View
220
Download
0
Category
Preview:
Citation preview
Recipe Management
(RMS)
Recipe Management
(RMS)
ManufacturingExecution
(MES)
Recipe Management
(RMS)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
Recipe Management
(RMS)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
AdvancedProcess
Control (APC)
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
AdvancedProcess
Control (APC)
Test and QAData
Collection
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
AdvancedProcess
Control (APC)
YieldAnalysis
Test and QAData
Collection
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
SchedulerAdvancedProcess
Control (APC)
YieldAnalysis
Test and QAData
Collection
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
SchedulerAdvancedProcess
Control (APC)
Cycle TimeAnalysis
(ECT Analyzers)
YieldAnalysis
Test and QAData
Collection
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
SchedulerAdvancedProcess
Control (APC)
Cycle TimeAnalysis
(ECT Analyzers)
CapacityPlanner
YieldAnalysis
Test and QAData
Collection
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
SchedulerAdvancedProcess
Control (APC)
Cycle TimeAnalysis
(ECT Analyzers)
CapacityPlanner
ProductionPlanner
YieldAnalysis
Test and QAData
Collection
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
SchedulerAdvancedProcess
Control (APC)
Cycle TimeAnalysis
(ECT Analyzers)
CapacityPlanner
ProductionPlanner
YieldAnalysis
Test and QAData
Collection
ComplianceAnalyzer
Recipe Management
(RMS)
EngineeringData
Collection (EDC)
EquipmentTracking (ET)
AutomatedMaterial
Handling (AMHS)
ManufacturingExecution
(MES)
SchedulerAdvancedProcess
Control (APC)
Cycle TimeAnalysis
(ECT Analyzers)
CapacityPlanner
ProductionPlanner
YieldAnalysis
Test and QAData
Collection
ComplianceAnalyzer
ECT vs. Tool Set Capital Cost, 14.5K WSPW of L52A
20
25
30
35
40
45
50
55
60
65
$1,440 $1,450 $1,460 $1,470 $1,480 $1,490 $1,500 $1,510 $1,520 $1,530 $1,540 $1,550 $1,560 $1,570 $1,580 $1,590 $1,600
Capital Cost of Least-Cost Tool Set (millions)
ECT
(day
s)
ECT vs. Capital Cost of Tool Set, 29.5K WSPW of L52A
20
30
40
50
60
70
80
90
2,800 2,820 2,840 2,860 2,880 2,900 2,920 2,940 2,960
Capital $ Spent on Tool Set (millions)
ECT
(day
s)
Entitlement Cycle Time vs. Tool Capital Cost for Various-Sized Fabs, L52A
2326293235384144475053565962656871747780838689929598
101104
0.093 0.094 0.095 0.096 0.097 0.098 0.099 0.100 0.101 0.102 0.103 0.104 0.105 0.106 0.107 0.108 0.109 0.110 0.111 0.112
Equipment Capital Cost per WSPW (million $)
Enti
tle
me
nt
Cyc
le T
ime
(d
ays)
12K WSPW
14.5K
17K
19.5K
24.5K
29.5K
34.5K
39.5K
44.5K
49.5K
54.5K
59.5K
Tool Capital Cost for 50 Series Flash vs. ECT and Fab Size
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
14.5 19.5 24.5 29.5 34.5 39.5 44.5 49.5 54.5 59.5
Fab Size (K WSPW)
To
ol
Ca
pit
al
Co
st
pe
r K
WS
PW
(m
illi
on
$)
ECT = 23 days
26 days
29 days
32 days
35 days
38 days
41 days
Tool capital cost vs. ECT and fab size
Prioritized
demands and
build rulesCustomer
Quotation &
Order Entry
SystemDemand
Forecast
System
Raw
Materials
SystemFactory
Floor
Systems
Bill of
Materials
System
Planning
Engine
Quotes
Queries &
OrdersOrder
Board
Factory
capabilities
and
status
Product
Availability
Product
structure
and
sourcing
rules
Material
availability
Material
requirements
Factory Plans
(start and out
schedules)
Recommended