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AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 1
EQUIPMENT DATASHEET
Tool ID AC02 OEM/Model Mattson Aspen II
Serial Number 1010 Process ETCH - ASHING
Vintage JANUARY, 2001 Wafer Size 200 mm
Mattson – Aspen II
AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 2
EQUIPMENT DATASHEET
AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 3
EQUIPMENT DATASHEET
AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 4
EQUIPMENT DATASHEET
AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 5
EQUIPMENT DATASHEET
AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 6
EQUIPMENT DATASHEET
AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 7
EQUIPMENT DATASHEET
AG Semiconductor Services • sales@agsemiconductor.com • www.agsemiconductor.com 8
EQUIPMENT DATASHEET
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