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Sequential parylene lift-off process for selective patterning of biological

materials

Advisor: Cheng-Hsien Liu

Reporter: Y. S. Lin

Date: 2007/4/18

K. Kuribayashi , Y. Hiratsuka , T. Yamamura and S. Takeuchi

Institute of Industrial Science, The University of Tokyo

MEMS 2007 p501~504

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Outline

• Introduction• Fabrication • Results & Discussion• Conclusion

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Introduction

• Multiple patterning of various types of biological material on the same substrate is an important technical challenge to realize high-throughput and high-sensitive bio-chemical analysis

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Introduction (cont’)

• Parylene(poly(para-xylylene))

1.with organic solvents

2.produce arrays on large area with high

resolution using standard photolithography

3.easily peel off from the substrate

4.it’s transparency

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Fabrication

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Results & Discussion

1st patterned red dyed lipid was dissolved by the 2nd organic solution with green dyed lipid and diffused under the parylene sheet due to low adhesion between the parylene sheet and the substrate

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Results & Discussion

1st patterned red dyed lipid was dissolved by the 2nd organic solution with green dyed lipid and diffused under the parylene sheet due to low adhesion between the parylene sheet and the substrate

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Results & Discussion

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Results & Discussion

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Results & Discussion

10μm thick(20mm×20mm)

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Results & Discussion

10μm thick(20mm×20mm)

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Results & Discussion

Feasibility of Intermediate layer

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Conclusion

• This sequential parylene lift-off process provides an efficient and economical method for selective patterning of various types of biological materials

• The biological materials such as lipid and proteins were patterned on the same substrate in both 2D and 3D configurations