Introductory workshop of core facilities CEITEC BUT

CORE FACILITIES CEITEC BUT

05. 03. 2015

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q  Core facilities Nano and StAn – what are they?

q  Core facility team

q  Technological units

q  CF Nano – instruments, where to find devices, where to find information

q  CF StAn – instruments, where to find devices, where to find information

q  Installation of instruments

q  Research infrastructure CEITEC Nano

q  Types of users

q  Access to CEITEC Nano research infrastructure – an example for an FME student

q  Fees – operating costs

q  Why do we do this?

q  Data – how many of you there are, the things you use, how much it costs

q  Our plans

q  Discussion

q  program

OUTLINE

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CEITEC CORE FACILITIES

CF Nano

CF StAn

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§  Joined sites of Masaryk University and Brno University of Technology §  The Centre of Laboratories - operation, maintenance and development of core

facilities and their instruments and technical equipment §  Under supervision of the head of CEITEC BUT and the Laboratory Board

CORE FACILITIES Nano and StAn

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CORE FACILITIES Nano a StAn TEAM

Ing. David Škoda, Ph.D. Head of Core facility Nano, head of Centre of Laboratories Mgr. Marek Eliáš, Ph.D. Operator RNDr. Alois Nebojsa Operator Ing. Dalibor Šulc Operator Ing. Martin Buršík, Ph.D. Operator Ing. Eva Kolíbalová, Ph.D. Operator Ing. Erik Pálesch, Ph.D. Operator

Ing. Ondřej Man, Ph.D. Head of Core facility StAn Mgr. Ondřej Caha, Ph.D. Operator Ing. Jan Michalička Operator Ing. Pavla Roupcová, Ph.D. Operator Ing. Zdeněk Spotz Operator Ing. Pavel Gejdoš, Ph.D. Technician

Mgr. Kateřina Švidrnochová Core Facilities Manager Ing. Pavlína Zajícová Core Facilities Financial Manager

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TECHNOLOGICAL UNITS

X-ray diffraction:

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CF Nano - instruments In operation (on provisional premises of MU and BUT) – 16 instruments:

To be in operation by the end of 2015 (on provisional premises):

q  Atomic Layer Deposition system Fiji 200 q  Focused Ion Beam/Scanning Electron Microscope

LYRA q  Lithographic Scanning Probe Micr. Dimension Icon q  Mechanical profilometer Dektak XT q  Optical microscope MX51 q  Resist stripper NANO Plasma cleaner q  Scanning Electron Microscope/e-beam writer MIRA3 q  Scanning Near-field Optical Microscopy MV 4000 q  ScanProbeMicro+uRaman+PhLum system NTegra

Spectra q  Spectroscopic Ellipsometer IR-VASE q  Spectroscopic Ellipsometer V-VASE q  Spectroscopic reflectometer NanoCalc 2000 q  UV Direct Write Laser system DWL 66-fs q  Vacuum FTIR Vertex80v + Hyperion 3000 q  VUV spectrometer VUVAS 1000 q  Wire bonder HB 16

q  Maskless lithography system q  E-beam writer q  Coating and development system q  Mask Aligner + NIL q  Lithographic wetbench, Chemical wetbenches q  Metal-Organic CVD, Low-Pressure CVD, Plasma-

enhanced CVD q  Annealing ovens q  E-beam evaporator, Magnetron sputtering q  Reactive Ion Etching system q  Deep Reactive Ion Etching system q  Ion beam etching q  Laser cutter q  Glove box q  Semiconductor characterisation system q  Electronic measurement components q  Low Temperature Electro-Magnetic Properties q  Complex UHV systém (MBE, STM, PEEM, LEEM) q  SIMS q  XPS q  nanoSAM q  PLD + RHEED q  Experimental PECVD

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WHERE TO FIND CF Nano q  FME BUT - lab A2/518 q  Dept. of Condensed Matter Physics, Faculty of Science, MU – Kotlářská str., building no. 9 q  Since 2Q/2015 in the former FEI factory - Podnikatelská str.

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q  CEITEC Web

http://www.ceitec.eu/ceitec-but/nanofabrication-and-nanocharacterization/z1 q  CEITEC Nano Wikipedia http://cfnanomicro.fme.vutbr.cz

WHERE TO LOOK FOR INFORMATION ABOUT CF Nano

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CF StAn - INSTRUMENTS

In operation (on provisional premises): To be in operation by the end of 2015 (on provisional premises):

q  X-ray powder diffractometer Rigaku SmartLab 3kW

q  X-ray diffractometer for thin layers and

nanostructures Rigaku SmartLab 9kW

q  + chambers with controlled environment for both diffractometers

q  HR TEM FEI Titan Themis3 300 Cubed ( TEM Cs corrector, monochromator, HR EELS, EDS,

tomography, Lorentz, ...) q  HR SEM FEI Verios 460L (resolution 0,7 nm @  1-­‐15  kV,  in-­‐lens  SE/BSE,  EDS, WDS,

EBSD) q  FIB-SEM FEI Helios NanoLab 660 (resolution in e- 0,7 nm @  1-­‐15  kV,  resolution in Ga+ 2,5-4

nm @  30  kV,  in-­‐lens  SE/BSE,  EDS, EBSD, GIS, manipulator, coldstage)

q  Devices for sample preparation for TEM, SEM

and SM: Mechanical saws, sanders, polishers, etc. for SM samples,

solutions and instruments for TEM samples in regular way, ion polisher for SM and SEM samples, ion polisher for TEM samples, steamer/sputter C + Au/Pd, ...

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WHERE TO FIND CF StAn q  X-ray diffractometers – lab A3/310 at FME BUT q  Since 2Q/2015 in the former FEI factory - Podnikatelská str.

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q  CEITEC Web

http://www.ceitec.eu/ceitec-but/structural-analysis-laboratory/z3 q  CEITEC Nano Wikipedia http://cfnanomicro.fme.vutbr.cz

WHERE TO LOOK FOR INFORMATION ABOUT CF StAn

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q  Current state q  Building technical facilities – laboratories q  Provisional installation – BUT FME, MU Dept. of Condensed Matter

Physics

q  Installation of remaining instruments – discussion q  Based on sales contracts

q Q2/2015 – Q4/2015

q  Location q  Technology Park B3 (former FEI) – restoring cleanrooms, cleanness

class 100, 100 000 q MU Dept. of Condensed Matter Physics, building 9 q  BUT FME A2/518 – IPE lab

INSTRUMENT INSTALLATION

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q  Shared presentation of CF Nano, CF StAn and µCT Laboratory and LIBS 30% of lab time based on the open access principle) on national and international level

q  RI CEITEC Nano has been in operation since 2011 and maintained its place on the Czech Roadmap for large infrastructures for another period (2016 – 2020(22))

q  Strategy paper of CZR and EU regarding research, experimental development and innovations q  http://ec.europa.eu/research/infrastructures/index_en.cfm?pg=esfri-national-roadmaps

q  RI CEITEC Nano – based on OPEN ACCESS principles – unified terms for user access to core facilities

q  Advantages q  CEITEC’s international reputation q  Establishing cooperation between research subjects q  Economic support for the core facilities operation

RESEARCH INFRASTRUCTURE CEITEC NANO (RI CEITEC NANO)

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USER TYPES

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STUDENT ACCESS TO THE RESEARCH INFRASTRUCTURE

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STUDENT ACCESS TO THE RESEARCH INFRASTRUCTURE

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q  Log in the website, select CF, the ACCESS tab q  Click on the application, open the pdf, fill in, click Submit, automatically sent

to katerina.svidrnochova@ceitec.vutbr.cz q  K. Švidrnochová sends a delivery confirmation within two days via e-mail (we

are working on automatic reply) q  KŠ submits the application for technical feasibility assessment to the

supervisor, and enters the project into the system– a demonstration of the internal system – WHAT WE SEE

q  A demonstration of the user view– WHAT THE USER SEES – a progress through the booking system to the overview of the project

q  After technical assessment, KŠ arranges further steps with the user (training, contacts, grants, etc.)

q  Everything follows the rules brought into effect on 1 Mar 2015, and approved by the Laboratory Board – ACCESS TO THE RULES (CEITEC web)

q  Access to the BOOKING SYSTEM via CEITEC web – the booking system will be launched in XY minutes

q  INSTRUMENTS OVERVIEW with detailed information – click on instruments q  An appeal for suggestions for the title of the Knowledge Base – you can get

in touch via Sli.do or Facebook C E I T E C Nano Research Infrastructure q  Acknowledgement q  Satisfaction questionnaire

DEMONSTRATION OF ACCESS TO THE RESEARCH INFRASTRUCTURE

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q  Users gain access to instruments only after they have been granted the access to the research infrastructure

q  Services provided q Unaided user work on a selected device q Assisted user work on a selected device q Complete service carried out by authorised personnel

q  A reservation in the booking system is required to access any instrument q  Both users and CEITEC Nano follow the Terms of Use for the CEITEC Nano

Infrastructure for 2015 – a document explaining the relationship between the user and the research infrastructure CEITEC Nano

SUMMARY

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SERVICE FEES – OPERATING COSTS

q  Sharing the operating costs of laboratories and instruments decreases the economic burden of research groups

q  Purchasing capital-intensive and costly high-tech instruments q  Creating reserves for re-investment q  Increasing the effectivity of lab-time use

Current situation for 2015

q  Bursar’s directive, Secretary’s directive, bylaw of payments q  Informative invoices to each user since April 2015, the cost of lab time will be

calculated quarterly q  Invoices in 2015 are of informative character, the costs are covered from public

sources of STI BUT q  Starting 2016, a discussion about covering the operating costs also partly by users q  Commercial cooperation – via HS

Contact Ing. Pavlína Zajícová

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COST MATRIX

External price

Academic price Internal price

Direct costs - Personal costs - Instrument operation   consumables   spare parts   service contracts   repair and maintenance - Cleanroom costs

Indirect costs - Electricity - Clean air - Gases, etc.

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Administrative costs

- Personal costs - Travelling - Representation - Consumables

Write-offs - Purchase price/ durability/ usability time in a year

-  Bursary’s directive regarding the price calculation at BUT is expected (certified full-cost methodology)

-  STI Secretary’s directive is expected

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OPERATING COSTS CALCULATION FOR THE DEVICES

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COST MATRIX AND PRICE CALCULATION

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Mapping user activities q  Overall utilised capacity q  Overall number of users q  User mapping (CEITEC, academic, commercial) q  Science mapping (what you do, things for which we can look for grants, collaborations

we can establish – with other universities, foreign institutions) q  Utilised capacity of the devices

How it helps q  Increase in user comfort q  CEITEC’s international reputation, participation in national and international projects q  Proving to the Ministry of Education (CZR) and EU, that we are active and use the devices q  We increase our attractiveness for potential research partners q  We increase the shared know-how q  Support for purchasing new devices (also the same ones) q  Strategy for the future development of laboratories q  Finding monetary sources for laboratory operation

WHY DO WE DO THIS?

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OUR PLANS

q  24. – 25. 3. 2015 – Nanotechnology for Electronics

q  Small technology workshops

q  EDS Conference – October 2015

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DISCUSSION

CEITEC BUT c/o Brno University of Technology Technická 3058/10, 616 00 Brno Czech Republic www.ceitec.cz | core.facility@ceitec.vutbr.cz