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    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 1

    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    2. Review of Smart Materials andStructures (part 2): Piezoceramics

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    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 2

    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Piezoelectricity

    Piezoelectricity describes the phenomenon of generating an electric

    charge in a material when subjecting it to mechanical stress (direct

    effect), and conversely, generating a mechanical strain in response

    to an applied electric field (converse effect).

    PZT: It is an acronym for Lead Zirconate Titanate, which is a

    commonly used piezoelectric ceramic material.

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    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 3

    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Piezoelectric Ceramics

    Piezoelectric elementary cell

    (1) before poling

    (2) after poling

    Courtesy PI Polytec

    The piezo effect exhibited by natural materials such as

    quartz, tourmaline, Rochelle salt, etc. is very small.

    Polycrystalline ferroelectric ceramic materials such as

    BaTiO3 and Lead Zirconate Titanate (PZT) have beendeveloped with improved properties.

    Ferroelectric ceramics become piezo- electric when poled.

    PZT crystallites are centro-symmetric cubic (isotropic) before

    poling and after poling exhibit tetragonal symmetry(anisotropic structure) below the Curie temperature (beyond

    which the piezoelectricity is lost).

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    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Poling

    Electric dipoles in Weiss domains

    (1) unpoled ferroelectric ceramic, (2) during and

    (3) after poling (piezoelectric ceramic)

    Courtesy PI Polytec

    Charge separation between the positive and negative ions is the reason for electric dipole behavior.

    Groups of dipoles with parallel orientation are called Weiss domains.

    The Weiss domains are randomly

    oriented in the raw PZT material,

    before the poling treatment has beenfinished.

    During poling, an electric field (>

    2000 V/mm) is applied to the

    (heated) piezo ceramics.

    With the field applied, the materialexpands along the axis of the field

    and contracts perpendicular to that

    axis.

    The electric dipoles align and roughly

    stay in alignment upon cooling. Thematerial now has a remnant

    polarization (which can be degraded

    by exceeding the mechanical,

    thermal and electrical limits of the

    material).

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    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Poling (cont)

    When an electric voltage is applied to a poled piezoelectric

    material, the Weiss domains increase their alignment proportional

    to the voltage. The result is a change of the dimensions(expansion, contraction) of the PZT material.

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    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Direct Piezoelectric Effect

    - Sensors

    Poling axis

    Electrodes

    +

    _V

    Applied Force F

    _

    +

    V

    F

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    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 7

    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Inverse Piezoelectric Effect

    - Actuators

    Poling axis

    Electrodes

    +

    _V

    Resulting Strain S

    _

    +

    S

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    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    More about Lead Zirconate Titanate (PZT)

    Material PZTs offer the user several benefits and advantages over other motion

    techniques

    1. Repeatable nanometer and sub- nanometer sized steps at high frequency

    can be achieved with PZTs because they derive their motion through solidstate crystal effects. There are no moving parts (no "stick-slip" effect).

    2. PZTs can be designed to move heavy loads (several tons) or can be madeto move lighter loads at frequencies of several 10 kHz.

    3. PZTs act as capacitive loads and require very little power in staticoperation, simplifying power supply needs.

    4. PZTs require no maintenance because they are solid state and their motionis based on molecular effects within the ferroelectric crystals.

    With high-reliability PZT materials a strain on the order of 1/1000 (0.1%)can be achieved; this means that a I00 mm long PZT actuator can

    expand by 100 micrometers when the maximum allowable field is

    applied.

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    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Curie Temperature

    Above a certain temperature, called the Curie Point, a

    piezoelectric material has a symmetric cubic crystal structure

    and there is no net charge induced dipole

    Below this temperature, the crystal structure becomes

    tetragonal, the positive and negative charges no longer

    coincide, producing a dipole

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    Dr. G. Song, Associate Professor

    Hysteresis (Open Loop PZTs)

    Hysteresis curves of an open loop piezo

    actuator for various peak voltages

    Similar to electromagnetic devices, open loop piezo

    actuators exhibit hysteresis (they are also referred to

    as ferroelectric actuators). Hysteresis is based on

    crystalline polarization effects and molecular friction.

    The absolute displacement generated by an open loop

    PZT depends on the applied electric field and the

    piezo gain which is related to the remanent

    polarization. Since the remanent polarization andtherefore the piezo gain is affected by the electric field

    applied to the piezo, its deflection depends on whether

    it was previously operated at a higher or a lower

    voltage (and some other effects). Hysteresis is

    typically on the order of 10 to 15 % of the commanded

    motion.

    Hysteresis can be eliminated by closed loop PZT

    actuators.

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    Dr. G. Song, Associate Professor

    The process starts with mixing and ball milling of the raw materials. Next, the

    mixture is heated to 75% of the sintering temperature to accelerate reaction of

    the components. The polycrystalline, calcinated powder is ball milled again to

    increase its reactivity. Granulation with the binder is next to improve

    processing properties. After shaping and pressing the (green) ceramics is

    heated to 750 C to burn out the binder.

    The next phase is sintering at temperatures between 1250 C and 1350 C.

    The ceramic block is cut, ground, polished, lapped, etc., to the desired shape

    and tolerance. Electrodes are applied by sputtering or screen printing

    processes.

    The last step is the poling process which takes place in a heated oil bath at

    electrical fields up to several kV/mm.

    PZT Ceramics Manufacturing

    Process

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    Dr. G. Song, Associate Professor

    Multi-layer PZT Manufacturing

    ProcessMulti-layer PZT actuators require a different manufacturing process.

    After milling a slurry is prepared. A foil casting process allows layer thickness

    down to 20 m.

    Next, the sheets are screen printed and laminated. A compacting process

    increases density of the "green" ceramics and removes air trapped between the

    layers.

    The final steps are the binder burnout, sintering (co-firing) at temperatures

    below 1100 C, end termination and poling.

    All processes, especially the heating and sintering cycles must be controlled to

    very tight tolerances. The smallest change affects quality and properties of thePZT material..

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    Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Applications of Piezo Actuators

    Micro engraving systems

    Knife edge control in

    extrusion toolsStimulation of vibrations

    Piezo hammersHolography

    Shock wave generation

    Linear drivesMirror positioning

    Shock wave generationMicro pumpsLaser tuning

    Vibration cancellationAudiophysiological

    stimulatiuonNeedle valve actuationAdaptive & active optics

    Inspection systemsMicro dispensing

    devicesWear correctionFast mirror scanners

    MicrolithographyVibration

    cancellationCell penetrationTool adjustment

    Fiber optic alignment &

    switching

    Critical dimension

    measurementDisk spin standsMicro manipulation

    Out-of-roundness

    grinding, drilling, tuningAuto focus systems

    Wafer and mask

    positioningPole tip recessionGene technologyStructural deformationScanning microscopy

    Nano-metrologyMR head testingPatch-clamp drivesVibration cancellationImage stabilization

    MicroelectronicsDisk DriveLife Science,Medicine, Biology

    Precision Mechanics

    and Mechanical

    Engineering

    Optics, Photonics andMeasuring Technology

    14

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    Dr. G. Song, Associate Professor

    Applications: Mirror Positioning

    Active secondary tip/tilt platform for IRTF

    (Mauna Kea, Hawaii) with Hexapod 6-

    Degrees-Of-Freedom alignment system.

    Mirror diameter: 244 mm

    Tip/tilt range: 250 rad

    Resonant frequency: 490 Hz

    Courtesy PI Polytec

    C l f S S 2 R i f S M i l d S (P 2) 15

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    Dr. G. Song, Associate Professor

    Applications: A Micro Scanner Actuated by

    PZTs

    Source: IEEE

    2002 MEMS

    Conference

    C t l f S t St t 2 R i f S t M t i l d St t (P t 2) 16

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    C t l f S t St t 2 R i f S t M t i l d St t (P t 2) 17

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    Control of Smart Str ct res 2 Re ie of Smart Materials and Str ct res (Part 2) 18

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    Dr. G. Song, Associate Professor

    Applications: A Micro PZT

    Speaker

    Source: IEEE

    2002 MEMS

    Conference

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    Dr. G. Song, Associate Professor

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    3232Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Applications: Vibration Control using PZT Actuator in

    3-1 Mode

    Polingdirection

    1, X

    3, z 2, y

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    3333Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Applications: Active Control of a 11-

    Foot Composite I-Beam Using PZT (3-1 mode)

    Base to Cantilever the 11-Foot Composite I-Beam

    Piezo Patches as Sensors and Actuators

    PC with Real-time Control System

    Power Amplifier for Piezo Actuators

    Poling

    direction

    1, X

    3, z2, y

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    3434Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Applications: Active Vibration Control

    using PZT Stack Actuators (3-3 mode)

    LPACT

    52

    14

    BaseBay

    35

    27

    Piezo Stack

    Actuator

    Force Sensor

    Displacement to 90 m

    Pushing Forces to 1000 N

    Pulling Forces to 50 N

    Sub-msec Response

    Sub-nm Resolution

    Preloaded PZT Stack Actuator (P-841 from PI Polytec)

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    3535Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Applications: A Micro PZT Stack

    Actuator

    Source: IEEE2001 MEMS

    Conference

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    4444Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Ultrasonic Piezo Rotary Motor

    by Piezo System, Inc

    Applications: Ultrasonic Piezo Rotary

    MotorHow it works: Voltage excitation,

    tuned to the bending resonance of a

    piezo/metal ring, produces elastic

    bending oscillations which travel alongthe surface of the ring. This travelling

    wave induces rotational motion in the

    rotor pressed against it. When

    excitation is stopped, the shaft is held

    in place by friction force. By reversingelectrical excitation, the rotor turns in

    the opposite direction.

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    4545Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Definition of Directions

    1

    3

    2

    45

    6

    Poling axis

    along 3 or Z

    Because of the anisotropic nature of PZT

    ceramics, effects are dependent on direction

    (see figure).

    To identify directions the axes, termed 1, 2,and 3, are introduced (analogous to X, Y, Z

    of the classical right hand orthogonal axial

    set).

    The axes 4, 5 and 6 identify rotations

    (shear).

    The direction of polarization (3 axis) is

    established during the poling process by a

    strong electrical field applied between two

    electrodes.

    For actuator applications the piezo properties

    along the poling axis are most essential

    (largest deflection).

    z

    x

    y

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    4646Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Piezoceramic Coefficients

    Primary coefficients:

    The primary piezoceramic coefficients are the electromechanical coupling k

    the voltage constants g

    the strain constants d.

    High electromechanical coupling is desired for all applications.

    Actuators need high strain constants d.

    Sensors need high voltage constants g.

    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 47

    St i ffi i t St i

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    4747Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Strain coefficients or Strain

    constants dijdij: Strain coefficients [m/Vl:

    strain developed (m/m) per electric field applied (V/m) or (due to the sensor / actuator properties of

    PZT material).

    a measure of the strain produced by an applied electric field (The motor Effect )

    - OR

    Charge output coefficients IC/N]: charge density developed (C/m2) per given stress (N/m2)

    a measure of the short circuit charge density to the applied stress (The generator Effect)

    d31

    Indicates the electrodes areperpendicular to the 3 axes

    d33

    d15

    Indicates electrodes are perpendicular

    to the 1 axes

    Indicates that the piezoelectrically

    induced strain or the applied stress is

    shear around the 2 axes

    d =Strain

    Applied field

    Typical units:

    Indicates that the piezoelectrically induced

    strain or the applied stress is in the 1 direction

    Indicates the electrodes areperpendicular to the 3 axes

    Indicates that the piezoelectrically

    induced strain or the applied stress

    is shear around the 3 direction

    =Short ct charge/electrode A

    Applied stress

    Coulomb/m2

    Newton/m2

    The first subscript gives the direction of the excitation, the seconddescribes the direction of the system response.

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    4848Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Voltage coefficients or field output

    coefficients

    g31

    Indicates the electrodes are

    perpendicular to the 3 axes

    g33

    g15

    Indicates the electrodes are

    perpendicular to the 1 axes

    Indicates that the piezoelectrically

    induced strain or the applied stress is

    shear around the 2 axes

    g =Strain developed

    Applied charge

    density

    Typical units:

    Indicates that the piezoelectrically induced

    strain or the applied stress is shear around the

    1 axes

    Indicates the electrodes are

    perpendicular to the 3 axes

    Indicates that the piezoelectrically

    induced strain or the applied stress

    is shear around the 3 axes

    =Open ct electric field

    Applied stress

    V/m

    Newton/m2

    gij: Voltage coefficients or field output coefficients [Vm/N]: open circuit electric field developed (V/m) per applied mechanical stress (N/m2).

    a measure of the electric field produced in the material by an applied mechanical

    stress.

    or (due to the sensor / actuator properties of PZT material) strain developed (m/m) per

    applied charge density (C/m2).

    a measure of the strain developed by an applied electric field.

    The first subscript gives the direction of the excitation, thesecond describes the direction of the system response.

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    4949Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Coupling coefficients

    K31

    Indicates the electrodes are

    perpendicular to the 3 axes

    Electromechanical coupling

    Indicates the stress/strain is in the 1 directionKp

    Indicates the electrodes areperpendicular to the 3 axes and

    stress/strain is equal in all directions

    perpendicular to the 3 axes

    Electromechanical coupling

    Kr

    Indicates that ceramic is disk shaped,

    the electrodes are perpendicular to the 3

    axes and the stress/ strain is radial

    Electromechanical coupling

    K2 =

    Electrical energy converted tomechanical energy

    Input electrical energy

    Mechanical energy converted to

    electrical energy

    Input mechanical energy

    kij : Coupling coefficients [no dimensions].

    The coefficients are energy ratios describing the conversion from mechanical to electrical

    energy or vice versa.

    k2 is the ratio of energy stored (mechanical or electrical) to energy (mechanical or electrical)

    applied. Quantifies how much energy remains in the material rather than being converted into

    another form. Typical values range from 0.40 to 0.70.

    The first subscript gives the direction of the excitation, the second

    describes the direction of the system response.

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    5050Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Elastic Compliance Constants Sij

    Elastic compliance coefficient is ratio of strain in i-indirection due to stress in the j-

    direction, provided there is no change of stress in other two directions.

    Direct stresses and strains are denoted by indices from 1 to 3 and shears are denoted by

    indices from 4 to 6.

    For example, S12 denotes direct strain in direction-1 due to direct stress in direction-2 and

    stresses in directions 1 and 3 are unchanged.

    In a similar way, S55 denotes shear strain around the axis-2 due to shear stress around the

    axis-2.

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    5151Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    If the electric field across the piezoelectric element is held constant, such as the case

    with short circuiting the electrodes, the properties are denoted by superscript E.

    If the electric charge density is held constant, such as the case with an open circuit at the

    electrodes, it is denoted by superscript 'D.'

    strainSij= stress

    meter/meter per Newton/square meter, square meter/Newton

    More about Elastic Compliance

    Constants Sij

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    5252Department of Mechanical Engineering

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    Other coefficientsOther important parameters are:

    Young's modulus Y (describing the elastic properties of the material)

    Because mechanical stressing of the ceramic produces an electrical response which opposes the

    resultant strain, the effective Young's Modulus with electrodes short circuited is lower than with the

    electrodes open circuited. In addition, the stiffness is different in the 3 direction from that in the 1 or

    2 direction. Therefore, in expressing such quantities both direction and electrical conditions must

    be specified.

    The relative dielectric coefficients (permittivity)

    The dielectric constants

    The relative dielectric constant is the ratio of the permittivity of the material, to

    the permittivity of free space, in the unconstrained condition, i.e., well below the

    mechanical resonance of the part.

    c (describing the capacitance of the material)

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    5353Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    More Definitions

    Definitions:

    S = strain (constant if mechanically clamped)

    T = stress (constant if not clamped)

    E = electric field (constant for short circuit)

    D = electrical displacement (constant for open circuit)

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    5454Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    PZT-5H characteristicsMorgan Matroc Inc

    ~ 5.5 kV/cmDepoling field (DC)

    ~ 20 kV/cmDielectric breakdown

    ~ 12 kV/cmPoling field

    ~ 11,000 psiStatic tensile strength

    > 75,000 psiCompressive strength

    3400K33

    3130K11

    193 deg. CCurie point

    7500 kg/m3

    -8.4510-12 m2/NS13E

    -4.7810-12 m2/NS12E

    43.510-12

    m2

    /NS44E

    20.710-12 m2/NS33E

    16.510-12 m2/NS11E

    74110-12 m/Vd15

    59310-12 m/Vd33

    -27410-12 m/Vd31

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    5555Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Major PZT manufacturers and PZT name

    convention

    Sensor Morgan-

    Technology Matroc

    BM300 - - - - -

    BM400 5400 EC-64 PZT-4 Type-I

    BM500 5500 EC-65 - PZT-5A Type-II

    BM527 5600 EC-70 PZT-5J Type-VBM532 5700 EC-76 - PZT-5H Type-VI

    BM740 PZT-7A

    BM800 5800 EC-69 - PZT-8 Type-III

    BM900 K81

    BM920 - - K83 - -BM940 K85

    Channel EDO Keramos Navy

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    5656Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Different PZTs and Applications

    - BM300 BM400 BM500 BM527 BM532 BM740 BM800 BM900 BM920 BM940

    Sonar Projectors - X - - - -- X - - -

    Hydrophones X X X X X - X - X -

    Depth Sounders - X X - - X X - - -

    Communication - X X X X X X - - -

    Sonobuoys X - X X X - - - X -

    Linear Arrays X X X X X - - - X -

    Level, Flow - X X X X X X - - -

    Flaw Detection (NDE) X X X - X X X X X X

    Thickness - X X - - X X X X X

    Accelerometers - X X X X X X X - X

    Actuators - X X - X - X - - -

    NDT - - - - - X - X X X

    Transducers X X X - X X X X X -

    Sterilizers - X - - - - X - - -

    Cleaners - X - - - - X - - -

    Degreasers - X - - - - X - - -

    Welders - - - - - - - - - -

    Alarms - X - - - - X - - -

    - BM300 BM400 BM500 BM527 BM532 BM740 BM800 BM900 BM920 BM940

    Underwater

    Measurement

    Medical

    Industrial

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    5757Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Electric behavior of an unstressed medium under the influence of an electric

    field Eis

    D = E

    where is the permittivity.

    The mechanical behavior (forE= 0) is

    S = s T

    where s is the compliance.

    Basic Relationships

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    5858Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    TdED

    dETsS

    'T

    E

    +=

    +=

    S = Strain (6x1)

    T= Stress (6x1)

    E= Electric field (3x1)

    SE = Compliance (zero field) (6x6)

    d= Piezoelectric coefficient (6x3)

    D = Electric displacement (3x1)

    T= Dielectric constant (zero stress) (3x3)

    Input Voltage

    Micro-strain

    0

    Constitutive Equation

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    5959Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    More about PZT Properties

    PZT materials exhibit most of the characteristics of ceramics, namely a high

    elastic modulus, brittleness and low tensile strength.

    The material itself is mechanically isotropic, and by virtue of the poling

    process, is assumed transversely isotropic in the plane normal to the poling

    direction as far as piezoelectric properties are concerned.

    This means that for PZT materials,

    s11 = s22, s13 = s23, s44 = s55

    d31 = d32 and d15 = d24 .

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    6060Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Constitutive Equation

    Poling

    direction

    1, X

    3, z2, y

    1 11 12 13 31

    2 12 22 13 31

    3 13 13 33 33

    23 44 15

    31 44 15

    12 66

    1 15 11

    2 15 11

    3 31 31 33 33

    0 0 0 0 0

    0 0 0 0 0

    0 0 0 0 0

    0 0 0 0 0 0 0

    0 0 0 0 0 0 00 0 0 0 0 0 0 0

    0 0 0 0 0 0 0

    0 0 0 0 0 0 0

    0 0 0 0 0

    S S S d

    S S S d

    S S S d

    S d

    S dS

    D d

    D d

    D d d d

    =

    1

    2

    3

    23

    31

    12

    1

    2

    3

    E

    EdD

    Eds '

    +=

    +=

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    6161Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Piezo Sensor Equation

    =

    =

    12

    31

    23

    3

    2

    1

    6

    5

    4

    3

    2

    1

    The stress vector is written as

    =

    6

    5

    4

    3

    2

    1

    333231

    24

    15

    3

    2

    1

    000ddd00d000

    0d0000

    DD

    D

    This equation summarizes the principle of operation of piezoelectric

    sensors. A stress field causes an electric displacement to be generated as a

    result of the direct piezoelectric effect.

    Note that shear stress in the 1-2 plane, 6 is not capable of generating any

    electric response.

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    6363Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Piezo Actuator Equation

    11 12 131 1 31

    12 11 132 2 31

    13 13 333 3 33

    4423 23 15

    4431 31 15

    6612 12

    0 0 0 0 0

    0 0 0 0 0

    0 0 0 0 0

    0 0 0 0 0 0 0

    0 0 0 0 0 0 0

    0 0 0 0 0 0 0 0

    S S S d

    S S S d

    S S S d

    S d

    S d

    S

    = +

    1

    2

    1

    3

    2

    3

    0

    0

    0

    E

    E TE

    +

    thermal coefficients of expansion, 1/K

    temperature change, K

    3 2

    1

    In a plane perpendicular to the piezo-polarization, it has isotropic

    properties, i.e., transversely isotropic material in the plane 1-2. For

    orthotropic material, there is no temperature shear strain. However, there

    is a shear strain induced due to electrical field El and E2.

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    6464Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Free StrainsFor piezoceramic materials:

    Actuation Strain

    =

    3

    2

    1

    15

    15

    33

    31

    31

    E

    EE

    000

    00d

    0d0

    d00

    d00

    d00

    These are called free strains

    =

    0

    Ed

    Ed

    EdEd

    Ed

    115

    215

    331

    331

    331

    6

    5

    4

    3

    2

    1

    where d33, d3l, and dl5 are piezoelectric strain

    coefficients.

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    6565Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    PZT Actuator: Longitudinal (d33 mode)

    Motor

    d33 mode

    d31 mode

    Poling

    direction

    1, X

    3, z2, y

    PZT Actuator: Transverse (d31 mode) Motor

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    6666Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    PZT Actuator: Double-layer

    Extension Mode

    PZT Actuator: Double-layer Bending Mode

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    6767Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    PZT Actuator: Multi-layer

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    6868Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Lateral (31) Mode Piezoelectric

    Sensor

    l

    t

    w

    Structure

    1

    2

    3

    P

    V1

    +

    Top & Bottom Surfaces

    Electroplated

    Principle: Bond or embed a Piezo wafer to a surface

    and monitor electric potential on electrodes. Piezo ispoled perpendicular to plated surfaces

    Piezoelectric sensors produce a charge when strainedlaterally.

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    6969Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Axial Force Sensor

    tp1

    2

    3

    Polarity

    V

    F

    Principle: Sense dynamic (AC) load in the poling direction.Sensor is placed in the series load path. If a parallel load path

    exists, make sensor as possible to attract a majority of the load.

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    7070Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    PZT Shear Mode Sensor

    p p

    Strain

    P

    P

    V1

    +

    V2

    +

    Strain Direction

    Electroplated

    Top & Bottom

    Part of Structure

    Being Monitored

    Bridge

    3

    2

    1

    Principle: Two PZTs poled

    transverse to their electrodes are

    bonded to a surface and connected

    with a bridge. Longitudinal strain

    induces shear in the PZTs and a

    Voltage through the d15 coefficient.

    Kistler Instrument A.G. of Switzerland has a patent on the basic idea.

    A Similar approach (shear mode) is employed in most accelerometers and load

    cells since there is much lower pyroelectric sensitivity and hence better

    coherence at low frequency.

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    7171Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    A Specific Example

    Voltage applied in the 3-direction and the Deflection Out is a 3D effect

    For an element of thickness t, length L and width w, an applied

    voltage Vproduces the following change in shape:

    Vdtt

    LVdL

    t

    wVdw 33

    3131 ,, ===

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    7373Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Voltage-Force Relationship

    ELV = AFT=

    TgE 33=

    C

    FdF

    A

    LgV 3333 ==

    25 N generates about 100 volts, about the force generated from

    squeezing your hand

    and

    C - Capacitance

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    7474Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Displacement-Voltage Relation

    ===L

    LLVdEdS 3333

    VdL 33=

    16kV or E = 800 V/m yields L = 10 micro meters.

    All the above is static analysis

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    7575Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Finite Element Modeling of Piezoceramic

    Smart Structures

    Euler-Bernoulli Model

    No axial load

    Shear deformation can be neglected

    Uniform along its length

    Predicts the correct curvature of actuator and base over the entire

    contact area

    Considers the actuator as a layer Treating bimorphs, the correct neutral axis is used which is the

    neutral axis of the layered system

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    7676Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    tp

    z

    x

    h

    tp

    wp

    1

    W1W(z) W2

    y

    x

    2

    yz

    Poling

    direction 1, X

    3, z2, y

    The Piezo Element Rigidly Bonded to a

    Structure

    wp

    h

    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 77

    Z (W)

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    7777Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    X (u)

    Z (W)

    We have , where u is the displacement in x direction.

    From the deformed configuration shown in the upper figure, we can get

    Then,

    dx

    dux =

    dx

    dW

    dx

    dWz

    dxdWzu =

    2

    2

    dx

    Wdz

    dx

    dux ==

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    7878Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    In terms of nodal displacements, W1, W2, 1 and 2 the bendingdisplacement is given by

    2

    32

    2

    32

    1

    32

    1

    32

    23

    2231)(

    +

    +

    +

    +

    +

    +

    =

    hh

    x

    h

    xW

    h

    x

    h

    x

    hh

    x

    h

    x

    h

    xW

    h

    x

    h

    xxW

    (1)

    Let q1 = W1, q2 = 1, q3 = W2, q4 = 2, then

    )()()(4

    1

    tqxxW ii

    i=

    =

    (2)

    (3)

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    7979Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    where

    hh

    x

    h

    xx

    h

    x

    h

    xx

    hh

    x

    h

    x

    h

    xx

    h

    x

    h

    xx

    +

    =

    +

    =

    +

    =

    +

    =

    32

    4

    32

    3

    32

    2

    32

    1

    )(

    23)(

    2)(

    231)(

    (4)

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    8080Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    The governing equations of motion for smart structures are

    based upon the electromechanical coupling effect. The

    piezoceramic material shown in the figure satisfy the following

    equation:

    =

    1

    3

    1131

    313

    1

    3

    T

    E

    Sd

    d

    S

    DE

    T

    (5)

    Where D3 represents the electric displacement, charge per

    unit area, E3 represents the applied field intensity, S1represents the strain, T1 is the stress, is the permitivity of

    the piezoelectric material, d31 is the piezoelectric charge

    coefficient and is the elastic constant for the

    piezoelectric material.

    T

    3

    p

    E ES /111

    =

    Poling

    direction 1, X

    3, z2, y

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    8282Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    +

    =

    h tT

    p

    p

    dxdzS

    E

    T

    DW

    0 1

    3

    1

    3

    10

    01

    2

    1(9)

    The strain S1 can be written as

    2

    2

    1x

    WzS x

    == (10)

    Substituting Eq. (6) into Eq. (9), we get

    +

    +

    +=

    =

    ht

    xpxpp

    T

    p

    h t

    xpp

    pp

    TT

    x

    pp

    p

    p

    dxdzEEEdEEdW

    dxdzE

    EEd

    EdEdEWU

    0

    2

    331

    2

    3

    2

    313

    0

    3

    31

    31

    2

    3133

    ]2)[(2

    1

    2

    1

    (11)

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    8383Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    By using the expression in Eq. (10), we get

    +

    +=

    h t

    ppp

    T

    pp

    p

    dxdz

    x

    WzE

    x

    WzEEdEEdWU

    0

    2

    2

    22

    2

    2

    331

    2

    3

    2

    313 ]2)[(

    2

    1

    (12)

    Substituting W(x) from Eq. (3), we get

    qkqbeqeU pTT

    p2

    1

    2

    1 2 = (13)

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    8484Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    where

    ( )

    dxdx

    d

    dx

    dttEtWk

    dxdx

    dtWEdb

    Ete

    Edt

    hW

    j

    h

    ip

    ppppijp

    h

    ip

    ppi

    p

    p

    T

    p

    p

    2

    2

    02

    22

    2

    0

    2

    2

    31

    3

    2

    313

    3][

    2

    ++=

    +=

    =

    =

    (14)

    By substituting i from Eq. (4), we get

    +=

    +=

    ==

    2

    2

    0

    314

    312

    31

    p

    pp

    p

    pp

    t

    WEdb

    tWEdb

    bb

    (15)

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    8585Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Stiffness Matrices:

    Define

    ++=

    3

    2

    2 p

    pppp

    ttEtWk

    23424

    223214

    313212

    44333

    2

    2

    22

    33

    2

    2

    11

    6,

    2

    6,

    6

    12,

    6

    4,

    12

    44

    3

    12123

    h

    kk

    h

    kk

    h

    kk

    h

    kk

    h

    kk

    h

    kk

    h

    kk

    h

    kk

    h

    k

    h

    ttEtWk

    hk

    httEtWk

    p

    pppp

    p

    pppp

    ==

    ==

    ==

    ==

    =

    ++=

    =

    ++=

    (16)

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    8686Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    By including the beam element for the elastic energy, we can

    rewrite Eq. (13) as

    kqqBeqeU TT 2

    1

    2

    12

    =

    where

    T

    pb bbbbBkkk ],,,[; 4321=+=

    (17)

    (18)

    where

    kb = stiffness matrix for the structure

    kp = stiffness matrix for the piezoceramic member

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    8787Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    The kinetic energy of piezoceramic can be written as

    dxwTh

    pp

    2

    02

    1

    = (19)

    where p is mass per unit length for the piezoceramics. Thekinetic energy for the piezoceramic element can be written as

    = qMqT pT

    p2

    1

    where

    [ ] =h

    jipijpdxxxm

    0

    )()( (20)

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    8888Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    The total kinetic energy is then given by

    = qMqTT

    2

    1

    where M = Mb + Mp

    Mb = mass matrix for beamMp = mass matrix for piezoceramic

    The Lagrangian function, L , is given by

    L = T U

    kqqBeqeqMq TTp

    T

    2

    1

    2

    1

    2

    1 2 +=

    The Lagrangian equation is

    0=

    kk

    q

    L

    q

    L

    dt

    d

    (21)

    (22)

    (23)

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    8989Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Substituting Eq. (22) into Eq. (23) and using q as generalized

    coordinates, we get

    aBeqkqm =+

    ][][where

    ][][][

    ][][][

    pb

    pb

    kkk

    mmm

    +=

    +=

    and ea is applied voltage.

    Eq. (24) represents the equation for the actuator.

    (24)

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    9090Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Taking q as a generalized coordinate, the equation for

    sensor voltage output in terms of q is

    qBe Ts

    = (25)

    Eq. (25) represents the voltage output from a piezoceramicsensor. Up to now, we have considered only an element.

    The equation for the global form is determined by combining

    the equations.

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    9191Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Example

    Let us consider a system as shown in the following figure.

    1 2 3 4

    Actuator Sensor

    11,W

    22,W 33 ,W 44 ,W 55 ,W

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    element and is used as a sensor.

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    9292Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

    Let us assume that

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    9393Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

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    9494Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

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    9595Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

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    9696Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

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    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 97

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    9797Department of Mechanical Engineering

    Dr. G. Song, Associate Professor

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    Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 98

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