Model 6517A ElectrometerUsers Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTYKeithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment. Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batteries, diskettes, and documentation. During the warranty period, we will, at our option, either repair or replace any product that proves to be defective. To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTYThis warranty does not apply to defects resulting from product modication without Keithleys express written consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow instructions. THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE BUYERS SOLE AND EXCLUSIVE REMEDIES. NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

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Keithley Instruments, Inc.Corporate Headquarters 28775 Aurora Road Cleveland, Ohio 44139 440-248-0400 Fax: 440-248-6168 1-888-KEITHLEY (534-8453) www.keithley.comBelgium: Sint-Pieters-Leeuw 02-363 00 40 Fax: 02-363 00 64 www.keithley.nl China: Beijing 8610-82251886 Fax: 8610-82251892 www.keithley.com.cn Finland: Helsinki 09-5306-6560 Fax: 09-5306-6565 www.keithley.com France: Saint-Aubin 01-64 53 20 20 Fax: 01-60 11 77 26 www.keithley.fr Germany: Germering 089/84 93 07-40 Fax: 089/84 93 07-34 www.keithley.de Great Britain: Theale 0118 929 7500 Fax: 0118 929 7519 www.keithley.co.uk India: Bangalore 91-80 2212 8027 Fax: 91-80 2212 8005 www.keithley.com Italy: Milano 02-48 39 16 01 Fax: 02- 48 39 16 28 www.keithley.it Japan: Tokyo 81-3-5733-7555 Fax: 81-3-5733-7556 www.keithley.jp Korea: Seoul 82-2-574-7778 Fax: 82-2-574-7838 www.keithley.com Netherlands: Gorinchem 0183-635333 Fax: 0183-630821 www.keithley.nl Singapore: Singapore 65-6747-9077 Fax: 65-6747-2991 www.keithley.com Sweden: Solna 08-509 04 600 Fax: 08-655 26 10 www.keithley.com Taiwan: Hsinchu 886-3-572-9077 Fax: 886-3-572-9031 www.keithley.com.tw

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Model 6517A Electrometer Users Manual

All references to the Model 6517 also apply to the Model 6517A.

1996, Keithley Instruments, Inc. All rights reserved. Cleveland, Ohio, U.S.A. Fourth Printing, May 2003 Document Number: 6517A-900-01 Rev. D

Manual Print HistoryThe print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.

Revision A (Document Number 6517A-900-01)............................................................................. December 1996 Revision B (Document Number 6517A-900-01).............................................................................November 1999 Revision C (Document Number 6517A-900-01).......................................................................................July 2000 Revision D (Document Number 6517A-900-01)...................................................................................... May 2003

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand and product names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present. This product is intended for use by qualied personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the manual for complete product specications. If the product is used in a manner not specied, the protection provided by the product may be impaired. The types of product users are: Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is operated within its specications and operating limits, and for ensuring that operators are adequately trained. Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits. Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel. Service personnel are trained to work on live circuits, and perform safe installations and repairs of products. Only properly trained service personnel may perform installation and service procedures. Keithley products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise marked or described in the Manual. Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test xtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 volts, no conductive part of the circuit may be exposed. Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card. Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use. When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided, in close proximity to the equipment and within easy reach of the operator. For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers. Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured. The instrument and accessories must be used in accordance with its specications and operating instructions or the safety of the equipment may be impaired. Do not exceed the maximum signal levels of the instruments and accessories, as dened in the specications and operating information, and as shown on the instrument or test xture panels, or switching card. When fuses are used in a product, replace with same type and rating for continued protection against re hazard. Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections. If you are using a test xture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid interlock. 5/03

screw is present, connect it to safety earth ground using the If a wire recommended in the user documentation. The ! symbol on an instrument indicates that the user should refer to the operating instructions located in the manual. The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal and common mode voltages. Use standard safety precautions to avoid personal contact with these voltages. The frame. symbol indicates a connection terminal to the equipment

To maintain protection from electric shock and re, replacement components in mains circuits, including the power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product.) If you are unsure about the applicability of a replacement component, call a Keithley Instruments ofce for information. To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

The WARNING heading in a manual explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure. The CAUTION heading in a manual explains hazards that could damage the instrument. Such damage may invalidate the warranty. Instrumentation and accessories shall not be connected to humans. Before performing any maintenance, disconnect the line cord and all test cables.

Table of Contents11.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8

General InformationIntroduction ........................................................................................................................................................ Features .............................................................................................................................................................. Warranty information ......................................................................................................................................... Manual addenda ................................................................................................................................................. Safety symbols and terms ................................................................................................................................... Specifications ..................................................................................................................................................... Inspection ........................................................................................................................................................... Options and accessories ..................................................................................................................................... 1-1 1-1 1-2 1-2 1-2 1-2 1-2 1-2

22.1 2.2 2.2.1 2.2.2 2.2.3 2.2.4 2.2.5 2.2.6 2.3 2.3.1 2.3.2 2.3.3 2.3.4 2.3.5 2.4 2.4.1 2.4.2 2.4.3 2.4.4 2.4.5 2.4.6 2.5 2.5.1 2.5.2 2.5.3 2.6 2.6.1 2.6.2 2.6.3

Front Panel OperationIntroduction ........................................................................................................................................................ 2-1 Power-up ............................................................................................................................................................ 2-2 Line power connections ............................................................................................................................. 2-2 Line fuse replacement ................................................................................................................................ 2-2 Power-up sequence ..................................................................................................................................... 2-3 Power-on default conditions ...................................................................................................................... 2-3 Warm-up period ......................................................................................................................................... 2-4 IEEE-488 primary address ......................................................................................................................... 2-4 Display ............................................................................................................................................................... 2-4 Exponent mode (Engineering or Scientific) ............................................................................................... 2-4 Information messages ................................................................................................................................ 2-4 Status and error messages .......................................................................................................................... 2-5 Multiple displays ........................................................................................................................................ 2-7 Navigating menus ...................................................................................................................................... 2-8 Connections electrometer, high-resistance meter, and V-source .................................................................. 2-9 Electrometer input connector ..................................................................................................................... 2-9 High-resistance meter connections .......................................................................................................... 2-11 Voltage source output connections .......................................................................................................... 2-11 Low noise cables, shielding, and guarding .............................................................................................. 2-12 Floating circuits ........................................................................................................................................ 2-13 Test fixtures .............................................................................................................................................. 2-15 Voltage measurements ..................................................................................................................................... 2-18 Basic measurement procedure .................................................................................................................. 2-18 Volts configuration .................................................................................................................................. 2-21 Voltage measurement considerations ....................................................................................................... 2-22 Current measurements ...................................................................................................................................... 2-24 Basic measurement procedure .................................................................................................................. 2-24 Amps configuration .................................................................................................................................. 2-27 Current measurement considerations ....................................................................................................... 2-28

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2.7 2.7.1 2.7.2 2.7.3 2.7.4 2.7.5 2.8 2.8.1 2.8.2 2.8.3 2.9 2.9.1 2.9.2 2.9.3 2.9.4 2.9.5 2.10 2.10.1 2.10.2 2.11 2.11.1 2.11.2 2.11.3 2.11.4 2.11.5 2.11.6 2.12 2.12.1 2.12.2 2.13 2.13.1 2.13.2 2.13.3 2.13.4 2.14 2.14.1 2.14.2 2.14.3 2.15 2.15.1 2.15.2 2.15.3 2.15.4 2.15.5 2.16 2.16.1 2.16.2 2.16.3 2.17 2.17.1 2.17.2 2.17.3 2.18 2.18.1 2.18.2 2.18.3 ii

Resistance and resistivity measurements .......................................................................................................... 2-32 Resistance measurements ......................................................................................................................... 2-33 Resistivity measurements ......................................................................................................................... 2-36 Ohms configuration .................................................................................................................................. 2-39 Multiple display ........................................................................................................................................ 2-42 Ohms measurement considerations .......................................................................................................... 2-42 Charge measurements (Q) ................................................................................................................................ 2-42 Basic measurement procedure .................................................................................................................. 2-43 Coulombs configuration ........................................................................................................................... 2-43 Charge measurement considerations ........................................................................................................ 2-45 Voltage source .................................................................................................................................................. 2-46 Sourcing options ....................................................................................................................................... 2-46 Setting voltage source value ..................................................................................................................... 2-48 Voltage and current limit .......................................................................................................................... 2-49 Interlock and test fixtures ......................................................................................................................... 2-50 Operate ..................................................................................................................................................... 2-50 Analog outputs .................................................................................................................................................. 2-50 2V analog output ...................................................................................................................................... 2-51 Preamp out ................................................................................................................................................ 2-52 Using external feedback ................................................................................................................................... 2-54 Electrometer input circuitry ...................................................................................................................... 2-54 Shielded fixture construction .................................................................................................................... 2-54 External feedback procedure .................................................................................................................... 2-55 Non-standard coulombs ranges ................................................................................................................ 2-56 Logarithmic currents ................................................................................................................................ 2-56 Non-decade current gains ......................................................................................................................... 2-57 Range and resolution ........................................................................................................................................ 2-57 Measurement range .................................................................................................................................. 2-57 Display resolution ..................................................................................................................................... 2-57 Zero check, relative, and zero correct .............................................................................................................. 2-58 Zero check ................................................................................................................................................ 2-58 Relative (REL) .......................................................................................................................................... 2-59 Zero correct .............................................................................................................................................. 2-60 Properly zeroed (as defined for instrument specifications) .................................................................. 2-60 Test sequences .................................................................................................................................................. 2-60 Test descriptions ....................................................................................................................................... 2-60 Configure Test Sequence .......................................................................................................................... 2-68 Running the selected test .......................................................................................................................... 2-70 Triggers ............................................................................................................................................................. 2-71 Trigger model ........................................................................................................................................... 2-73 Basic trigger configuration ....................................................................................................................... 2-76 Advanced trigger configuration ................................................................................................................ 2-77 External triggering .................................................................................................................................... 2-81 Trigger Link .............................................................................................................................................. 2-83 Buffer ................................................................................................................................................................ 2-94 Configuring data storage .......................................................................................................................... 2-96 Storing and recalling readings .................................................................................................................. 2-98 Buffer multiple displays ......................................................................................................................... 2-100 Filters .............................................................................................................................................................. 2-100 Digital filters ........................................................................................................................................... 2-101 Median filter ........................................................................................................................................... 2-101 Configuring the filters ............................................................................................................................ 2-103 Math ................................................................................................................................................................ 2-105 Polynomial .............................................................................................................................................. 2-105 Percent .................................................................................................................................................... 2-105 Percent deviation .................................................................................................................................... 2-105

2.18.4 2.18.5 2.18.6 2.18.7 2.18.8 2.19 2.19.1 2.19.2 2.19.3 2.19.4 2.19.5 2.19.6 2.19.7 2.20 2.20.1 2.20.2 2.21 2.21.1 2.21.2 2.21.3 2.21.4 2.21.5 2.21.6 2.21.7 2.21.8 2.21.9 2.22

Deviation ................................................................................................................................................ Ratio ....................................................................................................................................................... Logarithmic ............................................................................................................................................ Selecting and configuring math ............................................................................................................. Calculate multiple display ...................................................................................................................... Menu .............................................................................................................................................................. SAVESETUP ......................................................................................................................................... COMMUNICATION ............................................................................................................................. CAL ........................................................................................................................................................ TEST ...................................................................................................................................................... LIMITS .................................................................................................................................................. STATUS-MSG ....................................................................................................................................... GENERAL ............................................................................................................................................. Scanning ......................................................................................................................................................... Internal scanning .................................................................................................................................... External scanning ................................................................................................................................... Other measurement considerations ................................................................................................................ Ground loops .......................................................................................................................................... Triboelectric effects ............................................................................................................................... Piezoelectric and stored charge effects .................................................................................................. Electrochemical effects .......................................................................................................................... Humidity ................................................................................................................................................ Light ....................................................................................................................................................... Electrostatic interference ........................................................................................................................ Magnetic fields ....................................................................................................................................... Electromagnetic interference (EMI) ...................................................................................................... Relative humidity and external temperature readings ....................................................................................

2-105 2-106 2-106 2-106 2-107 2-107 2-110 2-116 2-117 2-118 2-118 2-120 2-120 2-125 2-125 2-125 2-126 2-126 2-127 2-127 2-127 2-127 2-127 2-127 2-128 2-128 2-128

33.1 3.2 3.2.1 3.2.2 3.3 3.4 3.5 3.6 3.6.1 3.6.2 3.6.3 3.6.4 3.6.5 3.6.6 3.6.7 3.6.8 3.7 3.7.1 3.7.2 3.7.3 3.8 3.8.1 3.8.2 3.8.3

IEEE-488 ReferenceIntroduction ........................................................................................................................................................ 3-1 Connections ........................................................................................................................................................ 3-2 IEEE-488 bus connections ......................................................................................................................... 3-2 RS-232 serial interface connections ........................................................................................................... 3-3 GPIB primary address selection ......................................................................................................................... 3-3 GPIB programming language selection ............................................................................................................. 3-4 QuickBASIC 4.5 programming ......................................................................................................................... 3-4 General bus commands ...................................................................................................................................... 3-5 REN (remote enable) .................................................................................................................................. 3-5 IFC (interface clear) ................................................................................................................................... 3-5 LLO (local lockout) ................................................................................................................................... 3-6 GTL (go to local) ....................................................................................................................................... 3-6 DCL (device clear) ..................................................................................................................................... 3-6 SDC (selective device clear) ...................................................................................................................... 3-6 GET (group execute trigger) ...................................................................................................................... 3-6 SPE, SPD (serial polling) ........................................................................................................................... 3-6 Front panel aspects of IEEE-488 operation ....................................................................................................... 3-7 Error and status messages .......................................................................................................................... 3-7 IEEE-488 status indicators ......................................................................................................................... 3-7 LOCAL key ................................................................................................................................................ 3-7 Status structure ................................................................................................................................................... 3-7 Condition registers ................................................................................................................................... 3-14 Transition filters ....................................................................................................................................... 3-14 Event registers .......................................................................................................................................... 3-15

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3.8.4 3.8.5 3.8.6 3.9 3.10 3.11 3.11.1 3.11.2 3.11.3 3.11.4 3.11.5 3.11.6 3.11.7 3.11.8 3.11.9 3.11.10 3.11.11 3.11.12 3.11.13 3.11.14 3.11.15 3.12 3.13 3.13.1 3.13.2 3.13.3 3.14 3.15 3.16 3.17 3.18 3.18.1 3.18.2 3.18.3 3.18.4 3.19 3.19.1 3.19.2 3.19.3 3.19.4 3.19.5 3.19.6 3.19.7 3.19.8 3.19.9 3.19.10 3.19.11 3.19.12 3.19.13 3.19.14 3.19.15

Enable registers ........................................................................................................................................ 3-15 Queues ...................................................................................................................................................... 3-15 Status byte and service request (SRQ) ..................................................................................................... 3-16 Trigger Model (IEEE-488 operation) ............................................................................................................... 3-18 Programming syntax ......................................................................................................................................... 3-21 Common commands ......................................................................................................................................... 3-27 *CLS clear status ................................................................................................................................. 3-27 *ESE event enable .................................................................................................................. 3-28 ESE? event enable query ..................................................................................................................... 3-28 *ESR? event status register query ....................................................................................................... 3-29 *IDN? identification query .................................................................................................................. 3-30 *OPC operation complete .................................................................................................................... 3-31 *OPC? operation complete query ........................................................................................................ 3-32 *OPT? option identification query ...................................................................................................... 3-33 *RCL recall ......................................................................................................................................... 3-33 *RST reset the Model 6517A .............................................................................................................. 3-33 *SAV save the current setup in memory ............................................................................................. 3-33 *SRE service request enable ................................................................................................... 3-34 SRE? service request enable query ...................................................................................................... 3-34 *STB? status byte query ...................................................................................................................... 3-35 *TRG trigger ....................................................................................................................................... 3-36 *TST? self-test query .......................................................................................................................... 3-36 *WAI wait-to-continue ........................................................................................................................ 3-36 Signal oriented measurement commands ......................................................................................................... 3-38 Calculate subsystems ........................................................................................................................................ 3-62 :CALCulate[1] .......................................................................................................................................... 3-62 :CALCulate2 ............................................................................................................................................. 3-65 :CALCulate3 ............................................................................................................................................. 3-67 :CALibration subsystem ................................................................................................................................... 3-71 :DISPlay subsystem .......................................................................................................................................... 3-72 :FORMat subsystem ......................................................................................................................................... 3-75 Output Subsystems ........................................................................................................................................... 3-80 :ROUTe subsystem ........................................................................................................................................... 3-81 :CLOSe ............................................................................................................................................................................. 3-81 :OPEN ............................................................................................................................................................................... 3-81 :OPEN:ALL ................................................................................................................................................................................. 3-82 :SCAN commands .................................................................................................................................... 3-82 :SENSe1 subsystem .......................................................................................................................................... 3-85 [:SENSe[1]] subsystem ............................................................................................................................ 3-85 :FUNCtion .................................................................................................................................................................. 3-85 :DATA commands .................................................................................................................................... 3-85 :APERture ............................................................................................................................................................................ 3-87 :NPLCycles .......................................................................................................................................................................... 3-89 RANGe commands ................................................................................................................................... 3-90 :REFerence .......................................................................................................................................................................... 3-95 :IREFerence ......................................................................................................................................................................... 3-97 :DIGits ................................................................................................................................................................................... 3-97 :AVERage commands .............................................................................................................................. 3-98 :MEDian Commands .............................................................................................................................. 3-100 :DAMPing .......................................................................................................................................................................... 3-101 :GUARd .............................................................................................................................................................................. 3-101 :ADIScharge Commands ........................................................................................................................ 3-102 :XFEedback ....................................................................................................................................................................... 3-102iv3.19.16 3.19.17 3.19.18 3.20 3.20.1 3.20.2 3.21 3.21.1 3.21.2 3.21.3 3.21.4 3.21.5 3.21.6 3.21.7 3.22 3.22.1 3.22.2 3.22.3 3.22.4 3.22.5 3.22.6 3.22.7 3.22.8 3.22.9 3.22.10 3.22.11 3.22.12 3.22.13 3.22.14 3.22.15 3.22.16 3.23 3.23.1 3.23.2 3.23.3 3.23.4 3.23.5 3.23.6 3.23.7 3.24 3.24.1 3.24.2 3.24.3 3.24.4 3.24.5 3.24.6 3.24.7 3.24.8 3.24.9 3.24.10 3.25 3.25.1 3.25.2 3.25.3 3.25.4:VSControl ................................................................................................................................ 3-102 :MSELect .................................................................................................................................. 3-103 :RESistivity commands .......................................................................................................................... 3-103 :SOURce subsystem ....................................................................................................................................... 3-106 Digital Output Commands ..................................................................................................................... 3-106 V-Source Configuration Commands ...................................................................................................... 3-106 :STATus subsystem ....................................................................................................................................... 3-109 [:EVENt]? ................................................................................................................................................................................... 3-109 :ENABle ...................................................................................................................................................................... 3-114 :PTRansition .............................................................................................................................................................. 3-117 :NTRansition .............................................................................................................................................................. 3-124 :CONDition?............................................................................................................................................................................... 3-126 :PRESet......................................................................................................................................................................................... 3-126 :QUEue commands ................................................................................................................................ 3-127 :SYSTem subsystem ...................................................................................................................................... 3-129 :PRESet......................................................................................................................................................................................... 3-129 :POSetup ................................................................................................................................................................... 3-129 :VERSion?................................................................................................................................................................................... 3-129 :ERRor? ....................................................................................................................................................................................... 3-129 :LSYNc:STATe ............................................................................................................................................................... 3-130 :KEY .............................................................................................................................................................................. 3-130 :CLEar........................................................................................................................................................................................... 3-131 :DATE , , ................................................................................................................................................. 3-132 :TIME , , ................................................................................................................................................. 3-132 :TSTamp commands .............................................................................................................................. 3-132 :RNUMber:RESet ................................................................................................................................................................... 3-133 Zero check and zero correct commands ................................................................................................. 3-133 A/D Controls .......................................................................................................................................... 3-134 RS-232 Interface Commands ................................................................................................................. 3-135 Basic Trigger Commands ....................................................................................................................... 3-135 :INTerlock? ............................................................................................................................................ 3-137 :TRACe subsystem ........................................................................................................................................ 3-137 :CLEar .................................................................................................................................................... 3-137 :FREE? ................................................................................................................................................... 3-137 :POINts ......................................................................................................................................... 3-138 :FEED Commands ................................................................................................................................. 3-139 :DATA? ........................................................................................................................................................................................ 3-141 :TSTamp:FORMat ................................................................................................................................................ 3-141 :ELEMents .......................................................................................................................................................... 3-141 Trigger subsystem .......................................................................................................................................... 3-142 :INITiate commands .............................................................................................................................. 3-142 :ABORt ........................................................................................................................................................................................ 3-142 :IMMediate ................................................................................................................................................................................ 3-143 :COUNt ............................................................................................................................................................................... 3-143 :DELay ................................................................................................................................................................................ 3-143 :SOURce ..................................................................................................................................................................... 3-144 :TIMer ................................................................................................................................................................................ 3-144 :SIGNal......................................................................................................................................................................................... 3-145 TCONfigure commands ......................................................................................................................... 3-145 RTCLock commands ............................................................................................................................. 3-147 :TSEQuence Subsystem ................................................................................................................................. 3-148 General Test Sequence Commands ........................................................................................................ 3-148 :STARt ......................................................................................................................................................................... 3-149 :STOP ............................................................................................................................................................................ 3-150 :STEP ............................................................................................................................................................................. 3-150 v3.25.5 3.25.6 3.25.7 3.25.8 3.25.9 3.25.10 3.25.11 3.25.12 3.25.13 3.25.14 3.25.15 3.25.16 3.25.17 3.25.18 3.25.19 3.25.20 3.25.21 3.25.22 3.25.23 3.26 3.27 3.27.1 3.27.2 3.27.3 3.27.4 3.28:MDELay .................................................................................................................................................................... 3-150 :SVOLtage ................................................................................................................................................................... 3-151 :STIMe ....................................................................................................................................... 3-151 :DTIMe ....................................................................................................................................... 3-152 :PDTime ...................................................................................................................................................................... 3-152 :MVOLtage ................................................................................................................................................................ 3-152 :MTIMe ......................................................................................................................................................................... 3-153 :HLEVel ...................................................................................................................................................................... 3-153 :HTIMe ........................................................................................................................................................................ 3-153 :LLEVel ........................................................................................................................................................................ 3-153 :LTIMe .......................................................................................................................................................................... 3-154 :COUNt ......................................................................................................................................................................... 3-154 :OFSVoltage ............................................................................................................................... 3-154 :ALTVoltage .............................................................................................................................. 3-154 :READings ................................................................................................................................. 3-154 :DISCard .................................................................................................................................... 3-155 :SPOints ........................................................................................................................................................................ 3-155 :SPINterval .................................................................................................................................................................. 3-155 Test sequence programming example .................................................................................................... 3-155 UNIT Subsystem ............................................................................................................................................ 3-156 RS-232 Serial Interface .................................................................................................................................. 3-157 RS-232 Interface Configuration ............................................................................................................. 3-157 RS-232 Operating Considerations .......................................................................................................... 3-157 RS-232 Interface Error Messages ........................................................................................................... 3-158 Downloading commands using ProComm ............................................................................................. 3-158 DDC programming language ......................................................................................................................... 3-158AA.1 A.1.1 A.1.2 A.1.3 A.1.4 A.1.5SpecicationsAccuracy calculations ........................................................................................................................................ A-4 Calculating volts accuracy ......................................................................................................................... A-4 Calculating amps accuracy ........................................................................................................................ A-4 Calculating ohms accuracy ........................................................................................................................ A-4 Calculating coulombs accuracy ................................................................................................................. A-5 Calculating Resistance/Resistivity Accuracy and Repeatability using the Alternating Polarity Method . A-5B C DInterface Function Codes ASCII Character Codes and IEEE-488 Multiline Interface Command Messages IEEE-488 Bus OverviewIntroduction ....................................................................................................................................................... D-1 Bus description .................................................................................................................................................. D-1 Bus lines ............................................................................................................................................................ D-2 Bus commands ................................................................................................................................................... D-3viE F GIEEE-488 Conformance InformationInformation ......................................................................................................................................................... E-1SCPI Conformance InformationIntroduction ........................................................................................................................................................ F-1Device Dependent Command SummaryviiList of Illustrations2Figure 2-1 Figure 2-A Figure 2-B Figure 2-2 Figure 2-3 Figure 2-4 Figure 2-5 Figure 2-6 Figure 2-7 Figure 2-8 Figure 2-9 Figure 2-10 Figure 2-11 Figure 2-12 Figure 2-13 Figure 2-14 Figure 2-15 Figure 2-16 Figure 2-17 Figure 2-18 Figure 2-19 Figure 2-20 Figure 2-21 Figure 2-22 Figure 2-23 Figure 2-24 Figure 2-25 Figure 2-26 Figure 2-27 Figure 2-28 Figure 2-29 Figure 2-30 Figure 2-31 Figure 2-32 Figure 2-33 Figure 2-34 Figure 2-35 Figure 2-36 Figure 2-37 Figure 2-38Front Panel OperationLine voltage switch .................................................................................................................................... 2-2 Input signal ................................................................................................................................................. 2-5 Measurement on 20nA range ..................................................................................................................... 2-5 Bar graph (zero-at-left) multiple display .................................................................................................... 2-8 Zero-centered bar graph multiple display .................................................................................................. 2-8 Maximum and minimum multiple display ................................................................................................. 2-8 Input connector configurations ................................................................................................................ 2-10 Maximum input levels ............................................................................................................................. 2-10 Capacitor test circuit without protection .................................................................................................. 2-10 Capacitor test circuit with protection ....................................................................................................... 2-10 Force voltage measure current ................................................................................................................. 2-11 V-source output ........................................................................................................................................ 2-11 Noise shield .............................................................................................................................................. 2-12 Guard shield ............................................................................................................................................. 2-13 Safety shield ............................................................................................................................................. 2-13 Floating measurements ............................................................................................................................ 2-14 Floating V-source ..................................................................................................................................... 2-14 Test fixture to source voltage, measure current (resistance measurements) ............................................ 2-16 Multi-purpose test fixture ......................................................................................................................... 2-17 Interlock connections ............................................................................................................................... 2-17 Hard-wired interlock ................................................................................................................................ 2-18 Typical connections for unguarded voltage measurements ..................................................................... 2-19 Typical connections for guarded voltage measurements ......................................................................... 2-20 Meter loading ........................................................................................................................................... 2-23 Unguarded voltage measurements ........................................................................................................... 2-23 Guarded voltage measurements ............................................................................................................... 2-24 Typical connections for current measurements ........................................................................................ 2-25 Connections for guarded, floating current measurements ........................................................................ 2-26 Voltage burden considerations ................................................................................................................. 2-29 Source resistance and capacitance ........................................................................................................... 2-30 High impedance current measurements ................................................................................................... 2-31 Floating current measurements ................................................................................................................ 2-31 Typical connections for resistance measurements ................................................................................... 2-34 Connections for resistance measurements using Model 8002A test fixture ............................................ 2-35 Surface resistivity measurement technique .............................................................................................. 2-36 Circular electrode dimensions .................................................................................................................. 2-37 Volume resistivity measurement technique ............................................................................................. 2-37 Connections for measurements using Model 8009 test fixture ................................................................ 2-39 Typical connections for charge measurements ........................................................................................ 2-44 V-source (independent configuration) ..................................................................................................... 2-47ixFigure 2-39 Figure 2-40 Figure 2-41 Figure 2-42 Figure 2-43 Figure 2-44 Figure 2-45 Figure 2-46 Figure 2-47 Figure 2-48 Figure 2-49 Figure 2-50 Figure 2-51 Figure 2-52 Figure 2-53 Figure 2-54 Figure 2-55 Figure 2-56 Figure 2-57 Figure 2-58 Figure 2-59 Figure 2-60 Figure 2-61 Figure 2-62 Figure 2-63 Figure 2-64 Figure 2-65 Figure 2-66 Figure 2-67 Figure 2-68 Figure 2-69 Figure 2-70 Figure 2-71 Figure 2-72 Figure 2-73 Figure 2-74 Figure 2-75 Figure 2-76 Figure 2-77 Figure 2-78 Figure 2-79 Figure 2-80 Figure 2-81 Figure 2-82 Figure 2-83 Figure 2-84V-source (FVMI configuration) ............................................................................................................... 2-48 Typical 2V analog output connections ..................................................................................................... 2-51 Typical preamp out connections ............................................................................................................... 2-53 Electrometer input circuitry (external feedback mode) ............................................................................ 2-54 Shielded fixture construction .................................................................................................................... 2-55 Transdiode logarithmic current configuration ...................................................................................... 2-57 Non-decade current gains ......................................................................................................................... 2-58 Equivalent input impedance with zero check enabled ............................................................................. 2-59 Connections; diode leakage current test ................................................................................................... 2-61 Default measurement points; diode leakage current test .......................................................................... 2-61 Connections; capacitor leakage current test ............................................................................................. 2-62 Connections; cable insulation resistance test ........................................................................................... 2-63 Test circuit; resistor voltage coefficient test ............................................................................................. 2-64 Alternating polarity resistance/resistivity test .......................................................................................... 2-65 Connections; surface insulation resistance test ........................................................................................ 2-66 Default measurement points; square wave sweep test ............................................................................. 2-67 Default measurement points; staircase sweep test .................................................................................... 2-67 Basic trigger model ................................................................................................................................... 2-73 Advanced trigger model ........................................................................................................................... 2-74 External triggering connectors ................................................................................................................. 2-81 External triggering and asynchronous trigger link input pulse specifications ......................................... 2-81 Meter complete and asynchronous trigger link output pulse specifications ............................................. 2-82 DUT test system ....................................................................................................................................... 2-82 External trigger connections ..................................................................................................................... 2-82 Trigger link connector .............................................................................................................................. 2-84 DUT test system ....................................................................................................................................... 2-85 Trigger Link connections (asynchronous example #1) ............................................................................ 2-85 Operation model for asynchronous trigger link example #1 .................................................................... 2-87 Connections using Trigger Link adapter .................................................................................................. 2-88 DUT test system (asynchronous example #2) .......................................................................................... 2-88 Trigger Link connections (asynchronous example #2) ............................................................................ 2-89 Operation model for asynchronous Trigger Link example #2 ................................................................. 2-90 Semi-synchronous Trigger Link specifications ........................................................................................ 2-91 Typical semi-synchronous mode connections .......................................................................................... 2-91 Trigger Link connections (semi-synchronous example) .......................................................................... 2-92 Operation model for semi-synchronous Trigger Link example ............................................................... 2-93 Digital filter; averaging and advanced filter types ................................................................................. 2-102 Digital filter; moving and repeating filter modes ................................................................................... 2-103 Limits bar graph example ....................................................................................................................... 2-119 Using limit test to sort 100k resistors .................................................................................................. 2-120 Digital I/O port ....................................................................................................................................... 2-120 Digital I/O port simplified schematic ..................................................................................................... 2-121 Sample externally powered relays .......................................................................................................... 2-122 Line cycle synchronization ..................................................................................................................... 2-123 Multiple ground points create a ground loop ......................................................................................... 2-126 Eliminating ground loops ....................................................................................................................... 2-127x3Figure 3-1 Figure 3-2 Figure 3-3 Figure 3-4 Figure 3-5 Figure 3-6 Figure 3-7 Figure 3-8 Figure 3-9 Figure 3-10 Figure 3-11 Figure 3-12 Figure 3-13 Figure 3-14 Figure 3-15 Figure 3-16 Figure 3-17 Figure 3-18 Figure 3-19 Figure 3-20 Figure 3-21 Figure 3-22 Figure 3-23 Figure 3-24 Figure 3-25 Figure 3-26 Figure 3-27 Figure 3-28 Figure 3-29 Figure 3-30 Figure 3-31 Figure 3-32 Figure 3-33 Figure 3-34 Figure 3-35 Figure 3-36 Figure 3-37 Figure 3-38 Figure 3-39 Figure 3-40IEEE-488 ReferenceIEEE-488 connector ................................................................................................................................... 3-2 IEEE-488 connections ................................................................................................................................ 3-2 IEEE-488 connector location ..................................................................................................................... 3-2 RS-232 interface connector ........................................................................................................................ 3-3 Model 6517A status register structure ....................................................................................................... 3-8 Standard event status .................................................................................................................................. 3-9 Operation event status ................................................................................................................................ 3-9 Arm event status ....................................................................................................................................... 3-10 Sequence event status ............................................................................................................................... 3-11 Trigger event status .................................................................................................................................. 3-12 Measurement event status ........................................................................................................................ 3-13 Questionable event status ......................................................................................................................... 3-14 Status byte and service request (SRQ) ..................................................................................................... 3-16 Trigger Model (IEEE-488 bus operation) ................................................................................................ 3-19 Standard Event Enable Register ............................................................................................................... 3-29 Standard Event Status Register ................................................................................................................ 3-29 Service Request Enable Register ............................................................................................................. 3-34 Status Byte Register ................................................................................................................................. 3-35 ASCII data format .................................................................................................................................... 3-76 IEEE754 single precision data format (32 data bits) ............................................................................... 3-76 IEEE754 double precision data format (64 data bits) .............................................................................. 3-77 Measurement Event Register ................................................................................................................. 3-110 Questionable Event Register .................................................................................................................. 3-111 Operation Event Register ....................................................................................................................... 3-112 Trigger Event Register ........................................................................................................................... 3-113 Arm Event Register ................................................................................................................................ 3-113 Sequence Event Register ........................................................................................................................ 3-114 Measurement Event Enable Register ..................................................................................................... 3-115 Questionable Event Enable Register ...................................................................................................... 3-115 Operation Event Enable Register ........................................................................................................... 3-116 Trigger Event Enable Register ............................................................................................................... 3-116 Arm Event Enable Register .................................................................................................................... 3-116 Sequence Event Enable Register ............................................................................................................ 3-117 Measurement Transition Filter ............................................................................................................... 3-118 Questionable Transition Filter ............................................................................................................... 3-119 Operation Transition Filter ..................................................................................................................... 3-120 Trigger Transition Filter ......................................................................................................................... 3-121 Arm Transition Filter ............................................................................................................................. 3-122 Sequence Transition Filter ..................................................................................................................... 3-123 Key-press codes ..................................................................................................................................... 3-131DFigure D-1 Figure D-2 Figure D-3IEEE-488 Bus OverviewIEEE-488 bus configuration ...................................................................................................................... D-2 IEEE-488 handshake sequence ................................................................................................................. D-3 Command codes ........................................................................................................................................ D-6xiList of Tables2Table 2-1 Table 2-2 Table 2-3 Table 2-4 Table 2-5 Table 2-6 Table 2-7 Table 2-8 Table 2-9 Table 2-10 Table 2-11 Table 2-12 Table 2-13 Table 2-14 Table 2-15 Table 2-16 Table 2-17 Table 2-18 Table 2-19 Table 2-20 Table 2-21 Table 2-22 Table 2-23 Table 2-24 Table 2-25 Table 2-26 Table 2-27 Table 2-28 Table 2-29 Table 2-30Front Panel OperationLine fuse selection ..................................................................................................................................... 2-2 Data checked on power-up ......................................................................................................................... 2-3 Power-up error messages ........................................................................................................................... 2-3 Typical display exponent values ................................................................................................................ 2-4 Status and error messages .......................................................................................................................... 2-6 Multiple (Next) displays by function ......................................................................................................... 2-7 EXIT key actions ....................................................................................................................................... 2-9 CONFIGURE VOLTS menu structure .................................................................................................... 2-21 CONFIGURE AMPS menu structure ...................................................................................................... 2-28 Minimum recommended source resistance values ................................................................................... 2-29 Ohms reading ranges and AUTO V-Source ............................................................................................. 2-33 CONFIGURE OHMS menu structure ..................................................................................................... 2-40 CONFIGURE COULOMBS menu structure ........................................................................................... 2-45 V-Source ranges ....................................................................................................................................... 2-46 CONFIGURE V-Source menu structure .................................................................................................. 2-46 Typical 2V analog output values ............................................................................................................. 2-51 Full-range PREAMP OUT values ............................................................................................................ 2-52 Integration times set-by-resolution (all functions) ................................................................................... 2-58 Auto resolution (all functions) ................................................................................................................. 2-58 CONFIGURE SEQUENCE menu structure ............................................................................................ 2-69 CONFIGURE TRIGGER menu structure ................................................................................................ 2-71 Maximum buffer readings ........................................................................................................................ 2-95 CONFIGURE DATA STORE menu structure ........................................................................................ 2-96 Fill-and-stop sequence ............................................................................................................................. 2-99 Continuous sequence ................................................................................................................................ 2-99 Pretrigger sequence .................................................................................................................................. 2-99 CONFIGURE FILTER menu structure ................................................................................................. 2-104 CONFIGURE MATH menu structure ................................................................................................... 2-106 MAIN MENU STRUCTURE ................................................................................................................ 2-108 Factory default conditions ...................................................................................................................... 2-1113Table 3-1 Table 3-2 Table 3-3 Table 3-4 Table 3-5 Table 3-6IEEE-488 ReferenceGeneral bus commands and associated statements .................................................................................... 3-5 IEEE-488.2 common commands and queries .......................................................................................... 3-27 Signal oriented measurement command summary .................................................................................. 3-38 CALCulate command summary ............................................................................................................... 3-42 CALibration command summary ............................................................................................................. 3-44 DISPlay command summary ................................................................................................................... 3-44xiiiTable 3-7 Table 3-8 Table 3-9 Table 3-10 Table 3-11 Table 3-12 Table 3-13 Table 3-14 Table 3-15 Table 3-16 Table 3-17FORMat command summary ................................................................................................................... 3-45 OUTput command summary .................................................................................................................... 3-45 ROUTe command summary ..................................................................................................................... 3-46 SENSe command summary ...................................................................................................................... 3-46 SOURce command summary ................................................................................................................... 3-52 STATus command summary .................................................................................................................... 3-53 SYSTem command summary ................................................................................................................... 3-55 TRACe command summary ..................................................................................................................... 3-56 Trigger command summary ..................................................................................................................... 3-57 :TSEQuence command summary ............................................................................................................. 3-58 :UNIT command summary ....................................................................................................................... 3-61BTable B-1Interface Function CodesModel 6517A interface function codes ..................................................................................................... B-1DTable D-1 Table D-2 Table D-3 Table D-4 Table D-5IEEE-488 Bus OverviewIEEE-488 bus command summary ............................................................................................................ D-4 Hexadecimal and decimal command codes ............................................................................................... D-6 Typical addressed command sequence ...................................................................................................... D-7 Typical common comm