10 Vacuum Measurement

Vacuum Measurement

Rough and Medium VacuumGauges and Controllers

Active Vacuum Gauges

Controllers forActive Vacuum Gauges

High and Ultra High VacuumGauges and Controllers

Beam Flux Monitor

Cables

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Contents

Introduction Page 10-3 to 10-9Criteria for the selection of vacuum gauges Page 10-3Vacuum pressure ranges Page 10-3Conversion of pressure units Page 10-3Product overview Page 10-4 to 10-5Glossary Page 10-6Typical measuring ranges of different vacuum gauges Page 10-7 Measuring methods Page 10-7 to 10-9

Rough and Medium Vacuum Gauges and Controllers Page 10-10 to 10-18

Active Vacuum Gauges Page 10-19 to 10-31

Controllers for Active Vacuum Gauges Page 10-32 to 10-36

High and Ultra High Vacuum Gauges and Controllers Page 10-37 to 10-48

Beam Flux Monitor Page 10-49 to 10-50

Cables Page 10-51 to 10-54

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http://www.vacom-vacuum.com

10-3www.vacom-vacuum.com

VACOM provides reliable vacuum measurement instruments for a wide range of applications between atmosphere and ultra high vacuum:technologically leading products, a comprehensive catalogue range, as well as OEM versions of own metrology products.In addition, VACOM offers

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Vacuum Measurement Instrumentation

Vacuum pressure ranges

Criteria for the selection of vacuum gauges

Measurement rangeWhich measurement method offers an appropriate measurement range? Is one single method sufficient or is it necessary tocombine different methods? Are combination gauges applicable?

Accuracy, reproducibility, response timeWhat measurement accuracy does the vacuum application require? Which measuring method offers sufficient accuracy? Whatreproducibility and response time of the sensor is necessary?

Composition of the process mediaAre correction factors for gas-type dependent measurements necessary and known? Is the gas composition variable?

Process conditions and environmental conditionsTo which process media or conditions is the sensor exposed? (media: corrosive, hazardous, oxidizing / deoxidizing, etc.; processconditions: contaminating or coating, low / high temperatures, high voltages, magnetic fields, glow discharges and other plasmas, fastpressure rise or pressure shock, etc.).Is a protection of the gauge in front of the inlet port necessary, by means of a baffle, a valve, a bent tube etc.?Which requirements result from environmental conditions? (vibration resistance, protection against contaminants and water,mechanical robustness, climatical and geographical conditions, ionizing radiation, etc.) Is there a danger of ignitable gas mixtures?Are explosion-proof gauges required?

Bakeout capabilityWhat temperature stability is required for the gauge and the gauge cable? Need temperature sensitive parts to be removable?

Readings displayIs a pressure display required? If yes, is an active gauge with integrated display appropriate or a separate display unit for one or moregauges?

Process control, data loggingWhich setpoints, analog outputs, PC or fieldbus interfaces need to be available?

Signal transmissionWhich type of signal needs to be transmitted over which cable lengths and in which quality?

Conversion of pressure units

1 Pa = 0.01 mbar = 0.0075 Torr1 mbar = 100 Pa = 1 hPa = 0.1 kPa = 0.75 Torr1 Torr = 1 mmHg = 133 Pa = 1.33 mbar

1 micron = 1 mTorr = 0.133 Pa = 1.33E-3 mbar1 psi = 6895 Pa = 69 mbar = 51.7 Torr1 atm = 760 Torr = 1013 hPa = 1013 mbar = 14.7 psi

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Product overview

Rough and medium vacuum gauges and controllers

Active vacuum gauges

Controllers for active vacuum gauges

High and ultra high vacuum gauges and controllers

Beam Flux Monitor

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Features of active vacuum gauges

Possible combinations of active or passive vacuum gauges and controllers

Features of vacuum gauge controllers and meters

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Glossary

Absolute pressureindicates the pressure relative to absolute vacuum. I.e. absolute vacuum = 0 mbar absolute, atmospheric pressure = 1013 mbarabsolute (under normal conditions). The absolute pressure of a gas is defined as the force of the gas particles per surface unit.

Relative pressure (or gauge pressure)indicates the pressure relative to atmospheric pressure. I.e. absolute vacuum = -1013 mbar gauge, atmospheric pressure = 0 mbargauge. Overpressure is indicated with a positive sign.

Differential pressureindicates the difference in pressure between two measuring points.

VacuumMeans that the absolute pressure of a gas within a system is smaller than the ambient air pressure. Some technical vacuumapplications require a low pressure of just a few mbar, other applications reach pressures below 10-9 mbar absolute. This is athousandth of a billionth of the normal atmospheric pressure and points out the complexity of vacuum measurement.

Vacuum gauge, vacuum measurement instrument, vacuum meterElectronic or mechanical instrument for measuring vacuum pressure (sometimes also called manometer). Due to physical constraints,there exists no measuring method that covers the whole range of technically used vacuum (atmospheric pressure to < 10-12 mbar).For different pressure ranges are different gauge types available, limited by physical effects, with different accuracies. The mostsensitive vacuum gauges measure absolute pressures of less than 10-12 mbar (15 decades smaller than atmospheric pressure). In general a vacuum measurement instrument comprises a pressure transducer (electronic or mechanical), measurement and controlelectronics (if applicable), a reading display (electronic or mechanical), and further optional functionalities.

Passive vacuum gaugeTransducer which turns the measurand (vacuum pressure) into a voltage or electric current according to its characteristic curve.Passive vacuum gauges are used in virtually all cases together with an external measurement and control electronics unit(refer to "controller"). Both are connected with a measurement or gauge cable.

Active vacuum gaugeDevice containing a pressure transducer (passive gauge) and a measurement and control electronics. Active gauges provide analogdata, e.g. as a 0 … 10 V or 4 … 20 mA output signal, or digital data via interfaces like RS232 or ProfiBus. Digital interfacesadditionally allow control of various gauge functions through a programmable logic control. Partially, setpoint relays for processcontrol, digital control inputs, status outputs or readings displays are integrated into the gauge, or available as an option.

Controllera) Device containing measurement and control electronics for a passive gauge, which interprets and processes the transducer signal.The electronics supply the transducer with power, controls the measuring circuit, and determines the readings. Usually a readingsdisplay is contained. In many cases, data interfaces (analog and/or digital), digital control inputs and outputs, as well as setpoint relaysfor process control are integrated or optionally available.b) Device which supplies active gauges with power and displays their output signal in pressure units (mbar, Pa, Torr, etc.). In manycases, data interfaces (analog and/or digital), digital control inputs and outputs, as well as setpoint relays for process control areintegrated or optionally available.

Gas-type independent measurementDirect pressure measurement which uses the force that gas particles exert on a surface. Pressure is defined as force per surface unit(in SI units: 1 N/m2 = 1 Pa). According to the kinetic gas theory, the force depends on the number of gas particles per volume(particle density), but is independent of the molar mass of the particles. I.e. the gas type does not affect the measurement. Typicalgauges: Bourdon gauge, diaphragm gauge.

Gas-type dependent measurementIndirect pressure measurement which doesn't use the force, but another physical property of the gas which depends on the particledensity and therefore indirectly on the pressure. E.g. thermal conductivity or ionization. However, these properties not only depend onthe particle density, but also on the gas type. To obtain comparability of the readings of different gas-type dependent gauges, they areusually calibrated for nitrogen, since nitrogen is the main component (approx. 80%) of normal air. Typical gauges: thermocouple gauge,Pirani gauge, convection Pirani gauge, ionization gauge.

Exponential notation1.0E-3 mbar = 1.0 x 10-3 mbar.

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Measuring methods

Bourdon gaugeSimple mechanical vacuum gauge. A thin metal spiral tube is closed at one end andconnected to the vacuum system at the other end. Outside the tube is either normalatmospheric pressure or a defined absolute pressure, dependent on the model. Theinside of the tube is evacuated together with the vacuum system. Depending on thepressure difference between inside and outside, the tube bends to a certain extent in theway of a spiral spring. By means of a lever system, the bend is transferred to acalibrated indicator needle and scale which displays the pressure of the vacuum system.

Diaphragm vacuum gaugesA diaphragm is exposed to a pressure difference between its two sides. One side isexposed to the vacuum, the other side is exposed to normal air pressure (in the case ofa relative pressure gauge) or a defined reference pressure (e.g. < 10-6 mbar absolute inthe case of an absolute pressure gauge). The pressure difference leads to a deformationof the diaphragm. The extent of the deformation is a measure for the pressure.Diaphragm gauges generate a linear transducer signal, because the force on thediaphragm is directly proportional to the pressure. This principle can be used for vacuumas well as for high pressure. Two common technical designs are the piezo-resistive andthe capacit-ance diaphragm gauge. Both types require periodic zero adjustments foraccurate measurements.

Piezo-resistive diaphragm vacuum gaugescontain a diaphragm with a piezo-resistive element. The specific resistance of theelement changes with deformation of the diaphragm. The resolution reaches usuallyapprox. 0.1% full scale (F.S.), i.e. the usable span is 3 pressure decades. Commonpiezo-resistive vacuum gauges offer 1300 … 1500 mbar F.S. (well above air pressure).Their longterm and temperature stability as well as their resolution is inferior tocapacitive diaphragm vacuum gauges, in return they are significantly lower-priced.

Bourdon gauge

Typical measuring ranges of different vacuum gauges

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Wheatstone bridge circuit

Thermocouple gauge

Measuring methods (continued)

Capacitance diaphragm vacuum gaugesThe diaphragm acts as one of the two plates of a plate-type capacitor. The capacitychanges with deformation of the diaphragm. The lower measurement limit is approx.0.01% full scale, i.e. the usable span is 4 pressure decades. Capacitive vacuum gaugesare available in different versions with 0.1 to 1000 mbar F.S. (or Torr F.S.). The 0.1 mbarF.S. versions require complex temperature control of the gauge in order to reach a lowermeasurement limit of 10-5 mbar absolute.

Heat loss vacuum gaugesHeat loss gauges are absolute pressure gauges which are used extensively for mediumvacuum measurement, some types also for rough vacuum measurement. They arecomparatively cheap, easy to install and are proven in a multitude of applications. Thebasic principle uses the fact that the thermal conduction of the residual gas depends onits particle density and thus on the pressure. The characteristics of such gauges are notlinear, instead they flatten to the lower and the upper measurement limits. Thereforeaccuracy and reproducibility fall off at the measurement limits. In addition, themeasurement is gas-type dependent, since different gases show different thermalconductivity coefficients. Heat loss vacuum gauges are usually calibrated for air ornitrogen. For use with other gases correction factors need to be applied.

Thermocouple vacuum gaugesTwo thin wires of different noble metals cross each other and are welded at thecross-point. This welded point forms a thermocouple. One of the wires is heated bymeans of a constant current. The resulting temperature of the thermocouple as well asits thermo-electrical voltage depends on the residual gas density. Thus thethermoelectrical voltage is a measure for the vacuum. Thermocouple gauges are robustand inexpensive. They measure between 0.001 mbar and approx. 20 mbar (absolute).

Pirani vacuum gaugesA heated thin wire within the vacuum is part of an adjusted Wheatstone bridge circuit.Due to thermal conduction of the residual gas, more or less energy is dissipated from thewire, depending on the gas density. The heating power required for maintaining aconstant wire temperature (approx. 150 °C) serves as a measure for the gas pressure.Pirani gauges are employed for the measurement range 5 x 10-4 mbar to atmosphericpressure. However, starting from approx. 10 mbar upwards, uncontrolled convectioneffects impair the accuracy and reproducibility increasingly. Above 1 mbar the gas-typedependency increases and can lead to strongly incorrect readings for gases other thanair or nitrogen.

Convection-enhanced Pirani vacuum gaugesConvection effects, which are problematic in the case of standard Pirani gauges, can beexploited in a defined way by means of a special sensor design. The sensor wire ismounted along the axis of a small tube which has to be installed horizontally. A thermalresistor wire coiled around the tube leads to an improved compensation of the ambienttemperature in the bridge circuit. Both features together improve the accuracy andreproducibility of the gauge in the rough vacuum range and also at the lower end of themeasurement range. The measurement range is extended down to 10-4 mbar. However,the gas-type dependency of the measurement method remains.

Capacitance diaphragm gauge

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ATMION® wide range vacuum gauge(Bayard-Alpert / Pirani) at the load lockchamber of a thermal annealing system

Measuring methods (continued)

Ionization vacuum gaugesTo measure high and ultra high vacuum, ionization vacuum gauges are most commonlyused. The residual gas inside the gauge is ionized by electron impact, the ions areattracted towards a cathode where they are neutralized. The ion current via the cathodeis proportional to the absolute pressure. The measurement is gas-type dependant,because gases show specific ionization probabilities. Therefore each particularcomposition of the residual gas requires a correlating calibration or at least a correctionfactor. Ionization vacuum gauges are mainly built in two designs, with cold cathode orwith hot cathode.

Cold cathode ionization vacuum gaugesThe internal volume of the gauge is penetrated by the magnetic field of a permanentmagnet. A high voltage of 2 ... 3 kV is applied between the rod-shaped anode and thecylindrical cathode. Electrons, which are produced by spontaneous emission, areaccelerated on spiral paths through electric and magnetic field and ionize the residualgas. Ions are collected by the cathode, electrons by the anode, and the pressuredependant discharge current is measured. The measurement range is approximately

to 10-2 mbar. Under clean vacuum conditions, cold cathode gauges are low-maintenance and long-living. Attention should be paid to the drifting characteristics. Thegauges show a pumping effect due to cathode sputtering and gas gettering, resulting inan initially lower pressure inside the gauge than in the vacuum chamber. The getteredgases remain in the gauge, and after some operating time the gauge measures a higherpressure. Also, the magnetic field can potentially interfere with other system componentsor processes. Depending on the particular gauge design, it is possible that switching thegauge on is problematic at high vacuum (< 10-6 mbar), if the gas discharge ignitespoorly due to the low gas density. The common technical design is the invertedmagnetron, also called inverted Penning gauge.

Hot cathode ionization vacuum gaugesThe electrons which are necessary for ionizing the residual gas are emitted from a hotcathode. Sometimes a second hot cathode exists as a spare filament. The most commondesign is the Bayard-Alpert gauge with a measurement range from 10-11 ... 10-9 to 10-2

mbar. Another design according to the so-called extractor method has a range from10-13 to 10-4 mbar. The hot filament (potential approx. 30 V) of the Bayard-Alpert type is located outside acylindrical wire grid anode (potential approx. 180 V). Electrons are accelerated towardsthe anode, penetrate the cylinder grid and ionize the residual gas. Ions are collected fromanother electrode inside the anode grid (the collector wire, potential 0 V), and the ioncurrent is measured. Hot cathode gauges show high measurement stability because theemission current from the filament is controlled electronically to a constant value, andsputtering and pumping effects are negligible. To a certain extent, a degas function canwork against gauge contamination. There exist neither magnetic fields nor problems withswitching on at high vacuum. Voltages are low enough to make unwanted gasdischarges inside the gauge improbable. Oxide coated filaments have a long life cycleand are stable to inrush of air. The measurement range depends largely on the design ofthe anode grid and the collector wire. The more delicate the structure is, the lower themeasurement range ends, because the so-called X-ray limit is reduced. The X-ray limitdescribes a pressure-independent collector current which is generated when"bremsstrahlung" (retardation radiation) hits the collector wire and releases electrons.Bremsstrahlung is mainly produced during collisions of electrons with the anode grid.

Combined vacuum gaugesMany vacuum processes require the application of two or more vacuum measuringmethods in order to meet the required measurement range and/or accuracy. For suchapplications different combination gauges were developed that combine two or threemeasurement methods in one single device. Typical combinations are Pirani + capacitive (THERMOVAC TTR 100), invertedmagnetron + Pirani (PENNINGVAC PTR 90) and Bayard-Alpert + Pirani (ATMION®). TheATMION® wide range vacuum gauge offers a measurement range of 13 decades (10-10

mbar to air pressure), while the combination of the hot cathode sensor with an alwaysactive Pirani sensor enables a safe, fully automated gauge operation.

Bayard-Alpert gauge

Inverted magnetron gauge

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Rough and Medium Vacuum Gauges and Controllers

RFM Bourdon Gauge

Bourdon gauge, standard version and stainless steel version (corrosion resistant), rough vacuum

Technical dataMeasurement range < 10 ... 1020 mbarMeasuring method Bourdon tube gaugeUnits mbarTemperature range (operation) -40 … +60 °CMax. media temperature RFM: 60 °C

RFMC: 200 °CMaterials in vacuum RFM: copper alloy

RFMC: stainless steel 316LHousing RFM: plastics (black), size 80 mm

RFMC: stainless steel, size 63 mmProtection category RFMC: IP 65Scope of delivery vacuum gauge

Order code Description Vacuumconnection

D H

RFMG RFM, standard G 1/4” B 80 115RFMK RFM, standard DN16KF 80 115RFMCG RFM, stainless steel G 1/4” B 63 86RFMCK RFM, stainless steel DN16KF 63 86

Visual monitoring of roughing lines and evacuation processesRelative pressure manometer with absolute pressure scale(ambient pressure = 1000 mbar; vacuum = 0 mbar)Two versions: RFM (standard) and RFMC (corrosion resistant)

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RFM-I Bourdon Gauge with Analog Output

Bourdon gauge, stainless steel version (corrosion resistant), rough vacuum, linear analog output

Technical dataMeasurement range < 10 ... 1000 mbar | < 1000 … 1E+5 Pa | < 10 … 750 TorrMeasuring method Bourdon tube gauge, rotary position sensor (non-contact) on the

needle shaftUnits mbarAnalog outputs linear, 4 … 20 mA, 2-wireTemperature range (operation) -40 … +60 °CMax. media temperature 100 °CMaterials in vacuum stainless steel 316LHousing stainless steel, nominal size 63 mmProtection category IP 54Power supply 12 … 30 VDC, max. 1 WElectrical connectors cable, 2 m, loose ends (DC in, analog out)Scope of delivery vacuum gauge

Order code lblblblb

Description Vacuumconnection

D H lblblblblblb

RFM-I-063-CG RFM-I, stainl. st., analog output G 1/4” B 63 86RFM-I-063-CK RFM-I, stainl. st., analog output DN16KF 63 86

Visual and electronic monitoring of roughing lines and evacuation processesA non-contact electronic rotary position sensor converts the position of the needle into a4 … 20 mA analog output signalRelative pressure manometer with absolute pressure scale(ambient pressure = 1000 mbar; vacuum = 0 mbar)

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DVR 2 Capacitance Diaphragm Gauge

Battery-operated vacuum gauge, rough vacuum, internal ceramic transducer

Technical dataMeasurement range 1 ... 1080 hPa | 1 ... 1080 mbar | 1 ... 810 TorrMeasuring method diaphragm (Al2O3, capacitive, absolute pressure)Accuracy < ± 1 hPa ±1 digit | < ± 1 mbar ±1 digit | < ± 0.75 Torr ±1 digitTemperature coefficient < ± 0.07 hPa / K |< ± 0.07 mbar / K | < ± 0.05 Torr / KMeasurement rate automatic, 3 s, 1 s, 1/3 sUnits hPa, mbar, Torr (switchable)Display LCD, digital and analogTemperature range (operation) 10 ... 60 °CMax. media temperature 80 °C at the pressure transducerMaterials in vacuum aluminium oxide, stainless steel, chemically resistant fluoro

elastomer, PBT / PPSHousing plasticsPower supply internal lithium battery, 9 V, 1.2 AhVacuum connection flange DN16KF with stepped screw-in hose nozzle DN6/DN10Scope of delivery vacuum gauge, battery

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionDHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVB-682902 DVR 2

Gas-type independent measurementFully electronicLong-term stableFast (analog) trend indication, precise (digital) readingCorrosion resistant ceramic diaphragmSplash-proofHigh electromagnetic interference resistanceBattery-operated with a durable lithium batteryProgrammable Auto switch-offATEX version on request

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVB-612220 Replacement battery 9 V Lithium 1.2 AhVB-900216 DKD calibration of a new DVR 2VB-900217 DKD re-calibration of a DVR 2

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DCP 3000 Capacitance Diaphragm Gauge

Vacuum gauge, rough vacuum, 1 to 4 external ceramic transducers, analog and digital display, serialinterface, connector for vent valve

Technical dataMeasurement channels 4Measurement range 0.1 ... 1080 hPa | 0.1 ... 1080 mbar | 0.1 ... 810 TorrMeasuring method diaphragm (Al2O3, capacitive, absolute pressure)Resolution 0.1 hPa | 0.1 mbar | 0.1 TorrAccuracy ±1 hPa | ±1 mbar | ± 0.75 TorrTemperature coefficient < ± 0.07 hPa / K |< ± 0.07 mbar / K | < ± 0.05 Torr / KUnits hPa, mbar, Torr (switchable)Display graphical LCD, multilingual, analog plus digital (5 digits) for one

channel (channel selectable) or digital for all 4 channelssimultaneously

Interfaces RS232CTemperature range (operation) 10 … 40 °CMax. media temperature 80 °C (short-time)Materials in vacuum Al2O3, PPS, chemically resistant fluoro elastomer, PP, aluminiumHousing plastics (support clip detachable)Protection category DCP 3000: IP 42 (front side)

VSK 3000: IP 54Power supply 18 … 30 VDC, 3.4 WElectrical connectors 2 x VACUU.BUS (gauges and vent valve), D-Sub 9 pin (RS232),

socket (DC in)Vacuum connection flange DN16KF, fitting for hose DN 8/10 mm, hose nozzle SW

6/10 mmConnectable gauges VSK 3000 (diaphragm gauge)Connectable vent valves vent valve 24 VDC with VACUU.BUS connectorScope of delivery Controller, 1 gauge VSK 3000 with cable 2 m, wall power supply

90 ... 264 VAC / 24 VDC (EU, UK, US, AU)

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionDHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVB-683170 DCP 3000

Gas-type independent and long-term stable measurementOptional venting functionConnection for up to 4 diaphragm gauges and 1 venting valveSelf-configuring (device identification)Fast (analog) trend indication, precise (digital) readingCorrosion resistant ceramic diaphragm gaugesSplash-proof (controller and gauges)Internal data logger

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVB-636657 VSK 3000 (transducer for DCP 3000)VB-682920 VACUU.CONTROL PC softwareVB-612552 Extension cable VACUU.BUS, 2 mVB-636656 Y-adapter VACUU.BUS, 1 x plug, 2 x socketVB-674217 VB M-B venting valve VACUU.BUS, DN16KF / G1/4" IVB-612566 Valve cable VACUU.BUS for venting valve VB M-B, 2 mVB-900214 DKD calibration of a new DCP 3000VB-900215 DKD re-calibration of a DCP 3000

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HPM 4/6 Thermocouple Vacuum Gauge Meter

Battery-operated, handheld vacuum gauge, rough and medium vacuum, for a DV series passivethermocouple gauge tube

Technical dataMeasurement channels 1Measurement range with DV-4: 0.01 … 20 mbar | 0.01 ... 20 Torr

with DV-6: 0.001 ... 1.3 mbar | 0.001 … 1 TorrDisplay LCD, 3 ½ digitsTemperature range (operation) -20 … +50 °CHousing plastics, hand-heldPower supply 9 VDC, 11 mA (one 9 V battery)Electrical connectors 9 V block, coiled cable with connector (gauge)Connectable gauges DV-4 series (20 Torr) and DV-6 series (1000 mTorr)Scope of delivery control unit w. coiled gauge cable, 9 V battery, carrying case.

Please order vacuum gauges separately.

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionDHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parHPM-4-6-mbar HPM 4/6, unit mbarHPM-4-6-torr HPM 4/6, unit Torr

Hand-held display and control unit for budget-priced thermocouple gauge tubes DV-4 and DV-6Switch with 3 positions (DV-6 / OFF / DV-4)Calibration with a potentiometer for DV-4 and DV-6, respectivelyCalibration reference tubes (NIST traceable) availablembar and Torr versions availableRugged carrying case included

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DIGITAL VT Thermocouple Vacuum Gauge Meter

Vacuum gauge, rough and medium vacuum, for a DV series passive thermocouple gauge tube

Technical dataMeasurement channels 1Measurement range VT-4: 0.01 ... 20 Torr

VT-6: 1 ... 1000 mTorrAccuracy VT-4: ±(30 % of reading + 0.02 Torr)

VT-6: ±(15 % of reading + 1 mTorr)Temperature coefficient VT-4: ±(1 % of reading +2 mTorr) / °C

VT-6: ±(1 % of reading + 0.2 mTorr) / °CUnits VT-4: Torr

VT-6: mTorrDisplay LED, 3 digits, greenTemperature range (operation) 5 ... 50 °CHousing plastics, 1/8 DIN, for panel mountingPower supply 4.5 ... 5.3 VDC, 155 mAElectrical connectors terminal clamp (DC in, gauge)Connectable gauges DV-4 series (20 Torr) and DV-6 series (1000 mTorr)Scope of delivery control unit, wall power supply (US adapter, cable 2 m)

90 ... 240 VAC / 5 VDC, gauge cable 2.5 m(other lengths on request).Please order gauges separately

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionDHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par55-288DV4 DIGITAL VT-4 (20 Torr)55-288DV6 DIGITAL VT-6 (1000 mTorr)

Long-living controllers for budget-priced passive thermocouple gaugesHigh stability and reliability under demanding conditionsEasy installation and operationAdjustment of VAC and ATM via two potentiometers at the front panelCalibration Reference Tubes (NIST traceable) availableTwo versions with different measurement ranges (VT-4 and VT-6)

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par12-01-164 EU adapter for included wall power supply12-01-165 UK adapter for included wall power supply

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DV Series Thermocouple Gauge Tubes

Passive heat loss gauge tubes, rough and medium vacuum

Technical dataMeasurement range DV-4: 0.01 ... 20 Torr

DV-6: 1 ... 1000 mTorrMeasuring method heat loss (thermocouple)Most sensitive range DV-4: 0.2 ... 5 Torr

DV-6: 10 ... 200 mTorrAccuracy see DIGITAL VTTemperature range (operation) 5 … 50 °CMounting position anyHeat loss sensor noble metal thermocoupleMaterials in vacuum nickel-plated steel, stainless steel, glass, noble metalElectrical connectors special connectorDisplay and control units HPM 4/6, DIGITAL VT, GP 307Scope of delivery gauge tube (gauge cables see control units)

Two versions with different measurement ranges (DV-4 and DV-6)Corrosion resistantStable calibrationTemperature compensatedGauges are matched and interchangeable without calibration adjustmentsRugged under demanding conditionsInexpensiveDV-6S: designed for outdoor use, vibration and shock applications (cryogenic tanks etc.),with protective cap

DV-4

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection lbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parDV-4D DV-4 Standard 1/8” NPTDV-4R DV-4 Rugged 1/8” NPTDV-4D-KF-16 DV-4 DN16KFDV-4D-KF-25 DV-4 DN25KFDV-34 DV-4 Stl. steel 1/8" NPTDB-16D Calibration reference DV-4 none

DV-6

Order code Description Vacuum connectionDV-6 DV-6 1/8" NPTDV-6S DV-6 (w. protect. cap) 1/8" NPTDV-36 DV-6 Stl. steel 1/8" NPTDV-6-KF-16 DV-6 DN16KFDV-6-KF-25 DV-6 DN25KFDV-6-VCR DV-6 VCRDV-6-CF DV-6 DN16CFDV-20 DV-6 Glass 3/8" O.D.DB-20 Calibration reference DV-6 none

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VGC-301 Convection Vacuum Gauge Controller

Vacuum controller, rough and medium vacuum, for a passive convection-enhanced Pirani gauge, analogoutput, setpoints, serial interfaces

Technical dataMeasurement channels 1Measurement range 0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 TorrResolution 0.01 Pa | 1E-4 mbar | 1E-4 TorrUnits Pa, mbar, Torr (switchable)Display graphical LCD with backlight, 2 to 4 digitsDisplay update rate 0.5 sAnalog outputs switchable:

non-linear 0.375 ... 5.659 V linear 0 ... 10 V, scaleable log-linear 1 ... 8 V (1 V / decade)

Setpoint relays 2 relays (SPDT), 1 A max. at 30 VInterfaces RS232 and RS485Temperature range (operation) 0 ... 40 °CHousing aluminium, 1/8 DIN, for panel mountingPower supply 100 ... 240 VAC (50/60 Hz) or 12 ... 30 VDC (approx. 4.5 W)Electrical connectors IEC plug (AC), 2 pin terminal (DC in), D-Sub 9 pin (gauge),

D-Sub 9 pin (I/O connector), 6 pin terminal (relays)Connectable gauges CVG-101, GP 275Scope of delivery controller, mains cable 1.5 m (EU)

(please order gauge and gauge cable separately)

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionDHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVGC301A-EU VGC-301

Budget-priced, compact controllerExtensive functionsMeasurement range of 7 decadesAll functions and gauge adjustment programmable via 4 front keys (menu-driven)Analog output configurableCompatible with Granville-Phillips® series 275 controllers and gauges

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Length (m)lbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCB421-1-10F Cable for CVG-101 3CB421-1-25F Cable for CVG-101 7.5CB421-1-50F Cable for CVG-101 15

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CVG-101, CVG-102 Convection-enhanced Pirani Gauges

Passive heat loss gauge with convection enhancement, rough and medium vacuum

Technical dataMeasurement range 0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 TorrMeasuring method heat loss (Pirani) with convection enhancementAccuracy (typical) ± 2 % of reading (500 ... 1000 mbar)

± 10 % of reading (1E-3 ... 500 mbar)Temperature range (operation) 0 ... 50 °CMax. bakeout temperature 150 °C (without cable)Mounting position horizontal (recommended)Heat loss sensor gold plated tungsten wireMaterials in vacuum Au on W, stainless steel, glass, Ni, PTFEHousing stainless steel with plastics enclosureElectrical connectors special connectorDisplay and control units VGC-301, GP 275, GP 307, GP 350, GP 370Scope of delivery gauge (gauge cable see control units)

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection H Hlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCVG101GA CVG-101 1/8” NPT / 1/2” tube 25.4CVG101GB CVG-101 DN16KF 33CVG101GC CVG-101 DN25KF 33CVG101GD CVG-101 DN40KF 33CVG101GE CVG-101 DN16CF 27.4CVG101GF CVG-101 DN40CF 21.6CVG101GG CVG-101 1/4” VCR, female 47.2CVG101GH CVG-101 1/2” VCR, female 44.5

Budget-priced, rugged gaugeWide measurement range (7 decades)Good accuracy and repeatabilityImproved accuracy compared to standard Pirani gauges due to convection enhancement andimproved temperature compensationShort response timeBest accuracy at horizontal mounting positionReplaceable without previous calibrationCompatible with Granville-Phillips® series 275 controller and gaugesReplacement gauge for CVM-201 and GP Mini-Convectron®

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCK431-01 Mating connector for CVG-101

Replacement gauge for CVM-201 and Mini Convectron® modules

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection Hlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCVG102GA CVG-102 1/8” NPT / 1/2” tube 25.4CVG102GB CVG-102 DN16KF 33CVG102GC CVG-102 DN25KF 33CVG102GD CVG-102 DN40KF 33CVG102GE CVG-102 DN16CF 27,4CVG102GF CVG-102 DN40CF 21.6CVG102GG CVG-102 1/4” VCR, female 47.2CVG102GH CVG-102 1/2” VCR, female 44.5

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10



GP 275 Convectron® Convection-enhanced Pirani Gauges

Passive heat loss gauge with convection enhancement, rough and medium vacuum

Technical dataMeasurement range 0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 TorrMeasuring method heat loss (Pirani) with convection enhancementAccuracy (typical) ± 2 % of reading (500 ... 1000 mbar)

± 10 % of reading (1E-3 ... 500 mbar)Temperature range (operation) 0 ... 50 °CMax. bakeout temperature 150 °C (without cable), or 105 °C (with cable)Mounting position horizontal (recommended)Heat loss sensor gold plated tungsten wireMaterials in vacuum Au on W, stainless steel, glass, Kovar®, Al2O3, NiFe, polyimideHousing stainless steel, plastics (connector enclosure)Electrical connectors special connectorDisplay and control units VGC-301, GP 275, GP 307, GP 350, GP 370Scope of delivery gauge (gauge cable see control units)

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection HHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par275071 275 Convectron® 1/8” NPT / 1/2” tube275203 275 Convectron® DN16KF275196 275 Convectron® DN25KF275316 275 Convectron® DN40KF275256 275 Convectron® DN16CF275238 275 Convectron® DN40CF275186 275 Convectron® 1/4” VCR, female275282 275 Convectron® 1/2” VCR, female

Industry standard, ruggedWide measurement range (7 decades)Good accuracy and repeatabilityImproved accuracy compared to standard Pirani gauges due to convection enhancement andimproved temperature compensationShort response timeBest accuracy at horizontal mounting positionReplaceable without previous calibrationCompatible with VGC-301 and CVG-101Replacement gauge for GP Mini-Convectron® and CVM-201

Replacement gauge for CVM-201 and Mini Convectron® modules

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection Hlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par275810 Mini-Convectron® gauge 1/8” NPT / 1/2” tube275816 Mini-Convectron® gauge DN16KF275817 Mini-Convectron® gauge DN25KF275818 Mini-Convectron® gauge DN40KF275813 Mini-Convectron® gauge DN16CF275814 Mini-Convectron® gauge DN40CF275811 Mini-Convectron® gauge 1/4” VCR, female275864 Mini-Convectron® gauge 1/2” VCR, female

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10



ZSE60F Digital Precision Pressure Switch Module

Active relative pressure diaphragm gauge (piezo), rough vacuum and positive pressure, two OpenCollector outputs, digital display, low leak rate

Technical dataMeasurement range -100 … +100 kPa (relative to atmosphere)Measuring method diaphragm (stainless steel, piezo resistive, relative pressure)Resolution 0.1 kPa | 1 mbarAccuracy display: ±2 % F.S. max. ±1 digit

analog out: ±5 % F.S.Reproducibility setpoints: ±0.2 % F.S. max. ±1 digitTemperature coefficient ± max. 3 % F.S.Response time max. 2.5 ms (with deactivated anti chatter function)Units kPa, bar, psi, mmHg, inHg, kgf/cm² (user selectable)

version …-M: kPa (non-changeable)Display LED, 3½ digits, red; one status LED per setpointDisplay update rate 0,2 sAnalog outputs either linear output, 1 ... 5 V, or

auto reference input (without analog output)Setpoint relays NPN or PNP open collector (O.C.), 2 outputs;

NPN: max. 30 VDC / 80 mA; PNP: max. 80 mA, max. 1 VOperating elements 3 front keys (UP / SET / DOWN)Temperature range (operation) 0 … 50 °CLeak rate 1E-10 Pa·m3/s | 1E-9 mbar·l/s | 7.5E-10 Torr·l/sMaterials in vacuum stainless steel 304 and ASTM630Housing plasticsProtection category IP65Power supply 12 … 24 VDC, max. 55 mA (no load)Electrical connectors 5-wire oil-resistant cable (DC in, analog I/O, transistors)Scope of delivery pressure switch with connection cable, 3m

Order code lblblblb

Vacuumconnection

In- / outputs HHlblblblblblb

ZSE60F-A2-22L 1/4" VCR 2 x NPN O. C., 1 x analog outputZSE60F-A2-30L 1/4" VCR 2 x NPN O.C., 1 x auto-reference inputZSE60F-A2-62L 1/4" VCR 2 x PNP O.C., 1 x analog outputZSE60F-A2-70L 1/4" VCR 2 x PNP O.C., 1 x auto-reference inputZSE60F-B2-22L 1/4" Swagelok 2 x NPN O. C., 1 x analog outputZSE60F-B2-30L 1/4" Swagelok 2 x NPN O.C., 1 x auto-reference inputZSE60F-B2-62L 1/4" Swagelok 2 x PNP O.C., 1 x analog outputZSE60F-B2-70L 1/4" Swagelok 2 x PNP O.C., 1 x auto-reference input

Small, budget-priced relative pressure switchStainless steel diaphragm for gas-type independent measurementVersatile use between rough vacuum and 1 bar positive pressureLeak rate compatible with high vaccum requirementsTwo transistor setpoint outputs and either an analog output or an auto reference inputTransistor outputs with adjustable setpoints, switchable output modes (inverted or non-inverted),and further options "hysteresis mode" or "window comparator mode"Auto reference is a potential free input for a reed contact or an electronic signal generatorAuto reference is used to adjust the transistor setpoints in the case of strong fluctuations of thepressure sourcetxtAbstand

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10



HPM 760S Piezo Vacuum Transducer

Active piezo-resistive diaphragm gauge, rough vacuum, temperature compensated

Technical dataMeasurement range 13.3 … 1.33E+5 Pa | 0.13 … 1330 mbar | 0.1 ... 1000 TorrMeasuring method diaphragm (stainless steel, piezoresistive, absolute pressure,

temp. compensated)Accuracy 0.25 % F.S.Response time < 2 sAnalog outputs linear, either 0 … 10 V, 0 … 5 V, 4 ... 20 mA or 2 ... 10 mATemperature range (operation) 0 ... 50 °CMaterials in vacuum stainless steel 316LPower supply 15 ... 30 VDC, 15 mA at 24 VDC (no load)Electrical connectors 4-pin connector (DC in, analog out)Display and control units THPS 760 Plus

(for 0 … 10 V analog output version only!)Scope of delivery gauge, 4-pin terminal connector

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Analog output HHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parHPM-760S-01-A 1/8" NPT 0 ... 5 VDCHPM-760S-01-B DN16KF 0 ... 5 VDCHPM-760S-01-C DN25KF 0 ... 5 VDCHPM-760S-01-D VCR4 0 ... 5 VDCHPM-760S-02-A 1/8" NPT 0 ... 10 VDCHPM-760S-02-B DN16KF 0 ... 10 VDCHPM-760S-02-C DN25KF 0 ... 10 VDCHPM-760S-02-D VCR4 0 ... 10 VDCHPM-760S-03-A 1/8" NPT 2 ... 10 mAHPM-760S-03-B DN16KF 2 ... 10 mAHPM-760S-03-C DN25KF 2 ... 10 mAHPM-760S-03-D VCR4 2 ... 10 mAHPM-760S-04-A 1/8" NPT 4 ... 20 mAHPM-760S-04-B DN16KF 4 ... 20 mAHPM-760S-04-C DN25KF 4 ... 20 mAHPM-760S-04-D VCR4 4 ... 20 mA

Gas-type-independent measurementRugged, corrosion resistant (ss diaphragm)Silicon sensor chip with integrated piezo transducer, sealed vacuum reference, temperaturecompensation network and resistive bridge circuitHigh accuracy and stabilityE. g. for process control, etc.Zero and span adjustable at the gaugeVersions with linear voltage or current output available

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10



CERAVAC CTR 100 Capacitance Diaphragm Gauges

Active ceramic diaphragm gauges, temperature compensated, rough and medium vacuum, serialinterface

Technical dataMeasurement range 4 versions:

133 Pa | 1.33 mbar | 1 Torr (1E-4 … 1 Torr); 1330 Pa | 13.3 mbar | 10 Torr (1E-3 … 10 Torr); 1.33E+4 Pa | 133 mbar | 100 Torr (0.01 … 100 Torr); 1.33E+5 Pa | 1330 mbar | 1000 Torr (0.1 … 1000 Torr)

Measuring method diaphragm (Al2O3, capacitive, absolute pressure, temperaturecompensated)

Resolution 0.003 % F.S.Accuracy 0.2 % of readingTemperature effect on zero 0.015 % F.S. / °C (1 Torr F.S.)

0.005 % F.S. / °C (10, 100, 1000 Torr F.S.)Temperature effect on span 0.01 % of reading / °CResponse time 30 msAnalog outputs linear, 0 ... 10 VDCInterfaces RS232-CTemperature range (operation) 5 ... 50 °CMax. bakeout temperature 110 °C at the flangeMaterials in vacuum Al2O3, stainless steel 316L, glass ceramics, AgTiCu brazing

solder, Vacon 70Protection category IP30Power supply 14 … 30 VDC (< 1 W)Electrical connectors D-Sub 15 pin (DC in, analog/digital I/O, RS232)Display and control units MVC-3 A, MVC-3 B, MVC-3 CScope of delivery gauge

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Measurement range H Hlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCC0 1/2" tube 1 Torr 44CC1 1/2" tube 10 Torr 44CC2 1/2" tube 100 Torr 44CC3 1/2" tube 1000 Torr 44CCC0 DN16CF-R 1 Torr 44CCC1 DN16CF-R 10 Torr 44CCC2 DN16CF-R 100 Torr 44CCC3 DN16CF-R 1000 Torr 44CCK0 DN16KF 1 Torr 44CCK1 DN16KF 10 Torr 44CCK2 DN16KF 100 Torr 44CCK3 DN16KF 1000 Torr 44CCV0 VCR8 1 Torr 44CCV1 VCR8 10 Torr 44CCV2 VCR8 100 Torr 44CCV3 VCR8 1000 Torr 44

Multi-purpose gauge with aluminium oxide diaphragm for gas-type independent measurementExcellent accuracy and reproducibility, high resolutionShort response timeCorrosion resistant, applicable for corrosive processesCompared to metal diaphragms reduced sensor-to-sensor variation, improved long-term stability,reduced diaphragm reset timePush-button for zero-adjustmentApplicable as reference gauge for the verification of other gauges corresponding to DIN/ISO 9000

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10



CERAVAC CTR 91 Capacitance Diaphragm Gauges (45 °C)

Active ceramic diaphragm gauges, temperature controlled, rough to high vacuum

Technical dataMeasurement range 5 versions:

13.3 Pa | 0.133 mbar | 0.1 Torr (1E-5 … 0.1 Torr); 133 Pa | 1.33 mbar | 1 Torr (1E-4 … 1 Torr); 1330 Pa | 13.3 mbar | 10 Torr (1E-3 … 10 Torr); 1.33E+4 Pa | 133 mbar | 100 Torr (0.01 … 100 Torr); 1.33E+5 Pa | 1330 mbar | 1000 Torr (0.1 … 1000 Torr)

Measuring method diaphragm (Al2O3, capacitive, absolute pressure, temperaturecontrolled to 45 °C)

Resolution 0.0025 % F.S. (0.1, 1 Torr F.S.)0.0015 % F.S. (10, 100, 1000 Torr F.S.)

Accuracy 0.15 % of readingTemperature effect on zero 0.005 % F.S. / °C (0.1 Torr F.S.)

0.0025 % F.S. / °C (1, 10, 100, 1000 Torr F.S.)Temperature effect on span 0.01 % of reading / °CResponse time 100 ms (0.1, 1 Torr F.S.) 30 ms (10, 100, 1000 Torr F.S.)Analog outputs linear, 0 ... 10 VDCTemperature range (operation) 15 ... 40 °CMax. bakeout temperature 90 °C at the flange (not operating)Materials in vacuum Al2O3, stainless steel 316L, glass ceramics, AgTiCu brazing

solder, Vacon 70Protection category IP 30Power supply 15 VDC or 18 … 26,4 VDC (4 ... 19 W)Electrical connectors D-Sub 15 pin (DC in, analog out)Display and control units MVC-3 A, MVC-3 B, MVC-3 CScope of delivery gauge

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Measurement range H Hlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCCT-1 1/2" tube 0.1 Torr 47CCT0 1/2" tube 1 Torr 47CCT1 1/2" tube 10 Torr 47CCT2 1/2" tube 100 Torr 47CCT3 1/2" tube 1000 Torr 47CCTC-1 DN16CF-R 0.1 Torr 49CCTC0 DN16CF-R 1 Torr 49CCTC1 DN16CF-R 10 Torr 49CCTC2 DN16CF-R 100 Torr 49CCTC3 DN16CF-R 1000 Torr 49CCTK-1 DN16KF 0.1 Torr 49CCTK0 DN16KF 1 Torr 49CCTK1 DN16KF 10 Torr 49CCTK2 DN16KF 100 Torr 49CCTK3 DN16KF 1000 Torr 49CCTV-1 VCR8 0.1 Torr 76CCTV0 VCR8 1 Torr 76CCTV1 VCR8 10 Torr 76CCTV2 VCR8 100 Torr 76CCTV3 VCR8 1000 Torr 76

Multi-purpose gauge with aluminium oxide diaphragm for gas-type independent measurementHeated gauge with excellent temperature stabilityExcellent accuracy and reproducibility, high resolution, fast responseCorrosion resistant, applicable for corrosive processesCompared to metal diaphragms reduced sensor-to-sensor variation, improved long-term stability,reduced diaphragm reset timePotentiometer for zero-adjustmentApplicable as reference gauge for the verification of other gauges corresponding to DIN/ISO 9000

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10



THERMOVAC TTR 91 / TTR 96 Pirani Gauge

Active heat loss gauge, rough and medium vacuum, optional setpoints

Technical dataMeasurement range 0.05 ... 1E+5 Pa | 5E-4 … 1000 mbar | 4E-4 … 750 TorrMeasuring method heat loss (Pirani), temperature compensatedResolution 1% of readingAccuracy ± 15 % of reading (1E-3 … 100 mbar);

± 50 % of reading (< 1E-3 mbar; > 100 mbar)Reproducibility 2 % of reading (1E-3 … 100 mbar)Response time 80 msAnalog outputs log-linear, 1.9 ... 10 VSetpoint relays 2 relays, 30 VDC / 0,5 A (optional)Temperature range (operation) 5 ... 60 °CMax. bakeout temperature 80 °C at the flange (horizontal position)

250 °C at the flange (CF with long tube only)Mounting position anyHeat loss sensor tungsten (TTR 91, 91 S), nickel (TTR 96 S)Materials in vacuum stainless steel, glass, Ni, NiFe, W or NiProtection category IP40Power supply 14 ... 30 VDC (< 1 W)Electrical connectors RJ45 (DC in, analog out, optional relays)Display and control units MVC-3 A, MVC-3 B, MVC-3 C, DISPLAY ONEScope of delivery gauge

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection H Hlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parLH-230035 TTR 91 DN16KF 15LH-230036 TTR 91 DN16CF-R 14LH-230037 TTR 91 DN16CF-R long 115LH-230038 TTR 91 1/8” NPT 29LH-230040 TTR 91 S (2 setpoints) DN16KF 15LH-230041 TTR 91 S (2 setpoints) DN16CF-R 14LH-230042 TTR 91 S (2 setpoints) DN16CF-R long 115LH-230043 TTR 91 S (2 setpoints) 1/8” NPT 29LH-230045 TTR 96 S (2 setpoints) DN16KF 15LH-230046 TTR 96 S (2 setpoints) DN16CF-R 14LH-230047 TTR 96 S (2 setpoints) DN16CF-R long 115LH-230048 TTR 96 S (2 setpoints) 1/8” NPT 29

Compact and rugged designStable vacuum measurement with large operating temperature range due to optimizedtemperature compensationRobust against overpressureReplaceable sensor unitShared push-button for adjustment of ATM and HVTwo push-buttons for setpoint adjustment (optional)

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10



CVM-211 Convection-enhanced Pirani Gauge Module

Active heat loss gauge with convection enhancement, rough and medium vacuum, digital display,setpoint

Technical dataMeasurement range 0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 TorrMeasuring method heat loss (Pirani) with convection enhancementResolution 0.01 Pa | 1E-4 mbar | 1E-4 TorrAccuracy (typical) ± 2 % of reading (500 ... 1000 mbar)

± 10 % of reading (1E-3 ... 500 mbar)Units bar / mbar (Torr version on request)Display LED, 2 to 3 digits, redAnalog outputs a) non-linear 0.375 to 5.659 V DC, or

b) log-linear 1 to 8 V DCSetpoint relays 1 relay (SPDT), 30 VDC / 1 ATemperature range (operation) 0 ... 40 °CMax. bakeout temperature 70 °CMounting position horizontal (recommended)Heat loss sensor gold plated tungsten wireMaterials in vacuum Au on W, stainless steel, glass, Ni, PTFEHousing stainless steel with plastics enclosurePower supply 11 … 30 VDC (< 5 W)Electrical connectors D-Sub 9 pin (DC in, analog/digital I/O, relay)Display and control units MVC-3 A, MVC-3 B, MVC-3 C

(log-linear versions only!)Scope of delivery gauge

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Analog output H Hlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCVM211GBA-B-L DN16KF log-linear 33CVM211GBA-B-NL DN16KF non-linear 33CVM211GEA-B-L DN16CF log-linear 37CVM211GEA-B-NL DN16CF non-linear 37

Simple, budget-priced and rugged gaugeWide measurement range (7 decades)Good accuracy and repeatabilityImproved accuracy compared to standard Pirani gauges due to convection enhancement andtemperature compensationShort response timeBest accuracy at horizontal mounting positionSetpoint and gauge adjustment programmable via 3 position push buttonAnalog output either non-linear or log-linearCompatible with GP Mini-Convectron® basic modules

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPS-12VDC-SUBD9 Wall pow. sup. 100-230 VAC(EU)/12 VDCPS402-A Battery adapter for 2 x 9 V batteries

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10



CVM-201 Convection-enhanced Pirani Gauge Module

Active heat loss gauge with convection enhancement, rough and medium vacuum, digital display,setpoints, serial interfaces

Technical dataMeasurement range 0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 TorrMeasuring method heat loss (Pirani) with convection enhancementResolution 0.01 Pa | 1E-4 mbar | 1E-4 TorrAccuracy (typical) ± 2 % of reading (500 ... 1000 mbar)

± 10 % of reading (1E-3 ... 500 mbar)Units Pa, mbar, Torr (user selectable)Display graphical LCD with backlight, 2 to 4 digitsAnalog outputs switchable:

non-linear 0.375 ... 5.659 V linear 0 ... 10 V, scaleable log-linear 1 ... 8 V (1 V / decade)

Setpoint relays 2 relays (SPDT), 30 VDC / 1 AOperating elements 4 front keysInterfaces RS232 and RS485Temperature range (operation) 0 ... 40 °CMax. bakeout temperature 150 °C (gauge only - electronics removed)Mounting position horizontal (recommended)Heat loss sensor gold plated tungsten wireMaterials in vacuum Au on W, stainless steel, glass, Ni, PTFE (polyimide instead of

PTFE available)Power supply 11 … 30 VDC (< 5 W)Electrical connectors D-Sub 9 pin (DC in, analog/digital I/O, relay 1), D-Sub 15 pin

(DC in, analog/digital I/O, relay 1+2, RS232, RS485)Connectable passive gauges replacement gauge tube see CVG-102Scope of delivery gauge

Order code Vacuum connection HCVM201GBA DN16KF 30CVM201GEA DN16CF 34

Gauge with extensive functionsWide measurement range (7 decades)Good accuracy and repeatabilityAll functions and gauge adjustment programmable via front keys (menu-driven)Detachable electronics, replaceable gauge tubeImproved accuracy compared to standard Pirani gauges due to convection enhancement andtemperature compensationShort response timeBest accuracy at horizontal mounting positionAnalog output configurableCompatible with GP Mini-Convectron® modules

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPS-12VDC-SUBD9 Wall pow. sup. 100-230 VAC(EU)/12 VDCPS402-A Battery adapter for 2 x 9 V batteries

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10



THERMOVAC TTR 100 Combination Gauge (Pirani / capacitive)

Active vacuum gauge with a Pirani and a ceramic diaphragm transducer, rough and medium vacuum,optional setpoints

Technical dataMeasurement range 0.05 ... 1.5E+5 Pa | 5E-4 … 1500 mbar | 4E-4 … 1125 TorrMeasuring method heat loss (Pirani); diaphragm (Al2O3, capacitive, absolute

pressure) (both temperature compensated)Accuracy ±15 % of reading (1E-3 ... 50 mbar)

±5 % of reading (50 … 950 mbar)±2.5 % of reading (950 … 1050 mbar)

Reproducibility ± 2 % of reading (1E-3 … 1100 mbar)Response time 10 msAnalog outputs log-linear, 0 ... 10.3 VSetpoint relays 2 relays, 30 VDC / 1 A (optional)Temperature range (operation) 10 ... 50 °CMax. bakeout temperature 80 °C at the flange (horizontal position)Mounting position anyHeat loss sensor tungsten, always activeMaterials in vacuum stainless steel, W, Al2O3, glass, Ni, Cu, NiFe, SnAg, AgPdProtection category IP40Power supply 15 ... 30 VDC (2.5 W)Electrical connectors RJ45 (DC in, analog out, optional relays)Display and control units MVC-3 A, MVC-3 B, MVC-3 C, DISPLAY ONEScope of delivery gauge

Order code lblblblb


H Hlblblblblblb

LH-230026 TTR 100 DN16KF 26LH-230027 TTR 100 S2 (2 setpoints) DN16KF 45LH-230028 TTR 100 1/8” NPT 26LH-230029 TTR 100 S2 (2 setpoints) 1/8” NPT 45

Improved accuracy at rough vacuum compared to standard Pirani gaugesGas-type independent measurement from 100 … 1500 mbarMixed output signal of Pirani and diaphragm gauge from 1 … 100 mbarShort response time, shows the real pressure during fast evacuation or ventingReplaceable sensor unitPotentiometer for zero (HV) adjustment (ATM adjustment not required)Two push-buttons for setpoint adjustment (optional)

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10



PENNINGVAC PTR 225 / PTR 237 Penning Gauge

Active cold cathode ionization gauge, medium vacuum to UHV, optional setpoint, optional fieldbusinterfaces

Technical dataMeasurement range 1E-7 ... 1 Pa | 1E-9 … 1E-2 mbar | 7.5E-10 … 7.5E-3 TorrMeasuring method cold cathode ionization (Penning)Accuracy ± 30 % of reading (1E-8 ... 1E-4 mbar)Reproducibility ± 4 % of readingTemperature coefficient < 0.5 % of reading / KAnalog outputs log-linear, 0 ... 10.6 V, 1.333 V / decadeError signals ignition status outputSetpoint relays 1 relay, 60 VDC / 0,5 A (optional)Digital control inputs high voltage on/offInterfaces ProfiBus DP (optional) or DeviceNet (optional)Temperature range (operation) 10 ... 50 °CMax. bakeout temperature PTR 225: 200 °C (electronics and magnet removed)

PTR 237: 350 °C (electronics and magnet removed)Mounting position anyMaterials in vacuum stainless steel, CrNi, Al2O3, NiFe, Ni, TiProtection category IP40Power supply 14.5 ... 36 VDC, typ. 24 VDC (< 2 W)Electrical connectors RJ45 (DC in, analog/digital I/O), optional connector (relay),

optional connector (ProfiBus DP or DeviceNet)Display and control units MVC-3 A, MVC-3 B, MVC-3 CScope of delivery gauge

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parLH-15734 PTR 225 DN25KFLH-15736 PTR 237 DN40CFLH-16434 PTR 225 S (1 setpoint) DN25KFLH-89641 PTR 225 PB (ProfiBus DP) DN25KFLH-89642 PTR 237 D (DeviceNet) DN40CF

All-metal gauge cellGood ignition characteristics due to optimized electrode designLow sputtering tendency (even with argon) due to high voltage reduction after plasma ignition anddue to titanium cathodeLow magnetic stray fieldPotentiometer and monitor output for setpoint adjustment (optional)

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10



PENNINGVAC PTR 90 Combination Gauge (inverted Magnetron / Pirani)

Active vacuum gauge with a cold cathode ionization and a Pirani transducer, rough vacuum to UHV

Technical dataMeasurement range 5E-7 ... 1E+3 Pa | 5E-9 … 1000 mbar | 3.8E-10 … 750 TorrMeasuring method cold cathode ionization (inverted magnetron);

heat loss (Pirani)Accuracy ± 30 % of reading (1E-8 ... 100 mbar)Reproducibility ± 5 % of reading (1E-8 ... 100 mbar)Analog outputs log-linear, 0 … 10.5 V, 0.6 V / decadeError signals < 0.5 V; > 9.5 V (Pirani defect);

ignition status outputTemperature range (operation) 5 … 55 °CMax. bakeout temperature 150 °C (electronics and magnet removed)Mounting position anyIonization gauge auto on/off on (< 1E-2 mbar), off (> 1E-2 mbar)Heat loss sensor tungsten, always activeMaterials in vacuum stainless steel, ceramics, FKM 75, Mo, Ni, Au, WProtection category IP 40Power supply 15 … 30 VDC (< 2 W)Electrical connectors RJ45 (DC in, analog out, status)Display and control units MVC3-A, MVC3-B, MVC3-C, DISPLAY ONEScope of delivery gauge

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection HHlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parLH-230070 PTR 90 DN25KFLH-230071 PTR 90 DN40KFLH-230072 PTR 90 DN40CF

Simple wide range vacuum gauge for continuous measurement between atmosphere and UHVPermanent pressure monitoring with the Pirani gaugeAutomated operation of the ionization gaugeImproved reliability even in argon processes (sputtering)Potentiometer for Pirani adjustment (HV and ATM)

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10



IGM-401 Bayard-Alpert Gauge Module

Active hot cathode ionization gauge, medium vacuum to UHV, digital display, setpoint, serial interface

Technical dataMeasurement range 1.3E-7 … 6.7 Pa | 1.3E-9 … 6.7E-2 mbar | 1E-9 … 5E-2 TorrMeasuring method hot cathode ionization (Bayard-Alpert)Sensitivity for N2 factory pre-set, user adjustable 2 ... 99Units Pa, mbar, Torr (switchable)Display graphical display (OLED, yellow), mantissa 3-digit,

exponent 2-digit, plus further elementsAnalog outputs log-linear, 0 ... 9 V, 1 V / decadeSetpoint relays 1 relay (SPDT), 30 VDC / 1 ADigital control inputs degas on/off, filament on/off, emission currentOperating elements 4 front keysInterfaces RS485Temperature range (operation) 0 ... 40 °CMax. bakeout temperature 200 °C (electronics removed)Mounting position anyIonization gauge auto on/off auto off only (limit programmable)Filaments (cathodes) yttria coated iridiumNumber of filaments 2Ionization gauge degas electron bombardmentMaterials in vacuum stainless steel, W, Ta, Y2O3 on Ir, ceramicsPower supply 20 ... 28 VDC (14 W)Electrical connectors D-Sub 9 pin (DC in, analog/digital I/O),

D-Sub 9 pin (DC in, RS485, relay)Scope of delivery gauge

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection H Hlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parIGM401YCD IGM-401 DN25KF 37IGM401YFD IGM-401 DN40CF 43

Rugged, compact stand-alone vacuum gaugeExtensive functionsHigh measurement stability and reproducibilityFilament overpressure protection via auto turn off (limit programmable)All functions and parameters programmable via front keys (menu-driven)

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parPS501-EU AC adapter, 90 … 240 VAC (EU) / 24 VDC (D-Sub 9-pin)

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ATMION® COMPACT Wide Range Gauge (Bayard-Alpert / Pirani)

Active vacuum gauge with a hot cathode ionization and a Pirani transducer, rough vacuum to UHV,optional external display, setpoint, serial interface, optional ProfiBus DP interface

Technical dataMeasurement range 1E-8 ... 1E+5 Pa | 1E-10 … 1000 mbar | 7.5E-11 … 750 TorrMeasuring method hot cathode ionization (Bayard-Alpert);

heat loss (Pirani) (temperature compensated)Accuracy ± 10 % of reading (1E-8 … 1E-2 mbar)

± 25 % of reading (1E-2 … 10 mbar)Reproducibility ± 5 % of reading (1E-8 … 1E-2 mbar)Display ATMIGRAF (optional, see display units)Analog outputs log-linear, 0 ... 10 V (0.625 V / decade)Error signals via interfaces and status LEDSetpoint relays 1 transistor output, max. 24 VDC / 0.2 ADigital control inputs Degas, Pirani adjust (ATM, VAC), operating modeInterfaces RS232, optional Profibus DPTemperature range (operation) 10 ... 40 °CMax. bakeout temperature 180 °C at the flange (electronics removed)Ionization gauge auto on/off on (< 1E-2 mbar), off (> 1E-1 mbar) (adjustable)Filaments (cathodes) yttria coated iridiumNumber of filaments 2Ionization gauge degas electron bombardmentHeat loss sensor platinum, always activeMaterials in vacuum stainless steel, W, Pt, glass, Y2O3 on Ir, NiFe (KF version only),

glass ceramic (CF version only), Al2O3Protection category IP40Power supply 21,6 ... 26,4 VDC (10 … 22 W)Electrical connectors D-Sub 15 pin (DC in, analog and digital I/O, RS232),

optional D-Sub 9 pin (Profibus DP)Display and control units MVC-3 A, ATMIGRAFScope of delivery gauge

Order code lblblblb


HHlblblblblblb

ATC25KLE ATMION® Compact DN25KFATC40CLE ATMION® Compact DN40CFATC25KPLE ATMION® Compact (ProfiBus DP) DN25KFATC40CPLE ATMION® Compact (ProfiBus DP) DN40CF

Combination vacuum gauge, extensive functions, wide measurement range (13 decades)High accuracy and repeatability, short response timeFully automated operation as well as external control of the measuring mode possiblePermanent pressure monitoring by the Pirani gaugeLong filament service life due to coating and intelligent emission controlNo unexpected down-time due to automatic filament change-overNon-mixed output signal, either Bayard-Alpert or Pirani sensor signalDetachable electronics, replaceable gauge headService software availablePirani adjustment via digital input, serial interfaces or control unit

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parAT24E AC adapter, 100-240 VAC(EU)/24 VDC (D-Sub 15)ATPC Y adapter f. RS232, 2 x D-Sub 15, 1 x D-Sub 9ATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9ATGC25K-HP Replacement gauge head, DN25KFATGC40C-HP Replacement gauge head, DN40CF

Other cable lengths see section "Cables" at the end of this chapter.

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ATMION® STANDARD Wide Range Gauge (Bayard-Alpert / Pirani)

Active vacuum gauge with a hot cathode ionization and a Pirani transducer, rough vacuum to UHV,optional external display, setpoint, serial interface, optional ProfiBus DP, replaceable filaments

Technical dataMeasurement range 1E-8 ... 1E+5 Pa | 1E-10 … 1000 mbar | 7.5E-11 … 750 TorrMeasuring method hot cathode ionization (Bayard-Alpert);

heat loss (Pirani) (temperature compensated)Accuracy ± 10 % of reading (1E-8 … 1E-2 mbar)

± 25 % of reading (1E-2 … 10 mbar)Reproducibility ± 5 % of reading (1E-8 … 1E-2 mbar)Display ATMIGRAF (optional, see display units)Analog outputs log-linear, 0 ... 10 V (0,625 V / decade)Error signals via interfaces and status LEDSetpoint relays 1 transistor output, max. 24 VDC / 0.2 ADigital control inputs Degas, Pirani adjust (ATM, VAC), operating modeInterfaces RS232, optional Profibus DPTemperature range (operation) 10 ... 40 °CMax. bakeout temperature 250 °C at the flange (electronics removed)Mounting position anyIonization gauge auto on/off on (< 1E-2 mbar), off (> 1E-1 mbar) (adjustable)Filaments (cathodes) yttria coated iridiumNumber of filaments 2, replaceableIonization gauge degas electron bombardmentHeat loss sensor platinum, always activeMaterials in vacuum stainless steel, W, Pt, Y2O3 on Ir, glass ceramic, Al2O3, CuProtection category IP40Power supply 21,6 ... 26,4 VDC (10 … 22 W)Electrical connectors D-Sub 15 pin (DC in, analog and digital I/O, RS232),

optional D-Sub 9 pin (Profibus DP)Display and control units MVC-3 A, ATMIGRAFScope of delivery vacuum gauge

Order code Description Vacuum connectionATS40C ATMION® Standard DN40CF

As ATMION® Compact, but higher bakeout temperature and replaceable filamentsCombination gauge, extensive functions, wide measurement range (13 decades)High accuracy and repeatability, short response timeFully automated operation as well as external control of the measuring mode possiblePermanent pressure monitoring by the Pirani gaugeLong filament service life due to coating and intelligent emission controlNo unexpected down-time due to automatic filament change-overNon-mixed output signal, either Bayard-Alpert or Pirani sensor signalDetachable electronics, replaceable gauge headService software availablePirani adjustment via digital input, serial interfaces or control unit

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionHlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parAT24E AC adapter, 100-240 VAC(EU)/24 VDC (D-Sub 15)ATPC Y adapter f. RS232, 2 x D-Sub 15, 1 x D-Sub 9ATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9ATGS C Replacement gauge head, DN40CFATGS Replacement gauge head without tube, DN40CFATF-001-1 Dual replacement filament (Y2O3 coated Ir) + CU40 gasket


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40


Controllers for Active Vacuum Gauges

THPS 760 PLUS Vacuum Controller

Display and control unit for one active piezo-resistive diaphragm gauge HPM 760S

Technical dataMeasurement channels 1Display range 0.1 … 1000 TorrResolution 0.1 TorrUnits TorrDisplay LED, 4½ digits, redAnalog outputs linear, 0 ... 10 VSetpoint relays 2 relays (SPDT), max. 240 V AC/ 2 AOperating elements 2 potentiometers, 2 push-buttonsTemperature range (operation) 0 ... 50 °CHousing plastics, 1/8 DIN, for panel mountingPower supply 85 ... 240 VAC, 50/60 Hz, 50 mAElectrical connectors terminal blocks (AC, relays, gauge, analog out)Connectable gauges HPM 760S (0-10 V version only)Scope of delivery unit, power cable 1.5 m (US), gauge cable 2.5 m

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parHPS-760 THPS 760 PLUS

Display unit for one HPM 760S diaphragm gaugeHigh stability, accuracy and reliabilityTwo setpoint relais and analog outputTwo potentiometers at the front for setpoint adjustment as well as zero and span adjustment

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DISPLAY ONE One-Channel Vacuum Controller

Display and control unit for one active gauge (THERMOVAC or PENNINGVAC)

Technical dataMeasurement channels 1Display range 5E-7 … 1.5E+5 Pa |5E-9 … 1500 mbar | 3.8E-9 … 1125 TorrMeasurement rate 50 / sUnits mbar, Pa, Torr (switchable)Display LED (green), mantissa max. 4 digits, exponent 2 digits, unit,

setpoint statusDisplay update rate 4 / sAnalog outputs 0 ... 10 V, dependent on gaugeSetpoint relays 1 relay (SPDT), 60 VDC / 1AOperating elements DIP-switch for unit and mantissaTemperature range (operation) 5 ... 50 °CHousing aluminium, 1/4 x 19”, 2 UProtection category IP 40Power supply 100 … 240 VAC, 50/60 Hz (max. 5 VA)Electrical connectors IEC plug (AC), RJ45 (gauge), terminal 5 pin (relay, analog out)Connectable gauges THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100;

PENNINGVAC PTR 90Scope of delivery unit, power cable (EU), mating connector for terminal

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parLH-230001 DISPLAY ONE

Simple power supply and display unit for one active Pirani or Pirani/capacitance orcold cathode/Pirani gaugeAutomatic gauge identificationReads the setpoint status of the gauge and supplies a relay output

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parLSL3 Cable for TTR and PTR, 3 m


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MVC-3 C Two-channel Vacuum Controller

Display and control unit for two active gauges (CERAVAC, THERMOVAC, CVM-201 and/or PENNINGVAC)

Technical dataMeasurement channels 2

(not applicable for ATMION® - refer to MVC-3 A)Display range 1E-8 … 1.5E+5 Pa |1E-10 … 1500 mbar | 7.5E-11 … 1125 TorrMeasurement range dependent on gaugeMeasurement rate 50 / sUnits mbar, Pa, Torr (switchable)Display LED (green), 1 line per channel (mantissa 4 digits,

exponent 2 digits), unit, relay statusDisplay update rate 4 / sAnalog outputs 1 per channel, 0 ... 10 V, dependent on gaugeSetpoint relays 2 relays (SPDT) per channel, 30 VDC / 1 ADigital control inputs PTR on/offOperating elements 4 front keysInterfaces RS232 and RS485Temperature range (operation) 5 ... 50 °CIonization gauge auto on/off PTR 225/237: optionally via a Pirani gaugeHousing aluminium, 1/4 x 19”, 3 UProtection category IP 40Power supply 100 ... 240 VAC, 50/60 Hz (max. 60 W)Electrical connectors IEC plug (AC), 2 x RJ45 (active gauges), D-Sub 25 pin (relays),

D-Sub 9 pin (RS232 and RS485), D-Sub 15 pin (analog anddigital I/O)

Connectable active gauges CERAVAC CTR 90 / 100 / 91;THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100;CVM-211 (log-linear version only!);PENNINGVAC PTR 225 / 237 / 90

Scope of delivery unit, power cable (EU)

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parMVC3-C MVC-3 C (2 ch. for CTR / TTR / CVM-211 / PTR)

Compact controller for 2 active vacuum gauges (capacitance, heat loss, cold cathode, combined)Automatic gauge identificationHighly accurate signal processingOverpressure protection for PTR gauges via auto turn off (limit programmable)Programmable gas type correction factor (for PTR gauges only)Clearly structured front key menu for access to all functions / parametersLarge alpha-numeric 7-segment display for each channelSerial interfaces, setpoint relays, digital inputs and analog outputsForward-looking, reliable technologyFree LabVIEW driver available

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parLSL3 Cable for TTR and PTR, 3 mSSL3 Cable for CVM-211, 3 mCSL3 Cable for CTR, 3 mATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9USB-RS232-KONV USB2.0/RS232 converter, USB-cable 0.8 m, driver CD


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ATMIGRAF Display and Power Supply for ATMION®

Display and power supply for one active ATMION® wide range gauge

Technical dataMeasurement channels 1Display range 1E-10 … 1000 mbarUnits mbarDisplay LED (green), mantissa 2 digits, exponent 2 digits,

mode (Pir/Fil1/Fil2), setpoint statusDisplay update rate 4 / sAnalog outputs as ATMION® (log-linear, 0 … 10 V)Error signals as ATMION®Setpoint relays 1 relay (SPST), 60 VDC / 1 ADigital control inputs as ATMION®Interfaces as ATMION®Temperature range (operation) 5 … 50 °CHousing aluminium, 1/4 x 19”, 2 UProtection category IP 40Power supply 24 VDC (max. 24 W)Electrical connectors D-Sub 15 pin (analog/ digital I/O, DC in); jack plug 5 mm (DC in

for included wall power supply); D-Sub 15 pin (gauge);D-Sub 9 pin (RS232)

Connectable gauges ATMION® Compact / StandardScope of delivery unit, wall power supply 90 ... 240 VAC / 24 VDC (EU plug)

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parAGPC-2 ATMIGRAF

Budget-priced, mobile "plug-and-play" display for one ATMION® wide range gaugeBetter flexibility than a gauge-integrated displayAllows for simultaneous integration of the ATMION® into a control systemWall power supply for ATMIGRAF and ATMION® includedAll in- and outputs of the ATMION® accessible at the backside9-pin D-Sub connector to connect the ATMION® RS232 interface to a PCWith a setpoint relay (driven by the ATMION® transistor setpoint)

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parATL3 Cable for ATMION®, 3 mATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9USB-RS232-KONV USB2.0/RS232 converter, USB-cable 0.8 m, driver CD


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MVC-3 A Vacuum Controller for ATMION®

Display and control unit for one active ATMION® wide range gauge and up to two other active gauges(CERAVAC, THERMOVAC, CVM-201 and/or PENNINGVAC)

Technical dataMeasurement channels for ATMION®: 1

for other active gauges: 2 (optional)Display range 1E-8 … 1.5E+5 Pa |1E-10 … 1500 mbar | 7.5E-11 … 1125 TorrMeasurement range dependent on gaugeMeasurement rate 50 / sUnits mbar, Pa, Torr (switchable)Display LED (green), 1 line per channel (mantissa 4 digits,

exponent 2 digits), unit, relay status, Pir/Fil1/Fil2Display update rate 4 / sAnalog outputs 1 per channel, 0 ... 10 V, dependent on gaugeSetpoint relays 2 relays (SPDT) per channel, 30 VDC / 1 ADigital control inputs ATMION® on/off, Degas on/off, PTR on/offOperating elements 4 front keysInterfaces RS232 and RS485Temperature range (operation) 5 ... 50 °CIonization gauge auto on/off PTR 225/237: optionally via a Pirani gaugeHousing aluminium, 1/4 x 19”, 3 UProtection category IP 40Power supply 100 ... 240 VAC, 50/60 Hz (max. 60 W)Electrical connectors IEC plug (AC), D-Sub 15 pin (ATMION®), optional 2 x RJ45 (other

active gauges), D-Sub 25 pin (relays), D-Sub 9 pin (RS232 andRS485), D-Sub 15 pin (analog and digital I/O)

Connectable active gauges ATMION® Compact / Standard;CERAVAC CTR 90 / 100 / 91 (optional);THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100 (optional);CVM-211 (log-linear version only!) (optional);PENNINGVAC PTR 225 / 237 / 90 (optional)


Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parMVC3-A0 1 channel for ATMION®MVC3-AM 1 ch. f. ATMION®, 2 ch. f. CTR/TTR/CVM-211/PTR

Compact controller for 1 ATMION® (active wide range vacuum gauge hot cathode/Pirani)2 optional channels for other active vacuum gauges (capacitance, heat loss, cold cathode,combined)Automatic gauge identificationHighly accurate signal processingOverpressure protection for PTR gauges via auto turn off (limit programmable)Programmable gas type correction factor (for PTR gauges only)Clearly structured front key menu for access to all functions / parametersLarge alpha-numeric 7-segment display for each channelSerial interfaces, setpoint relays, digital inputs and analog outputsForward-looking, reliable technologyFree LabVIEW driver available

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parATL3 Cable for ATMION®, 3 mLSL3 Cable for TTR and PTR, 3 mSSL3 Cable for CVM-211, 3 mCSL3 Cable for CTR, 3 mATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9USB-RS232-KONV USB2.0/RS232 converter, USB-cable 0.8 m, driver CD


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High and Ultra High Vacuum Gauges and Controllers

MVC-3 B High and Ultra High Vacuum Controller

Controller for one passive Bayard-Alpert gauge (BARION®) and up to two active gauges (CERAVAC,THERMOVAC, CVM-201 and /or PENNINGVAC)

Technical dataMeasurement channels for passive hot cathode gauge BARION®: 1

for active vacuum gauges: 2 (optional)Display range 1E-10 … 1.5E+5 Pa |1E-12 … 1500 mbar | 1E-12 … 1125 TorrMeasurement range electrometer (passive gauge channel):

1E-10 … 10 Pa |1E-12 … 0.1 mbar |1E-12 … 0.075 Torractive gauge channels (optional): dependent on gauge

Accuracy of electrometer ± 1% of readingMeasurement rate 50 / sUnits mbar, Pa, Torr (switchable)Display LED (green), 1 line per channel (mantissa 4 digits,

exponent 2 digits), unit, relay status, Fil1/Fil2Display update rate 4 / sAnalog outputs passive gauge channel:

log-linear, 0 … 10 V, 0.625 V / decadeactive gauge channels (optional): 1 per channel, 0 ... 10 V, dependent on gauge

Setpoint relays 2 relays (SPDT) per channel, 30 VDC / 1 ADigital control inputs BARION® on/off, Degas on/off, PTR on/offOperating elements 4 front keysInterfaces RS232 and RS485Temperature range (operation) 5 ... 50 °CIonization gauge auto on/off BARION®, PTR 225/237: optionally via a Pirani gaugeFilament operation modes automatic emission control (DC supply), Fil1/Fil2/autoElectron bombardment degas start via front keys, digital input or PCHousing aluminium, 1/4 x 19”, 3 UProtection category IP 40Power supply 100 ... 240 VAC, 50/60 Hz (max. 60 W)Electrical connectors IEC plug (AC), D-Sub mixed pin (BARION®), optional 2 x RJ45

(active gauges), D-Sub 25 pin (relays), D-Sub 9 pin (RS232 andRS485), D-Sub 15 pin (analog and digital I/O)

Connectable passive gauges BARION®Connectable active gauges CERAVAC CTR 90 / 100 / 91 (optional);

THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100 (optional);CVM-211 (log-linear version only!) (optional);PENNINGVAC PTR 225 / 237 / 90 (optional)


Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parMVC3-B0 1 channel for BARION®MVC3-BM 1 ch. f. BARION®, 2 ch. f. CTR/TTR/CVM-211/PTR

Compact controller with high-accuracy electrometer for 1 passive gauge BARION®2 optional channels for active vacuum gauges (capacitance, heat loss, cold cathode, combined)Automatic gauge identificationIntelligent emission current control for long filament life cycleProgrammable correction factor for each of both passive gauge filaments 1 and 2Degas by electron bombardment (EB)Overpressure protection for BARION® and PTR gauges via auto turn off (limit programmable)Programmable gas type correction factor (for BARION® and PTR gauges only)Clearly structured front key menu for access to all functions / parametersLarge alpha-numeric display for each channelSerial interfaces, setpoint relays, digital inputs and analog outputsForward-looking, reliable technologyFree LabVIEW driver available

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MVC-3 B High and Ultra High Vacuum Controller

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBSL3 Cable for BARION® (up to 250 °C), 3 mLSL3 Cable for TTR and PTR, 3 mSSL3 Cable for CVM-211, 3 mCSL3 Cable for CTR, 3 mATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9USB-RS232-KONV USB2.0/RS232 converter, USB-cable 0.8 m, driver CD


BARION® Bayard-Alpert Gauge

Passive hot cathode ionization gauge for MVC-3 B, medium vacuum to UHV, replaceable filaments

Technical dataMeasurement range 2E-9 … 4 Pa |2E-11 … 4E-2 mbar | 1.5E-11 … 3E-2 TorrMeasuring method hot cathode ionization (Bayard-Alpert)Sensitivity for N2 approx. 20 / mbarX-ray limit < 2E-9 Pa | < 2E-11 mbar | < 1.5E-11 TorrAccuracy ± 10 % of reading (1E-8 … 1E-2 mbar)Reproducibility ± 5 % of readingMax. bakeout temperature 400 °C (plug and cable removed)

250 °C (with plug and cable)Mounting position anyFilaments (cathodes) yttria coated iridiumNumber of filaments 2, replaceableMaterials in vacuum stainless steel, W, Y2O3 on Ir, glass ceramics, Ag plated CuElectrical connectors special connectorDisplay and control units MVC-3 BScope of delivery vacuum gauge, hexagonal wrench for plug locking screws

Order code lbl11parlbl12parlbl13parlbl14parDescription Vacuum connection lbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBAT40C BARION® DN40CF

UHV capable passive gauge with a demountable stainless steel coverAutomated, safe operation with the gauge controller MVC3-BLong life cycle and no unexpected down time due to 2 coated long-life filaments (replaceable)Very low heat input into the vacuum system (gauge temperature < 40 °C at 25 °C ambient)No electro-magnetic interference and no filament vibration due to DC supplyVacuum measurement possible to 250 °C bakeout temperatureDegas function by electron bombardment (EB)High accuracy and reproducibility (both filaments factory calibrated)Protective grid at vacuum port against interference from the process

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription lbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parATF-001-1 Dual replacement filament (Y2O3 coated Ir) + CU gasket

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40



GP 307 Controller for Bayard-Alpert Gauges

Modular controller for up to two passive hot cathode gauges (GP 274 series) and up to two fore-vacuumgauges

Technical dataMeasurement channels for hot cathode gauges: 1

for fore-vacuum gauges: 2 (optional module)Measurement range standard electrometer:

1.3E-8 … 13 Pa | 1.3E-10 … 0.13 mbar | 1E-10 … 0.1 TorrUHV electrometer: 6.6E-10 … 13 Pa | 6.6E-12 … 0.13 mbar | 5E-12 … 0.1 Torrfore-vacuum modules (optional): dependent on gauge

Sensitivity for N2 adjustableAccuracy of electrometer typically ± 3 % of reading (Standard und UHV)Units mbar, Pa, Torr (switchable on the module hardware)Display LED (green), 1 line per channel (mantissa 2 digits,

exponent 1½ digits), setpoint statusDisplay update rate 2 / sAnalog outputs electrometer:

log-linear, 0 ... 10 V, 1 V / decadeConvectron® module (optional): log-linear, 0 ... 7 V, 1 V / decadethermocouple module (optional): non linear, 0 ... 10 Vcapacitance gauge module (optional): linear, 0 ... 10 V

Setpoint relays optional modules with 2 or 6 relays (SPDT), 240 VAC / 4 A or30 VDC / 5 A

Digital control inputs IG1/2 on/off, Degas on/offDigital outputs IG1/2 statusInterfaces optional, either RS232, RS485 or IEEE488Temperature range (operation) 0 ... 40 °CIonization gauge auto on/off control via optional fore-vacuum channel availableFilament operation modes emission 0.1 / 1 / 10 mA (switchable, DC supply);

no filament switch at the controller, filament selection by pluggingthe pins at the gauge

Electron bombardment degas 10 … 40 W (UHV electrometer)Resistance heated degas 80 W max. (standard electrometer)Housing control unit and power supply: each Aluminium, 1/2 x 19”, 2 U,

side-by-side or remote mountingPower supply 90 ... 130 and 180 ... 260 VAC, 50/60 Hz (max. 250 W)Electrical connectors IEC plug (AC), 2 x IG plug, 2 x collector Coax, jack plug

(electrometer analog out), D-Sub (remote I/O), further connectorsdepending on configuration

Connectable passive gauges GP 274 series or compatible;GP 275 Convectron® or compatible (optional);DV-6 or compatible (optional)

Connectable active gauges capacitance diaphragm gauges (optional)Scope of delivery control unit and power supply, power cable, interconnect cable

power supply - control unit

Available in two basic versions, which differ in electrometer measurement range (standard orUHV) and degas operation (I²R or EB)Two hot cathode gauges connectable, alternate (sequential) activationControl unit and power supply in two separate chassisFront keys for direct activation of the hot cathode gauges and degasOther control elements for parameter settings behind the hinged display front panelFilament overpressure protection via auto turn off (limit programmable)Extendible controller functionality through optional modulesModules for 2 fore-vacuum channels (alternatively 2 convection Pirani gauges,2 thermocouple gauges, or 1 convection Pirani plus 1 capacitance gauge)Modules for a serial interfaceModules for process control relaysModule for additional linear analog outputs

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GP 307 Controller for Bayard-Alpert Gauges

GP 307 controller, 3-line display, sequential operation of a second gauge, remote input/output interface

Display Option - Measurement units: Power Cord Option:

PaPM mbarT Torr

DescriptionOption u

6 setpoint relays, user configurableC

DescriptionSetpoint Option z

A 2 setpoint relays for ion gauge6 setpoint relays, 2 per channelB

0 none

Description

dual thermocouple

Gauge Option y

3

1 dual Convectron®Convectron® / capacitance diaphragm gauge2

0 none

DescriptionInterface Option x

307508 – x y z – u v left mount, side-by-side with power supply for 19” rack307507 – x y z – u v half-rack mount, remote power supply

DescriptionOrder Code

C IEEE488D linear analog output

A RS232

DescriptionOrder Code307502 – x y z – u v left mount, side-by-side with power supply for 19” rack307501 – x y z – u v half-rack mount, remote power supply

RS485B

0 none

for Series 274 glass tubulated or nude (not UHV) gauges, resistive degas (I2R):

2 North America 240 V

4Universal Europe 220 V3United Kingdom 240 V

1 North America 115 VDescriptionOption v

for Series 274 nude UHV gauges with electron bombardment degas (EB), UHV electrometer (reads to 2E-11 Torr):

Optional rack-mount installation hardware (for field installation)

Order code lbl11parlbl12parlbl13parlbl14parAdapter for Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par307008 1 or 2 power supplies side-by-side307009 Power supply and control unit side-by-side307010 1 control unit on the left or right side (please specify)307011 1 control unit in the center307021 2 control units side-by-side

Gauge cables see section "Cables" at the end of this chapter.


10



GP 350 UHV Controller for Bayard-Alpert Gauges

Modular controller for one passive UHV hot cathode gauge (GP 274 series) and up to two Convectron®gauges


for convection Pirani gauges: 2 (optional module)Measurement range UHV electrometer:

1.3E-10 … 1.3 Pa | 1.3E-12 … 0.013 mbar | 1E-12 … 0.01 TorrConvectron® module (optional): 1E-2 … 1.3E+5 Pa | 1E-4 … 1330 mbar | 1E-4 … 1000 Torr

Sensitivity for N2 adjustable, 3 … 50 / TorrAccuracy of electrometer typically ± 3 % of readingUnits Pa, mbar, Torr (switchable on the module hardware)Display LED (green), 1 line per channel (mantissa 2 digits,


log-linear, 0 ... 10 V, 1 V / decadeConvectron® module (optional): log-linear, 0 ... 7 V, 1 V / decade

Setpoint relays process control module (optional): 2 relays (SPDT), 30 VAC or 30 VDC / 5 APC/RS232/RS485 module (optional): 4 relays (SPDT), 30 VDC / 2 A

Digital control inputs Fil1/2 on/off, degas on/offDigital outputs filament statusInterfaces RS232 module (optional)

PC/RS232/RS485 module (optional)Temperature range (operation) 0 ... 40 °CIonization gauge auto on/off control via Convectron channel availableFilament operation modes emission 0.1 / 1 / 10 mA, (switchtable, AC supply)Electron bombardment degas approx. 40 WHousing aluminium, 1/2 x 19”, 2 UPower supply 90 ... 130 and 200 ... 260 VAC, 50/60 Hz (max. 120 W)Electrical connectors IEC plug (AC), IG plug, collector Coax, jack plug (electrometer

analog out), D-Sub 9 pin (remote I/O), further connectorsdepending on configuration

Connectable passive gauges GP 274 series or compatible;GP 275 Convectron® or compytible (optional)

Scope of delivery unit, power cable

Controller with UHV electrometer for 1 hot cathode gaugeDegas by electron bombardment (EB)Front keys for direct activation of the hot cathode gauge (Fil1/2) and degasOther control elements for parameter settings behind the hinged display front panelFilament overpressure protection via auto turn off (limit programmable)Extendible controller functionality through optional modulesModule for 2 convection Pirani channelsModule for a serial interface (RS232 module)Module for 2 setpoint relays (process control module)Module for 2 serial interfaces and 4 setpoint relays (PC/RS232/RS485 module)

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GP 350 UHV Controller for Bayard-Alpert Gauges

GP 350 controller for 1 series 274 UHV nude ionization gauge, 1-line display, EB degas, remoteinput/output interface


North America 240 V2

Display Options - Measurement units: Power Cord Options:

M mbarPaP

T TorrDescriptionOption u

2 North America 240 V



0 noneDescriptionOption x

350509 – x – u v

350507 – x – u v half-rack mountDescriptionOrder Code

A RS232

DescriptionOrder Code350501 – x – u v half-rack mount350502 – x – u v left mount for 19-inch rack

GRS232 / RS485 (switchable) and 4 setpoint relaysF2 setpoint relays for ion gauge

0 noneDescriptionOption x

350508 – x – u v left mount for 19-inch rackcenter mount for 19-inch rack

F RS232 / RS485 (switchable) and 4 setpoint relays

350503 – x – u v center mount for 19-inch rack

M mbarPaP

T TorrDescriptionOption u

43 Universal Europe 220 V

United Kingdom 240 V

GP 350 controller, for a Series 274 nude UHV gauge and dual Convectron® Gauge operation, 3-line display, electronbombardment degas (EB), remote input/output interface:

Display Options - Measurement units: Power Cord Options:

Gauge cables see section "Cables" at the end of the chapter.


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GP 274 Glass Tubulated Bayard-Alpert Gauges

Passive hot cathode ionization gauges, medium vacuum to UHV, bifilar anode grid

Technical dataMeasurement range 4E-8 … 13 Pa | 4E-10 … 0.13 mbar | 3E-10 … 0.1 TorrMeasuring method hot cathode ionization (Bayard-Alpert)Sensitivity for N2 approx. 10 / TorrX-ray limit 4E-8 Pa | 4E-10 mbar | 3E-10 TorrAccuracy (typical) ± 20 % of readingMax. bakeout temperature 450 °CTubulation dia. 19.05 or 25.4 or 15 mm;

in Pyrex or Kovar®, or flangedEnvelope nonex glass 7720, O.D. 57 mm, L. 127 mmMounting position any, vertical recommendedFilaments (cathodes) dual, W or single, thoria coated Ir (non-replaceable)Electron bombardment degas 100 W max.Resistance heated degas 6.3 … 7.5 VAC at 10 ACathode current 4 … 6 ACathode voltage 3 … 5 VDC at +30 VDC BiasCollector potential 0 VGrid potential +180 VDCMaterials in vacuum glass, ss, W, heat resistant metal, ThO2 on Ir (if appl.)Overall Length 152 mmElectrical connectors special connectorDisplay and control units GP 307, GP 350, and othersScope of delivery gauge

Glass tubulated gauge, applicable with standard electrometer and UHV electrometerDegas by resistance heating (I2R) or electron bombardment (EB)Non-replaceable tungsten or thoria coated iridium filamentsCompatible with many controllers of other manufacturers

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Series 274 glass tubulated gauges with single thoria-coated iridium filament

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par274002 3/4 inch Pyrex glass inlet port274003 3/4 inch Kovar metal inlet port274005 1 inch Pyrex glass inlet port274006 1 inch Kovar metal inlet port274036 15 mm Pyrex glass inlet port274020 DN16CF non-rotatable, 3/4 inch port274007 DN40CF non-rotatable, 3/4 inch port274008 DN40CF non-rotatable, 1 inch port274032 DN25KF, 1 inch port

Series 274 glass tubulated gauges with dual tungsten filaments

Order code lbl11parlbl12parlbl13parlbl14parVacuum connection Vacuum connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par274037 15 mm Pyrex glass inlet port274012 3/4 inch Pyrex glass inlet port274013 3/4 inch Kovar metal inlet port274015 1 inch Pyrex glass inlet port274016 1 inch Kovar metal inlet port274021 DN16CF non-rotatable, 3/4 inch port274017 DN40CF non-rotatable, 3/4 inch port274018 DN CF non-rotatable, 1 inch port


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GP 274 Nude Bayard-Alpert Gauges

Passive hot cathode ionization gauges, medium vacuum to UHV, replaceable filament, bifilar anode

Technical dataMeasurement range 5E-8 … 13 Pa | 5E-10 … 0.13 mbar | 4E-10 … 0.1 TorrMeasuring method hot cathode ionization (Bayard-Alpert)Sensitivity for N2 approx. 10 / Torr (dependent on tube diameter)X-ray limit 5E-8 Pa | 5E-10 mbar | 4E-10 TorrAccuracy (typical) ± 20 % of readingMax. bakeout temperature 450 °CMounting position anyFilaments (cathodes) single, thoria coated Ir (replaceable)Electron bombardment degas 100 W max., 70 W nominalResistance heated degas 6.3 … 7.5 VAC at 10 ACathode current 4 … 6 ACathode voltage 3 … 5 VDC at +30 VDC BiasCollector potential 0 VGrid potential +180 VDCMaterials in vacuum stainless steel, ceramics, W, heat resistant metal, ThO2 on IrOverall Length 105 mmInsertion Length 76 mmElectrical connectors push-on pins or pin guard with locking strain reliefDisplay and control units GP 307, GP 350, and othersScope of delivery gauge

Nude gauge, applicable with standard electrometer and UHV electrometerBifilar anode gridDegas by resistance heating (I2R) or electron bombardment (EB)Replaceable thoria coated iridium filamentCompatible with many controllers of other manufacturers

Series 274 Nude gauges with single thoria-coated iridium filament

Order code Vacuumconnection

Electrical connection

274028 DN40CF for push-on pins274043 DN40CF with pin guard/locking strain relief274053 DN40KF with pin guard/locking strain relief

Accessories

Order code Description274029 Replacement filament (ThO2 coated Ir, original GP)274029-1 Replacement filament (ThO2 coated Ir)

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GP 274 Nude Bayard-Alpert UHV Gauges

Passive hot cathode ionization gauges, medium vacuum to UHV, replaceable filaments, welded anode

Technical dataMeasurement range 3E-9 … 1.3 Pa | 3E-11 … 0.013 mbar | 2E-11 … 0.01 TorrMeasuring method hot cathode ionization (Bayard-Alpert)Sensitivity for N2 approx. 25 / Torr (dependent on tube diameter)X-ray limit 3E-9 Pa | 3E-11 mbar | 2E-11 TorrAccuracy (typical) ± 20 % of readingMax. bakeout temperature 450 °CFilaments (cathodes) dual, W or dual, thoria coated Ir (replaceable)Electron bombardment degas 40 W max.Cathode current 2.5 … 3.5 A at 4 mA EmissionCathode voltage 3 … 5 VDC at +30 VDC BiasCollector potential 0 VGrid potential +180 VDCMaterials in vacuum ss, ceramic, W, heat resistant metal, ThO2 on Ir (if appl.)Overall Length 105 mmInsertion Length 76 mmElectrical connectors push-on pins or pin guard with locking strain reliefDisplay and control units GP 307, GP 350, and others

Nude gauge with extended UHV range (for UHV electrometer)Welded anode grid, degas by electron bombardment (EB) only2 replaceable tungsten or thoria coated iridium filamentsCompartible with many controllers of other manufactures

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Series 274 Nude UHV gauges with dual thoria coated iridium filaments



274023 DN40CF for push-on pins2748130 DN40KF for push-on pins274042 DN40CF with pin guard/locking strain relief274058 DN40KF with pin guard/locking strain relief

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Electrical connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par274025 Replacement filaments (ThO2 coated Ir, original GP)274025-1 Replacement filaments (ThO2 coated Ir)

Series 274 Nude UHV gauges with dual tungsten filaments



274022 DN40CF for push-on pins274050 DN40KF for push-on pins274041 DN CF with pin guard/locking strain relief274057 DN40KF with pin guard/locking strain relief

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription Electrical connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par274024 Replacement filaments (tungsten, original GP)274024-1 Replacement filaments (tungsten)


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GP 370 STABIL-ION® Controller for Bayard-Alpert Gauges

Modular controller for up to two passive hot cathode gauges (GP 370 series) and up to two fore-vacuumgauges


for fore-vacuum gauges: 2 (optional module)Measurement range UHV electrometer:

1.3E-9 … 13 Pa | 1.3E-11 … 0.13 mbar | 1E-11 … 0.1 Torrfore-vacuum modules (optional): dependent on gauge

Accuracy complete system (controller + GP 370 gauge):±4 % of reading (2E-2 … 1E-9 Torr)

Units mbar, Pa, Torr (switchable on the module hardware)Display LED (green), 1 line per channel (mantissa 3 digits,


log-linear, 0 ... 10 V, 1 V / decadeConvectron® module (optional): log-linear, 0 ... 7 V, 1 V / decadecapacitance gauge module (optional): linear, 0 ... 10 V

Setpoint relays optional: module with 2 or 6 relays (SPDT), 60 VDC / 5 ADigital control inputs IG1/2 status, IG1/2 on/off, Degas on/off, filament selection, IG gas

selection, CG gas selection, pressure range selection, etc.Interfaces optional: either RS232, RS485 or IEEE488Temperature range (operation) 0 ... 40 °CIonization gauge auto on/off control via fore-vacuum channel availableFilament operation modes emission 0.1 / 4 mA (switchable, DC supply)Electron bombardment degas 10 … 40 WHousing control unit and power supply: each Aluminium, 1/2 x 19”, 2 U,

side-by-side or remote mountingPower supply 90 ... 130 or 180 ... 260 VAC, 50/60 Hz (max. 220 W)Electrical connectors IEC plug (AC), 2 x IG plug, 2 x collector Coax, jack plug

(electrometer analog out), D-Sub 15 pin (remote I/O), D-Sub (IGremote inputs), further connectors depending on configuration

Connectable passive gauges GP 370 STABIL-ION® gauges;GP 275 Convectron® or compatible (optional)

Connectable active gauges capacitance diaphragm gauges (optional)Scope of delivery control unit and power supply, power cable, interconnect cable

power supply - control unit

Highly accurate and stable measurement system for high vacuum and UHVTwo ionization gauges series 370 connectable, alternate (sequential) activationUHV electrometer, operates both available gauge versions (extended range gauge or UHV gauge)Degas by electron bombardment (EB)Control unit and power supply in two separate chassisFront keys for direct activation of the hot cathode gauges and degasOther control elements for parameter settings behind the hinged display front panelFilament overpressure protection via auto turn off (limit programmable)Extendible controller functionality through optional modulesModules for 2 fore-vacuum channels (alternatively 2 convection Pirani gauges or 1 convectionPirani plus 1 capacitance gauge)Modules for a serial interfaceModules for process control relays

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GP 370 STABIL-ION® Controller for Bayard-Alpert Gauges

GP 370 controller, for one STABIL-ION® gauge, 3-line display, EB degas, sequential operation of asecond gauge, remote input/output interface

2 North Amerika 240 V


1 North Amerika 115 VDescriptionOption v

Display Option - Measurement units: Power Cord Option:

C

RS232

DescriptionOrder Code370501 – x y z – u v left mount, side-by-side with power supply for 19” rack370502 – x y z – u v half-rack mount, remote power supply

B RS485A

IEEE488

0 noneDescriptionInterface option x

1 dual Convectron®Convectron® / capacitance diaphragm gauge2

0 noneDescriptionGauge Option y

A 2 setpoint relays for ion gauge6 setpoint relays, 2 per channelB

0 noneDescriptionSetpoint option z

PmbarPa

MT Torr

DescriptionOption u

Optional installation hardware

Order code lbl11parlbl12parlbl13parlbl14parAdapter for Electrical connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par370008 1 or 2 power supplies side-by-side370010 1 control unit on the left or right side (please specify)370011 1 control unit in the center370021 2 control units side-by-side

Gauge cables see section "Cables" at the end of this chapter.


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GP 370 STABIL-ION® Bayard-Alpert Gauges

Passive hot cathode ionization gauges, medium vacuum to UHV

Technical dataMeasuring method hot cathode ionization (Bayard-Alpert)X-ray limit extended range gauge: 3E-8 Pa | 3E-10 mbar | 2E-10 Torr

UHV gauge: 3E-9 Pa | 3E-11 mbar | 2E-11 TorrTemperature range (operation) 0 ... 50 °CMax. bakeout temperature 150 °C (with plug and cable)

450 °C (without plug and cable)Mounting position anyFilaments (cathodes) yttr a coated iridiumNumber of filaments 2 (non-replaceable)Materials in vacuum UHV compatible, vacuum bakedElectrical connectors special connectorVacuum connection DN CFDisplay and control units GP 370 STABIL-ION® controllerScope of delivery vacuum gauge

Order code lbl11parlbl12parlbl13parlbl14parDescription Electrical connectionlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par370120 Extended range gauge (with memory module)370121 UHV range gauge (with memory module)

Precise assembly and stainless steel tube for improved reproducibilityMemory module with calibration data included

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40


Beam Flux Monitor

VACOM-BFM Beam Flux Monitor System

System for monitoring the beam equivalent pressure (B.E.P.) in MBE applications

Technical dataMeasurement channels for hot cathode gauges: 1Display range 1E-10 … 10 Pa | 1E-12 … 0.1 mbar | 1E-12 … 0.075 TorrMeasurement range controller:

1E-10 … 10 Pa | 1E-12 … 0.1 mbar | 1E-12 … 0.075 Torrgauge: 5E-9 … 4 Pa | 5E-11 … 4E-2 mbar | 3.8E-11 … 3E-2 Torr

Measuring method hot cathode ionization (Bayard-Alpert)Accuracy controller: < 1 % of reading;

gauge: ±10 % of reading (1E-8 … 1E-2 mbar)Reproducibility gauge: ±5 % of reading (1E-8 … 1E-2 mbar)Measurement rate 50 / sUnits mbar, Pa, Torr (switchable)Display LED (green), 1 line per channel (mantissa 4 digits,

exponent 2 digits), unit, relay status, Fil1/Fil2Display update rate 4 / sAnalog outputs log-linear, 0 … 10 V, 0.625 V / decadeSetpoint relays 2 relays (SPDT) per channel, 30 VDC / 1 ADigital control inputs gauge on/off, Degas on/offOperating elements 4 front keysInterfaces RS232 and RS485Temperature range (operation) 5 ... 50 °CMax. bakeout temperature vacuum system: 230 °C (with cable)Mounting position gauge: anyFilaments (cathodes) yttria coated iridiumNumber of filaments 2, replaceableFilament operation modes automatic emission control (DC supply), Fil1/Fil2/autoElectron bombardment degas start via front keys, digital input, or PCMaterials in vacuum ss, W, Y2O3 on Ir, Ta, glass ceramics, Au, Ag plated CuHousing controller: aluminium, 1/4 x 19”, 3 UMax. diameter gauge: 32 mmProtection category controller: IP 40Power supply controller: 100 ... 240 VAC, 50/60 Hz (max. 60 W)Electrical connectors controller: IEC plug (AC), D-Sub mixed pin (gauge), D-Sub 25 pin

(relays), D-Sub 9 pin (RS232 and RS485), D-Sub 15 pin (analogand digital I/O)gauge: special connector

Vacuum connection DN CFScope of delivery VACOM-BFM (complete system) containing gauge, linear shift

mechanism, controller MVC3-B0, power cable (EU); Please ordergauge cable separately.

Optimized design of the vacuum parts with minimized outgassing surfaceLinearly shiftable Bayard-Alpert ionization gauge (replaceable)Two long-life filaments (replaceable)Very low heat input into the vacuum systemEasy servicingGauge is adapted for installation in tubes > 34 mm I.D.Compact, functional gauge controller MVC3-B0High accuracy and reproducibilityIntelligent emission control for long filament service lifeDegas by electron bombardment (EB)Programmable correction factors for both filaments and gas typeFilament overpressure protection via auto turn off (limit programmable)Clearly structured front key menu for access to all functions / parametersSystem developed in cooperation with MBE usersFree LabVIEW driver available

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Beam Flux Monitor

VACOM-BFM Beam Flux Monitor System

VACOM-BFM (complete system), vacuum connection DN CF (please order gauge cable separately)

Order code lbl11parlbl12parlbl13parlbl14parDescription Home Strokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parVBX35-200H-075 VACOM-BFM 75 200VBX35-300H-100 VACOM-BFM 100 300

Other dimensions for Home and Stroke on request

Gauge cables

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBX35L05 Cable for VBX35-…, 5 mBX35L07 Cable for VBX35-…, 7 mBX35L10 Cable for VBX35-…, 10 mBX35L15 Cable for VBX35-…, 15 m

Accessories

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBX35G Replacement gauge kit with filaments (Y2O3 coated Ir)BX35F Replacement filaments (Y2O3 coated Ir)ATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9USB-RS232-KONV USB2.0/RS232 converter, USB cable 0.8 m, driver CD


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Cables

Interface Cables

Cables for RS232 communication

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9ATLPC5 RS232 interface cable, 5 m, 2 x D-Sub 9USB-RS232-KON USB2.0/RS232 converter, USB-cable 0.8 m, driver CD

Gauge Cables for MVC-3 Series, ATMIGRAF, DISPLAY ONE (for Active Vacuum Gauges)

Cables for connecting one ATMION® gauge with MVC-3 A or ATMIGRAF

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parATL3 Cable for ATMION®, 3 mATL5 Cable for ATMION®, 5 mATL10 Cable for ATMION®, 10 mATL20 Cable for ATMION®, 20 m

Cables for connecting one TTR or PTR gauge with DISPLAY ONE or MVC-3 series

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parLSL3 Cable for TTR and PTR, 3 mLSL5 Cable for TTR and PTR, 5 mLSL10 Cable for TTR and PTR, 10 mLSL15 Cable for TTR and PTR, 15 m

Cables for connecting one CVM-211 gauge with MVC-3 series

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parSSL3 Cable for CVM-211, 3 mSSL5 Cable for CVM-211, 5 mSSL10 Cable for CVM-211, 10 mSSL20 Cable for CVM-211, 20 m

Cables for connecting one CTR gauge with MVC-3 series

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parCSL3 Cable for CTR, 3 mCSL5 Cable for CTR, 5 mCSL10 Cable for CTR, 10 mCSL20 Cable for CTR, 20 m


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Cables

Gauge Cables for MVC-3 B Controllers (for Passive Vacuum Gauges)

Cables for a passive ionization gauge BARION®

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parBSL3 Cable for BARION® (up to 250 °C), 3 mBSL5 Cable for BARION® (up to 250 °C), 5 mBSL7 Cable for BARION® (up to 250 °C), 7 mBSL10 Cable for BARION® (up to 250 °C), 10 mBSL15 Cable for BARION® (up to 250 °C), 15 m

Gauge Cables for GP 307 Controllers

Cables for one glass tubulated ionization gauge series GP 274

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par307042 Cable, power supply and controller side-by-side, 3 m307043 Cable, power supply and controller side-by-side, 7.5 m307044 Cable, power supply and controller side-by-side, 15 m307030 Cable, remote mounting of power supply, 3 m307031 Cable, remote mounting of power supply, 7.5 m307032 Cable, remote mounting of power supply, 15 m

Cables for one nude ionization gauge (also UHV gauge) series GP 274, with push-on pins

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par307046 Cable, power supply and controller side-by-side, 3 m307047 Cable, power supply and controller side-by-side, 7.5 m307048 Cable, power supply and controller side-by-side, 15 m307034 Cable, remote mounting of power supply, 3 m307035 Cable, remote mounting of power supply, 7.5 m307036 Cable, remote mounting of power supply, 15 m20307-409 Cable, up to 225 °C, p.s. and ctrl. side-by-side, 10.5 m

Cables for one nude ionization gauge (also UHV gauge) series GP 274, with pin guard, locking strainrelief, for EB-Degas

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par307046-CE Cable, up to 150 °C, p.s. and ctrl. side-by-side, 3 m307047-CE Cable, up to 150 °C, p.s. and ctrl. side-by-side, 7.5 m307048-CE Cable, up to 150 °C, p.s. and ctrl. side-by-side, 15 m307034-CE Cable, up to 150 °C, remote mounting of p.s., 3 m307035-CE Cable, up to 150 °C, remote mounting of p.s., 7.5 m307036-CE Cable, up to 150 °C, remote mounting of p.s., 15 m


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Cables


Cables for one nude ionization gauge series GP 274 (not UHV gauge), with pin guard / locking strainrelief, for I2R-Degas

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par307046-CR Cable, up to 150 °C, p.s. and ctrl. side-by-side, 3 m307047-CR Cable, up to 150 °C, p.s. and ctrl. side-by-side, 7.5 m307048-CR Cable, up to 150 °C, p.s. and ctrl. side-by-side, 15 m307034-CR Cable, up to 150 °C, remote mounting of p.s., 3 m307035-CR Cable, up to 150 °C, remote mounting of p.s., 7.5 m307036-CR Cable, up to 150 °C, remote mounting of p.s., 15 m

Cables for fore-vacuum gauges

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par303040-10 Cable for 2 Convectron® gauges, 3 m303040-25 Cable for 2 Convectron® gauges, 7.5 m303040-50 Cable for 2 Convectron® gauges, 15 m307027 Cable for 1 Convectron® and 1 capacitance gauge, 3 m307028 Cable for 1 Convectron® and 1 capacitance gauge, 7.5 m307029 Cable for 1 Convectron® and 1 capacitance gauge, 15 m307054 Cable for 2 thermocouple gauges, 3 m307055 Cable for 2 thermocouple gauges, 7.5 m307056 Cable for 2 thermocouple gauges, 15 m


Cables for one nude UHV ionization gauge series GP 274 (dual filament, internal collector wire)

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par350004 with push-on pins, 3 m350005 with push-on pins, 7.5 m350006 with push-on pins, 15 m350004-C up to 150 °C, w. pin guard/locking strain relief, 3 m350005-C up to 150 °C, w. pin guard/locking strain relief, 7.5 m350006-C up to 150 °C, w. pin guard/locking strain relief, 15 m350053-20 up to 225 °C, with push-on pins, 6 m350053-30 up to 225 °C, with push-on pins, 9 m350053-50 up to 225 °C, with push-on pins, 15 m

Cables for dual Convectron® gauges

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par303040-10 Cable for 2 Convectron® gauges, 3 m303040-25 Cable for 2 Convectron® gauges, 7.5 m303040-50 Cable for 2 Convectron® gauges, 15 m


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Cables

Gauge Cables for GP 370 STABIL-ION® Controllers

Cables for one STABIL-ION® gauge

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par360116-10 Cable, power supply and controller side-by-side, 3 m360116-25 Cable, power supply and controller side-by-side, 7.5 m360116-50 Cable, power supply and controller side-by-side, 15 m360117-10 Cable, remote mounting of power supply, 3 m360117-25 Cable, remote mounting of power supply, 7.5 m

Cables for fore-vacuum gauges

Order code lbl11parlbl12parlbl13parlbl14parDescription HomeStrokelbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par307027 Cable for 1 Convectron® and 1 capacitance gauge, 3 m307028 Cable for 1 Convectron® and 1 capacitance gauge, 7.5 m307029 Cable for 1 Convectron® and 1 capacitance gauge, 15 m303040-10 Cable for 2 Convectron® gauges, 3 m303040-25 Cable for 2 Convectron® gauges, 7.5 m303040-50 Cable for 2 Convectron® gauges, 15 m


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Documents

10 Vacuum Measurement