The E0/E0 + D0 peak of the Zn1�xMnxS epilayers was observed
as a single peak at the edge of the oscillation region in the
pseudodielectric function spectra he(E)i. The E1 peak
originated from the contribution of 2D excitons and was not
changed. The E2 structure at lower Mn composition (x < 0.10)
was separated into three peaks according to the transition
positions, which were near 7.0 eV (S), 7.4 eV (D), and 7.8 eV
(G). Note that we observed four new peaks in the second
derivative spectra of the Zn1�xMnxS epilayers for Mn
composition above x = 0.21; these are located near 4.43,
5.68, 6.53, and 7.20 eV. It is also emphasized that E(L)
(4.43 eV) and E(X) (5.68 eV) structures positioned in the L-
point and X-point are newly observed for Zn1�xMnxS epilayers.
The second derivative spectra of the pseudodielectric functions
d2he(E)i/dE2 of Zn1�xMnxS are expressed as analytical line-
shapes with two-dimensional critical points. These peaks show
clearer structures than no differentiated spectra. The change of
the respective peak position energies in Zn1�xMnxS is closely
related to the increase of Mn composition.
Acknowledgement
This work was supported by a Korea Research Foundation
(KRF-2005-075-C00012).
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