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3D MEMS Accelerometers for Building Applications
Mikaël Colin – MEMScAP S.A.
1st MEMSCON Event – Bucharest
October 7th, 2010
1st MEMSCON Event07/10/10, Bucharest Company
Acceleration RF ID tag
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
Accelerometer end-user specifications
Parameter Value Unit
Acceleration 0.01-2 g
Frequency 0.1-10 Hz
Duration 15 s
Size constraint - mm3
Operating temperature -20 to +50 °C
Operating Humidity 0 to 100 %RH
Vibrations (15g) 1000 Hz
Shocks 2000 g
Battery lifetime 2 years
3D MEMS accelerometer
MEMS = Micro ElectroMechanical System
Accelerometers transduction mechanisms
Vibration Beam Accelerometer (VBA) Resonance frequency is dependent on the applied force Driven oscillator at resonance frequency (closed loop) High end applications
Company1st MEMSCON Event07/10/10, Bucharest
Spring Mass System Acceleration force causes a proof
mass displacement Displacement measurement system Direct or indirect measurement Indirect measurement methods:
Piezoelectric effect Piezoresistive effect Capacitive sensing
Transduction principles
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
Piezoelectric effect Piezoresistive effect
Capacitive sensing
MEMS Technologies
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
Bulk micromachining
Surface micromachining
Hybrid integration
Concept of 3D accelerometer
Mounting of 3 1D accelerometers
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
3-axis sensitive mechanical structure
3 independent structures on the same die
Selected concept
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
3 independent capacitive micromachined sensors on a single die
~ 4mm
~ 11mmOut of the wafer plane sensitivity In plane sensitivity
Fabrication
Wafer level packaging concept
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
ASIC+MEMS Assembly
Hybrid integration in a ceramic carrier
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
MEMSASIC Read-out
Thank you for your attention
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest