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22 Bd. Benoni Goullin 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr 3D NAND FLASH MEMORIES Comparison of Leading Edge 3D NAND Memories TOSHIBA-SanDisk /SAMSUNG/SK HYNIX/INTEL- MICRON Memory report by Belinda Dube December 2018 REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

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Page 1: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

22 Bd. Benoni Goullin44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

3D NAND FLASH MEMORIESComparison of Leading Edge 3D NAND MemoriesTOSHIBA-SanDisk /SAMSUNG/SK HYNIX/INTEL- MICRONMemory report by Belinda DubeDecember 2018

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Page 2: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Table of Contents

Overview / Introduction 4

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

o Toshiba/SanDisk

o Samsung

o SK Hynix

o Micron/Intel

Technology & Market 8

o NAND Roadmap

o NAND Revenue

Physical Analysis 14

o Toshiba Synthesis of the Physical Analysis

o Toshiba Physical Analysis Methodology

o Toshiba Physical analysis

Die

Cross-Section

o Toshiba Patents

o Samsung Synthesis of the Physical Analysis 53

o Samsung Physical Analysis Methodology

o Samsung Physical analysis

Die

Cross-Section

o Samsung Patents

o SK Hynix 80

Synthesis

Die design

Cross-Section

Patents

o Intel/ Micron 110

Synthesis

Die design

Cross-Section

Patents

Manufacturing Process Flow 146

o Global Overview

o Wafer Fabrication Unit

o Front-End Process

Cost Analysis 179

o Synthesis of the cost analysis

Yields Explanation & Hypotheses

NAND wafer and die cost

Front-End Cost

Component Cost

Estimated Price and Manufacturer Gross Margin 228

Company services 239

Page 3: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introductiono Executive Summaryo Reverse Costing

Methodologyo Glossary

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Executive Summary

The memory semiconductor industry continues to grow due to higher memory demand in consumer electronics andmass storage. Remarkable investments are channeled into the memory manufacturing business. IoT escalates thisdemand and hence manufacturers continue to increase the die density of memories at the same time aiming onreduction of the NAND die. The manufacturing process is complex compared to most semiconductor products. Eachmanufacturer proposes different manufacturing techniques with each generation in order to lower the wafermanufacturing by reducing the patterning count and cost.

This report details each process and features found in the latest NAND Memories. This full reverse costing study hasbeen conducted to provide insight on technology data, detailed analysis of microstructural features, wafermanufacturing cost and die selling price of the latest LEADING EDGE 3D NAND MEMORIES produced by the four topmanufacturers in the NAND memory industry.

Toshiba/SanDisk, Samsung , Micron/Intel have produced 64 Layers in their latest 3D NAND and SK Hynix have the

highest number of layers in their NAND Memory having 72 layers in their latest 3D NAND.

Based on complete teardown analyses of the 3D, the reports provide the physical analysis and detailed manufacturing

methods and cost estimation of each 3D NAND wafer. Comparison is made on the technology used, feature differences

and the wafer fabrication technics used by each manufacturer and their estimated cost.

Moreover, the report proposes a comparison of the four different NAND memories, highlights the differences in design

and manufacturing process.

All the 3D NAND memory manufacturers use the 12 inch wafer (300mm).

Page 4: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introductiono Executive Summaryo Reverse Costing

Methodologyo Glossary

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Executive Summary

Page 5: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Toshiba NAND- Packaging (with mesurements)

Page 6: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Toshiba NAND - Multiple Layer Etch

Dielectric support pillar :

• High Aspect Ratio etching is perfomed through dielectric material oxide and alternating stack

• The opening extending through the terrace is filled with SiO2

• This support pillar is useful in providing mechanical support to the terrace structure to avoid collapse during SiN wet etching.

Channel Hole• High Aspect Ratio etch is also perfomed in

creation, of channel hole and memory slits.

Cell Vertical structure (full view) –SEM©2018 by System Plus Consulting

Page 7: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Toshiba NAND- Logic Area : Transistor Technology

620nm

620nm

320nm

Page 8: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Samsung Memory- Memory Cross section- staircase

NAND Memory Staircase©2018 by System Plus Consulting

Page 9: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Samsung Memory- Memory Cross section- staircase

Page 10: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

SK Hynix Memory- Effective unit Area

Page 11: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Intel/Micron Memory- Double stack technic

Page 12: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Die comparison

Page 13: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Physical analysis summary

Page 14: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company ProfileTechnology and market

Physical Analysis o NAND Synthesiso Toshiba/SanDisk Synthesiso Toshiba/SanDisk Packageo Toshiba/SanDisk Physical

Analysiso Toshiba/SanDisk Patento Toshiba Outlineo Samsung Synthesiso Samsung Packageo Samsung Physical Analysiso Samsung Patento Samsung Outlineo SK Hynix Synthesiso SK Hynix Packageo SK Hynix Physical Analysiso SK Hynix Patento SK Hynix Outlineo Intel/Micron Synthesiso Intel/Micron Packageo Intel/Micron Physical

Analysiso Intel/Micron Patento Intel/Micron outlineo Comparison

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Physical analysis summary -staircase

Page 15: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flowo Toshiba Overviewo Toshiba Front-End Processo Samsung Overviewo Samsung Front End processo SK Hynix Overviewo SK Hynix Front End Processo Intel/Micron Overviewo Intel/Micron Front End

Processo Comparison

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

SK Hynix- Bit line contact and bit line

Page 16: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flowo Toshiba Overviewo Toshiba Front-End Processo Samsung Overviewo Samsung Front End processo SK Hynix Overviewo SK Hynix Front End Processo Intel/Micron Overviewo Intel/Micron Front End

Processo Comparison

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

Intel/Micron – First deck: channel hole and slit formation

Page 17: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Toshiba/SanDisk Supply

Chain/Yieldo Toshiba/SanDisk Wafer & Die Costo Toshiba/ SanDisk Package Costo Toshiba/SanDisk Back-End Costo Toshiba/SanDisk Component Costo Synthesiso Samsung Supply Chain/Yieldo Samsung Wafer & Die Costo Samsung Package Costo Samsung Back-End Costo Samsung Component Costo Synthesiso SK Hynix Supply Chain/Yieldo SK Hynix Wafer & Die Costo SK Hynix Package Costo SK Hynix Back-End Costo SK Hynix Component Costo Synthesiso Intel/Micron Supply Chain/Yieldo Intel/Micron Wafer & Die Costo Intel/Micron Package Costo Intel/Micron Back-End Costo Intel/Micron Component Cost

Estimated Price Analysis

Related Reports

About System Plus

Memory – CMOS and Last Metal Layers Front End Cost

Page 18: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Toshiba/SanDisk Supply

Chain/Yieldo Toshiba/SanDisk Wafer & Die Costo Toshiba/ SanDisk Package Costo Toshiba/SanDisk Back-End Costo Toshiba/SanDisk Component Costo Synthesiso Samsung Supply Chain/Yieldo Samsung Wafer & Die Costo Samsung Package Costo Samsung Back-End Costo Samsung Component Costo Synthesiso SK Hynix Supply Chain/Yieldo SK Hynix Wafer & Die Costo SK Hynix Package Costo SK Hynix Back-End Costo SK Hynix Component Costo Synthesiso Intel/Micron Supply Chain/Yieldo Intel/Micron Wafer & Die Costo Intel/Micron Package Costo Intel/Micron Back-End Costo Intel/Micron Component Cost

Estimated Price Analysis

Related Reports

About System Plus

Memory 3D Front-End Cost

Page 19: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Toshiba/SanDisk Supply

Chain/Yieldo Toshiba/SanDisk Wafer & Die Costo Toshiba/ SanDisk Package Costo Toshiba/SanDisk Back-End Costo Toshiba/SanDisk Component Costo Synthesiso Samsung Supply Chain/Yieldo Samsung Wafer & Die Costo Samsung Package Costo Samsung Back-End Costo Samsung Component Costo Synthesiso SK Hynix Supply Chain/Yieldo SK Hynix Wafer & Die Costo SK Hynix Package Costo SK Hynix Back-End Costo SK Hynix Component Costo Synthesiso Intel/Micron Supply Chain/Yieldo Intel/Micron Wafer & Die Costo Intel/Micron Package Costo Intel/Micron Back-End Costo Intel/Micron Component Cost

Estimated Price Analysis

Related Reports

About System Plus

Memory Wafer & Die Cost

Page 20: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Toshiba/SanDisk Supply

Chain/Yieldo Toshiba/SanDisk Wafer & Die Costo Toshiba/ SanDisk Package Costo Toshiba/SanDisk Back-End Costo Toshiba/SanDisk Component Costo Synthesiso Samsung Supply Chain/Yieldo Samsung Wafer & Die Costo Samsung Package Costo Samsung Back-End Costo Samsung Component Costo Synthesiso SK Hynix Supply Chain/Yieldo SK Hynix Wafer & Die Costo SK Hynix Package Costo SK Hynix Back-End Costo SK Hynix Component Costo Synthesiso Intel/Micron Supply Chain/Yieldo Intel/Micron Wafer & Die Costo Intel/Micron Package Costo Intel/Micron Back-End Costo Intel/Micron Component Cost

Estimated Price Analysis

Related Reports

About System Plus

Memory : Packaging Cost

Page 21: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Cost Comparisono Wafer Cost o Die Costo CMOS o NAND Memory Cellso Top metallizationo Cost/Gb

Related Reports

About System Plus

Wafer Cost Comparison- Medium Yield

Page 22: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Cost Comparisono Wafer Cost o Die Costo CMOS o NAND Memory Cellso Top metallizationo Cost/Gb

Related Reports

About System Plus

Die Cost Comparison- Medium Yield

Page 23: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Cost Comparisono Wafer Cost o Die Costo CMOS o NAND Memory Cellso Top metallizationo Cost/Gb

Related Reports

About System Plus

CMOS Cost Comparison

Page 24: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Plus

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

MEMORY• Emerging Non-Volatile Memory 2018

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

IC • Toshiba-SanDisk 3D NAND Flash

Related Reports

Page 25: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

SystemPlusConsultingSERVI CES

Page 26: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Pluso Company Serviceso Contact

Business Models Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>40 reports per year)

Costing Tools

Trainings

Page 27: 3D NAND FLASH MEMORIES - System Plus Consulting … · This report details each process and features found in the latest NAND Memories. This full reverse costing study has been conducted

Overview / Introduction

Company Profile

Technology and market

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Estimated Price Analysis

Related Reports

About System Pluso Company Serviceso Contact

Contact

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