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Managed by UT-Battelle for the Department of Energy 3D Ptychography with Differential Aperture Microscopy Gene E. Ice Oak Ridge National Laboratory Cornell June 2011

3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

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Page 1: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

Managed by UT-Battellefor the Department of Energy

3D Ptychography with Differential Aperture Microscopy

Gene E. IceOak Ridge National Laboratory

Cornell June 2011

Page 2: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

3 Managed by UT-Battellefor the Department of Energy

Vision builds on existing expertise

Achromatic X-ray infrastructure developed on 34-ID-E to study local structure and defects

Elastic strain tensor

Pushes envelope of what is possible

Presentation_name

Page 3: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

4 Managed by UT-Battellefor the Department of Energy Presentation_name

Existing infrastructure near what is needed to observe and characterize discrete defects deep in sample

<0.25 x 0.25 x 0.5 m3

strain~5x10-5 (~10 fm)

12

3

4

5

X-ray Area Detector

Improve spatial resolutionImprove sensitivity to rotations

Page 4: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

5 Managed by UT-Battellefor the Department of Energy Presentation_name

Differential aperture microscopy resolves submicron along incident beam!

Simplifies data interpretation

Submicron Z resolution

Isolates weak diffraction from strong

First demonstration by Larson et al. on deformed Cu -

Page 5: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

6 Managed by UT-Battellefor the Department of Energy

We are pushing in two directions

Improve spatial resolution of focused beam

Explore achromatic coherent diffraction methods

Presentation_name

Page 6: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

7 Managed by UT-Battellefor the Department of Energy

Nested (Montel) optics will push spatial resolution

More compact

Improved thermal/vibration stability

First tests– ~150 nm beams– Increased intensity

50-100 nm very practical

More recent tests ~100 nm resolution

Presentation_name

Page 7: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

8 Managed by UT-Battellefor the Department of Energy

New approaches will address remaining technical challenges

Low figure errors at edge-small spot

Figured edge shape-higher efficiency

Novel alignment/angle control

Presentation_name

Page 8: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

Managed by UT-Battellefor the Department of Energy

Focused-beam Coherent Imaging Offers Significant Advantages

• Full field imaging

• Nm resolution

• Focusing improves resolution at expense of field-of-view

Schroer et al. Phys. Rev. Lett. 101(2008)

108 photons/s x 600 seconds=6 x 1010

5 nm

In 100x100 nm2

~ 2 x 10140.2 nm

In 10x10 nm2

Page 9: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

10 Managed by UT-Battellefor the Department of Energy

Takahashi et al. reach 2 nm resolution with 1 μm beam

Diffraction-limited focusing (Osaka mirrors)

Treat beam as plane wave at focus

Presentation_name

Takahsi et al. Phys. Rev. B 82 21412 (2010).

Page 10: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

11 Managed by UT-Battellefor the Department of Energy

Challenges Sample damage/ heating

– Heating of a thin sample

– TAluminum=10°C @ 4 x 1014 20 keV x-rays/sec

Reconstruction of topologic defects (dislocations)

Signal-to-noise

Extended objects-ptychography

Extended 3D objects

Page 11: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

12 Managed by UT-Battellefor the Department of Energy

Coherent diffraction in Bragg mode offers strain sensitivity-but additional Challenge

Must collect multiple reflections to measure strain tensor-rotate sample

Coherent diffraction from a Au nano particle

Robinson et al. approachMost studies to date on small isolated particles

Page 12: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

13 Managed by UT-Battellefor the Department of Energy Presentation_name

Can Achromatic Methods Extend Lensless Diffraction Imaging?

Diffraction imaging provides strain tensor 4 Bragg reflections

– Multiple Bragg reflections accessed by Energy Scans

– NO SAMPLE ROTATIONS

Ptychography subdivides sample complexity in two dimensions.

What about 3rd?

Page 13: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

14 Managed by UT-Battellefor the Department of Energy

Real revolution will be to extend ptchography to 3 dimensions

Differential aperture provides additional spatial information

– Resolves discrete particles with non-overlapping diffraction

– Can it be used to determine regions contributing coherently, partially coherently and incoherently

Aperture will itself diffract intensity

Page 14: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

15 Managed by UT-Battellefor the Department of Energy

Osaka group uses diffraction from knife edge to achieve nm spatial resolution

Presentation_name

Shadow

Det

ecto

r

Page 15: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

16 Managed by UT-Battellefor the Department of Energy

First experiments begun

Presentation_name

Nanoscale particles indexed with white beam

However simple surface samples do not work well with white beam orhigh intensity monochromatic beams

Page 16: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

17 Managed by UT-Battellefor the Department of Energy

Eutectic pillar samples (Bei/George) provide stable sample

Presentation_name

Locked into matrix

Complicated with multiple pillars illuminated simultaneously

Really need 3D ptychography!

Page 17: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

18 Managed by UT-Battellefor the Department of Energy

High Q-space resolution helps separate Mo/NiAl pillar scattering

Real space

pillar 1?Pillar 1

Page 18: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

20 Managed by UT-Battellefor the Department of Energy Presentation_name

Summary X-ray imaging needed for things

that can’t be done with electrons.– Buried samples– 3D samples– Samples in environmental chambers

New approaches needed to study real materials.

– 3D ptychrography– Energy scanning methods for

reciprocal space mapping

Existing achromatic hardware provides model for future

Page 19: 3D Ptychography with Differential Aperture Microscopy€¦ · ~ 2 x 1014 0.2 nm In 10x10 nm2. 10 Managed by UT-Battelle for the Department of Energy Takahashi et al. reach 2 nm resolution

21 Managed by UT-Battellefor the Department of Energy

Reconstruction of dislocation still an unsolved challenge

Presentation_name

•Temporary solution compare to models

•Work on alternatives-ptychography near dislocation to characterize strain field

2 vortex

6 vortex

Reconstruction

Sample


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