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HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 1
COMPANY PROFILE
2 0 1 5
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ
hgs@happysolution.co.krwww.hgs.co.kr
www.happysolution.co.kr
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 2
TEL, FAX
Tel:(031)373-4689, (031)374-4689
Fax:(031)375-4689
COMPANY HAPPY GLOBAL SOLUTION CO., LTD. (HGS)
PRESIDENT
Hea Keun Yun
FOUNDED
ADDRESS
E-mail, Website
hgs@happysolution.co.krwww.hgs.co.kr
www.happysolution.co.kr
HQ in Korea: #46-3, Woesammi-ro 5beon-gil, Osan-Si, Gyeonggi-do, Korea 447-230
Aug. 10, 2006 (Incorporated on May 15, 2009)
Company Overview
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 3
TEL, FAX, Mobile
(512)419-7808 : Office(512)419-7884 : Fax (512)468-6032 : MobileAustin, Texas
COMPANY HAPPY GLOBAL SOLUTION CO., LTD. (HGS US)
PRESIDENT
FOUNDED Dec. 5th, 2012
ADDRESS
Company overview of US branch
E-mail, Website
Justin@happysolution.co.krwww.hgs.co.kr
www.happysolution.co.kr
8900 Shoal Creek Blvd., Bldg. 100, Suite 113, Austin, TX 78757
Contact Person
Hunter Lee (Austin)Justin Yun (Washington D.C. )
Yong Hugh
ADDRESS
14631 Lee Highway Suite 212Centreville, VA. 20121
TEL, FAX, Mobile
(703)815-8188 : Office(703)815-9898 : Fax(301)910-2929 : MobileWashington, D.C.
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 4
R & D Institute
R & D
President
Management Headquarters
Nat’l policy/Industrial/Commercial Project
Internal ERP Sys control, CAD
Accounting
Accounting, General Affairs
Int’l / Local Sales
C/S
Int’l/Local Robot Installation, After Sales Service
Sales/CSRobot Business
Manufacturing, Repair Sales, C/S Materials, Accounting
FFU, Pivot, Blade, Robot Analysis Sys, etc.
Overhaul
Robot (VHP+, XP, HP+, Producer, Kawasaki, etc.), HD Motor, etc.
MaterialsSalesManufacturing
Office Admin.
Organization
Sales, Overhaul Sale(Robot Overhaul, Parts Sourcing/Resale)
HGS US Branch
Sales of Industrial Robot
신규 사업부New Business
Planning, Design
Executive Director
Facility Improvement
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 5
Disassembling Hub Repair Motor Repair Assembling Performance Test
(48hrs cycle test)
Motor torque, Vibration Test Moving Repeatability Test Repeatability Test Sensor - Sensitivity : 0.01mm - X, Y, Z-axis sensing
- Measurement : Vertical, Horizontality, Height - Spec : within ±0.1mm- 48hrs repeated test
-Torque, Vibration test after repair-Electrical Status(R, L, I) Test-Coil, Resolver check
VHP+ ROBOT
VHP+ Robot is Vacuum Robot used for 200mm, 300mm ETCH, CVD, METAL Process. It is wafer transfer Robot moving Arm by 2 units of 3ph AC Servo Motor.
Repair Technology
Lead time: within 4~5 days
In repair shop
Release out
54321
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 6
Particles from upper bearing
Particles dropping down to lower bearing
Moving conditions improvement and life time extension by Cover, which is self-designed by HGS, preventing particles.
Insert Cover to prevent particles
PRODUCER ARM
Producer Arm is mainly used to 300mm CVD Process and is equipped with Robot Hub and transfer wafer in motion of Forward/Backward/Left/Right.
Repair Technology
Lead time : within 2~3 days
Disassembling
4AssemblingRepair
Assembling Cover to prevent particles w/ producer arm
Pics. of Cover equipped with producer arm
321 In repair
shop Release
outAnalysis of failure cause
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 7
Leak Check▪ Leak, Scratch check area : Hub, Top flange▪ Spec of Leak detector- 1.0e-10 He (Max.)- 1.0e-8 Vacuum Pressure(Max.)
Repair Technology
Lead Time: within 4~5days
XP ROBOT
Disassembling Hub Repair Motor RepairAssembling PerformanceTest
(48hrs cycle test)
Leak CheckOutsourcing
cleaning parts
7654321
XP Robot is Vacuum Robot used for 300mm METAL Process and it is wafer transfer Robot moving Arm by 4 units of 3ph AC Servo Motor.
Motor torque, Vibration Test
-Torque, Vibration test after repair-Electrical Status(R, L, I) Test-Coil, Resolver check
Moving Repeatability Test
- Measurement : Vertical, Horizontality, Height - Spec : within ±0.1mm- 48hrs repeated test
In repair shop
Release out
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 8
Disassembly Motor Replacement HUB and Arm Repair
Assembly Performance Test(48hrs cycle test)
Encoder Check Repeatability Test
Comparison tests for -Commend pulse -Feed back pulse -
HP ROBOT
HP Robot is Vacuum Robot used for Tool for 200mm Endura process. It is wafer transfer Robot moving an Arm by 2-axis. The robot is consisted as 2 units of Stepping motors, which is capable for precision control, and a Harmonic Gear that makes conversion with low-speed and high-torque.
Repair Technology
Lead time : within 2~3 days
입고 출고1
Sensor output Test- Sensor board lamp lights
2 43 5
- Measurement : Vertical, Horizontality, Height - Spec : within ±0.1mm- 48hrs repeated test
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 9
Repair Technology
Lead time: within 6wks
Disassembling Assembling Final InspectionRepair
KAWASAKI ROBOT
▪Wafer Transfer Robot
▪Equipment: AMAT
▪Process: CMP, CVD
▪Wafer Size: 300mm
▪Environment: ATM
▪Precision of repeatability:
within ± 0.1mm
▪CMP FI Robot 3NS411 ▪Producer FI Robot 3N 200mm Arm▪ CMP FI Controller 3NS411▪Producer FI Controller 3NS410
◆ Repair Ass’y
Outside, Functional Inspection
Disassembling-Robot,Controller
Cleaning, Replacing Parts Repair, Overhaul
Zeroing, Calibration
Cycle, Functional Test-Blade Flatness, I/O signal -Motion range, repeatability-Hand unit linear-Wafer transfer
Report-Work scope-Detailed Test Data-Replacement Parts List
4321 65
◆
Features
In repair shop
Release out
TestAnalysis of failure cause
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 10
Arm Level Path inspection Repeatability movement Vibration Measurement
- Vibration check jig- Vertical / Horizontality - Spec : ±0.1 mm- 200 times Cycle test
- Arm’s placement Repeatability check after repair
2 weeks
YASKAWA ROBOT
Disassembly Exchange part Assembly Cycle TESTRepeatability Check Cleaning
Incoming Release7654321
Parts Repair
Various kinds of Yaskawa robots could be repaired for semiconductor process.
Repair Technology
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 11HAPPY GLOBAL SOLUTION CO., LTD. Copyrightⓒ2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved. 1
MAG7 ROBOT
MAGNATRAN 7.1 MAGNATRAN 7.1 Armset
Lead time: within 1wk
Disassembling
Disassemble components (T1/T2 Assembly,
Z axis assembly)
Assembling
Adjustment Gap Calibration Data Uploading
Final InspectionRepair
Cleaning,Part Replacement
Analysis of failure cause
Visual / Functional Inspection
Test Cycle, Functional Test High/Low speed, Slippage test
Vacuum leak test.
Robot configuration I/O map data Communication
In repair shop
Releaseout
2 31 4 5 6
• Brooks Automation Vacuum
Robot
• Wafer: 200mm / 300mm
• Transfer Arm: Dual / Single
Armset
• Exchange Program Available
OEM: Inova, Altus, Jusung, IPS, Lam Research(Lam
2300), Novellus, ULVAC, etc.
Repair Technology
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 12
SOP AssemblingSOP Disassembling Performance Test
Remote Plasma Source
MKS Remote Plasma source (ASTRON Series, Revolution Series)
Lead time: within 4~5 days
In repair shop
Release out
41
ASTRON® Series ASTRON®i Siries
ASTRON®ex Series R*evolution Series
32
New Al Block & Consumable parts replacement
1
Features- Actual power monitoring through SPMS- New parts overhaul (Block, Nozzle, Board etc..)- Clean Efficiency increased through Al block internal structure alteration
New Anodizing Coating Full Auto System Test function- Repeatability test program- Key parameter testing- Auto ignition & burning test
- Coating method improvement - Protect of Worn out
Repair Technology
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 13
SOP Disassembling MOSFET Leds
Bending Jig
SOP Assembling Performance Test
RF Generator
AE, MKS RF Generator, Matching Network , Remote Plasma source DC Power Supply, Ozone Generator, Micro Wave generator.
Lead time: within 4~5 days
In repair shop
Release out
4321
AE RFG,APEX Series MKS Spectrum Series
MKS OB-1,2 Series MKS Genesis Series
- Main parts replaced (Power Pack, Drive Excite, MOS FET, Capacitor, etc.)- Lifetime extension- Test and calibration based on OEM spec.
Our strength of RF Generator and RPS Repair
Short lead time for all worldwide customers (Maximum 2 weeks) Price Competitiveness Repaired with Technical Know-how of RF and Electrical and Electronics experts A lot of repair experience with domestic and international customers
Features
Repair Technology
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 14
REMOTE PLASMA SOURCE SERIES Type Model Capacity
ASTRON® AX7650 / AX7651 / AX7657 / FI20620 / FI20620-1
2ℓ
ASTRON®i AX7670-16 / AX7670-19 / AX7670-21 /
AX7670-303ℓ
ASTRON®e AX7680 / FI80130ASTRON®ex AX7685 / FI80131 / FI80132 /
FI801334ℓ,6ℓ
ASTRON®hf-s AX7645 RH,PS 15ℓ
ASTRONhf AX7635 (LCD) 22ℓ
R*evolution AX-7690LAM-23 / AX-7690PSK-01 /AX-7690NOV-01
4ℓ,7500 W
XStream 6K / 8K
LS3200
Repair Technology
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 15
HD Motor is used to work conveyer in LCD manufacturing line. It is Ultra-high torque output of 2400N/m in max. and available to high precision position control.
HD MOTOR
Maker : SHINKO Max. torque : 2400 N/m Mass : 340kg Max. speed : 30 RPM Power : 220 V, Ø3 Max. Current : 85 A Accuracy : 0.0004˚
Moving Test Zig Mobile cart w/ lift
Pics. of
disassemble
and spread
out
Operation waveforms after repair
<Resolver tuning 후 Feedback data>
(In spec: ±10%)
Repair Technology
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 16
ELA Driver
<ELA Driver>
Feature - 100~110V ±10% Input - Control NSK Motor type : SSB014 series - Position/Torque Control
Repair Sequence - Condition check & fail parts Search - Parts, Capacitor, Resister, IC supply - Fail parts replace - Var Resistor, Capacitor turning - Circuit test - Completion test with Robot
Condition Check Parts supply Parts Replace Circuit test Completion Test
Lead time: within 1month
In repair shop
Release out
54321
Repair Technology
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 17
For unexpected Robot failure …!!
Robot Analysis System
Robot Analysis System developed to provide information and alarm of the operating conditions and status and breakdown phenomenon of the Robot, used in semiconductor and LCD equipment, and determine its own problems before they occur, so that users know.
Wafer mfg. Schedule “Facility down, Manufacturing loss”
“Increased amount of damaged wafer “
Material Loss
Personnel Loss
Production Loss
Wafer Broken!!
Home Calibration Position Error
Facility down for failure Robot
Robot Spare urgently needed
Key factor analysis for diagnosis of the robot
Analysis of key items &Optimization of the data
Display of resultafter data analysis
for Robot status
Central monitoring, On-line for each facility
“ What’s the happy solution?? ”
Wafer broken for Robot failure
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 18
Fine Warning Danger
Complete timeComplete time
Position errorPosition error
BacklashBacklash
TorqueTorque
VibrationVibration
Custom Spec
TekTek M Pos: 0.000sM Pos: 0.000sStopStop
2211
a. Torque variation
A-axisA-axis
B-axisB-axis
Moving WaveMoving Wave
PositionPosition
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 19
Configuration of Robot Analysis System
Ethernet
Driver
Capture Module1
Alarm
PC Software3
Main Module2
Central Monitoring 4
XP Robot
VHP/VHP+ Robot
Benefits for Robot Analysis System
① Detecting vibration and Torque problem of Robot
② Detecting sign of slip, particles and calibration
position error
③ Preventive maintenance by catching signs of trouble
④ Implementation of Remote integrated Control System (RCS)
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 20
Portable Robot Analysis System
Robot Model Consist of Features
VHP ROBOT
PRAS-V100• Portable diagnostic case
(1SET)
• Cable (1SET)
• S/W (1SET)XP ROBOT PRAS-X100
Pictures SpecificationBenefits
• Easy to use and carry as a portable case.
• Large size of touched-screen.
• Available to save log record with Self-
recording function autonomously without
disconnected FDC.
• Saving data to the huge storage of HDD.
(up to 50 year’s history)
• Estimate XP ROBOT in real-time.
• Update the S/W system continuously
S/W Composition
• OS : Windows7• DB : MSSQL2008• Robot analysis S/W• FDC communication
S/WH/W composition(Analysis system)
• Quad Processor MCU
• (DSP32bit/ARM32bit)
• LAN 10/100M 1CH• USB2.0 1CH• EEPROM 1Mb
<Portable analysis system>
<Diagnosed S/W screen>
• The Capture module is installed only at ordinary
times. If necessary, the portable detector can
be connected to measure.
• PRAS is utilized for a careful inspection of non
regular robots’ condition through PM cycle or
pre-alarm.
• PRAS transmits the measured data to FDC in
real-time.
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 21
Belt Analysis System
.
Driver
Capture Module
Alarm
Laptop for Analysis
Main(Calculation) Module
Comprehensive management by FDC
FDCFDC
BMSBMS
I. Main board V1.0
II. DSP Processor 150MHz
Single
III. EEPROM 1Mbit/ USB2.0
IV. LAN10/100M
V. EXT ALARM Port
VI. LED ALARM Display
Specification
제 원
• Belt Analysis System that is applied for driving parts of semiconductor and LCD facilities,
diagnoses any problem or breakdown.
• BAS detects problem autonomously before it occurs.
• Users recognize driving part’s information and BAS alerts the up-coming problem
previously to users.
Patent : Registration No. 10-2012-0106812 (September 25th 2012)Application No. 10-1223756 Analysis system of the belt and motor state with encoder (January 11th 2013)
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 22
XP HUB ASSEMBLY
• Used Facility and Process : AMAT Endura, 300mm Metal
• Part No : HGS-XPHPL(XP Hub Primary : OEM NO – 0010-
19899)
HGS-XPHAL (XP Hub Auxiliary : OEM NO – 0010-
19900)
• Production Range: All the parts (Hub Main Body, Soup, Magnet
ring, Magnet.)
• Applied Bearing : Optimized Bearings (Fala, Kaydon, RBC
etc.)
• Minimizes the impact of the particles in the high-
integrity metal process.
• Lower price competitiveness compared to OEM’s
products.
• Guarantees excellent process characteristics.
Specification
Feature
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 23
XP ELBOW
• Improved problems related with dislocated elbow
bearing.
(Drooping of elbow, particle occurrence, damage of elbow itself, and
damage of heater and blade in the process chamber, etc.)
• Semi-permanent performance guaranteed through
structural change and reinforcement of the
apparatus in the former elbow.
Prevents thermal expansion of elbow and elbow
drooping in case of vibrating in operation.
• Elbow - Part No : 0040-04682(Upper), 0040-
04680(Lower) - Material : Aluminum
• Bearing - Part No : KOYO SV5203-3ZZSTCS3 - Ball Type : Steel ball
New Type
Old Type
Specification
Feature
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 24
E HUB
• Used Process: Apply to all processes
• Bearing Contact Point: 4 Points
• Fixing Bearing: Bearing’s inner and outer races are
fixed by upper, lower unit body.
• Material : Aluminum
• Compared to normal Hub, E hub makes less particle, and same life time with upper and lower bearings.
Guaranteed longer life time and optimized operation
• By increasing the contact point of the bearing, hub’s rotating gets more stable.
(normal hub: 2 Points E-hub: 4 Points)
Lower price competitiveness compared to other companies’ products
Normal HUB E HUB
• Due to relatively short life
time of upper bearing
compared to lower bearing,
the hub’s life time gets
shorter.
• Same life time of the upper and
lower bearing.
• E hub’s life is longer than normal
hub.
FeatureSpecification
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 25
VHP Top-Flange Cooling Line
VHP Top Flange Cooling Line makes the motor bearing and hub bearing’s lifetime longer by
blocking the heat from VHP Top-Flange to the Motor.
• Material : Top-Flange(Aluminum), • Pipe : Cu Type, SUS Type • Pipe Size: 8/3• Velocity : 5m/s• Lifetime : Semi-permanent
• Optimized cooling effect which improves the process capability
• Improving Robot’s lifetime led by bearing’s longer
lifetime
• Practical and user friendly design
• Short lead time through our own design and
manufacturing, and good price competitiveness
• Impedance trend stabilized
• Motor’s lifetime improved
• CVD (Ultima, Producer SE)• ETCH• IMP• DIFF
Specification
Feature
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 26
Pivot(for VHP, HP) & any ARMS
Pivot combines the VHP ROBOT ARM and an area assembled with BLADE. HGS provides improved Belt type Pivot from the existing Gear type Pivot.
R&D, Products
Existing Gear type Pivot
Improved Belt type Pivot
Worn Gear causes Particles, Clearance
Advantages of Belt type pivot : Preventing Particles, life extension
HGS-VP2400L-TM
HGS-VP2400S-BF
Self-improved Pivot & Arms
Unit PriceUsed from
Apr. 2010
Reason for improvement
Preventing Particles, Moving Development, Service life extension
BEARING
Koyo, Kaydon
Material
Case: AluminumHandle: SUS304 Belt: Spring steel
plate
PlatingCase: Electroless NI, Handle: EP, Belt : -
Unit price
?
Used to ~ Jul. 2010
- -
BEARING
-
Material
Case: Aluminum Handle: SUS304
Belt: Spring steel plate
PlatingCase:
Handle: Belt :
Producer armUltima ARMVHP HUB ASS`YXP ARM, PivotXP HUB
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 27
HP Motor
HP motor is composed with the upper and lower motors, and is used in the Endura for
200mm process.
HP motor is installed Stepping motor(precise controlling) and Harmonic gear (low speed high
torque), and an encoder (resolution of 250).
• Phase control : 5-phase Stepping
• Max current consumption : 1.4A
• Resolution of Encoder : 250 CPR
• Resolution of Motor : 50000 PPR
• Harmonic Gear Reduction Ratio : 100:1
• Turn angle of the motor (including reducer) :
0.0072°
• High precision and high torque controlling
available
* Compatible in the Endura 200mm facility
- The same form factor with the formal motor
- The same control method and spec with the formal
motor
• Available to be more stable operation with 1/100
reducer in the low speed.
• As a new substitute about discontinued models,
the motor is possible to be maintenance and
replacement.
Specification
Feature
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 28
FFU (Fan Filter Unit)FFU mounted on the upper part of semiconductor facilities (primarily EFEM) required
high cleanliness level(Class-1) is an equipment, continuously injecting clean air. 1FAN and 2FAN type is produced in two models.
R&D, Products
Specification
• Input Power: 100~240V, 50/60Hz• Power consumption: Max 100W(1FAN), 200W(2FAN)• Max. Air flow rate: 700CFM(1Blower)• Material: Aluminum - 2T(Body), 3T(Top plate)• Noise: approx. 60dB
• Solid basic Features - 0.1um~0.2um particle Filtering - Ultralight and Firmness by Aluminum body • Periodical Filter replacement - Replacement filters can be separated from the body.• Customized-design for each facility - Implementation of adaptive design and fabrication for EFEM structure.•Cost Effectiveness - Much cost effective with the same specs. than competitor's product.
Features
• Pressure Sensor - Range: -100~3500Pa - Resolution: 0.05 Pa - Precision: 0.1%fs, 1%mv - Built-in temp. compensating circuit - Certificated: SCES047 in SWISS
•Preliminary, ULPA Filter - Glass-Fiber - Gasket: E.P.D.M - Efficiency: 99.9999816% - Certificated: ISO9001, UL
• Low Noise Brushless Motor - Long life time, Low noise - Max. RPM : 2600 - Certified: UL, CE
• Auto Fan Controller - Running mode: Auto/Manual - LCD Panel displaying running status and Error
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 29
LOCK CHAIN CLAMP
R&D, Products
The existing lock chain clamp problem: It has a no lock for preventing loose bolted joints.
Features
* The same size with the existing goods* It can be fastened with a wrench(spanner)
•Lock off -> It can be fastened to the same way as the existing Lock Clamp•Lock on -> It can be maintained the locked state while it never reverses
No bolts loosening
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 30
Consisted of
Existing materials
Complemented materialsAdvantages after
development
BODYAL Black
AnodizingAL BLACK Anodizing + Teflon
CoatingStrengthening corrosion
protection
SCREW SUS PEEKStrengthening corrosion
protectionMinimizing particle issue
SENSOR FT-KV1 (SUNX) FT-KV1 (SUNX) Localization of Sensor Align skill AMP FX-301 FX-301
End-Effector BLADE
End-Effector is a module mounted at the end of Robot Arm and sensing wafer when Foub is docking over Road-port Arm. It is developed to minimize particle issue and to strengthen corrosion protection by using complemented materials than existing ones.
R&D, Products
Senser Align Jig
Peek Screw
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 31
REPEATABILITY JIG
LEVEL & VIBRATION MEASUREMENT JIG
Measurement Jig
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 32
∆ Thermal Spray, Plasma Spay
Coating Technology in
Atmospheric Pressure
∆ Spray Coating Powder
Items Purity Particle Size
Al2O3 99.9% 100nm, 1~2um, 15~45um
Y2O3 99.9% 100nm, 1~2um, 15~45um
Al2O3-3%TiO2 99.9% 15~45 um
Al2O3-13%TiO2 99.9% 15~45 um
Al2O3-40%TiO2 99.9% 15~45 um
Al2O3-50%TiO2 99.9% 15~45 um
TiO2 99.9% 30~35 um, 50~80 um
Cr2O3 99.9% 30~35 um, 50~80 um
ZrO2-5.25%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um
ZrO2-8%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um
ZrO2-13%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um
WC-6%Co 99.9% 15~45 um
WC-12%Co 99.9% 15~45 um
WC-17%Co 99.9% 15~45 um
WC-10%Cr-4%Co 99.9% 15~45 um
Mo 99.9% 30~35 um, 50~80 um
Mo-30%NiCrBSi 99.9% 30~35 um, 50~80 um
Ni 99.9% 100nm, 1~2um, 15~45um
Ni-20%Cr 99.9% 15~45um
Cr3C2-NiCr 99.9% 30~35 um, 50~80 um
Al2O3-ZrO2 99.9% 30~35 um, 50~80 um
Al2O3-Y2O3 99.9% 100nm, 1~2um, 15~45um
Spray Coating & Sintering Powder
R&D, Products
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 33
∆ Deposition Service
∆ Physical Vapor Deposition(PVD)
∆ Product ImageEvaporation Source
Sputtering Target
Al 99.999%
Cu Cr Ti3O5Pt
Au wireZnSeITOAu wireZnS
Ti Cu
Al ITO AZO
ZnSe IGZOTiNZnONb
∆ Bonding Service
Various electronic device is fabricated by PVD process !!!
Sputtering target & Evaporation Source
R&D, Products
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Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 34
HAPPY GLOBAL SOLUTION CO., LTD.
Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ
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