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Univers i ty • Government • Indus t ryMicro /Nanotechno logy Sympos ium
CALL FOR ABSTRACTS
ugim.nanofab.utah.eduJohn Shott, Program Chair: [email protected]
Amy VanRoosendaal: [email protected] or 801-587-0676
JUNE 12 - 15, 2016 SALT LAKE CITY, UTAH
2016 UGIM SYMPOSIUM
Short (~12 minutes) presentations including but not limited to the following topics:
Equipment advances and tool selection (Looking for best practices here from facilities managers, not for a commercial solution from vendors)• Acquiring and managing mission-critical tools• How to fill the gap: nanolith technologies between EBL and UV contact litho• How to bring in tools when they are not sexy anymore, but badly needed for capacity• Case studies in evaluating and acquiring tools• How to extend the life of aging tools and operating systems• How to handle tools with a small user base (one PI for example)• Tools with small user base but very expensive infrastructure (WF6 CVD for example): acquire/install or give PI money to have the work somewhere else?• Renting space inside the cleanroom to individual groups? How do you collect rent and who maintains the tools?
Some call it marketing, we call it Outreach, education and shared training media session • How to use lab facilities to support educational programs?• Student MEMS design competitions• Teaching scaling engineering• Filling the experiential gaps left by formal coursework• Teaching DOE/SPC• Media: marketing and outreach materials available for others to use• Media: safety training materials available for others to use
Managing exotic materials: safely enabling new devices beyond simple scaling and design tricks• Handling PDMS for microfluidics without contaminating the fab with oils• Managing VO2, PZT and other materials whose properties of interest also raise risk for cross-contamination or toxic exposure• Full-flow management schemes for segregating difficult materials and mitigating cost
Fab efficiency and continuous improvement• Communication: pass downs, staff meetings: how often, how to track projects and firefighting, best practices for interacting with faculty and researchers• Telepresence robotics for 24/7 operations: non-hazardous safety buddy roles and facilitating remote communication between staff and researchers• Navigating the transition to paperless billing: best practices• Managing 24/7 operations• Managing integrated cleanroom + analytical microscopy facilities• Management peculiarities associated with international and remote facilities• Managing multiple processes on a couple of etch tools: user responsibility for monitoring and conditioning or scheduled, staff-driven configuration changes?
