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Environmental ReportTOSHIBA CORPORATIONStorage & Electronic Devices Solutions Company Yokkaichi Operations2016
1
Overview
Introduction
Founded
General manager
Location
Site area
Number of employees
Major products
January 1992
Tomoharu Matsushita
Yokkaichi Operations: 800, Yamanoisshiki-cho, Yokkaichi-shi, Mie Prefecture, 512-8550, Japan
Asahi Test Center: 2000, Nao, Asahi-cho, Mie-gun, Mie Prefecture, 510-8101, Japan
Yokkaichi Operations: 666,100 m2 *including car park
Asahi Test Center: 47,862 m2
6,095 (As of March, 2016)
NAND-type flash memory, Multi-chip package (MCP), Solid state drive (SSD)
・Server・Video game・Industrial equipment・Healthcare equipment・Electronic book・Television・Onboard equipment・Car navigation system
Silicon audio
Digital camera / Camcorder
PC
Smartphone / Tablet
microSDXC card SDXC card FlashAirTM
SSD USB flash memory
Application
NAND-type flash memory
Feature of SSD
Products
・Short access time・Lightweight・Low power consumption・Impact resistant
● NAND-type flash memoryA type of electrically erasable flash memory is suitable for storing high capacity data e.g. image and music.
● Multi-chip package (“MCP”)A package stacks multiple memory chips.
● FlashAirTM
FlashAirTM is a SDHC memory card with the wireless LAN function. It is possible to send and/or receive files inFlashAirTM onboard equipment with each other, also to access the files in FlashAirTM from external devices withwireless LAN function such as a smart phones and/or PCs.
● Solid state drive (“SSD”)A drive device using a NAND-type flash memory as memory media is widely substituted for a hard disk drive.
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Contents1
1 1 2
3 356
7 8
IntroductionOverviewProductsEditorial Policy
9 10
12
16
16 16
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18 18
Editorial PolicyThe purpose of this report is to facilitate the general public’s further understanding of environmental management (environmental management and environmental consideration in business activities) at Yokkaichi Operations, Toshiba Corporation Storage & Electronic Devices Solutions Company. The Environmental Reporting Guidelines 2012, published by the Ministry of the Environment, were used as a reference for editing.
Yokkaichi Operations* and Asahi Test Center, Toshiba Corporation Storage & Electronic Devices Solutions Company * Including representative dvisions and representative companies
Most of the performance data provided herein is from activities in fiscal 2015 (starting from April 1, 2015 to March 31, 2016) but some may contain data from previous years or fiscal 2016.
Applicable Period
Organization
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Communication Internal Education and Raising Awareness CSR and Regional Contribution Dissemination of Information Our Approaches to Biodiversity ConservationCommendations
15
11
Reducing the Environmental Impact Caused by Products 15Reducing the Environmental Impact of Our ProductsManagement of Chemicals in productsGreen Procurement
15
Reducing the EnvironmentalImpact of Our Business Activities Environmental Impact
Reduction in Total Waste Generated
Reduction of Chemical Substances ReleasedReduction of Greenhouse Gases Released
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Environmental ManagementTop MessageEnvironmental PolicyEnvironmental Management SystemEnvironmental Preservation StructureHistory of Yokkaichi Operations and Environmental Protection Activities Environmental Objectives/Targets Environmental Accounting Compliance with Laws and RegulationsEnvironmental AuditMeasures against Environmental Risks
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12
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15
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Top MessageEnvironmental Management
One characteristic example of the CO₂ emission reduction initiatives in Yokkaichi Operations is “energy saving in production process.” We always secure the highest clean level inside storage boxes and at production devices for wafers and essential components for semiconductor production. However, we relax the clean level in other parts to reduce total electric power consumption.We are also implementing "energy saving in power supply" by improving efficiency of the power supply devices and reducing the energy consumption of the air conditioning systems in the plant, and making efforts for "more efficient production line." For example, we have constructed a workpiece-transport system where each workpiece in a dedicated small container is freely transported between the fabrication facilities, searching for the optimum production line. In this system, we avoid wasteful use of the energy supplied to the production line and dramatically improve productivity. Yokkaichi Operations may be called a plant where cross-departmental energy-saving technologies are proactively introduced.
Tomoharu MatsushitaGeneral Manager ofYokkaichi Operations
Yokkaichi Operations, the world-leading NAND-type flash memory production base
Energy-saving’ measures adoptedeverywhere in production line in plant
Development of activities focused on environment, CSR and communication
Yokkaichi Operations has been actively promoting the reduction of environmental impact.In addition, focusing on nature conservation activities.
Toshiba Storage & Electronic Devices Solutions Company, Yokkaichi Operations is one of the largest semiconductor plants in the world. NAND-type flash memories, which are embedded in various digital products, such as rapidly spreading smartphones, are sent out to the world from here in Yokkaichi. Yokkaichi Operations is a production plant with state-of-the-art production equipment, and also development base. At the same time, it is “a plant that actively promotes efforts to reduce environmental impact,” sincerely tackling global environmental problems facing mankind.We have expanded fabrication facilities with the extension of the market. Fab3 started operation in 2005, Fab4 started operation in 2007, and Fab5 started operation in 2011. Furthermore, for the mass production of three-dimensional structure NAND-type flash memories (3D memories), the newly-rebuilt Fab2 started operation in February, 2016. At the Fab2, we aim to reduce CO₂ emissions by about 15% compared to Fab5. We take various initiatives for environmental protection, including preventive measures addressing global warming, chemical substance reduction, and biodiversity activities, so that Yokkaichi Operations deserves one of the top state-of-the art plants in the world.
In Yokkaichi Operations, we are actively developing the initiatives of “minimize waste”’ and “turn waste into resources,” and have achieved effective results in “3R activities.” We reduce the amount of the chemical liquid used in the lithography process and reduce new purchase of chemical liquid for cleaning. About hydrofluoric acid generated in the production process, we have introduced
4
cell area, we have adopted ultrafine 15nm process technology.With the multilevel cell technology that allows one memory cell to store two bits or more data, and the technologies of chip thin-grinding and thin multi-layer
Next generation semiconductor memoriessent out from plant actively promotingenvironmental impact reduction
a recovery system where the component after decomposition is solidified as calcium fluoride. We sell it to a dealer together with highly concentrated hydrofluoric acid as valuable materials for new fluorine products.We are not only working on the environmental activities inside the plant, but also positively promoting biodiversity activities in the surrounding area of the plant. Using "quick assessment of biodiversity potential" adopted by Toshiba group, we quantitatively assess the green space and water system within a 2-km radius from the plant, and perform environmental conservation activities jointly with local governments and experts. We are developing new efforts for nature conservation through activities such as participation in satoyama creation led by local community. In addition, we devote ourselves to CSR focusing on environmental conservation, implementing various activities in cooperation with the local community. The activities include periodical liaison meetings with local residents, environmental education programs (developed in collaboration with local government) at neighboring elementary schools, and participation in exhibitions. These are good opportunities to let people know widely about the environmental activities of Yokkaichi Operations and increase communication with stakeholders. Such efforts bear fruit one by one, and deepen trust between neighboring communities and the plant.
Yokkaichi Operations, where we are actively promoting the world-class project of environmental impact reduction, produces NAND-type flash memories. These memories themselves contribute to lower electric power consumption of various products. Especially, SSDs have no drive section unlike HDDs, and remarkably reduce power consumption. Therefore, SSDs are rapidly applied to data centers that are playing a major role in the era of using big data, and to the medical equipment field. The low power consumption of memories is achieved by cutting-edge process technology. As a nanofabrication technology for the reduction of memory
stacking, we have drastically reduced the cost and power consumption per memory capacity.Furthermore, we are working on the development of next generation semiconductor memories with greatly increased storage capacity achieved by forming the existing NAND-type flash memories into the three-dimensional structure. We developed the worldʼs first 48-layer three dimensional stacked cell structure flash memory called BiCS in March, 2015. We are also readying for mass production in the new Fab2 at Yokkaichi Operations. The new fab2 started operation in July, 2016. We will introduce cutting-edge production equipment and switch to the efficient BiCS memory mass production. As described above, using all sorts of technologies, we perform both the environmental and business activities at the same time in Yokkaichi Operations. The energy-saving technology and improved productivity in the plant lead to cost reduction and higher competitiveness in product price. The design and process technologies of the low-power consumption semiconductors give birth to next market leading products. In Yokkaichi Operations, further advance automation of the production process to increase productivity to the maximum so that our employees are shifted to higher-value-added sectors, where they can improve the ability of product development and polish technical skills. Here, “environment” is one of the most important key words. We all the members will continue to move forward so that the environmental conservation activities of Yokkaichi Operations will be recognized around the world.
World's first 48-layer three dimensional stacked structure flash memory (BiCS FlashTM)
5
Environmental Management
Environmental Policy
2. ExecutionWe assess environmental aspects, including biodiversity, related to our business activities. We have establishedenvironmental objectives and targets for reducing environmental impact, preventing pollution, and manufacturingenergy efficient products, and are proactively implementing environmental measures.
Yokkaichi Operations discloses this environmental policy internally and externally, ensures that it is thoroughly communicated to everyone at the site, and promotes its business activities in accordance with this policy, and encourage them to participate.
Tomoharu MatsushitaGeneral manager of Yokkaichi Operations,
Storage & Electronic Devices Solutions Company, Toshiba Corporation
(1)
(2)
(3)
(4)
(5)
(6)
(7)
We contribute to reducing environmental impact on society through product development according to high-capacity, small-sized, or resource-saving technologies, environmental assessment of products, and provision of NAND type flash memories by appropriate control of raw materials and reduction of their usage.We aim to address global warming by promoting energy saving in manufacturing equipment and power equipment and implementing measures to reduce greenhouse gas emissions, such as installation of PFC abatement systems.We positively promote improvements in productivity and 3Rs approaches to building a recycling-oriented society, and efficient use of resources by implementing measures to reduce the total discharge of waste materials or water intake.We realize reduction of environmental risks by managing chemicals used, developing technology to reduce chemicals and implementing measures to reduce both the amount handled and emissions.In order to conserve biodiversity, we strive to assess and mitigate the environmental impact of our business activities on biodiversity and seek to make a better contribution to society.We strive to facilitate mutual understanding with people in the local community or society through transmission of environmental information and participation in activities outside the site.We organize events designed to improve environmental awareness of all employees and encourage them to participate.
(1)
(2)
(3)
Our high-tech factory is located to the east of the lush Suzuka Mountains and to the west of Ise Bay with its abundant marine life. We position environmental preservation as one of managementʼs primary responsibilities and are continuously promoting environmental activities in harmony with economic activities.We comply with all applicable environmental laws and regulations, ordinances, and contracts, as well as other requirements Yokkaichi Operations has endorsed and voluntary standards.We strive to continuously improve our environmental management system through regular audits and reviews of our activities to enhance environmental activities level and environmental performances.
Yokkaichi Operations is aiming for the creation of new value in considering the global environment, and has set its environment policy based on a philosophy of contributing to the development of a sustainable society through its environmental activities, aiming for a low-carbon, recycling-oriented and naturally symbiotic society.
Recognizing that the Earth is an irreplaceable asset and it is humankindʼs duty to hand it on to future generations in a sound state, Yokkaichi Operations (Storage & Electronic Devices Solutions Company, Toshiba Corporation) is pursuing the creation of new value in symbiosis with the Earth, in accordance with the Toshiba Group's Environmental Vision. Yokkaichi Operations is contributing to the development of a sustainable society through its environmental activities, aiming for a low-carbon, recycling-oriented and naturally symbiotic society.
PolicyBased on the Environmental Philosophy of the Storage & Electronic Devices Solutions Company of Toshiba Corporation, Yokkaichi Operations is applying sophisticated environmental measures from life cycle perspective to the development and the manufacture of flash memory, emissions from manufacturing, and other business processes such as services. In this way, Yokkaichi Operations is striving to consider environmental issues while contributing to contemporary society in which electronics plays an indispensable role. With the aim of realizing a sustainable society, everyone at Yokkaichi Operations undertakes the following:1. Compliance and Sustainability
Vision
Revised on October 1, 2016
6
Environmental Management System
Environmental Preservation Structure
Having established an environmental management system pursuant to ISO 14001:2004 (hereinafter referred to as “EMS”), Yokkaichi Operations is striving to achieve continual improvement. With the aim of enhancing environmental management activities, the former Semiconductor Company of Toshiba Corporation (the present Storage & Electronic Devices Solutions Company of Toshiba Corporation) integrated the EMS in August 2007, and gained integrated certification for EMS, covering 13 sites including affiliated companies in Japan and 7 overseas sites, in September 2015.
We assess environmental aspects, including biodiversity, related to our operations, products and services. We have established environmental objectives and targets for reducing environmental impact, preventing pollution, and developing products that consider environmental impact, and are proactively implementing environmental measures.
Management review
Check
Continual Improvement
Implementation and operation
Environmental policy
Plan
Environmental management system model IISO14001 certificate
To promote environmental preservation activities continually and efficiently, we have established an environmental preservation structure with the General Manager in the highest position, and have defined responsibilities and authorities clearly. An Environment Management Committee is deliberative organ on
environmental preservation, for discussing the entire spectrum of environmental activities including EMS. We have established a Compliance Committee, to supervise compliance with environmental laws and ordinances, in order to ensure full compliance.
Resident-operationalcompanies
Deputy environmental protection officer:Manager of facilities engineering & operations dept
Department managers
Diagram ofenvironmentalpreservationstructure
Environmental protection officer : General manager (GM)
Compliance committee
Energy-saving committee
Workplace environment meeting
Department environment meeting
Manager of pollution prevention
Section & group managers
Internal environmental auditor
Manager of environmental protection group
ISO14001 Secretariat
Environment management committee
7
Environmental Management
History of Yokkaichi Operations and Environmental Protection Activities
Productized the world's first 48-layer 3D stacked structure flash memory / Started selling the SD card equipped with the industry's first TransferJet™Started operation of new manufacturing building No.2
2014
2013
2012
2011
2010
2009
2007
2003
2006
1996
2005
2000
2004
2001
2008
1999
1993
2002
1998
1992
1995
1991
1990
1994
20152016
AugustDecemberFebruary
NovemberJanuary
AprilFebruary
NovemberFebruary
May
October
October
FebruaryFebruary
AprilFebruaryFebruary
FebruaryOctober
NovemberFebruary
DecemberJuly
December
FebruaryJanuary
MayJune
AugustNovember
JulyOctober
AprilJuly
NovemberDecember
FebruaryOctober
November
FebruaryFebruary
OctoberDecember
OctoberOctober
February
AprilOctober
July
Groundbreaking in line with development of "Yokkaichi Hi-Tech Complex" by Yokkaichi-shi Land Development Corporation Concluded pollution control agreement with Yokkaichi-shi, Mie PrefectureStarted construction of manufacturing building No.1Concluded pollution control agreement with Yamanoissiki-cho, Yokkaichi-shi / Started holding Yamanoissiki-cho local meetingsYokkaichi Operations founded
Started manufacturing DRAMStarted operation of manufacturing building No.1Underwent first Toshiba comprehensive environmental auditCompletion of manufacturing building No.2
Gained BS7750 environmental management system certification Started operation of manufacturing building No.2Gained ISO14001:1996 environmental management system certificationStarted manufacturing SRAM
Started manufacturing NAND-type flash memory Received prize of Recycling Promotion Council
Started manufacturing MCP / Started selling SD memory card Received the Chubu METI* Minister's Award (heat category) *Ministry of Economy, Trade, and Industry Received prize of the Chairman of ECCJ* *Energy Conservation Center, JapanAchieved zero emissions, the first in Toshiba group (in fiscal 1999)Received the Chubu METI Minister's Award (electricity category)Received the Chubu METI Minister's Award (contribution to energy management)End of DRAM manufacturing
Started selling mini SD memory card / Started selling USB flash memoryReceived the Director-General, Agency for Natural Resources and Energy Award (heat category) Started publishing Yokkaichi Operation's environmental reportStarted operation of Asahi Test Center
Received the Director-General, Agency for Natural Resources and Energy, Award (electricity category) Completion of manufacturing building No.3Started operation of manufacturing building No.3Gained ISO14001:2004 environmental management system certification
Started selling micro SD memory card / Started selling SDHC memory cardReceived Energy Saving Center's Award for outstanding performance at conference of successful cases of energy savingStarted Kid's ISO14000 program (environmental education for children)Completion of welfare buildingCompletion of manufacturing building No.4Gained ISO14001:2004 environmental management system certification of Toshiba Corporation Storage & Electronic Devices Solutions Company Started operation of manufacturing building No.4
Received PRTR Outstanding Performance Award (Jury's Special Award)
End of SRAM manufacturing / Productized 512MB SSD / Productized embedded-type NAND-type flash memory with the greatest capacity of 64GB Started Kid's Yokkaichi CO2 diet program (environmental education for children)Received Gold Boiler Management Establishment AwardStarted selling the world first SDXC memory card with the greatest capacity of 64GB and the fastest transfer rate Productized embedded-type NAND-type flash memory with the greatest capacity of 128GB / End of 200mm wafer manufacturing line Received Encouraging Prize of Kansai Eco-Office Grand AwardStarted Eco-kid's CO2 diet program (environmental education for children)
Developed the world smallest 19nm process NAND-type flash memory with high-capacity 64Gbit (8GB) Completion of manufacturing building No.5 (primary period)Started operation of manufacturing building No.5Received Technology Prize in the 48th All Japan Boiler ConferenceReceived the Highest Performance Award of Toshiba Group Environmental AwardsProductized SSD for PC with the world smallest 19nm process NAND-type flash memory Productized SSD for enterprise with the greatest capacity of 1.6TBReceived the Prize of the Chairman of ECCJ of Energy Conservation Group Prize Received the Prize of the Chairman of the 3R's (Reduce, Reuse, Recycle) promoter Prize Received the silver prize in an international section of Green Apple Award
Started shipping the sample of SSD for enterprise with the greatest capacity of 1.6TB Received the Chubu METI Director's Award (energy management)Received the Prize of the Manager of Tokai branch office, ECCJReceived the Prize of the Chairman of the 3R's (Reduce, Reuse, Recycle) promoter Prize Received 1st place at 2nd Mie Prefecture’s Environmental AwardsStarted mass production of the 15nm process NAND-type flash memoryReceived the Prize of the Chairman of the 3R's (Reduce, Reuse, Recycle) promoter PrizeReceived the METI Minister’s Awards of Awards for Resources Recirculation Technologies and Systems
8
Every year, we set our environmental objectives/targets, by reflecting the achievements of the previous fiscal year, performance, requirements of Yokkaichi Operations and changes in environmental conditions in the results of our environmental assessment. In fiscal 2015, we set and realized environmental targets through various activities.
Environmental targets and performance in fiscal 2015
Environmental Objectives/Targets
Reduction of at least15,411 tonsNot more than294 thousand tonsNot more than 63,946 tonsNot more than 32,574 tonsNot more than 15,781 thousnd m3
Not more than 733 tonsNot more than 44,355 tons
3 cases
Once
2 schools
Twice
Twice
Twice
Twice
All the time
All the time
Expansion of cooperative association
・TOSHIBA BATON・Toshiba Group Environmental Exhibition
-Japanese edition to beissued in August-English edition to beissued in December
Enhance environmental awareness months- Environmental month: June- 3Rs Promotion month: October- Energy-saving month: February
Reduction of CO2 emissions
Reduction of PFC emissions
Reduction in the total amount of waste generatedReduction in waste volumes(excluding the volume of objects with value)
Reduction of water intake
Reduction of emissions of chemical substancesReduction in the total amount of treatments of chemical substances
Promotion of Toshiba group global environmental action 2015
Exhibiting to the external environmental eventsEnvironmental meetings with the community
Publication of environmental report
Environmental education for children
Reuse promotion due to unnecessary calendar and notebook recoveryReuse promotion due to charity eco bazaar recovery *Donation to Yokkaichi greening fund
Miswritten postal card with stamp recovery*Education support for developing countries
Used stamps recovery
Used feather products recovery*Contribution to society in the region
Caps of the PET bottle recovery*vaccine of children in the developing country
Implementation of measuresto enhance awareness
Lilium japonicum conservation (Development of ecosystem network construction proposed by local companies cooperation)
Addressing global warming
Efficient use of resources
Reduction of environmental risks
Enhancement of environmental awareness
Biodiversity conservation activities
Corporate social responsibility and Environmental communication
17,885 tons
251 thousand tons
57,612 tons
32,037 tons
13,692 thousand m3
656 tons
40,143 tons
Implemented as planned
3 cases
Once
2 schools
Twice (calendar:1,536, notebook:747）
Twice (50,350Yen)
Twice (464 sheets)
Twice (5,387 stamps)
806,000 pcs (equivalent to 1,613 servings of vaccine)
Implemented as planned
1 association
2 down comforters, 14 down jackets
Environmental objective Environmental target Target value Performance Evaluation
AchievedDevelopment of products that consider environmental impact
Contributing to 3 measures 3 measuresReducing resource usage of products by
promoting nanofabrication process
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Implemented as planned Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
Achieved
9
Environmental Management
Cost of green procurement
Cost of ISO14001 operations andenvironmental educationCost of resource utilization
Cost of global warming prevention
Cost of pollution such as air and gas protection
Wastewater measurements
Regulatory environmentalstandards Voluntary standards Actual value requency of measurement
Not exceeding 130Not exceeding 1.2Not exceeding 50
Not exceeding 72Not exceeding 0.099
Not exceeding 35
36 to 44<0.01<1.0
Once/YearOnce/YearTwice/Year
Sound noise and vibration measurements
Actual value
43 to 5544 to 5944 to 54
<30<30
7.60.82.70.52.02.6
Once/MonthOnce/WeekOnce/MonthOnce/WeekOnce/Week
pHBOD （mg／L）COD （mg／L）SS （mg／L）
Environmental Accounting
Compliance with Laws and Regulations
We have introduced environmental accounting to quantify costs related to environmental preservation and their benefits and to utilize the data as guidelines for environmental preservation activities.Classification and calculation of environmental preservation costs are based on the “Environmental Accounting Guidelines 2005” specified by the Ministry of the Environment as well as Toshiba Group’s own specifications.For the environmental measures with the increase in production, the costs totaled approximately 18.9 billion Japanese yen in fiscal 2015.
Environmental preservation cost
0
20
40
60
80
100
120
140
160
180
200
[billion yen] 220
2006 2007 2008 2009 2010 2011 2012 2013 2014 2015
We have set our voluntary standards at stricter levels than regulatory environmental standards for substances discharged to the air or into water, and are aiming for thorough compliance with these. As a result of these efforts, all the actual values in fiscal 2015 met our voluntary standards as before.
Atmospheric measurements
Nitrogen (mg/L)Fluorine (mg/L)
NOx (ppm)SOx (Nm3/h) Soot (mg/Nm3)
Regulatory environmental standards Voluntary standards
6.5 to 8.0
Actual value Frequency of measurement
Once/Week
Vibration (dB)
Sound noise (dB)
Location: timeProperty line: morning and
eveningProperty line: daytimeProperty line: eveningProperty line: daytimeProperty line: evening
Regulatory environ-mental standards
not applicable
not applicablenot applicable
not applicable
not applicable
Not exceeding 65Not exceeding 55Not exceeding 50
Voluntary standards
Not exceeding 60
Not exceeding 50
Frequency of measurement
Four times/YearFour times/Year
Once/YearOnce/Year
Four times/Year
*1: Mie Prefecture’s Ordinance for Living Environment Conservation *2: Water Pollution Prevention Law
Not exceeding 20 *1
Not exceeding 20 *1
Not exceeding 70 *1
Not exceeding 60 *2
Not exceeding 8 *2
5.8 to 8.6 *1
Not exceeding 4.0Not exceeding 4.0Not exceeding 3
Not exceeding 6.0Not exceeding 5.0
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On-site Audit
Internal Environmental Audit
ISO 14001 External Examinations
specifically, workplace management at 19 facilities e.g. checks of wastewater treatment equipment, recycling, and chemicals warehouses and facilities that use chemicals, effectiveness of emergency drills, compliance, measurement control of legally controlled substances, 4S (sorting, straightening-up, sanitation, and sweeping) approach, implementation status of employee education, etc.Having structured an EMS in accordance with ISO14001, Yokkaichi Operations annually conducts internal environmental audits of the EMS to improve our environmental performance. Additionally, we are also subject to an annual ISO 14001 external examination, where we can ensure compliance of the EMS with ISO14001 standards and continually improve our environmental management activities.
Since 1993, the Toshiba Group has been conducting regular environmental audits covering its sites including Yokkaichi Operations annually, through the Toshiba comprehensive environmental audit system established by the Toshiba Corporation. An audit team consisting of qualified internal members conducts this audit for 2 days, based on the following principles: “3 Zen (all) approach," “3 Gen (actual) approach," and visual control (management to watch and show) approach.The “3 Zen (all) approach" is to promote management of all facilities in all areas by all employees, and the “3 Gen (actual) approach" is to emphasize measurement of the actual situation of actual items at actual plants. The audit items cover 1) environmental management, 2) legal compliance and 3) plant management, or more
Every year, we conduct a Toshiba Comprehensive Environmental Audit. With an emphasis on workplace management, the auditors examine achievement levels of the Toshiba group’s environmental action plan for energy saving, reduction of chemical substance emissions, reduction of waste, etc.
Internal environmental auditWe conduct internal environmental audits covering all the departments at Yokkaichi Operations. The auditors are certified by an external organization.To identify an issue to be improved, they check that activities in each department meet our environmental policy, or that each department is proactively promoting its activities to achieve environmental objectives and targets. We actively publicize excellent activities to other departments in order to raise the standard of our activities as a whole.
ISO14001 external examinationAn external certification organization conducts the audits, of which there are two types. In the surveillance audit, conducted annually, checks are made on the validity of the EMS and its maintenance. In the recertification audit, implemented once every three years, the continual effectiveness of the overall EMS is comprehensively verified.In fiscal 2015, the Toshiba Corporation Storage & Electronic Devices Solutions Company underwent a surveillance audit and we, Yokkaichi Operations, have already completed corrective action for one item identified as “opportunities for improvement."
Environmental Audit
Toshiba’s comprehensive environmental audit
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Measures against Environmental Risks
We implement various structural measures to prevent chemicals and gases from leaking during storage or handling, a large amount of which we use for semiconductor manufacturing. We also perform automatic around-the-clock monitoring of wastewater or waste gas discharged by Yokkaichi Operations.
Water and airWe manage the water and gas which Yokkaichi Operations discharges under our strict voluntary rules to ensure compliance with the Water Pollution Prevention Law, Air Pollution Control Law, regulation values specified by Mie Prefecture’s Ordinances and target values agreed with Yokkaichi City.Automatic analyzers perform around-the-clock monitoring of wastewater and waste gas. We analyze approximately 20,000 items of wastewater and waste gas per year at the Analysis Center at Yokkaichi Operations and we perform human and mechanical monitoring.
Environmental risk assessmentWe verify that no environmental impact has been detected, by assessing the long-term environmental risks of the surrounding area through ecosystem surveys, odor surveys, chemical substance surveys, etc. of the nearby river whenever environmental impacts of Yokkaichi Operations are likely to change significantly, for example, when a manufacturing building is established.
Emergency drillsIn readiness for emergencies, we have standardized response procedures for selected facilities and operations with high environmental risks assumed. Emergency drills are periodically carried out to maintain readiness so that swift action can be taken in the event of an emergency, and we can ensure their effectiveness and review our response procedures.
Wastewater Treatment Facilities
Dike*Shown in red dash lines
Double Piping at the Joints
24-hour Monitoring on Automatic Wastewater Analyzer
Environmental Risk Assessment
Emergency Drills
Environmental Management
Examples of measures to prevent environmental pollutionWastewater treatment facilitiesAcid and alkali discharged from Yokkaichi Operations are collected with wastewater treatment facilities and released into the river through the abatement process.
Overhead pipes / Double piping at the jointsPipes are arranged on racks instead of being laid underground, in order to prevent any chemical leakage polluting the soil. Piping at the joints is doubled to enable monitoring of liquid leakage.
Dike for tankThe underground relay tank in the clean room building, by providing in the basement and not outdoors, we are committed to preventing the spread. Even if leaking drainage in the tank, we will be able to prevent the spread of the spill by placing the dike.
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Environmental Impact
Reduction in Total Waste Generated
Reduction of Chemical Substances Released
Chemicals
Water
Industrial Water
FY2013
76,937
27
11,998
FY2014 FY2015
tons
thousand m3
thousand m3
Greenhouse gas
Chemicals
Waste materials
Wastewater
NOx
SOx
thousand tons
tons
tons
thousand m3
tons
tons
823
395
57,659
10,017
15.3
0
80,695
31
12,590
82,266
41
13,712
926
496
56,721
10,767
17.2
0
1,203
622
57,612
11,402
17.0
0
Input
Output
We use various chemical substances in the semiconductor manufacturing process. As these chemical substances largely influence environmental risk, we positively promote reducing usage and emissions, and switching to substitutes.
Total Waste Generated Ratio of GB basic unit*
2014 2015
20%
40%
60%
80%
100%
0
10,000
20,000
30,000
40,000
50,000
60,000
70,000 [Ratio of GB basic unit][tons]
2006 2007 2008 2009 2010 2011 2012 20130%
0
100
200
300
400
500
700
600
2006 2007 2008 2009 2010 2011 2012 2013 2014 20150%
20%
40%
60%
80%
100%[Ratio of GB basic unit][tons]
Chemical substances released Ratio of GB basic unit*
Reducing Environmental Impact Caused by Business Activities
FY2013 FY2014 FY2015
The total waste generated in fiscal 2015 (including valuable waste that could be sold) was 57,612 tons. In spite of the upward trend in the total waste generated, we are working to reduce the amount of chemicals and gases used, and promote recycling or selling of waste generated. Compared with last year, we reduced the total waste generated per memory capacity (GB basic unit).
* Ratio calculated, regarding total amount of total waste generated per memory capacity: 1GB (gigabyte) in fiscal 2006 as 100 %
* Ratio calculated, regarding total amount of chemical substances released per memory capacity: 1GB (gigabyte) in fiscal 2006 as 100 %
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Reducing Environmental Impact Caused by Business Activities
Chemical Substance Control System
Example of reducing usage of chemical substancesIn a process of drainage containing nitrogen produced in a semiconductor manufacturing process, we remove nitrogen with a microbe, and use methanol as a nutritional supplement of the microbe.By reusing isopropyl alcohol (IPA) component drainage produced in a semiconductor manufacturing process as a nutritional supplement and optimizing quantity of methanol addition, we reduced the consumption of methanol about 352 t/year.We will promote the technical development to reduce the environmental impact in the future.
Clean room
Process of drainage containing IPA
Methanol (procurement)
Treated water
Before improvement:Organic drainage
Process of drainage containing nitrogen
After improvement:Nutritional supplement
waste fluid
Organic
process
Oxidation
(Round off to two decimal places)
Substancenumber
182
272302332374395405412438453
Chemical substnce name
zinc compounds(water-soluble)
silver and its water-soluble compoundsCopper salts
(Water-soluble, except complex salts)naphthalene
arsenic and its inorganic compoundsHydrogen fluoride and its water solible
saltsPeroxydisulfate water-soluble salts
Boron compounds
Amounthandled
Amount released
IntoAir
0.00
0.00
0.00
0.13
0.00
1.93
0.00
0.00
0.00
0.29
0.00
IntoWaterArea
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
Intosoil
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
IntoLandfill
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
TotalAmount
0.00
0.00
0.00
0.13
0.00
1.93
0.00
0.00
0.00
0.29
0.00
AsWaste
0.00
0.00
6.07
30.51
0.11
0.00
1.14
0.64
0.00
67.55
0.00
Intosewage
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
TotalAmount
0.00
0.00
6.07
30.51
0.11
0.00
1.14
0.64
0.00
67.55
0.00
0.00
0.15
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.16
0.00
0.00
0.00
0.00
4022.48
55.69
0.00
0.13
0.00
0.91
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
0.00
Amount transfered
0.16
0.15
6.07
30.63
0.11
4024.41
56.83
0.64
0.13
67.83
0.91
Nitrification
released and transferred if the amount handled of a Class I Designated Chemical Substance per year is 1 ton or more (0.5 ton or more for a Specified Class I Designated Chemical Substance). The Toshiba Group voluntarily discloses the amounts handled, consumed, removed and recycled in addition to the amounts released and transferred for each Class I Designated Chemical Substance, of which 0.1 ton or more per year is handled.
PRTR (Pollutant Release and Transfer Register)The PRTR Law of Japan mandates a system to monitor the amounts of chemical substances released to the environment (air, water area or soil), the amounts transferred, etc., and to aggregate the results and disclose data to the public. This law, the Act on Confirmation, etc. of Release Amounts of Specific Chemical Substances in the Environment and Promotion of Improvements to the Management Thereof, requires reporting of the amounts
PRTR data for fiscal 2015 unit : tons/year
Amountcon-
sumed
*1 *2 *3Amountremoved
Amountrecycled
*1 Amount consumed is the amount of a substance used in or associated with a product and shipped out of the Operations.*2 Amount removed is the amount of a substance transformed into other substances by neutralization, decomposition or reaction treatment performed at the Operations.*3 Difference between the amount of waste transferred and the amount recycled depends on whether waste is processed with charge or without charge. For example, when waste disposal is outsourced with charge even for recycling purposes, the amount is considered as the amount of waste transferred.
Molybdenum and its compounds
methylnaphthalene
Molybdenum and its compounds
Management of usage and emissions of chemical substancesChemical substances may cause serious environmental pollution and, as a result, adversely affect human health and the ecosystem if inappropriately managed. Our basic policy on chemical substances is:-to minimize the use of hazardous chemical substances,-to reduce the use of chemical substances and switch tosubstitutes with less environmental impact, and-to ensure the appropriate management of chemicalsubstances.We aggregate the amount of chemicals handled monthly bymeans of a Chemical Substance Control System. Using thisdata, we aim to monitor the amount of chemical substancesreleased into the air and water area, and the amounttransferred as waste.
14
Reduction of Greenhouse Gases Released
In the semiconductor manufacturing process, we use greenhouse gases such as perfluorocarbons (PFCs), as well as a large amount of energy.To address global warming, we have been developing various energy-saving measures for manufacturing equipment and power facilities, and reducing our greenhouse gas emissions.
*1 6 greenhouse gases to be reduced under Kyoto Protocol: carbon dioxide (CO2), methane (CH4), nitrous oxide (N2O) (= nitrous monoxide), hydrofluorocarbons (HFCs), perfluorocarbons (PFCs), sulfur hexafluoride (SF6)*2 Ratio calculated, regarding total amount of greenhouse gases released per memory capacity: 1GB (gigabyte) in fiscal 2005 as 100 %
A large amount and various kinds of greenhouse gases are used in the production processes: the P-CVD (plasma CVD) process where insulating films are formed on wafers, and the DRY (dry-etching) process where wirings and contact holes are formed by nanofabrication technology.We regard “emission reduction from the source” as the key to the reduction of greenhouse gas emissions, and have implemented many measures shown in the table below: Measure 1 is installing a detoxifying device to the production equipment that uses greenhouse gases. The device decomposes greenhouse gases into ones with small warming potential and emit them.
This measure decomposed almost all the greenhouse gases, and was highly effective in reducing them. Measures 2 through 4 are shortening the cleaning time of the reaction chamber in the production device by device modification and other improvements. These measures suppressed the amount itself of the greenhouse gases used. Measures 5 through 9 is omitting wasteful parts of the wafer processing conditions. The measure reduced the amount of the greenhouse gases used. Although the reduction effect of measures 5 through 9 is rather small, they lead to product cost reduction. We will continue to promote measures linked to such product cost reduction..
Example of reducing total GHG emissions : Efforts to reduce GHG emissions in manufacturing equipments
The optimum electric energy changes in Yokkaichi Operations because a load fluctuation by the production increase is large. Therefore, we manage the energy efficiency as a basic unit, and we decide the optimal supply from the variation of the basic unit..Now, we conducted the visualization of the basic unit, and the alert e-mail automatic delivery, and shortened the time before the person in charge noticed the deterioration of the basic unit. Furthermore, it is possible to identify the cause of the efficiency degradation by combining the basic unit data and the statistics tool.
Example of reducing energy-derived CO2 emissions : Visualization of power consumption per unit
200
400
600
0%
20%
40%
60%
80%
100%
0 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015
Greenhouse Gas Released*1 Ratio of GB basic unit*2
[Ratio of GB basic unit][Thousand tons-CO2]
800
1,000
1,200
1,400
Alert e-mail automatic delivery when exceeding the limit
Upper limit*1
Associated data*3
Basic unit*2
Lower limit*1
1
2
3
4
5
6
7
8
９
Measures
Installation of abatement equipment
Shortening of cleaning time in reaction chamber (1)
Shortening of cleaning time in reaction chamber (2)
Shortening of cleaning time in reaction chamber (3)
Rationalization of process condition (1)
Process
P-CVD、DRY
P-CVD
P-CVD
P-CVD
DRY
DRY
DRY
DRY
DRY
Gases
CF4、C4F8、CHF3、SF6、NF3
NF3
NF3
NF3
C4F8、CHF3
C4F8
C4F8
CF4
CF4、CHF3
RemarksInstallation at the time of
the new introductionContnuation in fiscal 2015
Contnuation in fiscal 2015
Completion in fiscal 2014
Ratio for total amount of reduction FY2015
99.41%
0.11%
0.30%
0.03%
0.01%
0.01%
0.01%
0.09%
0.04%
Rationalization of process condition (2)
Rationalization of process condition (3)
Rationalization of process condition (4)
Rationalization of process condition (5)
Completion in fiscal 2014
Completion in fiscal 2014
Completion in fiscal 2015
Completion in fiscal 2015
Completion in fiscal 2015
*1 ±3σ of the moving average in one month*2 Electric power supply per 1m3 of high air, etc.*3 Electric power supply, total flow, etc.
15
Reducing Environmental Impact Caused by Products
Our Efforts to Enhance Energy Efficiency in Our Product
Toshiba invented a new process whereby flash memory chips are stacked vertically. Toshiba started mass production of 256-gigabit (32gigabytes) 48-layer three-dimensional stacked cell structure flash memory (BiCS FLASH™) in Sep, 2015.The vertically stacked three-dimensional (3D) flash memory(BiCS FLASH) has far higher die area density compared to two-dimensional (2D) NAND flash memory.
Furthermore, we contribute to high capacity and resource-saving because the number of the necessary chips decreases. By replacing an HDD used in storage systems such as the data center with SSD, power consumption can be reduced compared with a system composed only HDD.
Management of Chemicals in Products
Green Procurement
Regulations controlling chemical substances in products have been strengthened year after year. They include some major regulations such as the EU’s RoHS Directive, End of Life Vehicles (ELV) Directive, Packaging and Packaging Waste Directive, and REACH Regulation. Similar regulations to EU RoHS also went into effect in various countries around the world.The Toshiba Storage & Electronic Devices Solutions Company Group has designated certain chemicals used by the Group as “Procurement Prohibited Substances” and “Procurement Controlled Substances” in order to
The Toshiba Corporation Storage & Electronic Devices Solutions Company revised its Green Procurement Guidelines on Sept. 1, 2014, in which it asks its suppliers to submit information on specific “environment controlled substances,” its suppliers’ systems and other requested materials.
either prohibit or restrict content in products in accordance with applicable laws and regulations of each country. At the stages of product design and engineering, the Toshiba Storage & Electronic Devices Solutions Company Group conducts assessments of the environmental impact of products as a part of its engineering process.Information on chemical substances contained in new raw materials and products is reviewed to identify the existence or use of “Procurement Prohibited Substances” and “Procurement Controlled Substances” as designated by the Toshiba Storage & Electronic Devices Solutions Company Group.
To facilitate efficient green procurement activities and close communication with our suppliers, in 2009 we established the Green Procurement Updating System (GPUS) allowing us to collect information or materials through the internet.
Shipping
informa
Access totion
Product information
Yokkaichi Operations Toshiba Sales
Customers
Responses
Inquiries
Parts and materialsDB
Product environment DB
Shipping label indicating RoHS
compliance
Parts and materials
informationInput
Input
Survey on parts and materials information
(1)
(2)
(3)(4)(5)(6)
Inquiries Responses
Reference
Green Procurement Updating System (GPUS)
Certification for EU RoHS-controlled substancesCertification for environment-controlled substancesAnalysis dataSafety data sheets (SDS)Composition list for products and partsCertification for Halogen-free substances
*BiCS FLASHTM is a registered trademark of Toshiba Corporation.
16
Communication
Internal Education and Raising Awareness
CSR and Regional Contribution
Special eventsEvery year, Yokkaichi Operations implements various activities to raise employeesʼ awareness about the environment: June is designated as Environment Month; October is the 3Rs Promotion Month (3Rs: reduce, reuse, recycle); and February is the Enhance Energy-saving Month in Japan. October 2015, we held charity eco bazaar in our factory, sold disused articles in our house, and donated proceeds to Yokkaichi greening fund. Moreover, we received the urban greening association award in May, 2016. The greening activities through donations to Yokkaichi Greening fund were appreciated.
Clean-up activitiesYokkaichi Operations works on regular clean-ups within the site and the surrounding roads. Plastic, wastepaper, scraps of metal, glass and wood waste, etc. are separated from the collected trash.
Kids’ Yokkaichi CO2 diet programThis is one of environmental education programs established by Yokkaichi City Environmental Forum that was set up by Yokkaichi City and seven neighboring companies. Yokkaichi Operations has also participated in the launch of this program.We explain the current situation of environmental issues to elementary school children near Yokkaichi City, and encourage them to implement energy-saving activities at home. At the end of the class, “Konyudou-kun,” Yokkaichi City’s mascot, gives each school child a certificate.
Eco-kids’ CO2 diet programThis is one of our environmental education programs developed in collaboration with Mie Prefecture. With this program, we provide environmental education for children in Asahi-cho, Mie Prefecture, where our branch is located. The program requires each school child to contemplate how to reduce the use of electricity as a leader at home.Thus, we make efforts to provide them with opportunities to be aware of the environment. At the end of the class, "Ahmin and Ameri," Asahi Town's mascot, gives each school child a certificate.
Clean-up activities
Scene of education
Scene of education
Charity eco bazaar(3Rs Promotion Month)
Category Course Person to be trained Theme
Environmental educationWe provide all our employees with environmental education to upgrade the level of our environmental activities. The e-learning program for general employees aims to deepen their understanding of the environmental management system at Yokkaichi Operations. Education programs are prepared depending on the employeesʼ position and function to improve their operations, as well as environmental awareness and job knowledge. We constantly update all these programs. We also provide education for internal environmental auditors annually to further advance their competence.
Education programs
according to positions
For managers
For general employees
For new or transferred personnel
For specific employees
For environmental auditors
General Manager/Senior Manager
All employeesNew recruit/Transferred personnel
Operator engaged in specific work
Internal environmental auditor
Responsibilities and authority of senior manager
Revisions to EMS / Environmental policy / Objectives and targets
Global environmental issues / EMS / Environmental policy
Compliance rules with environmental laws / Environmental impact incurred by non-conformance with operation standards and procedures for specific work
Roles and responsibilities / Revisions to environmental laws
Responsibilities and authority of manager
Education programs
according to functions
Communication
Dissemination of Information
17
Donation of calendar and notebookAround the turn of the year, we collect calendars and notebooks at Yokkaichi Operations that were surplus to requirements and donate them to Yokkaichi City Social Welfare Council. The donated calendars and notebooks are also utilized as rehabilitation materials or notebooks for written conversation.
Miswritten postal card with stamp collection activityWe have been part of the "World TERAKOYA Movement", an international cooperation program for non-formal education launched by NFUAJ (National Federation of UNESCO Associations in Japan ), through the collection of miswritten postal cards with stamps since 2014. we collected over 480 postal cards, and donated stamps to the value of 22,000 yen in fiscal 2015.
Used feather products collection activityWe have collected feather products, and donated them to "UMOU PROJECT". This activity has been help to contribute to society in the region.
Down comforter Down jacket
Donated calendars and notebooks
Collected miswritten postal card
Mie Children’s Eco-fair
Environmental Meetings with the Community
Yokkaichi Eco-fair
Corporate accountabilityEnvironmental meetings with the communityFor the purpose of local environmental protection, we hold periodic meetings with the local residents’ association to report on our environmental protection activities including environmental measurement data on water and air, and provide tours of environmental facilities. We are continuing to promote communication aiming for harmonious business activities with the local community.
Environmental reportSince 2003, we have published an Environmental Report (a Site Report) to inform the general public about our environmental activities. This is our 14th Environmental Report. We will continue to issue this report, striving to make the contents more accessible.
Participation in environmental eventMie children’s eco-fairTo provide children in Mie Prefecture with opportunities to enjoy learning about the environment, we support and participate in the “Mie Children’s Eco-fair” hosted by Mie Prefecture. Approximately 4,400 people visited the fair over two days in total in 2015.
Yokkaichi eco-fairParticipating in the Exhibition, hosted by Yokkaichi city, held as an event of the 1st anniversary of the opening of Yokkaichi Pollution and Environmental Museum for Future Awareness, we introduced our activities , such as energy saving in Yokkaichi Operations, and Toshiba memory products.
18
Our Approaches to Biodiversity Conservation
Commendations
Ecosystem networks in collaboration with other companiesYokkaichi Operations conducted a survey of the ecosystem in the local community including the development area in 2016. As a result of the survey, we found that the neighboring green belts secure the wildlife corridors, and give the positive effects the living environments of plants and animals.Based on this result, Yokkaichi Operations aimed for the maintenance and improvement of the environment by the improvement of the park which is a new green belt. In future, Yokkaichi Operations will actively promote the biodiversity conservation.
METI Minister’s Awards
Preservation of ”Satoyama”
Awarding of Reduce, Reuse, Recycle
1Planting 1.5 Million Trees
Preservation of ”Satoyama*”Toshiba volunteers in Yokkaichi Operations participate in activities to develop “Mie Kita Satoyama”, which is promoted by communities, every month. This activity was proposed by communities, but Yokkaichi Operations participated in the setup of the activity organization. We deepen the mutual understanding with communities through activities such as logging, thinning and improvement of the promenade.
*Undeveloped woodland near populated area
Planting 1.5 million treesToshiba sealed the declaration of Toshiba Planting between Mie Prefecture, Yokkaichi City and Toshiba in October, 2012, and started the activities "Planting 1.5 Million Trees" in Mie as one part of CSR activity. The third activity was carried out in October, 2015. Employees of Yokkaichi Operations, Mie Operations, Chubu Branch and the families participated in the activities with Mie Prefecture, Yokkaichi-shi and communities.
Awards for Resources Recirculation Technologies and SystemsToshiba received METI Minister's Award* for Resources Recirculation Technologies and Systems in collaboration with Asahi Glass Co., Ltd., and Organo Corporation. Activities of the recycling calcium fluoride recovery in waste water, that three companies collaborated, are appreciated.* This awards program was launched in 1975, with the aim of extensively calling for and recognizingoutstanding projects and efforts by companies and other industrial groups with excellent technologies thatcontribute to waste reduction, reuse and recycling, thereby encouraging and fostering such efforts andcreating new business. The program is organized by the Japan Environmental Management Association forIndustry (JEMAI), with the support of METI.
Reduce, Reuse, Recycle promotion AwardWe received Reduce, Reuse, Recycle Promotion Association Chairman’s Award for achievement in promoting reduce, reuse, recycle activities consecutively for three years from 2012. Activities of the reduction in total waste generated, such as reduction in chemical material used and calcium fluoride recovery in waste water, are appreciated.
Environmental Protection GroupFacilities Engineering & Operations DepartmentYokkaichi OperationsStorage & Electronic Devices Solutions Company800, Yamanoisshiki-cho, Yokkaichi City, Mie Prefecture 512-8550, Japan TEL: +81-59-330-1025 FAX: +81-59-330-1134URL http://toshiba-yokkaichi.jp/
