3D Metrology Systems General Brochure 2CE-IFBH-8 · Accuracy (μm)* MPESD 9 + L/50 Max. sample size Diameter 250mm Max. sample weight 5kg Detector FPD ... report GD&T. 6 7 Articulated

3D METROLOGY SYSTEMS GENERAL CATALOGUE

3D Metrology Systems

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Visualizes the minute defects on the surface and inside of a specimen using advanced X-ray/CT technology

Nikon, using X-ray/CT (Computed Tomography) technology, provides non-destructive inspection of the inside of samples with minute and complicated structures using noncontact or optical sensors. The technology allows for a a wide range of inspection targets, such as printed substrates with digital parts, plastic-molded parts, casting, newly developed materials, medical parts, consumer products and archaeological relics.

Large scale volume space inspection

To improve precision and production speeds, accurate inspection data of geometric forms are fed back to the production process in real-time.In automobile, airline, shipbuilding industries, where high-quality production is essential, Nikon's measurement solutions contribute to reduce production costs and throughput by providing measuring solutions.

X-Ray/CT Inspection

Computed tomography ― XT H 320 / XT H 450 / XT H 225 / XT H 225 ST‥ ‥‥‥‥‥‥‥ P. 4

Metrology CT ― MCT225‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 5

Electronics inspection ― XT V 160 / XT V 130C‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 5

Portable Metrology System

Handheld scanners ― ModelMaker‥ ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 6

Articulated arms ― MCAx+‥ ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 7

Non-contact Sensor 3D Metrology System

HN-C3030‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 7

Coordinate Measuring Machine

ALTERA/LK series‥ ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 8

Laser Scanner

High-speed, high accuracy laser scanner ― L100‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 9

High accuracy laser scanner ― LC15Dx‥ ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 9

Digital line scanner ― LC60Dx‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 9

Cross scanner ― XC65Dx(-LS) ‥ ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ P. 9

Software

Multi-sensor CMM metrology software ― CAMIO‥ ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥P. 10

Fully featured for CNC, manual and portable CMMs ― CMM Manager‥‥‥‥‥‥‥‥‥‥P. 10

Point cloud processing ― Focus Inspection/Focus Scan ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥P. 10

Large Volume Metrology

Non-contact large-volume inspection ― Laser Radar MV331/351‥‥‥‥‥‥‥‥‥‥‥‥P. 11

Indoor Global Positioning System ― iGPS ‥ ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥P. 11

IndexFrom Nanotechnology to Heavy Industry

Non-contact 3D metrology drives the digital

production process

Originally focused on automobile and aerospace manufacturing, Nikon's streamlined production system, featuring the 3D CAD program, is now employed in measurement and inspection processes. Nikon has shortened the time for product launches and reduced development costs in all product lineups through the use of 3D CAD data for 3D digital measurement and inspection processes. Nikon provides Laser Scanners, CMMs (Coordinate Measuring Machines) and MCA Portable Coordinate Measuring Arms to support innovative, non-contact measurement sensing technologies.

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Electronics inspection — XT V 160 / XT V 130CBoth XT V 160 and XT V 130C are cost-effective systems for electronics and semiconductor inspections. XT V 160 is an easy-to-use high-quality PCB inspection system targeting production facilities and failure analysis laboratories.

SpecificationsX-ray source 225kV/225W

Accuracy (μm)* MPESD 9 + L/50

Max. sample size Diameter 250mm

Max. sample weight 5kg

Detector FPD

* Verified using VDI / VDE 2630 guidelines Applies only to single material samples with maximum diameter of 250mm and maximum height of 250mm

Metrology CT — MCT225 MCT225 provides Metrology CT for a wide range of sample sizes and material densities in accordance with the latest industry standards. All internal and external geometry is measured efficiently without reference measurements or damaging the sample

Computed tomography — XT H 320 / XT H 450Anywhere the internal structure matters, X-ray and CT technology serves as an efficient tool to provide valuable information. Detailed capture and measurement of internal features is often vital for quality control, failure analysis and material research across various industries.

The XT H 320 is a large cabinet system for the X-ray CT scanning and metrology of large components. The XT H 450 sets a new reference for turbine blade measurement and NDT of small to medium castings. At the core of this powerful equipment is a 450 kV micro-focus source, providing superior resolution and accuracy.

Computed tomography — XT H 225 / XT H 225 STThe versatile XT H 225 system offers a microfocus X-ray source, a large inspection volume, high image resolution and is ready for ultrafast CT reconstruction. The XT H 225 ST is ideally suited for a various materials and sample sizes. Combined with the wide range of flat panel detectors to choose from, this system provides a flexible tool for quality laboratories, production facilities, and research departments.

SpecificationsXT H 225 XT H 225 ST

X-ray source (standard)

225kV microfocus reflection target

X-ray source (option)

180kV transmission target180kV transmission target /

225kV rotating target

Maximum kV 225kV

Power rating225W

20W (180kV source)

Detector (standard)

FPD

Manipulator (standard)

5-axis

Max. sample weight

15kg 50kg

Dimensions (W x D x H)

1,830mm × 875mm ×1,987mm

2,414mm × 1,275mm × 2,202mm

Weight 2,400kg 4,200kg

Specifications

XT H 320 XT H 450 3D XT H 450 2D

X-ray source (standard)

225kV / 320kV microfocus reflection

target450kV microfocus reflection target

X-ray source (option)

225kV rotating target 450kV high brilliance source

Maximum kV 225kV / 320kV 450kV

Power rating225W(225kV source) /320W(320kV source)

450W

Detector (standard)

FPD CLDA

Manipulator (standard)

4-axis

Max. sample weight

100kg

Dimensions (W x D x H)

2,695mm x 1,828mm x 2,249mm

3,613mm x 1,828mm x 2,249mm

Weight 8,500kg 14,000kg

For more information about each product, see individual brochure. For more information about each product, see individual brochure.

X-ray and CT Inspection

SpecificationsXT V 160 XT V 130C

Max. kV 160kV 130kV

Max. electron beam power 20W 10W

X-ray source Transmission target

Geometric magnification 2.5x - 2400x

Detector FPD

Manipulator 5-axis

Tilt 0 - 75 degrees

Measuring volume 406mm ×406mm

Max. sample weight 5kg

Dimensions (W x D x H) 1,200mm ×1,786mm ×1,916mm

Weight 1,935kg

Automated inspection Included Optional

Computed tomography/ X. Tract

Optional

Primary applications

Real-time and automated electronics and

semiconductor inspection, failure analysis

Real-time electronics inspection

Shaving foam canConnector

BGA device inspectionBond wire analysisBroken bond wire

Direct comparison to CAD model

Section of internal geometry

CT volume reconstruction

Dimensional report GD&T

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Articulated arms — MCAx+The MCAx+ (Manual Coordinate measuring Arm) is a precise, reliable and easy-to-use portable 7-axis measuring system. It is the perfect partner for the ModelMaker laser scanners and Focus Handheld scanning and inspection software due to its high precision, repeatability, and stability. The arm can be equipped with a wide range of probing systems, such as a large choice of probes for a variety of tasks including touch-trigger measurements and continuous scanning.

Features

• Automatic probe recognition and repeatable probe/scanner mounting allows immediate switching between measurement tools

• Zero-G counterbalance reduces operator fatigue delivering effortless control in all positions• Secures the arm easily and safely when not in use - Enables to fix the arm in any intermediate position• No referencing or warm-up time required

SpecificationsMeasuring

rangePoint

repeatabilityVolumetric accuracy

With H120

With MMDx50

With MMDx100

With MMDx200

MCAx20+ 2.0m 0.023mm 0.033mm 0.028mm 0.042mm 0.048mm 0.066mm






For more information about each product, see individual brochure.


For more information about each product, see individual brochure.

Handheld scanners — ModelMakerNikon's ModelMaker scanners automatically adjust its laser intensity to measure any materials, shiny or multi-colored, without surface preparation. Requiring no warm-up time, the scanners are ideally suited for 3D inspection and reverse engineering applications.


MMDx50 (red laser)

H120 (blue laser technology)

No warm-up timeUp to 450,000 points per second

SpecificationsH120 MMDx50 MMDx100 MMDx200

Points per second 300,000 (max. 450,000) 50,000

Accuracy* 7μm (2δ: 14μm) 10μm (2δ: 20μm) 16μm (2δ: 32μm)

Stripe width 120mm 50mm 100mm 200mm

Stand-off 80mm 95mm 100mm 110mm

Measuring range 100mm 50mm 100mm 150mm

Laser power adjustment ESP4 ESP3

Laser class Class 2

Weight 500g 400g

* Based on Nikon’s test method• ESP: Enhanced Sensor Performance

HN-C3030 Equipped with a high-speed, high-precision laser scanner, the HN-C3030 is suitable for measurement of various gear types, including hypoid gears, bevel gears, helical gears, spur gears, internal gears, splines, turbocharger wings, oil seals, etc. Five-axis automatic control allows scanning of parts with complex shapes using optimum scanning angles.

Features

• Dense 3D scan provides better insight into complex gear shapes• Part-to-CAD comparison reveals surface imperfections (e.g. waviness, machining traces) that cause of

undesired vibrations or high frequency noise• Laser scanning offers high measurement speed• Non-contact eliminates the need for probe tip compensation• Can be used outside of temperature-controlled rooms when connected

to an optional thermal regulator• Optional dedicated software for gear analysis enables teaching files to

be easily made from gear dimensions and mounting position

Non-contact Sensor 3D Metrology System

SpecificationsMax. sample size ø300 x (H) 300 mm*

Max. sample weight for guaranteed accuracy 30 kg (including fixture)

Effective measurement range (X x Y x Z) 310 x 320 x 400 mm

Laser scanner

Working distance 98.6 mm (from center of measurement range)

Measurement distance 20 mm

Height detection range ±10 mm

Linear resolution 20 µm

Safety standardsLaser (class) Class 1

Device EU low voltage directive, EU EMC directive, EU machinery directive

* Space for shaft (ø61 x H187 mm extended downward from chuck fixture level) for measurement of shaft-mounted gears

Right

Condition 1 and 2

Condition 2 and 2

Comparison of actual tooth flanksLeft

* Images above show tooth flank variation under different processing conditions.

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Advanced multi-sensor technology

Optimizes CMM throughput and provides the opportunity to broaden the application scope to new materials and components as needs change.

Superior ceramic design

With near perfect stiffness to-weight ratio and greater resistance to temperature shifts, the machines provide consistent performance across all manufacturing environments.

Intuitive software

Innovative work-flows and intuitive software features facilitate complex inspection tasks and boost productivity.

ALTERA/LK series

ALTERA SL/SL HAALTERA (small size) LK H-R


Coordinate Measuring Machine

REVO LC15Dx

High accuracy laser scanner — LC15DxThe all-digital laser scanner is a viable alternative to a tactile probe for an increasing number of high precision CMM applications. With its smaller field-of-view, the LC15Dx perfectly suits digitizing small or detailed objects with higher point density and tighter tolerances.

Features• ESP3 makes it possible to acquire stable point clouds• Accuracy that rivals tactile probes• Captures a multitude of inspection points

High-speed, high accuracy laser scanner — L100The L100 offers the best possible combination of speed, accuracy, and ease-of use. Suited for both surface and feature measurement, the L100 quickly delivers accurate data and insightful part to-CAD comparison reports. Nikon's ESP algorithm makes it possible to measure large objects with composite material surfaces that include glossy or reflective surfaces and different colors, and rapidly compare them to CAD drawings.

Features• Robust for digitizing multi-material assemblies or shiny surfaces with the ESP4• Maintains precision even with scanning performance of up to 200,000 points per second• Improved ease of use with the 100mm wide FOV

Cross scanner — XC65Dx(-LS)

Incorporating three lasers in a cross pattern, the XC65D captures the 3D details of features, edges, pockets, ribs and freeform surfaces in a single scan. By digitizing complex features from three sides, the Cross Scanner acquires the complete 3D geometry of features to enable accurate extraction of positions and dimensions.

Features• Full 3D capture of complex surfaces and features in a single scan• Faster feature inspection by eliminating scanner re-orientation• XC65Dx-LS has a long stand-off of 170mm making it possible to scan the shapes of deep pockets

Digital line scanner — LC60DxOne of our best selling models, this cost-effective CMM scanner provides high accuracy and productivity standards by using the latest digitizing technology. The LC60Dx requires no manual sensor adjustment and scans at a high frame rate for nearly all material surfaces.

Features• ESP3 provides real-time, point per point laser intensity adjustment that constantly adapts to the material

surface• Premium performance CMM scanner for every inspection job• Capable of starting measurement after a minimal warm-up time

Laser Scanner

SpecificationsL100 LC15Dx LC60Dx XC65Dx XC65Dx-LS

FOV width 100mm 18mm 60mm 3 × 65mm

FOV depth 60mm 15mm 60mm 3 × 65mm

Probing error* 6.5μm 1.9μm 9μm 12μm 15μm

Scanning speed 200,000 pts/sec 70,000 pts/sec 75,000 pts/sec 3 × 25,000 pts/sec

Stand-off 105mm 60mm 95mm 75mm 170mm

Laser power adjustment ESP4 ESP3

* Based on Nikon's test method• ESP: Enhanced Sensor Performance

Standard lineup

Model Measurement range（mm）

Volumetric accuracyE0/E150, MPE （TP200）

ISO 10360-2:2009

RepeatabilityPFTU, MPE (TP200)ISO 10360-5:2010

Accuracy guaranteed temperature

ALTERA(small size)

7.5.5 711×508×508 1.8+L/400μm 1.7 μ m

20 ± 2℃

8.7.6 813×711×610 1.8+L/400μ m 1.7 μ m

10.7.6 1,016×711×610 1.8+L/400μ m 1.7 μ m

15.7.6 1,524×711×610 1.8+L/400μ m 1.7 μ m

10.10.8 1,016×1,016×813 1.8+L/400μ m 1.7 μ m

12.10.8 1,220×1,016×813 1.8+L/400μ m 1.7 μ m

15.10.8 1,524×1,016×813 1.8+L/400μ m 1.7 μ m

20.10.8 2,032×1,016×813 1.8+L/400μ m 1.7 μ m

ALTERA(mid, large size)

15.12.10 (min) 1,525×1,220×1,016 1.9+L/375μ m 1.9 μ m

60.20.15 (max) 6,096×2,032×1,524 4.0+L/375μ m 2.5 μ m

ALTERA+(high-accuracy type)

8.7.6 (min) 813×711×610 1.5+L/375μ m 1.5 μ m

25.10.8 (max) 2,540×1,016×813 1.6+L/375μ m 1.6 μ m

Custom lineup

Axis stroke (mm)Volumetric accuracy

(ISO10360-2)MPEE μm+L/mm

Probe accuracy(ISO10360-2)

MPEP μm [TP200]

Accuracy guaranteed temperature

ALTERA SL 800×700×600~2,500×2,000×1,500 1.1+L/400~ 1.1

2.020±2˚C20±2˚C

ALTERA SL HA 800×700×600~2,500×1,200×1,000 0.7+L/600~ 1.1

1.320±1˚C20±1˚C

LK V-R 3,000×2,000×1,200~ 4.5+L/200~ 4.5

20±2˚CLK V-GP 3,000×3,000×2,500~ 4.0+L/250~ 4.0

LK H-T (table) 1,000×400×600~ 1.9+L/250~ 1.9

LK H-R (rail) 4,500×1,600×2,000~ 10.0+L/200~ 6.0

• Values vary depending on axis stroke• For full CMM specifications, please contact Nikon

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Multi-sensor CMM metrology software — CAMIOCAMIO is a comprehensive CMM software package, with advanced integrated multi-sensor capability for touch probes, scanning probes and laser scanning. Inspection programs and reports can be created for a wide range of common or specialist applications, both online or offline, using any popular CAD format.

CAMIO offers true multi-sensor capability, allowing best-practice selection of sensor technology for each task. This flexibility improves the quality of the inspection data and reduces CMM cycle times.

Indoor Global Positioning System — iGPSiGPS is a modular large scale metrology solution that transforms large fabrication facilities into accurate metrology-enabled areas. Within the facility, an unlimited number of handheld measurement probes or tracking sensors (fixated on tools and components) can operate concurrently.

Features

• Expand measurement volume by extending transmitter network

• Continuous position monitoring of sensors guarantees real-time data acquisition Supports factory-wide deployment

• Easily deployable for measuring the dynamic positioning of handheld probes, articulated arms, laser radars and other measurement equipment

• Uniform accuracy throughout the entire workspace

Fully featured for CNC, manual and portable CMMs — CMM-ManagerCMM-Manager is by far the most value-for-money multi-sensor inspection software that runs on nearly all manual, CNC and portable CMMs. Users accomplish more in less time with CMM-Manager, by automating serial inspection or by easily measuring a few features on the spot.

It is a task-oriented, highly intuitive software featuring quick walk-in measurement, one-click CAD measure, collision-free CAD teach, virtual simulation, real-time verification, CAD and datum alignment, and many more smart functions. CMM-Manager’s Windows graphical user interface makes the software even more informative and interactive.

Point cloud processing — Focus Inspection/Focus ScanFocus Inspection is today’s reference for point cloud inspection. It manages acquired point clouds and performs part-to-CAD comparison and advanced feature inspection. The software covers a wide range of inspection applications and offers stunning performance, an intuitive user interface, and standard macro functionality to automate the entire inspection process. Focus San is fully integrated into Focus Inspection and Automation. Its off-line module enables users to create, modify and prove out part programs using 3D CAD models, allowing CMMs to be used exclusively for measurement.

Graphical reports combine GD&T tolerances and CAD comparisons

Laser Radar mounted on robot for car body inspection

High-performance offline programming with automatic collision detection

Sheet metal inspection1. Import CAD 2. Import points 3. Align 4. Compare

Full graphical representation of planned scanning path

Confirm2

Measure

1

3

Pick


Software

Place transmitters around the working area

Location information of each probe is transmitted to a computer

Multiple probes can be used

Specifications

MV331 MV331 HS MV331p HS MV351 HS

Range 30 m 30 m 30 m 50 m

Measurementspeed

Scanning2,000 pts/

second2,000 pts/

second2,000 pts/second

2,000 pts/second

Surface points 0.5 sec 0.2 sec 0.2 sec 0.2 sec

Tooling ball 7 sec 2 sec 2 sec 2 sec

Feature (hole) 20 sec 2.2 sec 2.2 sec 2.2 sec

EnvironmentalReplaceable

filtersReplaceable

filters

Replaceable filters +attachment for

air pressurization

Replaceable filters

Designed for Cost-efficiency Performance Continuous inlineoperation Long range

Laser Radar is a versatile system that offers non-contact and true single- person inspection, and supports off-line programming for completely automated and unattended operation. Laser Radar incorporates patented laser reflection technology that allows for direct surface and feature measurement at high data rates.

Features

• Measurement range for MV351 up to 50m, MV331 up to 30m• Vision Scan inspection mode captures up to 2000 points per second• Accuracy from 24 µm (2m distance)

Non-contact measurement ideal for delicate and inaccessible specimens• Automation saves on operator expenses and manipulation errors• Reliable range measurements on composite materials

Non-contact large-volume inspection — Laser Radar MV331/351

Large Volume Metrology

EnThis brochure is printed on recycled paper made from 40% used material.Printed in Japan (1711-02)T Code No. 2CE-IFBH-8

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. November 2017.©2014-2017 NIKON CORPORATION

WARNING TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

NIKON CORPORATIONShinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japanphone: +81-3-6433-3703 fax: +81-3-6433-3784 http://www.nikon.com/products/industrial-metrology/

NIKON INSTECH CO., LTD.Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290phone: +81-3-6433-3701 fax: +81-3-6433-3784

NIKON METROLOGY, INC.12701 Grand River Avenue, Brighton, MI 48116 U.S.A.phone: +1-810-220-4360 fax: +1-810-220-4300E-mail: [email protected]://us.nikonmetrology.com/http://www.nikoninstruments.com/

NIKON METROLOGY EUROPE NVGeldenaaksebaan 329, 3001 Leuven, Belgiumphone: +32-16-74-01-00 fax: +32-16-74-01-03E-mail: [email protected]://www.nikonmetrology.com/

NIKON INSTRUMENTS (SHANGHAI) CO., LTD.CHINA phone: +86-21-6841-2050 fax: +86-21-6841-2060(Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026(Guangzhou branch) phone: +86-20-3882-0552 fax: +86-20-3882-0580

NIKON SINGAPORE PTE LTDSINGAPORE phone: +65-6559-3651 fax: +65-6559-3668

NIKON MALAYSIA SDN BHDMALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633

P.T. NIKON INDONESIAINDONESIA phone: +62-267 8643949 fax: +62-267 8643950

NIKON SALES (THAILAND) CO., LTD.THAILAND phone: +66-2633-5100 fax: 66-2633-5191

NIKON INSTRUMENTS KOREA CO., LTD.KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415

NIKON INDIA PRIVATE LIMITEDINDIA phone: +91-124-4688500 fax: +91-124-4688527

NIKON CANADA INC.CANADA phone: +1-905-602-9676 fax: +1-905-602-9953

NIKON INSTRUMENTS S.p.A.ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93

NIKON METROLOGY UK LTD.UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881E-mail: [email protected]

NIKON METROLOGY SARLFRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35E-mail: [email protected]

NIKON METROLOGY GMBHGERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229E-mail: [email protected]

ISO 14001 Certifiedfor NIKON CORPORATION

ISO 9001 Certifiedfor NIKON CORPORATIONIndustrial Metrology Business Unit

Documents

3D Metrology Systems General Brochure 2CE-IFBH-8 · Accuracy (μm)* MPESD 9 + L/50 Max. sample size Diameter 250mm Max. sample weight 5kg Detector FPD ... report GD&T. 6 7 Articulated