87
AUTOMATED 3D CT: INDUSTRIAL DEVELOPMENTS AND TRENDS By S H Lim, Cairnhill Metrology World Metrology Day, 18 May 2012, NMC, Singapore V = 0.5 μm, 50kV, 480μA, Mode 3, 4h

02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

Embed Size (px)

Citation preview

Page 1: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

AUTOMATED 3D CT:

INDUSTRIAL

DEVELOPMENTS

AND TRENDS

By S H Lim, Cairnhill Metrology

World Metrology Day, 18 May 2012, NMC, Singapore

V = 0.5 µm, 50kV, 480µA, Mode 3, 4h

Page 2: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Outline

Introduction / Brief History

I. XCT Market & Applications

II. XCT Enabling Technologies

III. Industrial Trends and Further Work Areas

Acknowledgement

2

Page 3: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Introduction

• ‘Tomography’ comes from the Greek ‘tomos’, which means ‘slice’ –

images are taken through the volume of the object; and ‘graphein’ ,

which means ‘to write’ or record the image.

• In this presentation, “XR” = X-Ray (usually 2D); “XCT” = X-Ray

Computer Tomography, the 3D view from X-ray images. (CT and CAT,

Computer Aided Tomography, are interchangeable terms.)

• For Metrology class XCT, perhaps the term “Metro-XCT” or “MXCT”?

3

Page 4: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Wilhelm Conrad Röntgen (1845–1923), discovered electromagnetic X-radiation

on 8 Nov 1895, which won him the first Nobel Prize in Physics in 1901.

Johann Radon (1887–1956), formulated the integral transform of a function over a

straight line, the inverse transform and the transform in three-dimensions in 1917.

Godfrey Hounsfield (1919–2004) constructed a computer that could take input

from X-rays at various angles to create an image of an object in “slices”. His

prototype head scanner was successfully applied on 1 Oct 1971 on a cerebral cyst

patient in London. In 1975, he built a whole-body scanner.

Allan McLeod Cormack (1924-1998), developed the theoretical underpinnings of

CT scanning. In 1979, Hounsfield and Cormack shared the Nobel Prize for

Physiology or Medicine, for their independent contributions to XCT.

4

Milestones in History

Page 5: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Discovery

of X-rays

W.C. Röntgen

Würzburg 1895

“Ueber eine neue

Art von Strahlen.”

(“On a new kind of

rays.”)

“... dass durch die schwarze Cartonhülse,

..., ein Agens hindurchgeht, das im Stande

ist, lebhafte Fluorescenz zu erzeugen...”

(“... that through the black cartoon casing,

..., an agent is permeating, which is able to

produce vivacious fluorescence”)

Principles of X-ray Inspection

Page 6: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

What Are X-rays

X-rays are electro-magnetic radiation with wavelengths in the range of

0.01nm to 10nm (hard: 0.1 – 0.01nm; soft: 10 – 0.1nm). X-rays are

emitted by electrons outside the nucleas; Gamma rays by the nucleas.

Page 7: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Über die Bestimmung von Funktionen längs gewisser Mannigfaltigkeiten

Berichte der mathematisch-physikalischen Kl. Sächsischen Gesellschaft

der Wissenschaften 59, Leipzig 1917, S. 262

dxdyRyxyxf

Rg

)sincos(),(

)(

The Radon transform is

the set of projections for all

7

Johann Radon’s Integral Transform

Page 8: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

G.N. Hounsfield

A.M. Cormack

EMI, London

8

First Tomography System

Page 9: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Outline

Introduction & Brief History

I. XCT Market & Applications

II. XCT (Metrology) Enabling Technologies

III. Industrial Trends and Further Work Areas

Acknowledgement

9

Page 10: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Since 1971, Medical Imaging XCT complements X-ray; in turn

complemented by Nuclear-Magnetic Resonance Imaging.

• From 80’s, XCT Failure Analysis, Materials Analysis and Defects

Inspection in Aerospace, Automotive and Electronics.

• From 90’s, Online XR for Food Safety in production

• From 2006, Metrology XCT - for complex product design, early

first-article inspection (plastic injection molding), functional

analysis, 3D defects inspections and reverse engineering.

10

I. XCT Market & Applications

Page 11: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Process Pressures

• Yields Enhancements, Defects Reduction & Increased Throughput

• Environmental Drivers

• Major accidents and recall; Fear of Litigation

• Design & Functional Innovation Pressures

• Increasing Miniaturization

• Innovative Computer Aided Designs (for performance and features)

• Metrology at the Limits of Physics

Result: Early Metrology and Analysis - from Lab to Real-Time

11

XCT Market Applications: Process Drivers

Page 12: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Ham caught in seal

From L: Edge Mask, Clip Mask, Can Edge Mask and Deoxidizer Mask

L: Chipped biscuit R: Chipped sausage

12

Food XR Contaminant Detection

Page 13: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Product Presence confirmed by Density

Smart Multi-lane Production Line removes contaminants from each lane

Bulk Products Divided into 16 lanes for contaminant removal

13

Food XR Contaminant Detection

Page 14: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

•2D applications • PCBAs

• Power electronics, solar & hybrid technology

• Multilayer circuit boards

• Semiconductors & Electronics

• 3D Computed Tomography applications • Turbine & Blades

• 3D Metrology

• Material Sciences

• Biomedical

• Geology & Exploration

14

Electronics, Turbines, Material Science, Metrology, etc

Page 15: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

15 Micro-Metrology Seminar, 12 April 2012

Page 16: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

v|tome|x CT 2D ndt

systems 2D microfocus

systems Nanofocus 2D + 3D Systems

X-ray Tubes

• 3D Metrology

• Casting

• Composites

• Turbineblades

• Material

sciences

• Castings

• Electronic

assemblies

• Sensors

• OEM

• Scientific

research

• PCBA

• Multilayer

• Power

electronics

• Sensors

• Semicon-

ductors

• Sensors

• 3D Metrology

• Biomedical

• Material

sciences

• Geology

16

GE Phoenix | X-ray Products & Applications

Page 17: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Knowledge from Medical Imaging CT

2. 3D Visualisation Software

3. X-Ray Detector and Beam

4. Calibration with Tactile / Calibration Objects

5. CMM Mechanical Stability and Abbé Principles

17

II. XCT Enabling Technologies

Page 18: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

2D-CT or

Fan Beam CT

18

XCT Principle of Operation

Page 19: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Acquisition Reconstruction Surface-

extraction Analysis

• CT-System:

Source (power, focal spot size, …)

Stability (granite basis, …)

• Environment:

Temperature, vibrations, …

• User:

choice of parameters , measurement

strategy, …

• Interaction between

X-rays (Energy, spectral range, …)

Sample (material, geometry, …)

Detector (dynamic range, noise level …)

• Used algorithms

Beam hardening correction (BHC)

exact surface extraction

Process chain Factors influencing the

measurement results

Image contrast & Resolution

19

XCT System Elements

Page 20: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

20

Example of XCT Internal Set-up

Page 21: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Techniques from Medical Imaging CT

2. 3D Visualisation Software

3. X-Ray Detector and Beam

4. Calibration with Tactile / Calibration Objects

5. CMM Mechanical Stability and Abbé Principles

21

II. XCT Enabling Technologies

Page 22: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Powerful Enabler! Volume rendering (a sub-specialty of 3D Computer

Graphics) research at Heidelberg University; resulted in Volume Graphics

GmbH founded in 1997 with core VGL® voxel (VGStudio) technology

• Voxel (volumetric pixel) = a volume element representing a value on a grid in

3D space. (Pixel reps 2D data). A volume/voxel data set = 3D array of voxels

• Polygonal meshes represent the surfaces of 3D objects. Voxels represent

the surfaces and the entire internal geometries of the objects in fine details.

• Uses Windows 7 Workstations. Exports to Polyworks, Calypso, PC-DMIS

• Other 3D Visualisation Software also on market

(view movie clip)

22

3D Visualisation Software

Page 23: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

23

Page 24: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Medical Imaging CT Techniques

2. 3D Visualisation Software

3. X-Ray Detector and Beam

4. Calibration with Tactile / Calibration Objects

5. CMM Mechanical Stability and Abbé Principles

24

II. XCT Enabling Technologies

Page 25: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Image Acquisition/Contrast-Resolution/Spot Size

2. Data Reconstruction

3. Beam Artefact (Noise)

4. Accelerated Acquisition & Reconstruction Speed

5. Comparison with Synchrotron!

25

X-Ray Detector and Beam

Page 26: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Limits to High Contrast & Resolution:

• Smallest Voxel Size (FPD Detector Resolution)

• Focal Spot Size (Micro Focus / Nano Focus Tube)

• Mechanical Accuracy

• Software Algorithms (Interacts with above)

26

Image Acquisition

Page 27: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

CT slice of carbonate sample at 2 μm Voxel size

• CsI Scintillator High Spatial and Contrast Resolution

• Efficient low-noise electronics outstanding dynamic S/N ratio 10000:1

• Active temperature stabilization - optimal long term stability and linearity

Image from GE DXR Detector Image from common FPD

GE DXR Flat Panel Detector: Image Format: 1024 x 1024

or 2048 x 2048 pixel, 200µm pitch; 3092 x 2400 pixel, 100µm pitch

(Nanotom). 65,536 grey scale.

27

Image Acquisition - Detector Resolution

Page 28: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Swichable Tubes: Example 180 kV nanofocus®and

240 kV microfocus tube in one compact CT system

28

Image Acquisition – XR Tube Spot Size

Page 29: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Current

Leading

Technology Microfocus and

high-power

Nanofocus

tubes

29

Image Acquisition – XR Tube Spot Size

Page 30: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

The 4 images show the resolution using the different

modes of the high-power nanofocus tube. While the 1.5µm

line pairs in Mode0 is weakly visible, it is clearly resolved

in Mode3. The focus changed from 2.5µm to < 1µm

Leading in

Technology high-power

nanofocus tube

Mode0 Mode1 Mode2 Mode3

30

Image Acquisition – Final Resolution

Page 31: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Resolution at each mode

i.e.. smallest resolvable structures:

Mode 0: F ~ 2,5 µm ( P < 3 W )

Mode 1: F ~ 2,0 µm ( P = 2 W )

Mode 2: F ~ 1,0 µm ( P = 1 W )

Mode 3: F ~ 0,8 µm ( P = 0,8 W )

Approx values for the focal spot size as resolution limits.

31

Image Acquisition – Final Resolution

Page 32: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

System

Three contributions

from apparatus:

• voxel size V

• focal spot size F

• mechanics

U=(M-1)F

V=P/M

The focal spot size is the ultimate limit of resolution!

32

Image Acquisition – Final Resolution

Page 33: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Detector pixel size P<< U F limits resolution

Detector pixel P >> U P, i.e.V limits resolution

Hence the precondition for a final resolution A: -

• Voxel size (= pixel size / M) < A

• Focal spot size F < A

• Sample rotation is feasible at desired magnification M

33

Image Acquisition – Final Resolution (A)

Page 34: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Voxel size 1.2 µm !!

Miniature

Chess rook

(made by means of

Laser-Stereo-

Lithography)

Nominal actual

comparison

Laser Zentrum

Hannover/D

34

Image Acquisition: Nominal Actual Comparison

Page 35: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

AlMg5Si7 Alloy: Material Research, University & Industrial Metallography Labs

35

Image Acquisition – Nanotom m Performance

Page 36: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Image Acquisition / Contrast & Resolution / Spot Size

2. Data Reconstruction

3. Beam Artefact (Noise)

4. Accelerated Acquisition & Reconstruction Speed

5. Comparison with Synchrotron!

36

X-Ray Detector and Beam

Page 37: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Where does the 3D information come from?

X-ray images show the different attenuation of beams after crossing different

object areas

xI

I

eII x

0

0

ln

),;,,( phEZzyx

37

Data Reconstruction

Page 38: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

How to extract the 3D information?

Projections contain information on material distribution in the sample

Radon (simplified): starting out from an unlimited number of 2D projections of

an 3D object one can reconstruct completely this 3D object

Result (ideally):

dsZzyxI

I),,,(ln

0

),,,( Zzyx

38

Data Reconstruction

Page 39: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

4 x 4 pixels

The projections provide information of position and density of the

object features.

39

Data Reconstruction

Page 40: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

It can be shown:

ryxfyxfb

1),(),(

fb is equal to f, but blurred with 1/r

Solution: Filter projections with prior to backprojection

FRcwhereRcRgRg )(),()()('

40

Data Reconstruction

Page 41: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Example: Glow Plug

projection inversion log + filter back-projection

dsZzyxI

I),,,(ln

0

0I

I ),,,( Zzyx

41

Data Reconstruction (Real Algorithm)

Page 42: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Image Acquisition / Contrast & Resolution / Spot Size

2. Data Reconstruction

3. Beam Artefact (Noise)

4. Accelerated Acquisition & Reconstruction Speed

5. Comparison with Synchrotron!

42

X-Ray Detector and Beam

Page 43: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Beam Drift – thermal effects on tube

• Ring Artefacts – deviating detector pixel cause ring structures

randomized detector shift

• Feldkamp Artefacts – surfaces parallel to beam cannot be

properly reconstructed (algorithm) tilting the sample

• Cone Beam Artefacts (geometry) keep away from edge

• Beam Hardening (poly-energetic beam) correction

algorithms

• Partial Volume Artefacts & Other Systemic Errors

43

Beam Artefacts (Noise)

Page 44: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Rules of thumb:

Absorption

increases

with Density

Beam Hardening

Density

Increases with

Atomic Number

Periodic Table of Elements

44

Beam Artefacts Vis-à-vis Atomic Density

Page 45: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Energy Range for X-ray NDT application: 30-450kV

Material Thickness (mm)

W

ire

IQ

I (%

) Curves based on

Fe – steel

density ~7,85 g/cm3

Page 46: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Example: Aluminum Die Cast

The longer the way through the material the

harder the radiation becomes.

46

Beam Hardening

Page 47: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

130 kV Tungsten

Target

Shift of the mean energy, absorption of soft photons.

47

Beam Hardening

Page 48: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Influence of beam hardening on the extracted surface

(a) Surface without reduction

of beam hardening artefacts

(b) Surface with advanced

beam hardening correction

CT Volume data of

sphere plate

• Beam hardening correction significantly improves data quality

48

Beam Hardening – Correction Techniques (I)

Page 49: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Influence of beam hardening on the extracted surface

(a) surface without reduction

of beam hardening artefacts

(b) Surface with advanced

beam hardening correction

• Does this influence the measurement ?

49

Beam Hardening – Correction Techniques (I)

Page 50: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Influence of beam hardening on distance measurements

Strong reduction of sphere distance error E due to advanced BHC algorithm

Without BHC With Advanced BHC technique

-0.004

-0.003

-0.002

-0.001

0.000

0.001

0.002

0.003

0.004

0 5 10 15 20

Sphere distance [mm]

Length

measurm

ent E

rror

E ,

[m

m].

-0.004

-0.003

-0.002

-0.001

0.000

0.001

0.002

0.003

0.004

0.0 5.0 10.0 15.0 20.0

Sphere distance [mm]

Length

measure

ment err

or

E,

[mm

].

50

Beam Hardening – Correction Techniques (I)

Page 51: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Influence of surface extraction algorithm on probing error size for sphere plate

• probing error size PS: ISO PS8 µm, phoenix|x-ray PS4 µm

-10

-8

-6

-4

-2

0 0 2 4 6 8 10 12 14 16

PS

m]

ISO

phoenix|x-ray

51

Beam Hardening – Correction Techniques (II)

Page 52: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Image Acquisition / Contrast & Resolution / Spot Size

2. Data Reconstruction

3. Beam Artefact (Noise)

4. Accelerated Speed for Acquisition & Reconstruction

5. Comparison with Synchrotron!

52

X-Ray Detector and Beam

Page 53: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

The ESRF synchrotron is a cyclic particle accelerator (electrons emitted by an electron

gun are accelerated in Linac and transmitted to a circular Booster synchrotron, to reach

an energy level of 6 GeV (billion electron-volts), to be injected into a large storage ring,

844m in circumference, to circulate in a vacuum environment at a constant energy for

many hours. The guiding magnetic field (bending the particles into a closed path) is time-

dependent, synchronized to a particle beam of increasing kinetic energy. Bending, beam

focusing and acceleration can be separated into different components.

European Synchrotron Radiation Facility,

Grenoble, France

53

Synchrotron (Super Microscope)

Page 54: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

V = 0.5 µm, 50kV, 480µA, Mode 3, 3h

50 µm

ESRF Radiation based CT Prior state-of-the-art nanotom m

3) Stainless steel: Material Research, University & Industrial Metallography Labs

54

nanotom m Comparison with Synchrotron

Improved sharpness (+40%), increased SNR (+100%), increased contrast range and fewer artefacts due to reduced tube & detector drifts (position & correction) and high contrast detector

Rings are artefact noise

Page 55: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

With previous state-of-the art CT, it was only possible to see the steel and air inclusions!

Nanotom m shows the air and steel as well as high absorbing and low absorbing inclusions!

3) Stainless steel: Material Research, University & Industrial Metallography Labs

ESRF Radiation based CT nanotom m

CLOSEST to synchrotron CT

55

nanotom m Comparison with Synchrotron

Page 56: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Medical Imaging CT Techniques

2. 3D Visualisation Software

3. X-Ray Detector and Beam

4. Calibration with Tactile / Calibration Objects

5. CMM Mechanical Stability and Abbé Principles

56

II. XCT Enabling Technologies

Page 57: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Characteristic Values

• Probing Error Form PF = Rmax – Rmin

scattering of the surface points around the regression sphere (noise)

• Probing Error Size PS = Dm – Dr (Deviation measured from reference diameter)

surface position

• Size Measurement Error E = Lm – Lr (Deviation between measured and reference length)

measurement precision over long distances

• German guideline VDI 2630 – determination of char. values for CT (in progress)

regression sphere Rmin

Rmax PF

Da

57

Calibration with Tactile / Calibration Objects

Page 58: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Reference objects

• Traceability to national material standards through calibration

• Arrangement of spheres like above (ruby-balls on CF-stick sphere plate)

• Calibrated “sphere plate” with 16 sphere shaped calottes designed and

calibration by German National PTB.

Material: Zerodur® (near zero coefficient of thermal expansion)

Uncertainties: Positional = 1.5µm; Form = 2 µm

58

XCT Calibration Artefacts

Page 59: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Correction of the voxel size by comparing

measured with nominal value (Ball-stick)

• FOD will be set temporarily to a new value

(until restart of datos|x)

• Log file of changes is written

• Function is password-protected

• Warning is give if nom-act difference is

above 1%

date time Voxact Vox Nom FOD dFOD FDD Act User

11/25/08 16:09:36 39.997 39.984 225 -0.073 500 Brunke

11/26/08 13:50:38 7.8772 7.8598 59.999 -0.133 300 Brunke

11/26/08 16:59:01 4.107 4.1009 29.999 -0.045 300 Brunke

11/27/08 11:32:57 4.1461 4.1009 17.999 -0.196 299.999 Brunke

11/27/08 13:47:52 4.1022 4.1009 18 -0.006 299.999 Brunke

11/27/08 17:07:48 1.8555 1.8525 9 -0.015 300 Brunke

11/28/08 11:41:38 1.9087 1.8525 7.499 -0.221 250 Brunke

59

Easy Cal XCT Calibration Application

Page 60: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

University of Padova CT Tetrahedron and Pan Flute Gauge Zeiss Calibration Ref Sphere

PTB Calotte Cube QFM Cylinder

60

On-going Work on XCT Calibration Objects

Page 61: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

1. Medical Imaging CT Techniques

2. 3D Visualisation Software

3. X-Ray Detector and Beam

4. Calibration with Tactile / Calibration Objects

5. CMM Mechanical Stability and Abbé Principles

61

II. XCT Enabling Technologies

Page 62: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Mechanically sturdy construction; granite base,...

• Linear/Axial Alignments and Precision Rotary

Table. Abbé errors minimized / compensated.

• Volumetric Calibration with Traceable Cal Objects

• Environmental factors: temperature, humidity,

vibration. Good air conditioning critical for XCT.

• Comparison with Reference Laboratory CMM!

62

CMM Mechanical Stability and Abbé Principles

Page 63: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Mechanically sturdy construction; granite base,...

• Linear/Axial Alignments and Precision Rotary

Table. Abbé errors minimized / compensated.

• Volumetric Calibration with Traceable Cal Objects

• Environmental factors: temperature, humidity,

vibration. Good air conditioning critical for XCT.

• Comparison with Reference Laboratory CMM!

63

CMM Mechanical Stability and Abbé Principles

Page 64: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Test object: Aluminum casting, appr. 90x90x150 mm3

250 µm Voxelsize, BHC, optimized surface extraction

Distance of two cylinder holes, 25 measurements, tolerance 0.1 mm

CAD Nominal value: 45.015 mm

• Mean measured value: 45.015mm

• = 0.002 mm

• cg = 1.41, cgk = 1.34*

45,011 45,013 45,014 45,016 45,016

45,011 45,015 45,018 45,018 45,012

45,013 45,015 45,015 45,016 45,015

45,012 45,017 45,017 45,017 45,018

45,012 45,018 45,015 45,013 45,017

*Messprozessfähigkeit nach Bosch Heft 10

„Fähigkeit von Mess- und Prüfprozessen“

64

v|tome|x l450 Repeatability (Mechanical Accuracy)

Page 65: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• Mechanically sturdy construction; granite base,...

• Linear/Axial Alignments and Precision Rotary Table.

Abbé errors minimized / compensated.

• Volumetric Calibration with Traceable Cal Objects

• Environmental factors: temperature, humidity,

vibration. Good air conditioning critical for XCT.

• Comparison with Reference Laboratory CMM!

65

CMM Mechanical Stability and Abbé Principles

Page 66: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

phoenix v|tome|x L CT system

GE Sensing & Inspection

Al Cylinderhead model by

ACTech GmbH

v|tome|x L Vs Reference Class CMM

66

Page 67: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Leitz PMM 12106 in certified measurement room

MPE (E) = 0.8 + L/400 µm

Measurement of 40 features (distances, diameters,

angles, GD&T)

Calibrated and certified

67

Step 1: Measurement by Reference CMM

Page 68: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Leitz Ref CMM

?

CT system

Compare Results between Ref CMM and XCT

68

Page 69: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Distances

Feature tactile DKD value CT value Dev CT-tactile

1. Z09A-Z09B-A 64,9993 65,0041 0,005

2. Z09A-Z10A-A 20,0094 20,0056 -0,004

3. Z09B-Z10A-A 68,0055 68,0088 0,003

4. Z13A-Z13B-A 88,4336 88,4332 0,000

5. Z10A-Z13B-A 100,6552 100,6476 -0,008

XCT Vs Reference CMM Measurements

69

Page 70: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Diameters

Feauture tactile DKD

value CT value Dev CT-tactile

1. Z09A-DM 3,5963 3,5956 -0,001

2. Z09B-DM 3,5974 3,5952 -0,002

3. Z10A-DM 3,5962 3,5959 0,000

4. Z10B-DM 3,5949 3,5930 -0,002

5. Z13A-DM 6,0153 6,0194 0,004

6. Z13B-DM 6,0162 6,0197 0,003

7. Z14-DM 7,0033 7,0083 0,005

XCT Vs Reference CMM Measurements

70

Page 71: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

*Made of aircraft aluminium. Data courtesy

of Continental AG, Frankfurt/D, Chassis &

Safety Dept.

71

XCT Measurement of a Valve Block*

Page 72: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

real Al part

• STL measure data

• alignment

• variance analysis

Measurement Report

Measurement Report

?

72

Verification of XCT Dimensional Metrology

Page 73: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Hexagon/Leitz PMM 866

MPE (E): 0.8 µm + L/400c(L in mm)

herheit für die Prüfaufgabe: 5 µm

Measurement of 30 features (distances,

diameters, angles..) in 2 hours

73

Step 1: Measurements by Reference CMM

Page 74: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

GE/phoenix|x-ray v|tome|x L 450

Probing error size (PS): 2 + L/90 µm (L in mm)

Complete scan of the part in 30 min

74

Step 2: Measurement by High-Resolution XCT

Page 75: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Name Merkmal Einstellungen Soll Ist Tol+ Tol- Test Abw. Ist KMM Abw. CT-KMM

Ref Q Durchmesser 28,000 28,034 0,06 0,01 i.O. 0,035 28,034 0,000

Ref P Durchmesser 7,000 7,055 0,1 0 i.O. 0,055 7,054 0,001

Motorsteckerbohrung Durchmesser 10,000 10,037 0,06 0 i.O. 0,037 10,035 0,002

CT measurement: 28.0349

CMM measurement 28.0344

Diff. CT-CMM: 0.0005

Step 3: Report Creation & Results Comparison

75

Page 76: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

feature nom.

meas.

CT diff. CT meas. CMM

diff.

CT-CMM

Zyl 1175_1 11,750 11,780 0,030 11,776 0,004

Zyl 1175_2 11,750 11,775 0,025 11,775 0,000

Zyl 1175_3 11,750 11,781 0,031 11,776 0,005

Zyl 1175_4 11,750 11,773 0,023 11,776 -0,003

Zyl 1175_5 11,750 11,783 0,033 11,776 0,007

Zyl 1175_6 11,750 11,778 0,028 11,775 0,003

Zyl 1175_7 11,750 11,782 0,032 11,779 0,003

Zyl 1175_8 11,750 11,779 0,029 11,775 0,004

Zyl 1175_9 11,750 11,785 0,035 11,779 0,006

Zyl 1175_10 11,750 11,783 0,033 11,777 0,006

Zyl_EUV_1 10,750 10,760 0,010 10,766 -0,006

Zyl_EUV_2 10,750 10,761 0,011 10,767 -0,006

Zyl 1175_1 11,750 11,780 0,030 11,776 0,004

Zyl 1175_2 11,750 11,775 0,025 11,775 0,000

Step 3: Report Creation & Results Comparison

76

Page 77: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

feature type nominal meas. CT meas. CMM

Diff.

CT-CMM

Zyl_1-Zyl_4 y Distance 23,500 23,468 23,473 -0,005

Zyl_1-Zyl_4 z Distance 30,000 30,009 30,007 0,002

Zyl_1-Zyl _10 y Distance 70,500 70,442 70,447 -0,005

Zyl_1-Zyl _10 z Distance 54,500 54,521 54,519 0,002

Zyl_4-Zyl_10 y Distance 47,000 46,974 46,974 0,000

Zyl_4-Zyl_10 z Distance 24,500 24,511 24,512 -0,001

Step 3: Report Creation & Results Comparison

77

Page 78: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Test objects: sphere sticks with 40, 4 and 2mm sphere-to-sphere distance

PS = 0.0015 mm + L/3000 (L in mm) (Probing Error Size per VDI/VDE 2630!)

nanotom

78

Characteristic Values

Page 79: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Test objects: sphere sticks with 40 mm,4 mm and 2 mm sphere-to-sphere distance (+/-

4K tube temperature after 2 h Warm-up time)

• Sphere distance error < 1 µm!!

• Repositioning accuracy of linear axes < 2 µm

Nominal sphere distance 39,9844 4,1009 1,8525

Voxelsize [mm] 0,06 0,006 0,003

Allowed tolerance [mm] 0,025 0,015 0,02

Sigma [mm] 0,0006 0,0004 0,0005

cg 1,35 1,35 1,3400

79

Repeatability

nanotom

Page 80: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Rotation axis v|tome|x:

• Radial = +/- 2 µm

• Axial = +/- 2.5 µm

Rotation axis nanotom:

• Radial = +/- 0.05 µm

• Axial = +/- 0.05 µm

v|tome|x

nanotom

80

v|tome|x & nanotom Axial / Radial Accuracy

Page 81: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Outline

Introduction & Brief History

I. XCT Market Applications

II. XCT Enabling Technologies

III. Industrial Trends and Further Work Areas

Acknowledgement

81

Page 82: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• XCT advances mean new applications beyond failure / defects

analysis. 3D internal, structural and dimensional metrology for

iterative functional design-analysis now possible!

• XCT set to become a pillar of competitive manufacturing!

• Strong take up and vibrant competition will improve ROI.

• Future trends include In-Line XCT for production!

• More work on international standards and calibration artefacts.

• Safety in XCT use must not be overlooked.

82

III. Industrial Trends and Further Work Areas

Page 83: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

• ISO 15708-1 [29] Non-destructive testing - Radiation methods – Computed

tomography – Part1: Principles

• ISO 15708-2 [112] Non-destructive testing – Radiation methods – Computed

tomography – Part 2: Examination practices

• ISO/TC 213 WG10 [113] Geometrical product specifications (GPS) – Acceptance

and reverification tests for coordinate measuring machines (CMM) – Computed

tomography

• ASTM E 1695 [114] Standard test method for measurement of computed

tomography (CT) system performance

• ASTM E 1441 [115] Standard guide for computed tomography (CT) imaging

• ASTM E 1570 [116] Standard practice for computed tomographic (CT)

examination

83

Existing XCT-Related International Standards

Page 84: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Inspection System

Automatic defect analysis and -classification

Inspection volume up to 500mm x 1000mm L

Scan- and inspection times 5-10mm/s

Spatial resolution 300µm

Designed for 24/7 operation in foundries

Belt or Palette conveying systems

Interfaces to adjacent process steps

Core competence and world wide service from GE

84

Future: GE Inline-CT System Concept

Page 85: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

Acquisition Inlet Data Transfer

Identification

Outlet Data

Transfer

• Conveying thru principle

• X-ray shielding housing

• Dust proofed

• Simple Installation

• Air conditioning

85

Future: GE Inline-CT System concept

Page 86: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

2D NDT Fast 3D NDT Inline CT 3D-ADR NDT Inline-Metrology

86

GE Roadmap

(view second movie clip)

Page 87: 02. Automated 3D CT Industrial Developments & Trends (Cairnhill).pdf

World Metrology Day, 18 May 2012

Automated 3D CT Industrial Development & Trends

THANK YOU!!

Visit us at www.cairnhill.com

87