Measuring Microfeatures with Dense Point Clouds€¦ · Measuring Microfeatures with Dense Point...

Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de

Measuring Microfeatures with Dense Point Clouds

Scanning with tomography, microprobes and confocal or contrast variation systems

Dr.-Ing. Ingomar Schmidt

Geometries smaller than 300 µm, which cannot be reached by

“standard“ probes

Part tolerances between 1 µm – 20 µm

Independent of workpiece size

Microfeature

No difference in the possibilities compared to standard geometries

(with the right sensor )

Dimensions

Position

Form / Shape

Roughness

Measure Microfeatures

Standard sensors do not deliver enough point density, because feature form in relation to dimension is almost always worse.

Solution: Create dense point clouds by using the right sensor

technology

Measuring Point Clouds

VT-A-7-2-0301_E

Color coded Presentation

VT-A-6-4-0250_E

-Highest precision and accuracy for measurements on MICROPARTS due to one

nanometer resolution and accuracy optimized design

- MPE E1 (unid./20x): (0.15 + L /900) µm

- MPE E (3D WFP): (0.25 + L /600) µm

Werth VideoCheck® UA 400x400

The “Microfeature CMM“

Werth VideoCheck® UA 400x400 Multisensor Head

VT-A-6-6-0267_E

Highly accurate distance sensor

Werth Chromatic Focus Probe (CFP)

High precision,

telecentric optics

Werth Fiber Probe WFP

Multisensor

VT-A-10-02-0065_E

Chromatic Focus Probe

IP in Picture

Focus Variation

Werth Laser Probe

IP Scanning

IP at Picture

Grid Scanning

Werth Fiber Probe

Werth Contour Probe

Trigger Probe

Scanning

Computer Tomography

Laser Line Probe

Nano Focus Probe

Interferometer

Multisensor

VT-A-10-02-0065_E

Focus Variation

Werth Fiber Probe

Computer Tomography

Nano Focus Probe

Interferometer

3D-Patch – “Focus Variation“

VT-A-5-2-0072_E

3D-Patch – Micro Form Punch

Nano Focus Probe - Principle

VT-A-8-6-00454_E

Confocal Scanning of a Micro Form

Punch with NFP

Werth Fiber Probe WFP (Pat.) – Principle

Ball Size down to 10µm Radius

Probe in

deflected

Moving Direction

Sensor Chip

Workpiece

Probing Element

VT-A-9-02-0086_E

Developed in cooperation with PTB Braunschweig, Germany

Scanning of Micro-gears with WFP

Tooth Implant Measured

by WFP Scanning

Fiber Probe in zero position

Fiber Probe deflected

Direction of movement

Sensor Chip

Workpiece

Fiber Probe

x-/y- deflection, measured

with image processing sensor Distance

sensor

z- deflection, measured

with distance sensor

Spring leaf

suspension

Werth 3D Fiberprobe WFP Principle

Werth 3D Fiberprobe WFP Design

Werth 3D Fiber Probe WFP Results

• 3D – probing deviation: 0,15 µm* * measured on a reference sphere with VideoCheck UA and 3D correction of probing sphere form error

Error on a calibration sphere

-0,075

1 9 17 25 33position

Werth Interferometer Probe WIP

Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de 23

125 µm

0° 90°

Beam Former Unit

Fiber Carrier

Technical Data

● Sensor principle: interferometry

● Working distance: 0.01-3 mm

● Measuring range: ± 150 μm

● Probe diameter: 0.08-1 mm

● Probe length: 2.5-150 mm

● 0° up to 90° beam direction

● Probing error MPE for P1: 0.25 μm

X-Ray Tomography

VT-A-6-3-0220_E

The Microfeature CT - CMM

Computer Tomography integrated in a Multisensor Coordinate Measuring Machine

Werth TomoCheck

Measurement of an Injector Nozzle

with the Werth TomoScope®

Tomography result

VT-A-7-2-0305_E

Results can be displayed either color coded

… as values which can be measured in defined areas. This Example shows how to

measure the diameter devolution

SOFTWARE

WinWerth 3D CAD Module Online and Offline

3D CAD- Online – Control of the machine with CAD-data

Selection of an element

CNC measuring process is calculated automatically

Support of all sensors

Measuring points can be defined on patches, curves, and points

3D CAD- Offline - Programming without machine

The measuring process is shown in the graphic

VT-A-7-4-0383_E

WinWerth 3D BestFit color coded presentation of deviations

VT-A-8-11-0196_E

Result Output

Meßprotokoll

Messung in Tiefe : Seite 4

Bericht Nr. :

Kreisformabweichung

-20,0-19,0-18,0-17,0-16,0-15,0-14,0-13,0-12,0-11,0-10,0-9,0-8,0-7,0-6,0-5,0-4,0-3,0-2,0-1,00,01,02,03,0

Kreisformabweichung

1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31

Numerical Output

First Article

Inspection Report

Graphical

Presentation

3D Nominal / Actual

Comparison

2D Nominal / Actual

Comparison

Formplot

Roughness Plot Statistics

VT-A-9-11-0285_E

The integration of “scanning sensors for dense point clouds“ in Multisensor CMM‘s opens new horizons in the metrology field.

For more information see www.werth.de

Questions ?

Measuring Microfeatures with Dense Point Clouds€¦ · Measuring Microfeatures with Dense Point...

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