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A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A. Lemkin, Bernhard E. Boser, David Auslander

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Page 1: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A. Lemkin, Bernhard E. Boser, David Auslander

Page 2: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A. Lemkin, Bernhard E. Boser, David Auslander

Page 3: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A. Lemkin, Bernhard E. Boser, David Auslander

Page 4: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass Mark A. Lemkin, Bernhard E. Boser, David Auslander

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