470 Commerce Way, Livermore, CA 94551 925.373.8201 Voice 925.373.8202 Fax www.semicore.com

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SYSTEM DESCRIPTION: Manufacture: Temescal (BOC Edwards)

Model: FC 1800 (Fast- Cycle) E-beam Evaporation System PICTURES: Additional photographs available upon request. System has been upgraded to a Telemark TT-10 power supply, sweep control and indexer.

CONFIGURATION:

SYSTEM FACRICATION

Cabinet, Steel Framework Fully-enclosed system cabinet with full opening service

door DEPOSITION CHAMBER:

20-inch diameter x 9-inch high stainless steel, deposition chamber designed for waist high substrate loading and unloading.

18-inch diameter stainless steel, evaporation source chamber with viewport

Isolation valve between substrate and source chambers. PUMPING SYSTEM: Cryogenic pump

CTI-8 cryo with SC helium compressor ROUGHING PUMP

27 cfm roughing pump

470 Commerce Way, Livermore, CA 94551 925.373.8201 Voice 925.373.8202 Fax www.semicore.com

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HIGH VACUUM VALVES High Vacuum poppet valve

Roughing, Leak-check, Backing, and Vent Valves VACUUM CONTROLLER:

Temescal Auto/Manual vacuum sequence controller. CHAMBER GAUGING:

Granville Phillips combination ionization and TC gauge. DEPOSITION: E-beam

4 pocket Electron Beam Gun 4 pocket crucible indexer. TT-10 power supply with X-Y beam sweep controller. 3 cm Ion gun and power supply with single gas

controller. DEPOSITION SOURCE SHUTTER:

Electro-pneumatic source shutter: DEPOSITION Controller

Inficon IC4 plus Quartz crystal deposition controller Single quartz crystal sensor (water-cooled)

SUBSTRATE HEAT: Optional SUBSTRATE FIXTURING:

Planetary or Lift-off tooling available. Substrate rotation assembly with variable speed drive

motor. SYSTEM DOCUMENTATION:OEM manuals.

CONDITION: Fully operational at time of shut down.

DELIVERY: Immediate.

PRICE: Call for pricing.

Note: All equipment listed above is subject to prior sale or other disposition.