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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 1
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
2. Review of Smart Materials andStructures (part 2): Piezoceramics
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 2
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezoelectricity
Piezoelectricity describes the phenomenon of generating an electric
charge in a material when subjecting it to mechanical stress (direct
effect), and conversely, generating a mechanical strain in response
to an applied electric field (converse effect).
PZT: It is an acronym for Lead Zirconate Titanate, which is a
commonly used piezoelectric ceramic material.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 3
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezoelectric Ceramics
Piezoelectric elementary cell
(1) before poling
(2) after poling
Courtesy PI Polytec
The piezo effect exhibited by natural materials such as
quartz, tourmaline, Rochelle salt, etc. is very small.
Polycrystalline ferroelectric ceramic materials such as
BaTiO3 and Lead Zirconate Titanate (PZT) have beendeveloped with improved properties.
Ferroelectric ceramics become piezo- electric when poled.
PZT crystallites are centro-symmetric cubic (isotropic) before
poling and after poling exhibit tetragonal symmetry(anisotropic structure) below the Curie temperature (beyond
which the piezoelectricity is lost).
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Poling
Electric dipoles in Weiss domains
(1) unpoled ferroelectric ceramic, (2) during and
(3) after poling (piezoelectric ceramic)
Courtesy PI Polytec
Charge separation between the positive and negative ions is the reason for electric dipole behavior.
Groups of dipoles with parallel orientation are called Weiss domains.
The Weiss domains are randomly
oriented in the raw PZT material,
before the poling treatment has beenfinished.
During poling, an electric field (>
2000 V/mm) is applied to the
(heated) piezo ceramics.
With the field applied, the materialexpands along the axis of the field
and contracts perpendicular to that
axis.
The electric dipoles align and roughly
stay in alignment upon cooling. Thematerial now has a remnant
polarization (which can be degraded
by exceeding the mechanical,
thermal and electrical limits of the
material).
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Poling (cont)
When an electric voltage is applied to a poled piezoelectric
material, the Weiss domains increase their alignment proportional
to the voltage. The result is a change of the dimensions(expansion, contraction) of the PZT material.
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Direct Piezoelectric Effect
- Sensors
Poling axis
Electrodes
+
_V
Applied Force F
_
+
V
F
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 7
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Inverse Piezoelectric Effect
- Actuators
Poling axis
Electrodes
+
_V
Resulting Strain S
_
+
S
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
More about Lead Zirconate Titanate (PZT)
Material PZTs offer the user several benefits and advantages over other motion
techniques
1. Repeatable nanometer and sub- nanometer sized steps at high frequency
can be achieved with PZTs because they derive their motion through solidstate crystal effects. There are no moving parts (no "stick-slip" effect).
2. PZTs can be designed to move heavy loads (several tons) or can be madeto move lighter loads at frequencies of several 10 kHz.
3. PZTs act as capacitive loads and require very little power in staticoperation, simplifying power supply needs.
4. PZTs require no maintenance because they are solid state and their motionis based on molecular effects within the ferroelectric crystals.
With high-reliability PZT materials a strain on the order of 1/1000 (0.1%)can be achieved; this means that a I00 mm long PZT actuator can
expand by 100 micrometers when the maximum allowable field is
applied.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 9
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Curie Temperature
Above a certain temperature, called the Curie Point, a
piezoelectric material has a symmetric cubic crystal structure
and there is no net charge induced dipole
Below this temperature, the crystal structure becomes
tetragonal, the positive and negative charges no longer
coincide, producing a dipole
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Hysteresis (Open Loop PZTs)
Hysteresis curves of an open loop piezo
actuator for various peak voltages
Similar to electromagnetic devices, open loop piezo
actuators exhibit hysteresis (they are also referred to
as ferroelectric actuators). Hysteresis is based on
crystalline polarization effects and molecular friction.
The absolute displacement generated by an open loop
PZT depends on the applied electric field and the
piezo gain which is related to the remanent
polarization. Since the remanent polarization andtherefore the piezo gain is affected by the electric field
applied to the piezo, its deflection depends on whether
it was previously operated at a higher or a lower
voltage (and some other effects). Hysteresis is
typically on the order of 10 to 15 % of the commanded
motion.
Hysteresis can be eliminated by closed loop PZT
actuators.
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The process starts with mixing and ball milling of the raw materials. Next, the
mixture is heated to 75% of the sintering temperature to accelerate reaction of
the components. The polycrystalline, calcinated powder is ball milled again to
increase its reactivity. Granulation with the binder is next to improve
processing properties. After shaping and pressing the (green) ceramics is
heated to 750 C to burn out the binder.
The next phase is sintering at temperatures between 1250 C and 1350 C.
The ceramic block is cut, ground, polished, lapped, etc., to the desired shape
and tolerance. Electrodes are applied by sputtering or screen printing
processes.
The last step is the poling process which takes place in a heated oil bath at
electrical fields up to several kV/mm.
PZT Ceramics Manufacturing
Process
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Multi-layer PZT Manufacturing
ProcessMulti-layer PZT actuators require a different manufacturing process.
After milling a slurry is prepared. A foil casting process allows layer thickness
down to 20 m.
Next, the sheets are screen printed and laminated. A compacting process
increases density of the "green" ceramics and removes air trapped between the
layers.
The final steps are the binder burnout, sintering (co-firing) at temperatures
below 1100 C, end termination and poling.
All processes, especially the heating and sintering cycles must be controlled to
very tight tolerances. The smallest change affects quality and properties of thePZT material..
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications of Piezo Actuators
Micro engraving systems
Knife edge control in
extrusion toolsStimulation of vibrations
Piezo hammersHolography
Shock wave generation
Linear drivesMirror positioning
Shock wave generationMicro pumpsLaser tuning
Vibration cancellationAudiophysiological
stimulatiuonNeedle valve actuationAdaptive & active optics
Inspection systemsMicro dispensing
devicesWear correctionFast mirror scanners
MicrolithographyVibration
cancellationCell penetrationTool adjustment
Fiber optic alignment &
switching
Critical dimension
measurementDisk spin standsMicro manipulation
Out-of-roundness
grinding, drilling, tuningAuto focus systems
Wafer and mask
positioningPole tip recessionGene technologyStructural deformationScanning microscopy
Nano-metrologyMR head testingPatch-clamp drivesVibration cancellationImage stabilization
MicroelectronicsDisk DriveLife Science,Medicine, Biology
Precision Mechanics
and Mechanical
Engineering
Optics, Photonics andMeasuring Technology
14
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: Mirror Positioning
Active secondary tip/tilt platform for IRTF
(Mauna Kea, Hawaii) with Hexapod 6-
Degrees-Of-Freedom alignment system.
Mirror diameter: 244 mm
Tip/tilt range: 250 rad
Resonant frequency: 490 Hz
Courtesy PI Polytec
C l f S S 2 R i f S M i l d S (P 2) 15
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: A Micro Scanner Actuated by
PZTs
Source: IEEE
2002 MEMS
Conference
C t l f S t St t 2 R i f S t M t i l d St t (P t 2) 16
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
C t l f S t St t 2 R i f S t M t i l d St t (P t 2) 17
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Control of Smart Str ct res 2 Re ie of Smart Materials and Str ct res (Part 2) 18
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: A Micro PZT
Speaker
Source: IEEE
2002 MEMS
Conference
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Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
Applications: Vibration Control using PZT Actuator in
3-1 Mode
Polingdirection
1, X
3, z 2, y
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3333Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: Active Control of a 11-
Foot Composite I-Beam Using PZT (3-1 mode)
Base to Cantilever the 11-Foot Composite I-Beam
Piezo Patches as Sensors and Actuators
PC with Real-time Control System
Power Amplifier for Piezo Actuators
Poling
direction
1, X
3, z2, y
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3434Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: Active Vibration Control
using PZT Stack Actuators (3-3 mode)
LPACT
52
14
BaseBay
35
27
Piezo Stack
Actuator
Force Sensor
Displacement to 90 m
Pushing Forces to 1000 N
Pulling Forces to 50 N
Sub-msec Response
Sub-nm Resolution
Preloaded PZT Stack Actuator (P-841 from PI Polytec)
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3535Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: A Micro PZT Stack
Actuator
Source: IEEE2001 MEMS
Conference
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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Dr. G. Song, Associate Professor
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4444Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Ultrasonic Piezo Rotary Motor
by Piezo System, Inc
Applications: Ultrasonic Piezo Rotary
MotorHow it works: Voltage excitation,
tuned to the bending resonance of a
piezo/metal ring, produces elastic
bending oscillations which travel alongthe surface of the ring. This travelling
wave induces rotational motion in the
rotor pressed against it. When
excitation is stopped, the shaft is held
in place by friction force. By reversingelectrical excitation, the rotor turns in
the opposite direction.
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4545Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Definition of Directions
1
3
2
45
6
Poling axis
along 3 or Z
Because of the anisotropic nature of PZT
ceramics, effects are dependent on direction
(see figure).
To identify directions the axes, termed 1, 2,and 3, are introduced (analogous to X, Y, Z
of the classical right hand orthogonal axial
set).
The axes 4, 5 and 6 identify rotations
(shear).
The direction of polarization (3 axis) is
established during the poling process by a
strong electrical field applied between two
electrodes.
For actuator applications the piezo properties
along the poling axis are most essential
(largest deflection).
z
x
y
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4646Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezoceramic Coefficients
Primary coefficients:
The primary piezoceramic coefficients are the electromechanical coupling k
the voltage constants g
the strain constants d.
High electromechanical coupling is desired for all applications.
Actuators need high strain constants d.
Sensors need high voltage constants g.
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 47
St i ffi i t St i
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4747Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Strain coefficients or Strain
constants dijdij: Strain coefficients [m/Vl:
strain developed (m/m) per electric field applied (V/m) or (due to the sensor / actuator properties of
PZT material).
a measure of the strain produced by an applied electric field (The motor Effect )
- OR
Charge output coefficients IC/N]: charge density developed (C/m2) per given stress (N/m2)
a measure of the short circuit charge density to the applied stress (The generator Effect)
d31
Indicates the electrodes areperpendicular to the 3 axes
d33
d15
Indicates electrodes are perpendicular
to the 1 axes
Indicates that the piezoelectrically
induced strain or the applied stress is
shear around the 2 axes
d =Strain
Applied field
Typical units:
Indicates that the piezoelectrically induced
strain or the applied stress is in the 1 direction
Indicates the electrodes areperpendicular to the 3 axes
Indicates that the piezoelectrically
induced strain or the applied stress
is shear around the 3 direction
=Short ct charge/electrode A
Applied stress
Coulomb/m2
Newton/m2
The first subscript gives the direction of the excitation, the seconddescribes the direction of the system response.
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4848Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Voltage coefficients or field output
coefficients
g31
Indicates the electrodes are
perpendicular to the 3 axes
g33
g15
Indicates the electrodes are
perpendicular to the 1 axes
Indicates that the piezoelectrically
induced strain or the applied stress is
shear around the 2 axes
g =Strain developed
Applied charge
density
Typical units:
Indicates that the piezoelectrically induced
strain or the applied stress is shear around the
1 axes
Indicates the electrodes are
perpendicular to the 3 axes
Indicates that the piezoelectrically
induced strain or the applied stress
is shear around the 3 axes
=Open ct electric field
Applied stress
V/m
Newton/m2
gij: Voltage coefficients or field output coefficients [Vm/N]: open circuit electric field developed (V/m) per applied mechanical stress (N/m2).
a measure of the electric field produced in the material by an applied mechanical
stress.
or (due to the sensor / actuator properties of PZT material) strain developed (m/m) per
applied charge density (C/m2).
a measure of the strain developed by an applied electric field.
The first subscript gives the direction of the excitation, thesecond describes the direction of the system response.
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4949Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Coupling coefficients
K31
Indicates the electrodes are
perpendicular to the 3 axes
Electromechanical coupling
Indicates the stress/strain is in the 1 directionKp
Indicates the electrodes areperpendicular to the 3 axes and
stress/strain is equal in all directions
perpendicular to the 3 axes
Electromechanical coupling
Kr
Indicates that ceramic is disk shaped,
the electrodes are perpendicular to the 3
axes and the stress/ strain is radial
Electromechanical coupling
K2 =
Electrical energy converted tomechanical energy
Input electrical energy
Mechanical energy converted to
electrical energy
Input mechanical energy
kij : Coupling coefficients [no dimensions].
The coefficients are energy ratios describing the conversion from mechanical to electrical
energy or vice versa.
k2 is the ratio of energy stored (mechanical or electrical) to energy (mechanical or electrical)
applied. Quantifies how much energy remains in the material rather than being converted into
another form. Typical values range from 0.40 to 0.70.
The first subscript gives the direction of the excitation, the second
describes the direction of the system response.
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5050Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Elastic Compliance Constants Sij
Elastic compliance coefficient is ratio of strain in i-indirection due to stress in the j-
direction, provided there is no change of stress in other two directions.
Direct stresses and strains are denoted by indices from 1 to 3 and shears are denoted by
indices from 4 to 6.
For example, S12 denotes direct strain in direction-1 due to direct stress in direction-2 and
stresses in directions 1 and 3 are unchanged.
In a similar way, S55 denotes shear strain around the axis-2 due to shear stress around the
axis-2.
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5151Department of Mechanical Engineering
Dr. G. Song, Associate Professor
If the electric field across the piezoelectric element is held constant, such as the case
with short circuiting the electrodes, the properties are denoted by superscript E.
If the electric charge density is held constant, such as the case with an open circuit at the
electrodes, it is denoted by superscript 'D.'
strainSij= stress
meter/meter per Newton/square meter, square meter/Newton
More about Elastic Compliance
Constants Sij
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5252Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Other coefficientsOther important parameters are:
Young's modulus Y (describing the elastic properties of the material)
Because mechanical stressing of the ceramic produces an electrical response which opposes the
resultant strain, the effective Young's Modulus with electrodes short circuited is lower than with the
electrodes open circuited. In addition, the stiffness is different in the 3 direction from that in the 1 or
2 direction. Therefore, in expressing such quantities both direction and electrical conditions must
be specified.
The relative dielectric coefficients (permittivity)
The dielectric constants
The relative dielectric constant is the ratio of the permittivity of the material, to
the permittivity of free space, in the unconstrained condition, i.e., well below the
mechanical resonance of the part.
c (describing the capacitance of the material)
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5353Department of Mechanical Engineering
Dr. G. Song, Associate Professor
More Definitions
Definitions:
S = strain (constant if mechanically clamped)
T = stress (constant if not clamped)
E = electric field (constant for short circuit)
D = electrical displacement (constant for open circuit)
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5454Department of Mechanical Engineering
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PZT-5H characteristicsMorgan Matroc Inc
~ 5.5 kV/cmDepoling field (DC)
~ 20 kV/cmDielectric breakdown
~ 12 kV/cmPoling field
~ 11,000 psiStatic tensile strength
> 75,000 psiCompressive strength
3400K33
3130K11
193 deg. CCurie point
7500 kg/m3
-8.4510-12 m2/NS13E
-4.7810-12 m2/NS12E
43.510-12
m2
/NS44E
20.710-12 m2/NS33E
16.510-12 m2/NS11E
74110-12 m/Vd15
59310-12 m/Vd33
-27410-12 m/Vd31
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5555Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Major PZT manufacturers and PZT name
convention
Sensor Morgan-
Technology Matroc
BM300 - - - - -
BM400 5400 EC-64 PZT-4 Type-I
BM500 5500 EC-65 - PZT-5A Type-II
BM527 5600 EC-70 PZT-5J Type-VBM532 5700 EC-76 - PZT-5H Type-VI
BM740 PZT-7A
BM800 5800 EC-69 - PZT-8 Type-III
BM900 K81
BM920 - - K83 - -BM940 K85
Channel EDO Keramos Navy
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5656Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Different PZTs and Applications
- BM300 BM400 BM500 BM527 BM532 BM740 BM800 BM900 BM920 BM940
Sonar Projectors - X - - - -- X - - -
Hydrophones X X X X X - X - X -
Depth Sounders - X X - - X X - - -
Communication - X X X X X X - - -
Sonobuoys X - X X X - - - X -
Linear Arrays X X X X X - - - X -
Level, Flow - X X X X X X - - -
Flaw Detection (NDE) X X X - X X X X X X
Thickness - X X - - X X X X X
Accelerometers - X X X X X X X - X
Actuators - X X - X - X - - -
NDT - - - - - X - X X X
Transducers X X X - X X X X X -
Sterilizers - X - - - - X - - -
Cleaners - X - - - - X - - -
Degreasers - X - - - - X - - -
Welders - - - - - - - - - -
Alarms - X - - - - X - - -
- BM300 BM400 BM500 BM527 BM532 BM740 BM800 BM900 BM920 BM940
Underwater
Measurement
Medical
Industrial
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5757Department of Mechanical Engineering
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Electric behavior of an unstressed medium under the influence of an electric
field Eis
D = E
where is the permittivity.
The mechanical behavior (forE= 0) is
S = s T
where s is the compliance.
Basic Relationships
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5858Department of Mechanical Engineering
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TdED
dETsS
'T
E
+=
+=
S = Strain (6x1)
T= Stress (6x1)
E= Electric field (3x1)
SE = Compliance (zero field) (6x6)
d= Piezoelectric coefficient (6x3)
D = Electric displacement (3x1)
T= Dielectric constant (zero stress) (3x3)
Input Voltage
Micro-strain
0
Constitutive Equation
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5959Department of Mechanical Engineering
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More about PZT Properties
PZT materials exhibit most of the characteristics of ceramics, namely a high
elastic modulus, brittleness and low tensile strength.
The material itself is mechanically isotropic, and by virtue of the poling
process, is assumed transversely isotropic in the plane normal to the poling
direction as far as piezoelectric properties are concerned.
This means that for PZT materials,
s11 = s22, s13 = s23, s44 = s55
d31 = d32 and d15 = d24 .
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6060Department of Mechanical Engineering
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Constitutive Equation
Poling
direction
1, X
3, z2, y
1 11 12 13 31
2 12 22 13 31
3 13 13 33 33
23 44 15
31 44 15
12 66
1 15 11
2 15 11
3 31 31 33 33
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 00 0 0 0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0
S S S d
S S S d
S S S d
S d
S dS
D d
D d
D d d d
=
1
2
3
23
31
12
1
2
3
E
EdD
Eds '
+=
+=
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6161Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezo Sensor Equation
=
=
12
31
23
3
2
1
6
5
4
3
2
1
The stress vector is written as
=
6
5
4
3
2
1
333231
24
15
3
2
1
000ddd00d000
0d0000
DD
D
This equation summarizes the principle of operation of piezoelectric
sensors. A stress field causes an electric displacement to be generated as a
result of the direct piezoelectric effect.
Note that shear stress in the 1-2 plane, 6 is not capable of generating any
electric response.
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6363Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezo Actuator Equation
11 12 131 1 31
12 11 132 2 31
13 13 333 3 33
4423 23 15
4431 31 15
6612 12
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0 0
S S S d
S S S d
S S S d
S d
S d
S
= +
1
2
1
3
2
3
0
0
0
E
E TE
+
thermal coefficients of expansion, 1/K
temperature change, K
3 2
1
In a plane perpendicular to the piezo-polarization, it has isotropic
properties, i.e., transversely isotropic material in the plane 1-2. For
orthotropic material, there is no temperature shear strain. However, there
is a shear strain induced due to electrical field El and E2.
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6464Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Free StrainsFor piezoceramic materials:
Actuation Strain
=
3
2
1
15
15
33
31
31
E
EE
000
00d
0d0
d00
d00
d00
These are called free strains
=
0
Ed
Ed
EdEd
Ed
115
215
331
331
331
6
5
4
3
2
1
where d33, d3l, and dl5 are piezoelectric strain
coefficients.
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6565Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT Actuator: Longitudinal (d33 mode)
Motor
d33 mode
d31 mode
Poling
direction
1, X
3, z2, y
PZT Actuator: Transverse (d31 mode) Motor
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6666Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT Actuator: Double-layer
Extension Mode
PZT Actuator: Double-layer Bending Mode
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6767Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT Actuator: Multi-layer
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6868Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Lateral (31) Mode Piezoelectric
Sensor
l
t
w
Structure
1
2
3
P
V1
+
Top & Bottom Surfaces
Electroplated
Principle: Bond or embed a Piezo wafer to a surface
and monitor electric potential on electrodes. Piezo ispoled perpendicular to plated surfaces
Piezoelectric sensors produce a charge when strainedlaterally.
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6969Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Axial Force Sensor
tp1
2
3
Polarity
V
F
Principle: Sense dynamic (AC) load in the poling direction.Sensor is placed in the series load path. If a parallel load path
exists, make sensor as possible to attract a majority of the load.
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7070Department of Mechanical Engineering
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PZT Shear Mode Sensor
p p
Strain
P
P
V1
+
V2
+
Strain Direction
Electroplated
Top & Bottom
Part of Structure
Being Monitored
Bridge
3
2
1
Principle: Two PZTs poled
transverse to their electrodes are
bonded to a surface and connected
with a bridge. Longitudinal strain
induces shear in the PZTs and a
Voltage through the d15 coefficient.
Kistler Instrument A.G. of Switzerland has a patent on the basic idea.
A Similar approach (shear mode) is employed in most accelerometers and load
cells since there is much lower pyroelectric sensitivity and hence better
coherence at low frequency.
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7171Department of Mechanical Engineering
Dr. G. Song, Associate Professor
A Specific Example
Voltage applied in the 3-direction and the Deflection Out is a 3D effect
For an element of thickness t, length L and width w, an applied
voltage Vproduces the following change in shape:
Vdtt
LVdL
t
wVdw 33
3131 ,, ===
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7373Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Voltage-Force Relationship
ELV = AFT=
TgE 33=
C
FdF
A
LgV 3333 ==
25 N generates about 100 volts, about the force generated from
squeezing your hand
and
C - Capacitance
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7474Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Displacement-Voltage Relation
===L
LLVdEdS 3333
VdL 33=
16kV or E = 800 V/m yields L = 10 micro meters.
All the above is static analysis
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7575Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Finite Element Modeling of Piezoceramic
Smart Structures
Euler-Bernoulli Model
No axial load
Shear deformation can be neglected
Uniform along its length
Predicts the correct curvature of actuator and base over the entire
contact area
Considers the actuator as a layer Treating bimorphs, the correct neutral axis is used which is the
neutral axis of the layered system
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7676Department of Mechanical Engineering
Dr. G. Song, Associate Professor
tp
z
x
h
tp
wp
1
W1W(z) W2
y
x
2
yz
Poling
direction 1, X
3, z2, y
The Piezo Element Rigidly Bonded to a
Structure
wp
h
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 77
Z (W)
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7777Department of Mechanical Engineering
Dr. G. Song, Associate Professor
X (u)
Z (W)
We have , where u is the displacement in x direction.
From the deformed configuration shown in the upper figure, we can get
Then,
dx
dux =
dx
dW
dx
dWz
dxdWzu =
2
2
dx
Wdz
dx
dux ==
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7878Department of Mechanical Engineering
Dr. G. Song, Associate Professor
In terms of nodal displacements, W1, W2, 1 and 2 the bendingdisplacement is given by
2
32
2
32
1
32
1
32
23
2231)(
+
+
+
+
+
+
=
hh
x
h
xW
h
x
h
x
hh
x
h
x
h
xW
h
x
h
xxW
(1)
Let q1 = W1, q2 = 1, q3 = W2, q4 = 2, then
)()()(4
1
tqxxW ii
i=
=
(2)
(3)
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7979Department of Mechanical Engineering
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where
hh
x
h
xx
h
x
h
xx
hh
x
h
x
h
xx
h
x
h
xx
+
=
+
=
+
=
+
=
32
4
32
3
32
2
32
1
)(
23)(
2)(
231)(
(4)
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8080Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The governing equations of motion for smart structures are
based upon the electromechanical coupling effect. The
piezoceramic material shown in the figure satisfy the following
equation:
=
1
3
1131
313
1
3
T
E
Sd
d
S
DE
T
(5)
Where D3 represents the electric displacement, charge per
unit area, E3 represents the applied field intensity, S1represents the strain, T1 is the stress, is the permitivity of
the piezoelectric material, d31 is the piezoelectric charge
coefficient and is the elastic constant for the
piezoelectric material.
T
3
p
E ES /111
=
Poling
direction 1, X
3, z2, y
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8282Department of Mechanical Engineering
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+
=
h tT
p
p
dxdzS
E
T
DW
0 1
3
1
3
10
01
2
1(9)
The strain S1 can be written as
2
2
1x
WzS x
== (10)
Substituting Eq. (6) into Eq. (9), we get
+
+
+=
=
ht
xpxpp
T
p
h t
xpp
pp
TT
x
pp
p
p
dxdzEEEdEEdW
dxdzE
EEd
EdEdEWU
0
2
331
2
3
2
313
0
3
31
31
2
3133
]2)[(2
1
2
1
(11)
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8383Department of Mechanical Engineering
Dr. G. Song, Associate Professor
By using the expression in Eq. (10), we get
+
+=
h t
ppp
T
pp
p
dxdz
x
WzE
x
WzEEdEEdWU
0
2
2
22
2
2
331
2
3
2
313 ]2)[(
2
1
(12)
Substituting W(x) from Eq. (3), we get
qkqbeqeU pTT
p2
1
2
1 2 = (13)
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8484Department of Mechanical Engineering
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where
( )
dxdx
d
dx
dttEtWk
dxdx
dtWEdb
Ete
Edt
hW
j
h
ip
ppppijp
h
ip
ppi
p
p
T
p
p
2
2
02
22
2
0
2
2
31
3
2
313
3][
2
++=
+=
=
=
(14)
By substituting i from Eq. (4), we get
+=
+=
==
2
2
0
314
312
31
p
pp
p
pp
t
WEdb
tWEdb
bb
(15)
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8585Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Stiffness Matrices:
Define
++=
3
2
2 p
pppp
ttEtWk
23424
223214
313212
44333
2
2
22
33
2
2
11
6,
2
6,
6
12,
6
4,
12
44
3
12123
h
kk
h
kk
h
kk
h
kk
h
kk
h
kk
h
kk
h
kk
h
k
h
ttEtWk
hk
httEtWk
p
pppp
p
pppp
==
==
==
==
=
++=
=
++=
(16)
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8686Department of Mechanical Engineering
Dr. G. Song, Associate Professor
By including the beam element for the elastic energy, we can
rewrite Eq. (13) as
kqqBeqeU TT 2
1
2
12
=
where
T
pb bbbbBkkk ],,,[; 4321=+=
(17)
(18)
where
kb = stiffness matrix for the structure
kp = stiffness matrix for the piezoceramic member
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8787Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The kinetic energy of piezoceramic can be written as
dxwTh
pp
2
02
1
= (19)
where p is mass per unit length for the piezoceramics. Thekinetic energy for the piezoceramic element can be written as
= qMqT pT
p2
1
where
[ ] =h
jipijpdxxxm
0
)()( (20)
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8888Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The total kinetic energy is then given by
= qMqTT
2
1
where M = Mb + Mp
Mb = mass matrix for beamMp = mass matrix for piezoceramic
The Lagrangian function, L , is given by
L = T U
kqqBeqeqMq TTp
T
2
1
2
1
2
1 2 +=
The Lagrangian equation is
0=
kk
q
L
q
L
dt
d
(21)
(22)
(23)
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8989Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Substituting Eq. (22) into Eq. (23) and using q as generalized
coordinates, we get
aBeqkqm =+
][][where
][][][
][][][
pb
pb
kkk
mmm
+=
+=
and ea is applied voltage.
Eq. (24) represents the equation for the actuator.
(24)
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9090Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Taking q as a generalized coordinate, the equation for
sensor voltage output in terms of q is
qBe Ts
= (25)
Eq. (25) represents the voltage output from a piezoceramicsensor. Up to now, we have considered only an element.
The equation for the global form is determined by combining
the equations.
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9191Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Example
Let us consider a system as shown in the following figure.
1 2 3 4
Actuator Sensor
11,W
22,W 33 ,W 44 ,W 55 ,W
The system consists of four elements. Elements 1 and 4 arebeam elements. Element 2 is a piezoceramic beam element and
is used as an actuator. Element 3 is a piezoceramic/beam
element and is used as a sensor.
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9292Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Let us assume that
=
=
1
44
1
43
1
42
1
41
1
34
1
33
1
32
1
31
1
24
1
23
1
22
1
21
1
14
1
13
1
12
1
11
1
1
44
1
43
1
42
1
41
1
34
1
33
1
32
1
31
1
24
1
23
1
22
1
21
1
14
1
13
1
12
1
11
1
][
][
mmmm
mmmm
mmmm
mmmm
m
kkkk
kkkk
kkkk
kkkk
k
Beam element 1
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9393Department of Mechanical Engineering
Dr. G. Song, Associate Professor
=
=
aaaa
aaaa
aaaa
aaaa
a
aaaa
aaaa
aaaa
aaaa
a
mmmm
mmmm
mmmm
mmmm
m
kkkk
kkkk
kkkk
kkkk
k
44434241
34333231
24232221
14131211
44434241
34333231
24232221
14131211
][
][
Actuator element ( beam + piezoceramic)
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9494Department of Mechanical Engineering
Dr. G. Song, Associate Professor
=
=
ssss
ssss
ssss
ssss
s
assss
ssss
ssss
ssss
s
mmmm
mmmm
mmmm
mmmm
m
kkkk
kkkk
kkkk
kkkk
k
44434241
34333231
24232221
14131211
44434241
34333231
24232221
14131211
][
][
Sensor element ( beam + piezoceramic)
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9595Department of Mechanical Engineering
Dr. G. Song, Associate Professor
=
=
444
443
442
441
4
34
4
33
4
32
4
31
4
24
4
23
4
22
4
21
4
14
4
13
4
12
4
11
4
4
44
4
43
4
42
4
41
4
34
4
33
4
32
4
31
4
24
4
23
4
22
4
21
4
14
4
13
4
12
4
11
4
][
][
mmmm
mmmm
mmmmmmmm
m
kkkk
kkkk
kkkk
kkkk
k
Beam element 4
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9696Department of Mechanical Engineering
Dr. G. Song, Associate Professor
++
++
++++
++
++
5
5
4
4
3
3
2
2
4
44
4
43
4
42
4
41
4
34
4
33
4
32
4
31
4
24
4
23
4
2244
4
21434241
4
14
4
13
4
1234
4
11333231
242322
2
4422434241
1413123411333231
242322
1
4421
1
43
141312
1
3422
1
33
W
W
W
W
mmmm
mmmm
mmmmmmmm
mmmmmmmm
mmmmmmmmmmmmmmmm
mmmmmm
mmmmmm
ssss
ssss
ssssaaa
sssasaaa
aaaa
aaaa
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9797Department of Mechanical Engineering
Dr. G. Song, Associate Professor
=
++
++
++++
++
++
+
0
0
0
02 4
3
2
1
5
5
4
4
3
3
2
2
4
44
4
43
4
42
4
41
4
34
4
33
4
32
4
31
4
24
4
23
4
2244
4
21434241
4
14
4
13
4
1234
4
11333231
242322
2
4422434241
1413123411333231
242322
1
4421
1
43
141312
1
3422
1
33
a
a
a
a
a
ssss
ssss
ssssaaa
sssasaaa
aaaa
aaaa
bb
b
b
e
W
W
W
W
kkkk
kkkk
kkkkkkkk
kkkkkkkk
kkkkkkkkkkkkkkkk
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