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7/27/2019 MKS Vacuum Measurement Brochure
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EnablingSTAINLESS STEEL FITTINGS AND VACUUM VALVESVACUUM TRANSDUCERS AND GAUGE CONTROLLER SYSTEMS
EFFLUENT MANAGEMENT SUBSYSTEMS
Innovative Process Solutions
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MKS The worlds broadest source of control productsfor todays advanced processes
MKS Instruments is a global provider of instruments, subsystems and process control solutions that measure, control,
power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance
and productivity. Our products are derived from our core competencies in pressure measurement and control, materials
delivery, gas composition analysis, electrostatic charge management, yield management, control and information
technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers
of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar
cells, data storage media, and other advanced coatings.We also leverage our technology in other markets with advanced
manufacturing applications including medical equipment, pharmaceutical manufacturing, and energy generation and
environmental monitoring.
EnablingInnovative Process Solutions
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Stainless Steel Fittings and Vacuum Valves
MKS HPS Products manufactures a complete line of stainless steel components and vacuum
valves in ISO-KF, ISO Universal, metal-sealed CF and ButtWeld versions, as well as process
piping specifically designed for biopharmaceutical applications.This product line also includes
safety shut-off valves, soft-start valves, and angle and in-line vacuum valves in heated or
unheated configurations. All MKS process components and valves are manufactured to the
highest industry cleanliness standards. In addition to its broad offering of standard components,MKS can provide custom-designed chambers and manifolds.
Stainless Steel Fittings
Series 23, 31, 76, and 88
MKS offers a wide variety of fittings and components
such as tees, crosses, elbows, tubes, flanges, end
caps, reducers, and seals in standard sizes and
configurations. These fittings are offered in theSeries 23 ButtWeld, the Series 31 ISO-KF, the
Series 76 ISO-Universal, and the Series 88 CF
components.
Heated Valves
Heated valves are designed
for use in systems where
materials can solidify on cold
surfaces and cause cloggingin the process exhaust lines.
Ranging in size from NW25
to NW100, MKS' heated
valves are available in single
or multiple stage, angle or
inline, and standard or low
profile bodies.
Single and
Multiple Stage Valves
The MKS line of single and two-
stage valves includes standard,
low profile, and metal-sealed
styles in angle and in-line
configurations. In port sizesranging from NW16 to NW160
for single stage, and NW25 to
NW100 for multiple stage,
these valves reduce particle
contamination and damage due
to sudden pressure changes.
Gauge Isolation,
Leak Check, and Specialty Valves
MKS has developed compact vacuum valves for gauge isolation
and leak checking. The Cv valve is ideal for isolating sensors or
closing off leak check ports.The IDA valve enables in situ cali-
bration of MKS Baratron manometers on a vacuum system.
MKS also offers specialty safety valves.The patented VACUUM
SENTRYvalve protects the system in the event of power failure
to the pump. The AUTO-SOFT
valve protects the vacuum systemfrom particle contamination and prevents product damage in the
event of a sudden change in the system.
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Vacuum Transducers and Gauge Controller Systems
For vacuum measurement from 10-11 to 10,000 Torr, MKS offers
a broad range of gauges, controllers and transducers, including
Pirani, convection Pirani, piezo, hot cathode, cold cathode and
new MEMS-based multi-sensor technology. The MKS line of
vacuum gauges includes the Series 900 transducers that contain
sensors and electronics combined into a single device, as well asthe traditional, easy-to-operate gauge controller/sensor combinations.
Multi-Gauge Controllers
The MKS line of multi-gauge controllers operates a combination
of sensor technologies including hot cathode, cold cathode,
Pirani, convection-enhanced Pirani, piezo, and capacitance
manometer for a very wide pressure
measurement range of 10-11 to 10,000 Torr.
Series 900
Vacuum/Pressure Transducers
MKS comprehensive line of vacuum/pressure transducers collectively
measure from 10-10 to 1500 Torr and includes MEMS-based Micro-
Pirani and piezo sensors. Their compact size, low cost, expanded
pressure measurement range and direct atmospheric pressurereadings make the Series 900 transducers an ideal solution to any
vacuum system design. Digital output and communication in a
variety of formats, in addition to analog output, make these gauges
easy to implement.
Single Gauge ControllersThe MKS line of single gauge controller sys-
tems includes Pirani, convection-enhanced
Pirani and cold cathode sensor technologies.
The controller/sensor systems can measure
from 10-10 to 1,000 Torr.
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Effluent Management Subsystems
Minimizing the buildup of residue in vacuum pumping lines pays back in improved process yield and
system uptime. MKS' HPS heaters keep reaction by-products in the vapor phase until they can be
safely collected in an appropriate trap. Detailed process understanding by our engineers, along with
a choice of heater temperatures and trap designs, allows MKS to provide the optimum Effluent
Management Subsystem solution for many corrosive processes including: LPCVD-Silicon Nitride,
LPCVD-TEOS, WCVD, SABPSG, and Metal Etch.
Traps
MKS' patented line of traps are highly-efficient and compact. Each
trap is designed for specific processes in semiconductor manufacturing.
By-products are trapped insideaway from the process, pumps,
gauging, or anything else that can be damaged or clogged by hardened
by-products. When used in conjunction with an Effluent Management
Subsystem, the results can include increased uptime, longer pump life,
safer cleaning and by-product disposal, and higher yields.
Heaters
MKS heater jackets are designed for use on
stainless steel tubing, components, and valves.
The cleanroom-compatible jackets have a unique
molded design for proper fit and easy installation.
They are manufactured from materials that heatthe piping inside, but keep the outside of the
jackets cool to the touch. Snap-on flange
insulators keep the flanges hot, eliminating cold
spots. Digital control, display and communication
of each heater temperature and set point is an
option.
Virtual Wall
The unique Virtual Wall is a patented device that provides a
nitrogen boundary layer inside vacuum lines. Vacuum foreline
and exhaust line models are available for increased uptime,
reduced particles, reduced maintenance, and improvedthroughput.
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Vacuum Technology Line Card - 3/08
HPS, Baratron, AUTO-SOFT, and VACUUM SENTRY are registered trademarks, and Cv, IDA, MicroPirani,
Effluent Management Subsystems
, and Virtual Wall
are trademarks of MKS Instruments, Inc. 2008 MKS Instruments, Inc. All rights reserved.
MKS Vacuum Technology
HPS Products
5330 Sterling Drive
Boulder, CO 80301
Tel: 303.449.9861
800.345.1967 (in USA)
Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810
Tel: 978.645.5500
800.227.8766 (in USA)
Web: www.mksinst.com
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