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1-Channel-AsB Detector AsB Detector with improved low-kV Performance and faster Imaging
Upgrade Info
Contact: Dr. Ulrich Kohl-Roscher
Date: September 2015
Introduction
Increase productivity and improve image quality of your FE-
SEM by retrofitting the new
1-Channel Angle selective Backscatter (AsB) Detector.
Benefit from the high speed and increased sensitivity due to
improved detector and electronics design. The new detector
builds on the proven detection scheme of
Angle selective Backscatter detector (AsB) with a new low-
kV capable detector diode, already known from MERLIN
systems.
Availability
The 1-Channel-AsB Detector is available for the following
FE-SEM series:
• 15xx
• SUPRA series
• ULTRA series
For MERLIN series use AsB4 instead.
1-Channel-AsB Detector AsB Detector with improved low-kV Performance and faster Imaging
Benefits
• Low-kV imaging with better imaging already at 1kV
• Faster imaging compared to previous AsB detectors,
thanks to improved electronics and reduced noise
components.
• High long-term and temperature stability for particle
scanning
• Contrast Mechanisms
With its segmented detection diode and the flexible mix-
ing of signals a lot of different contrast mechanisms can
be imaged. Allowing for pure material contrast, topo-
graphic contrast or channeling contrast (see fig. 1,2).
• Ease of use
The 1-Channel-AsB Detector is completely integrated
into the pole piece of the GEMINI lens. This allows you
to image BSEs with ultra short working distances without
aligning the AsB detector to the optical axis.
Operation
The detector is fully integrated in SmartSEM.
Resolve pure Material Contrast from your Field Emission Scanning Electron Microscope (FE-SEM).
2
Upgrade Info
Figure 2
With an 1-Channel-AsB Electron Detector image in MBS mode it becomes clear that the „scratches“ are dislocations. Vertical broad shadows are orthogonal to the rolling direction.
Strain deformation in steel with razor sharp dislocations.
Upgrade path
Software SmartSEM 5.07 or higher
Hardware Requires a free detector port on
LREM
Cannot be combined with a second
detector on a multiplexer.
A system preventive maintenance performed within the last
12 months is mandatory.
The retrofit must be performed by a ZEISS-authorized
service engineer. Application training is recommended.
For further information, contact:
Part Ordering no.
Upgrade Kit AsB1 -OSE-
1-Channel-AsB Detector integrated in
the GEMINI objective lens
346006-9040-990
Figure 1
1-Channel-AsB Electron Detector diode
Figure 3
Carl Zeiss Microscopy GmbH 07745 Jena, Germany [email protected] www.zeiss.com/microscopy
EN_4
3_01
1_04
2 | C
Z-09
/201
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