Nano-Electronics at DIEGM In collaboration with: EU projects: –NESTOR, SINANO, PULL-NANO Italian...

Nano-Electronics at DIEGM• In collaboration with:

• EU projects: – NESTOR, SINANO, PULL-NANO

• Italian projects:– PRIN (2002, 2004, 2006)– FIRB– PNR

Nano-switches in SOI technologyEU projects: NESTOR, SINANO

balistic and quasi-balistic transport

Modeling of nano-devices

Design and Fabrication of nano-devices

Ultra-thin body Silicon On Insulator nanotransistor

EU projects:

• SINANO

• PULL-NANO

single atoms

SON MOSFET

Si channel 20nm Buried dielectrics 20nm

tox = 30 Å

Si3N4

SiO2

Poly Si

80nm

Si epi

Innovative Non Volatile Memoriesbased on localized trapping

Electrical Device Characterization

FILMATO MISURA ?

Italian Universities Nano-Electronics Team (IU.net)

• A new powerful university consortium to overcome the fragmentation of nano-electronics research in Italy

www.iunet.eu

members

Politecnico di Milano

Università di Udine

Università di PadovaUniversità di

Modena

Università di Pisa

Università di Ferrara

Università di Roma “La Sapienza”

Università di Bologna

30 staff members, approximately 30 PhD students