· voltage sag performance for semiconductor facto- ries 17 SEMI F47 SEMI , ... SEMI Draft Doc....

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jsdata.co.krjsdata.co.kr/down/down.php?file=all.pdf · 02 03 Percent of Equipment Nominal Voltage Duration of Voltage Sag in Seconds SEMI F47 (80% : 1 SEC, 70% : 0.5 SEC, 50% : 0.2
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