View
4
Download
1
Category
Preview:
Citation preview
CONVEYOR AIR BEARING
PRODUCT SPECIFICATIONS
TABLE OF CONTENTS
CONVEYOR AIR BEARING LINE INFORMATION
Line Sheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
HIGH SPEED CONVEYOR AIR BEARINGS
Data Sheet including Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Specif ications: Vacuum Flow - 25mm H2O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
Specif ications: Vacuum Flow - 51mm H2O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Specif ications: Vacuum Flow - 76mm H2O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
Specif ications: Vacuum Flow - 102mm H2O . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8
Specif ications: Free Vacuum Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
Testing Photographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-11
LOW AIRFLOW CONVEYOR AIR BEARINGS
Data Sheet including Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-13
Specif ications: Vacuum Flow - 76mm H2O . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14
Specif ications: Vacuum Flow - 152mm H2O . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
Specif ications: Vacuum Flow - 228mm H2O . . . . . . . . . . . . . . . . . . . . . . . . . . . .16
Specif ications: Free Vacuum Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17
Testing Photograph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18
POROUS MEDIA PRECISION CHUCK
Data Sheet including Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19-20
Precision Non-Contact Chuck Test Results . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
Precision Non-Contact Chuck Performance Data: Global Flatness . . . . . . . . . . . .22
Precision Non-Contact Chuck Performance Data: Line Flatness . . . . . . . . . . . . .23
Precision Non-Contact Chuck Specif ications: Free Vacuum Flow . . . . . . . . . . . . .24
Testing Photographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .25
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
Adjustment Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .26
Low Airf low Conveyor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .27
High Speed Conveyor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .28
Rough Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .29-31
Fine Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .32
Mounting Feet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .33-34
Mounting Foot Installation Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .35
OTHER MATERIALS
Porous Media Photograph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .36
FPD Trade Show Poster (36”x24” reduced to 8.5”x11”) . . . . . . . . . . . . . . . . . . . .37
patent pending
NEW WAY AIR BEARINGS POROUS MEDIA AIR BEARING SOLUTIONS™
CONVEYOR AIR BEARING PRODUCT LINE
750mm High Speed Conveyor Air Bearings as part
of an FPD Glass Handling System with Precision Chuck
750mm Low Airflow Conveyor Air Bearings as part of an
Air Conveyor and Precision Chuck FPD Glass Handling System
Modular Air Bearings Designed Specifically for FPD Manufacturing
New Way Air Bearings now offers a line of three modular
air bearing products specifically designed to meet the
glass-handling requirements of the Flat Panel Display
(FPD) manufacturing process. This line includes flat
panel conveyor air bearings for floating glass in high
speed applications, low airflow applications, and for
applications under or near precision processes.
These solutions provide significant advantages over con-
ventional contact bearings or orifice-based air bearings,
especially for coating or AOI applications in Gen-5 or
higher manufacturing lines. Superior stiffness provides
for faster settling time and higher yield, without the
scratching or breakage typical of competitive systems.
And the larger the glass size, the bigger the advantage.
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911
www.newwayairbearings.com info@newwayairbearings.com
CONVEYOR AIR BEARINGSThe New Way Product Line
750mm High Speed Conveyor Air Bearing
New Way engineered this High Speed Conveyor Air Bearing to provide
improved non-contact control of FPD glass at high process speeds. For the best
control, air gaps should be less than 50 microns. New Way applies large
amounts of vacuum area for strong downward forces on the glass, maintaining
the smaller air gap necessary for higher stiffness and improved damping. The
large, attractive forces give excellent flattening ability that helps maintain con-
trol of the glass.
High Speed Conveyor Air Bearing
750mm Low Airflow Conveyor Air Bearing
Low Airflow Conveyor Air Bearing
New Way’s Low Flow Conveyor Air Bearings provide non-contact control
optimized for low airflow requirements. The difficulty with high fly-heights of
greater than 50 microns is that they typically result in low air film stiffness (less
control) unless they also have correspondingly high pressures and flows. By
plumbing most of the porous media face with low pressure air, and with high
pressure air only around the vacuum holes, the flow requirements are greatly
reduced. The periodic high pressure areas, preloaded by the vacuum, create
high stiffness points which stabilize the glass dynamics even at high air gaps
and low air consumption.
Porous Media Precision Chuck
New Way Porous Media Precision Chucks are engineered for use under or near
precision FPD glass processes. They provide a much higher level of precision,
stiffness, and damping than traditional air conveyors. The vacuum holes are
designed so that, with air pressure on, the flow through a vacuum hole is the
same whether there is glass over it or not. Simple and smart. This also means
that as the glass comes on and off the chuck, the vacuum pressures and air
gaps remain the same.
250x75mm Precision Chuck
The Advantages of Porous Media
Unlike conventional orifice compensation, New Way Porous Media Air Bearings
control the airflow across the entire bearing surface through millions of holes in
the porous material. Porous carbon has been found to be one of the best mate-
rials for this purpose, producing an ideal supply of uniform air pressure across
the face of the bearing while automatically restricting and damping the air flow
at the same time. The carbon surface also provides greater bearing protection
if there is an air supply failure, and allows the bearings to be moved during air
failure without damaging the support surface.
New Way Porous Media Air Bearings
S22100H750
S22100L750
S2225401
HIGH SPEED CONVEYOR AIR BEARINGpatent pending
NEW WAY AIR BEARINGS POROUS MEDIA AIR BEARING SOLUTIONS™
750mm High Speed Conveyor Air Bearing S22100H750
For the best control of FPD glass, air gaps should
be less than 50 microns. Large amounts of vacuum
area result in large downward forces on the glass
making it difficult to maintain large air gaps. The
smaller gap results in higher stiffness and improved
damping. The large, attractive forces give excellent
flattening ability that helps maintain control of the
glass. This combined with the constant low pres-
sure at the leading edge of the glass prevents the
glass from lifting off the conveyor at high speeds.
Improved Non-Contact Control of FPD Glass at High Speeds
750mm High Speed Conveyor Air Bearings as part of an Air Conveyor and Precision Chuck FPD Glass Handling System
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911
www.newwayairbearings.com info@newwayairbearings.com
HIGH SPEED CONVEYOR AIR BEARINGSpecification Drawings: 750mm Bearing
© Copyright 2005, New Way Air Bearings Printed in USA on Recycled and Recyclable Paper NWAB-05-085-A1 2005-09-14-V1-100
Maximum Allowable Pressure Supply
Do not exceed 60psi (4 atm). Failure to observe this limitation
could result in damage to the bearing and serious bodily injury.
��!CAUTION
(in H
20)
(mm
H20
)(lb
)(g
)(N
)1
25.4
00.
2511
3.3
1.11
(in)
(µm
)(p
si)
(kPa
)(S
CFM
)(S
LPM
)(S
CFM
)(S
LPM
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0.
0003
910
1.85
12.7
60.
041.
171.
0931
.00
0.00
001
0.30
653.
8911
.68
0.11
0.00
059
153.
4023
.44
0.08
2.17
1.15
32.5
00.
0001
53.
8056
6.32
10.1
20.
100.
0007
920
5.45
37.5
80.
143.
831.
1833
.50
0.00
027
6.95
486.
048.
680.
090.
0009
825
8.00
55.1
60.
216.
001.
2435
.00
0.00
039
10.0
042
2.85
7.55
0.07
0.00
118
3010
.90
75.1
50.
339.
301.
2936
.50
0.00
055
14.0
039
6.42
7.08
0.07
0.00
138
3514
.00
96.5
30.
4613
.17
1.39
39.5
00.
0006
917
.50
362.
446.
470.
060.
0015
740
17.3
011
9.28
0.65
18.5
01.
5243
.00
0.00
085
21.5
034
2.85
6.12
0.06
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
A2-
HS
1 20
05-0
9-14
-V1-
100
STIF
FNES
SIN
PU
T P
RE
SS
UR
ETE
ST L
IFT
PRES
SUR
EFL
OW
CA
UTI
ON
: Max
imum
Allo
wab
le P
ress
ure
Sup
ply
- Do
not e
xcee
d 60
psi (
4 at
m).
Failu
re to
obs
erve
this
lim
itatio
n co
uld
resu
lt in
dam
age
to th
e be
arin
g an
d se
rious
bod
ily in
jury
.
FLA
T PA
NEL
HIG
H S
PEED
CO
NVE
YOR
TES
T R
ESU
LTS
TEST
VA
CU
UM
ST
IFFN
ESS
TEST
LO
AD
LOA
D L
IFT
FLO
WV
AC
UU
MS
TIFF
NE
SS
0.00
20.0
0
40.0
0
60.0
0
80.0
0
100.
00
120.
00
140.
00
1015
2025
3035
40
Test
Lift
(µm
)
Inpu
t Pre
ssur
e (k
Pa)
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
0.00
0.05
0.10
0.15
0.20
0.25
0.30
1015
2025
3035
40
Test
Lift
(µm
)
INPU
T PR
ESSU
RE
AN
D F
LOW
STIF
FNES
SkP
aS
LPM
N/µ
m
(in H
20)
(mm
H20
)(lb
)(g
)(N
)2
50.8
00.
2511
3.3
1.11
(in)
(µm
)(p
si)
(kPa
)(S
CFM
)(S
LPM
)(S
CFM
)(S
LPM
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0.
0003
910
3.20
22.0
60.
061.
832.
0056
.50
0.00
013
3.20
932.
7616
.66
0.16
0.00
059
155.
8039
.99
0.14
3.83
2.05
58.0
00.
0002
87.
1580
7.99
14.4
30.
140.
0007
920
9.40
64.8
10.
257.
172.
1962
.00
0.00
043
10.8
068
9.43
12.3
20.
120.
0009
825
13.9
095
.84
0.45
12.8
32.
3366
.00
0.00
057
14.5
060
4.07
10.7
90.
110.
0011
830
18.1
012
4.80
0.70
19.8
32.
4970
.50
0.00
073
18.5
055
1.54
9.85
0.10
0.00
138
3523
.30
160.
651.
0830
.67
2.67
75.5
00.
0008
922
.50
507.
429.
060.
090.
0015
740
27.8
019
1.67
1.51
42.8
32.
9182
.50
0.00
104
26.5
046
9.83
8.39
0.08
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
A2-
HS
2 20
05-0
9-14
-V1-
100
STIF
FNES
STE
ST L
IFT
PRES
SUR
EFL
OW
LOA
D L
IFT
FLO
W
STIF
FNES
S TE
ST L
OA
DTE
ST V
AC
UU
M
FLA
T PA
NEL
HIG
H S
PEED
CO
NVE
YOR
TES
T R
ESU
LTS
INP
UT
PR
ES
SU
RE
VA
CU
UM
STI
FFN
ES
SC
AU
TIO
N: M
axim
um A
llow
able
Pre
ssur
e S
uppl
y - D
o no
t exc
eed
60ps
i (4
atm
). Fa
ilure
to o
bser
ve th
is li
mita
tion
coul
d re
sult
in d
amag
e to
the
bear
ing
and
serio
us b
odily
inju
ry.
Stif
fnes
s (N
/µm
)
0.00
0.05
0.10
0.15
0.20
0.25
0.30
1015
2025
3035
40
Test
Lift
(µm
)
STIF
FNES
S
0.00
50.0
0
100.
00
150.
00
200.
00
250.
00
300.
00
1015
2025
3035
40
Test
Lift
(µm
)
Inpu
t Pre
ssur
e (k
Pa)
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
INPU
T PR
ESSU
RE
AN
D F
LOW
kPa
SLP
MN
/µm
(in H
20)
(mm
H20
)(lb
)(g
)(N
)3
76.2
00.
2511
3.3
1.11
(in)
(µm
)(p
si)
(kPa
)(S
CFM
)(S
LPM
)(S
CFM
)(S
LPM
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0
.00
03
910
4.00
27.5
80.
092.
502.
4569
.50
0.00
019
4.75
1208
.14
21.5
80.
210
.00
05
915
7.45
51.3
70.
195.
502.
6374
.50
0.00
034
8.65
998.
8617
.84
0.17
0.0
00
79
2012
.40
85.4
90.
3810
.67
2.88
81.5
00.
0005
012
.80
856.
5215
.30
0.15
0.0
00
98
2517
.30
119.
280.
6418
.17
3.07
87.0
00.
0006
516
.50
746.
2113
.33
0.13
0.0
01
18
3022
.90
157.
891.
0529
.83
3.28
93.0
00.
0008
321
.00
668.
0911
.93
0.12
0.0
01
38
3529
.20
201.
331.
6747
.17
3.87
109.
500.
0009
624
.50
604.
0710
.79
0.11
0.0
01
57
4035
.20
242.
702.
4068
.00
4.31
122.
000.
0011
429
.00
576.
6110
.30
0.10
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
A2-
HS
3 20
05-0
9-14
-V1-
100
FLA
T PA
NEL
HIG
H S
PEED
CO
NVE
YOR
TES
T R
ESU
LTS
TEST
VA
CU
UM
TEST
LIF
TPR
ESSU
RE
FLO
W
STIF
FNES
S TE
ST L
OA
D
CA
UTI
ON
: Max
imum
Allo
wab
le P
ress
ure
Sup
ply
- Do
not e
xcee
d 60
psi (
4 at
m).
Failu
re to
obs
erve
this
lim
itatio
n co
uld
resu
lt in
dam
age
to th
e be
arin
g an
d se
rious
bod
ily in
jury
.
LOA
D L
IFT
FLO
WV
AC
UU
MS
TIFF
NE
SS ST
IFFN
ESS
INP
UT
PR
ES
SU
RE
0.00
50.0
0
100.
00
150.
00
200.
00
250.
00
300.
00
1015
2025
3035
40
Test
Lift
(µm
)
Inpu
t Pre
ssur
e (k
Pa)
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
Stif
fnes
s (N
/(µm
)
0.00
0.05
0.10
0.15
0.20
0.25
0.30
1015
2025
3035
40
Test
Lift
(µm
)
INPU
T PR
ESSU
RE
AN
D F
LOW
STIF
FNES
SkP
aS
LPM
N/µ
m
(in H
20)
(mm
H20
)(lb
)(g
)(N
)4
101.
600.
2511
3.3
1.11
(in)
(µm
)(p
si)
(kPa
)(S
CFM
)(S
LPM
)(S
CFM
)(S
LPM
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0.
0003
910
4.60
31.7
20.
113.
173.
2893
.00
0.00
023
5.75
1492
.41
26.6
60.
260.
0005
915
9.30
64.1
20.
257.
173.
4397
.00
0.00
038
9.75
1256
.24
22.4
40.
220.
0007
920
14.6
010
0.66
0.48
13.6
73.
6010
2.00
0.00
055
14.0
010
57.1
318
.88
0.19
0.00
098
2520
.60
142.
030.
8524
.17
4.10
116.
000.
0007
118
.00
906.
1116
.19
0.16
0.00
118
3027
.20
187.
541.
4440
.83
4.45
126.
000.
0008
722
.00
792.
8414
.16
0.14
0.00
138
3534
.20
235.
802.
2864
.67
4.80
136.
000.
0010
226
.00
704.
7512
.59
0.12
0.00
157
4040
.90
282.
003.
1589
.33
5.16
146.
000.
0012
030
.50
667.
6611
.93
0.12
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
A2-
HS
4 20
05-0
9-14
-V1-
100
STIF
FNES
STE
ST L
IFT
PRES
SUR
EFL
OW
LOA
D L
IFT
FLO
W
FLA
T PA
NEL
HIG
H S
PEED
CO
NVE
YOR
TES
T R
ESU
LTS
TEST
VA
CU
UM
ST
IFFN
ESS
TEST
LO
AD
INP
UT
PR
ES
SU
RE
VA
CU
UM
STI
FFN
ES
SC
AU
TIO
N: M
axim
um A
llow
able
Pre
ssur
e S
uppl
y - D
o no
t exc
eed
60ps
i (4
atm
). Fa
ilure
to o
bser
ve th
is li
mita
tion
coul
d re
sult
in d
amag
e to
the
bear
ing
and
serio
us b
odily
inju
ry.
0.00
50.0
0
100.
00
150.
00
200.
00
250.
00
300.
00
1015
2025
3035
40
Test
Lift
(µm
)
Inpu
t Pre
ssur
e (k
Pa)
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
Stif
fnes
s (N
/(µm
)
0.00
0.05
0.10
0.15
0.20
0.25
0.30
1015
2025
3035
40
Test
Lift
(µm
)
INPU
T PR
ESSU
RE
AN
D F
LOW
STIF
FNES
SkP
aS
LPM
N/µ
m
Met
ricPL
ENU
M
PRES
SUR
EVA
CU
UM
FLO
W
(PER
BEA
RIN
G)
(mm
H20
)(S
LPM
)
25.4
149
50.8
219
76.2
268
101.
630
712
7.0
341
152.
437
317
7.8
401
203.
242
722
8.6
449
254.
047
027
9.4
489
304.
850
7
Eng
lish PL
ENU
M
PRES
SUR
EVA
CU
UM
FLO
W
(PER
BEA
RIN
G)
(in H
20)
(SC
FM)
15.
242
7.71
39.
444
10.8
25
12.0
46
13.1
77
14.1
68
15.0
69
15.8
310
16.5
711
17.2
612
17.8
8
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
A3
2005
-09-
14-V
1-10
0
FLA
T PA
NEL
HIG
H S
PEED
CO
NVE
YOR
TES
T R
ESU
LTS
Vac
uum
Flo
w:
No G
lass
Pre
sent
0
100
200
300
400
500
600 0.
050
.010
0.0
150.
020
0.0
250.
030
0.0
350.
0
Plen
um P
ress
ure
(mm
H20
)
Vacuum Flow (SLPM)
0.00
2.00
4.00
6.00
8.00
10.0
0
12.0
0
14.0
0
16.0
0
18.0
0
20.0
0
02
46
810
1214
Plen
um P
ress
ure
(in H
20)
Vacuum Flow (SCFM)
50
Mc
Do
na
ld B
lvd
., A
sto
n,
PA
19
01
4
US
AP
ho
ne
: 6
10
-49
4-6
70
0
F
ax
: 6
10
-49
4-0
91
1
w
ww
.ne
ww
ay
air
be
ari
ng
s.c
om
50
Mc
Do
na
ld B
lvd
., A
sto
n,
PA
19
01
4
US
AP
ho
ne
: 6
10
-49
4-6
70
0
F
ax
: 6
10
-49
4-0
91
1
w
ww
.ne
ww
ay
air
be
ari
ng
s.c
om
LOW AIRFLOW CONVEYOR AIR BEARINGpatent pending
NEW WAY AIR BEARINGS POROUS MEDIA AIR BEARING SOLUTIONS™
750mm Low Airflow Conveyor Air Bearing S22100L750
The periodic high pressure areas, preloaded by the
vacuum, create high stiffness points which stabilize
the glass dynamics even at high air gaps and low
air consumption. Because the pressurized air
bleeds out of the entire bearing face it provides a
high margin of safety against glass touch-down.
Non-Contact Control Optimized for Low Airflow Requirements
750mm Low Airflow Conveyor Air Bearings as part of an Air Conveyor and Precision Chuck FPD Glass Handling System
The problem with high fly-heights (> 50 microns) is
that they typically result in low air film stiffness
(less control) unless they also have corresponding-
ly high pressures and flows. By plumbing most of
the porous media face with low pressure air, and
with high pressure air only around the vacuum
holes, the flow requirements are greatly reduced.
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911
www.newwayairbearings.com info@newwayairbearings.com
LOW AIRFLOW CONVEYOR AIR BEARINGSpecification Drawings: 750mm Bearing
Maximum Allowable Pressure Supply
Do not exceed 60psi (4 atm). Failure to observe this limitation
could result in damage to the bearing and serious bodily injury.
��!CAUTION
© Copyright 2005, New Way Air Bearings Printed in USA on Recycled and Recyclable Paper NWAB-05-085-B1 2005-09-14-V1-100
(in H
20)
(mm
H20
)3
76.2
0
(in)
(µm
)(p
si)
(kPa
)(S
CFH
)(S
LPM
)(p
si)
(kPa
)(S
CFH
)(S
LPM
)(S
CFH
)(S
LPM
)0.
0009
825
0.75
5.17
0.26
0.13
0.02
0.14
0.03
0.01
0.53
0.25
0.00
197
503.
8026
.20
1.32
0.63
0.20
1.38
0.25
0.12
1.70
0.80
`0.
0029
575
9.50
65.5
03.
661.
730.
604.
140.
650.
314.
502.
120.
0039
410
016
.85
116.
187.
683.
631.
409.
651.
350.
649.
334.
400.
0049
212
524
.90
171.
6813
.03
6.15
2.55
17.5
83.
301.
5615
.90
7.50
0.00
591
150
32.3
522
3.05
18.9
18.
934.
0027
.58
6.15
2.90
22.0
010
.38
0.00
689
175
38.4
526
5.10
24.1
611
.40
5.80
39.9
99.
754.
6027
.78
13.1
1
(in H
20)
(mm
H20
)3
76.2
0
(in)
(µm
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0.
0009
825
0.00
041
10.5
043
7.43
7.81
0.07
70.
0000
20.
5012
3.39
2.20
0.02
20.
0019
750
0.00
120
30.5
032
5.27
5.81
0.05
70.
0007
418
.90
97.2
01.
740.
017
0.00
295
750.
0020
151
.00
264.
284.
720.
046
0.00
148
37.5
080
.61
1.44
0.01
40.
0039
410
00.
0027
670
.00
211.
433.
780.
037
0.00
224
56.8
069
.98
1.25
0.01
20.
0049
212
50.
0034
888
.50
173.
773.
100.
030
0.00
303
76.9
062
.85
1.12
0.01
10.
0059
115
00.
0040
910
4.00
137.
892.
460.
024
0.00
383
97.4
057
.47
1.03
0.01
00.
0068
917
50.
0047
612
1.00
117.
462.
100.
021
0.00
467
118.
7053
.69
0.96
0.00
9
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
B2-
LF3
2005
-09-
14-V
1-10
0
LOA
D L
IFT
TEST
LIF
T P
RES
SUR
EFL
OW
PRES
SUR
EFL
OW
HIG
H P
RE
SS
UR
E
LOA
D L
IFT
VAC
UU
M F
LOW
TEST
VA
CU
UM
PR
ESSU
RE
STI
FFN
ES
S
TEST
LIF
T
LOW
PR
ES
SU
RE
STIF
FNES
SST
IFFN
ESS
HIG
H P
RE
SS
UR
E: t
est l
oad
0.25
lb /
113.
3g /
1.11
N L
OW
PR
ES
SU
RE
: tes
t loa
d 0.
12lb
/ 54
g / 0
.53N
CA
UTI
ON
: Max
imum
Allo
wab
le P
ress
ure
Sup
ply
- Do
not e
xcee
d 60
psi (
4 at
m).
Failu
re to
obs
erve
this
lim
itatio
n co
uld
resu
lt in
dam
age
to th
e be
arin
g an
d se
rious
bod
ily in
jury
.
LOW
FLO
W C
ON
VEYO
R T
EST
RES
ULT
SIN
PU
T P
RE
SS
UR
E A
ND
FLO
WTE
ST V
AC
UU
M
PRES
SUR
E
CA
UTI
ON
: Max
imum
Allo
wab
le P
ress
ure
Sup
ply
- Do
not e
xcee
d 60
psi (
4 at
m).
Failu
re to
obs
erve
this
lim
itatio
n co
uld
resu
lt in
dam
age
to th
e be
arin
g an
d se
rious
bod
ily in
jury
.
010203040
2040
6080
100
120
140
160
180
Test
Lift
(µm
)
Hig
h In
put P
ress
ure
(x10
kPa)
Hig
h In
put F
low
(SLP
M)
Low
Inpu
t Pre
ssur
e (k
Pa)
Low
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
0.00
00.
020
0.04
00.
060
0.08
00.
100
0.12
00.
140
2040
6080
100
120
140
160
180
Test
Lift
(µm
)
Hig
h P
ress
ure
Reg
ion
Stif
fnes
s (N
/µm
)Lo
w P
ress
ure
Reg
ion
Stif
fnes
s (N
/µm
)
INPU
T PR
ESSU
RE
AN
D F
LOW
kPa
SLP
MST
IFFN
ESS
N/µ
m
(in H
20)
(mm
H20
)
615
2.40
(in)
(µm
)(p
si)
(kPa
)(S
CFH
)(S
LPM
)(p
si)
(kPa
)(S
CFH
)(S
LPM
)(S
CFH
)(S
LPM
)0.
0009
825
1.30
8.96
0.48
0.23
0.03
0.21
0.02
0.01
0.73
0.34
0.00
197
506.
6045
.51
2.38
1.13
0.20
1.38
0.15
0.07
2.68
1.26
0.00
295
7515
.20
104.
806.
733.
180.
402.
760.
530.
256.
633.
130.
0039
410
026
.10
179.
9514
.04
6.63
1.00
6.89
1.23
0.58
14.3
56.
770.
0049
212
537
.70
259.
9323
.57
11.1
31.
8012
.41
2.20
1.04
23.7
011
.19
0.00
591
150
49.2
033
9.22
33.7
415
.93
2.90
19.9
93.
751.
7734
.30
16.1
9
(in H
20)
(mm
H20
)6
152.
40
(in)
(µm
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0.
0009
825
0.00
059
15.0
063
4.28
11.3
30.
111
0.00
002
0.50
123.
392.
200.
022
0.00
197
500.
0014
035
.50
437.
437.
810.
077
0.00
066
16.7
590
.92
1.62
0.01
60.
0029
575
0.00
228
58.0
037
3.10
6.66
0.06
50.
0013
834
.95
75.4
81.
350.
013
0.00
394
100
0.00
309
78.5
029
5.01
5.27
0.05
20.
0021
554
.50
66.4
41.
190.
012
0.00
492
125
0.00
384
97.5
023
0.65
4.12
0.04
00.
0029
374
.40
59.7
41.
070.
010
0.00
591
150
0.00
457
116.
0018
6.55
3.33
0.03
30.
0037
394
.65
54.6
20.
980.
010
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
B2-
LF6
2005
-09-
14-V
1-10
0
TEST
VA
CU
UM
PR
ESSU
RE
INP
UT
PR
ES
SU
RE
AN
D F
LOW
LOW
FLO
W C
ON
VEYO
R T
EST
RES
ULT
S
HIG
H P
RE
SS
UR
EC
AU
TIO
N: M
axim
um A
llow
able
Pre
ssur
e S
uppl
y - D
o no
t exc
eed
60ps
i (4
atm
). Fa
ilure
to o
bser
ve th
is li
mita
tion
coul
d re
sult
in d
amag
e to
the
bear
ing
and
serio
us b
odily
inju
ry.
STIF
FNES
SST
IFFN
ESS
HIG
H P
RE
SS
UR
E: t
est l
oad
0.25
lb /
113.
3g /
1.11
N L
OW
PR
ES
SU
RE
: tes
t loa
d 0.
12lb
/ 54
g / 0
.53N
STI
FFN
ES
STE
ST V
AC
UU
M
PRES
SUR
E
TEST
LIF
TLO
AD
LIF
T
LO
W P
RE
SS
UR
E
LOA
D L
IFT
TES
T L
IFT
PR
ESSU
RE
FLO
WPR
ESSU
RE
FLO
W
CA
UTI
ON
: Max
imum
Allo
wab
le P
ress
ure
Sup
ply
- Do
not e
xcee
d 60
psi (
4 at
m).
Failu
re to
obs
erve
this
lim
itatio
n co
uld
resu
lt in
dam
age
to th
e be
arin
g an
d se
rious
bod
ily in
jury
.
VAC
UU
M F
LOW
0510152025303540
2040
6080
100
120
140
160
180
Test
Lift
(µm
)
Hig
h In
put P
ress
ure
(x10
kPa)
Hig
h In
put F
low
(SLP
M)
Low
Inpu
t Pre
ssur
e (k
Pa)
Low
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
INPU
T PR
ESSU
RE
AN
D F
LOW
kPa
SLP
M
0.00
0
0.02
0
0.04
0
0.06
0
0.08
0
0.10
0
0.12
0
0.14
0
2040
6080
100
120
140
Test
Lift
(µm
)
Hig
h P
ress
ure
Reg
ion
Stif
fnes
s (N
/µm
)Lo
w P
ress
ure
Reg
ion
Stif
fnes
s (N
/µm
)
STIF
FNES
SN
/µm
(in H
20)
(mm
H20
)9
228.
60
(in)
(µm
)(p
si)
(kPa
)(S
CFH
)(S
LPM
)(p
si)
(kPa
)(S
CFH
)(S
LPM
)(S
CFH
)(S
LPM
)0.
0009
825
2.00
13.7
90.
690.
330.
000.
000.
000.
001.
000.
470.
0019
750
9.20
63.4
33.
551.
680.
000.
000.
000.
003.
481.
64`
0.00
295
7520
.65
142.
3810
.17
4.80
0.10
0.69
0.00
0.00
9.48
4.47
0.00
394
100
33.8
023
3.04
20.1
39.
500.
402.
760.
000.
0018
.98
8.96
0.00
492
125
47.1
432
5.02
32.0
515
.13
1.10
7.58
0.40
0.19
30.8
814
.57
(in H
20)
(mm
H20
)
922
8.60
(in)
(µm
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0.
0009
825
0.00
065
16.5
074
6.21
13.3
30.
131
0.00
000
0.00
106.
071.
890.
019
0.00
197
500.
0015
238
.50
551.
549.
850.
097
0.00
051
12.9
581
.59
1.46
0.01
40.
0029
575
0.00
240
61.0
045
3.05
8.09
0.07
90.
0012
030
.60
68.0
91.
220.
012
0.00
394
100
0.00
323
82.0
035
2.38
6.29
0.06
20.
0020
151
.00
61.6
91.
100.
011
0.00
492
125
0.00
402
102.
0027
5.77
4.93
0.04
80.
0028
271
.65
56.6
61.
010.
010
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
Prin
ted
in U
SA
on
Rec
ycle
d an
d R
ecyc
labl
e P
aper
N
WA
B-0
5-08
5-B
2-LF
9 20
05-0
9-14
-V1-
100
LOA
D L
IFT
TEST
LIF
T P
RES
SUR
EFL
OW
PRES
SUR
EFL
OW
LOA
D L
IFT
VAC
UU
M F
LOW
TEST
VA
CU
UM
PR
ESSU
RE
STI
FFN
ES
S
TEST
LIF
T
HIG
H P
RE
SS
UR
ELO
W P
RE
SS
UR
E
STIF
FNES
SST
IFFN
ESS
HIG
H P
RE
SS
UR
E: t
est l
oad
0.25
lb /
113.
3g /
1.11
N L
OW
PR
ES
SU
RE
: tes
t loa
d 0.
12lb
/ 54
g / 0
.53N
CA
UTI
ON
: Max
imum
Allo
wab
le P
ress
ure
Sup
ply
- Do
not e
xcee
d 60
psi (
4 at
m).
Failu
re to
obs
erve
this
lim
itatio
n co
uld
resu
lt in
dam
age
to th
e be
arin
g an
d se
rious
bod
ily in
jury
.
LOW
FLO
W C
ON
VEYO
R T
EST
RES
ULT
SIN
PU
T P
RE
SS
UR
E A
ND
FLO
WTE
ST V
AC
UU
M
PRES
SUR
E
CA
UTI
ON
: Max
imum
Allo
wab
le P
ress
ure
Sup
ply
- Do
not e
xcee
d 60
psi (
4 at
m).
Failu
re to
obs
erve
this
lim
itatio
n co
uld
resu
lt in
dam
age
to th
e be
arin
g an
d se
rious
bod
ily in
jury
.
0510152025303540
2040
6080
100
120
140
160
180
Test
Lift
(µm
)
Hig
h In
put P
ress
ure
(x10
kPa)
Hig
h In
put F
low
(SLP
M)
Low
Inpu
t Pre
ssur
e (k
Pa)
Low
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
0.00
0
0.02
0
0.04
0
0.06
0
0.08
0
0.10
0
0.12
0
0.14
0
2040
6080
100
120
Test
Lift
(µm
)
Hig
h P
ress
ure
Reg
ion
Stif
fnes
s (N
/µm
)Lo
w P
ress
ure
Reg
ion
Stif
fnes
s (N
/µm
)
INPU
T PR
ESSU
RE
AN
D F
LOW
kPa
SLP
MST
IFFN
ESS
N/µ
m
MetricPLENUM
PRESSUREVACUUM FLOW (PER BEARING)
(mm H20) (SLPM)
25.4 4550.8 7276.2 97
101.6 118127.0 133152.4 145177.8 155203.2 165228.6 174254.0 184279.4 193304.8 202330.2 211355.6 220381.0 229406.4 237431.8 245457.2 252
EnglishPLENUM
PRESSUREVACUUM FLOW (PER BEARING)
(in H20) (SCFM)
1 1.592 2.543 3.424 4.155 4.696 5.127 5.478 5.829 6.14
10 6.4811 6.8012 7.1113 7.4314 7.7515 8.0716 8.3717 8.6518 8.90
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911www.newwayairbearings.com info@newwayairbearings.com
© Copyright 2005, New Way Air Bearings Printed in USA on Recycled and Recyclable Paper NWAB-05-085-B3 2005-09-14-V1-100
LOW FLOW CONVEYOR TEST RESULTSVacuum Flow: No Glass Present
0
50
100
150
200
250
300
0 50 100 150 200 250 300 350 400 450 500
Plenum Pressure (mm H20)
Vacu
um F
low
(SLP
M)
0.00
1.00
2.00
3.00
4.00
5.00
6.00
7.00
8.00
9.00
10.00
0 2 4 6 8 10 12 14 16 18 20
Plenum Pressure (in H20)
Vacu
um F
low
(SC
FM)
50
Mc
Do
na
ld B
lvd
., A
sto
n,
PA
19
01
4
US
AP
ho
ne
: 6
10
-49
4-6
70
0
F
ax
: 6
10
-49
4-0
91
1
w
ww
.ne
ww
ay
air
be
ari
ng
s.c
om
POROUS MEDIA PRECISION CHUCKpatent pending
NEW WAY AIR BEARINGS POROUS MEDIA AIR BEARING SOLUTIONS™
250x75mm Precision Chuck S2225401
and off the chuck, the vacuum pressures and air
gaps remain the same.
By being able to move the glass over an array of
Precision Chucks, large substrate sized vacuum
chucks are eliminated. Also, the high pressure air
exiting the gap prevents back-side damage from
contamination between the chuck and the glass.
Non-Contact Control of FPD Glass in Precision Processing
Porous Media Precision Chuck shown with New Way Air Conveyors in a FPD Glass Handling System
New Way Porous Media Precision Chucks are for
use under or near precision processes. They pos-
sess much higher level of precision, stiffness, and
damping than traditional air conveyors. The vacuum
holes are designed so that, with air pressure on,
the flow through a vacuum hole is the same
whether there is glass over it or not. Simple and
smart. This also means that as the glass comes on
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911
www.newwayairbearings.com info@newwayairbearings.com
POROUS MEDIA PRECISION CHUCKSpecification Drawings
© Copyright 2006, New Way Air Bearings Printed in USA on Recycled and Recyclable Paper NWAB-06-074-C1 2006-03-23-V1-100
(IN./H
2O)
(mm
/H2O
)(lb
)(g
)(N
)45
.511
57.0
00.
2511
3.3
1.11
(in)
(µm
)(p
si)
(kPa
)(S
CFM
)(S
LPM
)(S
CFM
)(S
LPM
)(in
)(µ
m)
(lb/in
)(g
/µm
)(N
/µm
)0.
0000
00
0.00
0.00
0.00
00.
000.
012
0.33
0.00
000
0.00
020
52.
9019
.99
0.02
10.
600.
022
0.62
0.00
010
2.65
2699
.05
48.2
10.
470.
0003
910
7.40
51.0
20.
062
1.76
0.04
31.
210.
0002
87.
1522
25.5
339
.75
0.39
0.00
059
1513
.50
93.0
80.
132
3.75
0.08
02.
260.
0004
511
.55
1838
.48
32.8
40.
320.
0007
920
21.3
014
6.86
0.23
46.
640.
139
3.95
0.00
063
15.9
015
47.0
127
.63
0.27
0.00
098
2529
.55
203.
740.
355
10.0
50.
222
6.30
0.00
079
20.1
513
07.7
823
.36
0.23
0.00
118
3038
.80
267.
520.
459
13.0
00.
311
8.81
0.00
096
24.3
011
12.7
619
.88
0.19
0.00
138
3546
.90
323.
360.
411
11.6
40.
0011
128
.10
919.
2416
.42
0.16
50 M
cDon
ald
Blv
d., A
ston
, PA
190
14 U
SA
Pho
ne: 6
10-4
94-6
700
F
ax: 6
10-4
94-0
911
ww
w.n
eww
ayai
rbea
rings
.com
info
@ne
ww
ayai
rbea
rings
.com
© C
opyr
ight
200
5, N
ew W
ay A
ir B
earin
gs
P
rinte
d in
US
A o
n R
ecyc
led
and
Rec
ycla
ble
Pap
er
NW
AB
-05-
085-
C2
2005
-09-
14-V
1-H
20-1
00
STIF
FNES
S TE
ST L
OA
DTE
ST V
AC
UU
M
PREC
ISIO
N N
ON
-CO
NTA
CT
CH
UC
K T
EST
RES
ULT
S
INP
UT
PR
ES
SU
RE
VA
CU
UM
STI
FFN
ES
S STIF
FNES
STE
ST L
IFT
PRES
SUR
EFL
OW
LOA
D L
IFT
FLO
W
05101520253035
05
1015
2025
3035
Test
Lift
(µm
)
Inpu
t Pre
ssur
e (x
10 k
Pa)
Inpu
t Flo
w (S
LPM
)V
acuu
m F
low
(SLP
M)
Stif
fnes
s (N
/µm
)
0.15
0.20
0.25
0.30
0.35
0.40
0.45
0.50
05
1015
2025
3035
Test
Lift
(µm
)
INPU
T PR
ESSU
RE
AN
D F
LOW
STIF
FNES
SkP
aS
LPM
N/µ
m
Metric
PLENUM PRESSURE
VACUUM FLOW (PER BEARING)
(mm Hg) (SLPM)38.1 1540.6 1643.2 1645.7 1748.3 1750.8 1853.3 1955.9 1958.4 2061.0 2063.5 2166.0 2168.6 2271.1 2273.7 2376.2 2378.7 2481.3 2483.8 2586.4 2588.9 2691.4 2694.0 2796.5 27
EnglishPLENUM
PRESSUREVACUUM FLOW (PER BEARING)
(in Hg) (SCFM)1.5 0.521.6 0.551.7 0.571.8 0.591.9 0.612 0.64
2.1 0.662.2 0.682.3 0.692.4 0.712.5 0.732.6 0.752.7 0.762.8 0.782.9 0.803 0.82
3.1 0.833.2 0.853.3 0.873.4 0.893.5 0.903.6 0.923.7 0.943.8 0.96
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911www.newwayairbearings.com info@newwayairbearings.com
© Copyright 2005, New Way Air Bearings Printed in USA on Recycled and Recyclable Paper NWAB-05-085-C3 2005-09-14-V1-100
PRECISION CHUCK TEST RESULTSVacuum Flow: No Glass Present
15
18
21
24
27
30
40 50 60 70 80 90 100
Plenum Pressure (mm Hg)
Vacu
um F
low
(SLP
M)
0.50
0.55
0.60
0.65
0.70
0.75
0.80
0.85
0.90
0.95
1.00
1.5 2 2.5 3 3.5 4
Plenum Pressure (in Hg)
Vacu
um F
low
(SC
FM)
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911
www.newwayairbearings.com info@newwayairbearings.com
POROUS MEDIA PRECISION CHUCKGlobal Flatness Performance Data
20.0 25.0 24.5 23.0 23.5 23.0 23.0 22.0 A 5.0
1 22.0 24.0 22.5 21.0 21.0 20.0 22.0 20.5 C 22.42
22.0 24.0 22.5 22.5 22.0 23.0 23.0 22.0 E 3.84
21.0 22.5 22.0 22.0 22.0 23.0 23.0 21.5 A 4.0
2 20.0 21.0 19.0 19.0 21.0 22.0 23.0 22.5 C 21.60
21.0 23.0 21.0 21.0 21.0 22.5 23.0 21.5 E 3.44
22.0 24.0 22.0 20.0 20.0 21.0 22.5 20.5 A 5.5
3 20.0 22.5 22.0 20.0 21.0 18.5 20.0 20.5 C 21.15
21.0 22.5 22.0 22.0 21.5 21.0 21.0 20.0 E 3.53
20.0 23.0 22.0 22.0 22.0 22.0 21.0 19.5 A 4.5
4 19.5 20.5 20.5 21.0 18.5 19.5 20.5 20.5 C 20.79
19.0 20.0 22.0 22.0 22.0 21.0 21.0 20.0 E 3.41
RANGE=
AVG=
3STD=
RANGE=
AVG=
3STD=
3STD=
STATS
RANGE=
AVG=
3STD=
VACUUM
INPUT
RANGE=
AVG=
20.0 25.0 24.5 23.0 23.5 23.0 23.0 22.0 A 5.0
1 22.0 24.0 22.5 21.0 21.0 20.0 22.0 20.5 C 22.42
22.0 24.0 22.5 22.5 22.0 23.0 23.0 22.0 E 3.84
21.0 22.5 22.0 22.0 22.0 23.0 23.0 21.5 A 4.0
2 20.0 21.0 19.0 19.0 21.0 22.0 23.0 22.5 C 21.60
21.0 23.0 21.0 21.0 21.0 22.5 23.0 21.5 E 3.44
22.0 24.0 22.0 20.0 20.0 21.0 22.5 20.5 A 5.5
3 20.0 22.5 22.0 20.0 21.0 18.5 20.0 20.5 C 21.15
21.0 22.5 22.0 22.0 21.5 21.0 21.0 20.0 E 3.53
20.0 23.0 22.0 22.0 22.0 22.0 21.0 19.5 A 4.5
4 19.5 20.5 20.5 21.0 18.5 19.5 20.5 20.5 C 20.79
19.0 20.0 22.0 22.0 22.0 21.0 21.0 20.0 E 3.41
RANGE=
AVG=
3STD=
RANGE=
AVG=
3STD=
3STD=
STATS
RANGE=
AVG=
3STD=
VACUUM
INPUT
RANGE=
AVG=
Substrate Fly Height in Scanning Direction
10.0
15.0
20.0
25.0
30.0
25 50 75 100 125 150 175 200 225 250 275 300
Translation in Scanning Direction (mm)
Su
bstr
ate
Fly
Heig
ht
(mic
ro
ns)
250 mm
300 m
mNOTES:
� All units in microns unless otherwise specified.
� Measurements ‘A’ and ‘E’ were made at edges of part.Measurement ‘C’ was center of part.
� Measurements ‘B’ and ‘D’ were made between ‘A’ and ‘C’ andbetween ‘C’ and ‘E’ respectively.
TEST PARAMETERS:
Input Flow (SLPM): 29.12
Max. Vacuum @ Plenum (MM./HG.): 85.09
Input Pressure (BAR): 1.38
1
2
3
4
1
2
3
4
© Copyright 2005, New Way Air Bearings Printed in USA on Recycled and Recyclable Paper NWAB-05-085-C4 2005-09-14-V1-100
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911
www.newwayairbearings.com info@newwayairbearings.com
POROUS MEDIA PRECISION CHUCKLine Flatness Performance Data
A
B
C
D
E
A
B
C
D
E
A
B
C
D
E
A
B
C
D
E
21.0
22.5
4
22.0 RANGE= 1.5
21.5 AVG= 21.60
21.0 3STD= 1.75
3STD= 2.49
19.5 AVG= 20.80
3
20.5 RANGE= 2.5
21.0 3STD= 2.44
21.0
22.0
RANGE= 4.0
21.5 AVG= 21.53
21.5 3STD= 0.73
21.5
22.0
22.5
2
22.0 RANGE= 0.5
22.0 AVG= 21.70
1
23.5 RANGE= 2.5
21.0 AVG= 22.00
21.0 3STD= 2.85
BEARING CENTER STATS
A
B
C
D
E
A
B
C
D
E
A
B
C
D
E
A
B
C
D
E
21.0
22.5
4
22.0 RANGE= 1.5
21.5 AVG= 21.60
21.0 3STD= 1.75
3STD= 2.49
19.5 AVG= 20.80
3
20.5 RANGE= 2.5
21.0 3STD= 2.44
21.0
22.0
RANGE= 4.0
21.5 AVG= 21.53
21.5 3STD= 0.73
21.5
22.0
22.5
2
22.0 RANGE= 0.5
22.0 AVG= 21.70
1
23.5 RANGE= 2.5
21.0 AVG= 22.00
21.0 3STD= 2.85
BEARING CENTER STATS
FLATNESS AT CENTER OF BEARING
14.0
15.0
16.0
17.0
18.0
19.0
20.0
21.0
22.0
23.0
24.0
25.0
26.0
A B C D E A B C D E A B C D E A B C D E
1 2 3 4
BEARING
MIC
RO
NS
TEST PARAMETERS:
Input Flow (SLPM): 29.12
Max. Vacuum @ Plenum (MM./HG.): 85.09
Input Pressure (BAR): 1.38
Maximum Lift (microns): 25.00
Minimum Lift (microns): 18.50
Lift Range (microns): 6.50
Average Lift (microns): 21.49
Total Lift 3STD: 4.00
MIC
RO
NS
© Copyright 2005, New Way Air Bearings Printed in USA on Recycled and Recyclable Paper NWAB-05-085-C5 2005-09-14-V1-100
50
Mc
Do
na
ld B
lvd
., A
sto
n,
PA
19
01
4
US
AP
ho
ne
: 6
10
-49
4-6
70
0
F
ax
: 6
10
-49
4-0
91
1
w
ww
.ne
ww
ay
air
be
ari
ng
s.c
om
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 1
PROPER INSTALLATION AND ADJUSTMENT OF THE AIR BEARING CONVEYOR IS CRITICAL TO ACHIEVE MAXIMUM PERFORMANCE. THE TOP SURFACE OF EACH CONVEYOR SECTION MUST BE LEVEL AND PROPERLY ALIGNED TO ADJOINING PROCESS EQUIPMENT AND CONVEYOR SECTIONS. THE CONVEYORS SHOULD BE MOUNTED ON A STURDY SUPPORT STRUCTURE WITH PROVISIONS FOR PROPER CONVEYOR POSITIONING AND MOUNTING. THE AIR SUPPLIED TO THE CONVEYORS MUST BE CLEAN AND DRY. AIR AND VACUUM SUPPLY PLENUMS MUST BE SIZED TO INSURE THAT PRESSURE AND VACUUM FLOW REQUIREMENTS ARE MET. THE OPTIONAL MOUNTING FEET PROVIDE A PRE-DESIGNED SOLUTION FOR ATTACHMENT AND ALIGNMENT OF THE CONVEYOR AND ALSO PROVIDE PRESSURE AND VACUUM CONNECTIONS.
CONVEYOR ADJUSTMENT FEATURES THE FOLLOWING ILLUSTRATION DESCRIBES THE FEATURES THAT ARE PROVIDED FOR HEIGHT ADJUSTMENT WHEN THE OPTIONAL MOUNTING FEET ARE INSTALLED ON THE CONVEYOR SECTIONS.
M6 JACK-UP ADJUSTMENT SCREW
O-RING(S)
USE THE M6 HOLD-DOWN ADJUSTMENT SCREWS TO PULL THE CONVEYOR DOWN AGAINST
THE O-RINGS AND PRELIMINARILY ADJUST THE HEIGHT OF THE
CONVEYOR.
USE THE M6 JACK UP ADJUSTMENT SCREWS TO FINALIZE CONVEYOR ADJUSTMENT. TIGHTEN OR LOOSEN THE HOLD-DOWN ADJUSTMENT SCREWS AS NECESSARY TO MAINTAIN SUFFICIENT OPPOSING PRESSURE AND PREVENT ADJUSTMENT DRIFT.
M6 ROUGH ADJUSTMENT SCREW WITH WASHER
M6 HOLD-DOWNADJUSTMENT SCREWS
WITH WASHER
THE O-RINGS PREVENT LEAKS BETWEEN THE MANIFOLD AND THE CONVEYOR. ENSURE THAT THE GAP BETWEEN THE MANIFOLD AND THE CONVEYOR MOUNTING FOOT DOES NOT EXCEED 0.80MM TO INSURE SEAL INTEGRITY.
M6 JACK UP ADJUSTMENT SCREW
THE EFFECTIVE HEIGHT ADJUSTMENT RANGE OF THE MOUNTING FEET IS 0.80MM WHEN MOUNTING TO A UNIFIED SUPPORT STRUCTURE AND MANIFOLD. IF THE MANIFOLD CONNECTION IS SEPARATED FROM THE SUPPORT STRUCTURE, THIS ADJUSTMENT RANGE CAN BE GREATLY INCREASED.
MOUNTING FOOT
CONVEYOR SECTION
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 2
THE FOLLOWING ILLUSTRATIONS DESCRIBE THE MOUNTING FEATURES REQUIRED WHEN THE OPTIONAL MOUNTING FEET ARE INSTALLED ON THE CONVEYOR SECTIONS.
LOW FLOW CONVEYOR
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 3
HIGH SPEED CONVEYOR
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 4
ROUGH ADJUSTMENT
INITIALLY, THE CONVEYOR SECTIONS SHOULD BE INSTALLED AND THE GAP BETWEEN THE ADJUSTMENT FEET AND THE SUPPORT STRUCTURE AND MANIFOLD ADJUSTED TO A NOMINAL GAP OF 0.40 MM. THIS WILL PLACE THE CONVEYOR IN THE MIDDLE OF THE 0.80 MM RANGE OF THE ADJUSTMENT FEET. AT THIS TIME, THE GENERAL LEVELNESS OF THE CONVEYOR SECTIONS AND THE ALIGNMENT OF THE CONVEYORS TO OTHER PROCESS EQUIPMENT SHOULD BE NOTED. THE SUPPORT STRUCTURE POSITION SHOULD BE MODIFIED IF NECESSARY. ONCE THE SUPPORT STRUCTURE POSITIONING IS DETERMINED TO BE SATISFACTORY, ADJUST ALL CONVEYOR SECTIONS TO BE LEVEL AND ALIGNED ON THE SAME PLANE. USE THE HOLD-DOWN AND JACK-UP ADJUSTMENT SCREWS, MASTER FLAT, LEVEL AND A 0.025 MM (OR SMALLER) FEELER GAGE TO GET THE ROUGH ADJUSTMENT AS CLOSE AS POSSIBLE.
DESIRED ALIGNMENT (SIDE VIEW)
ALIGNMENT PROBLEMS (SIDE VIEW)
USE 0.025 MM (OR SMALLER) FEELER GAGE TO CHECK FOR OUT OF PARALLEL CONDITION
CONVEYORS ARE LEVEL(MASTER FLAT WITH LEVEL)
SUPPORT STRUCTURE AND MANIFOLD CONNECTION
0.40 MM GAP (TYP)
CONVEYORS ARE ON THE SAME PLANE
CONVEYORSECTION
LEVEL
CONVEYORSECTION
NOT LEVEL
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 5
DESIRED ALIGNMENT (END VIEW)
ALIGNMENT PROBLEMS (END VIEW)
CONVEYORS ARE LEVEL
CONVEYORS ARE ON THE SAME PLANE
0.40 MM GAP(TYP)
CONVEYOR ARRAYAPPEARS TO BE LEVEL
CONVEYOR SECTIONS ARE LEVEL BUT NOT ON THE SAME PLANE (CHECK WITH FEELER GAGE)
SUPPORT STRUCTURE AND MANIFOLD CONNECTION
(MASTER FLAT WITH LEVEL)
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 6
ALIGNMENT PROBLEMS (END VIEW)
USE 0.025 MM (OR SMALLER) FEELER GAGE TO CHECK FOR OUT OF
PARALLEL CONDITION
CONVEYOR SECTIONS ARE NOT LEVEL OR ON THE SAME PLANE (CHECK WITH FEELER GAGE)
CONVEYOR SECTIONS ARE LEVEL BUT NOT ON THE SAME PLANE
CONVEYOR ARRAY NOT LEVEL
CONVEYOR ARRAYNOT LEVEL
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 7
FINE ADJUSTMENT
ROUGH ADJUSTMENT WILL SET EACH OF THE CONVEYOR’S SECTIONS LEVEL AND CLOSE TO FINAL POSITION IN RELATION TO OTHER PROCESS EQUIPMENT AND CONVEYOR SECTIONS. FINE ADJUSTMENT IS A FINE-TUNING OF THE TRANSITION POINTS TO ENSURE SMOOTH FLOW OF WORK ALONG THE CONVEYOR. THE ALLOWABLE MISMATCH AT EACH TRANSITION POINT WILL VARY BASED ON APPLICATION REQUIREMENTS. USE THE JACK-UP ADJUSTMENT SCREWS TO ADJUST, TIGHTEN OR LOOSEN THE HOLD-DOWN ADJUSTMENT SCREWS AS NECESSARY TO MAINTAIN SUFFICIENT OPPOSING PRESSURE AND PREVENT ADJUSTMENT DRIFT. BE CAREFUL NOT TO USE TOO MUCH FORCE. THIS MAY DISTORT THE BEARING AWAY FROM THE TRANSITION POINT.
FINE ADJUSTMENT (SIDE VIEW)
MINIMIZE THIS DISTANCE
INDICATOR USE INDICATOR TO FINE-TUNE TRANSITION ALIGNMENT. ENSURE THAT STEP BETWEEN CONVEYOR SECTIONS IS 5 MICRONS OR LESS. (THIS DISTANCE MAY VARY WITH APPLICATION).
MOVE INDICATOR BACK AND FORTH BETWEEN SECTIONS. BE CAREFUL NOT TO DAMAGE THE TOP SURFACE OF CONVEYORS.
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 8
FLAT PANEL CONVEYOR MOUNTING FOOT
When used with High Speed Conveyor Bearings single hole conducts pressure. When used with Low Airflow Conveyor Bearings single hole conducts vacuum.
04/04/05
CONVEYOR INSTALLATION AND ADJUSTMENT INSTRUCTIONS
PAGE 9
FLAT PANEL CONVEYOR MOUNTING FOOT
When used with High Speed Conveyor Bearings both holes shown conduct vacuum. When used with Low Airflow Conveyor Bearings only one of the two holes shown is used to conduct pressure (because bearing has only one mating hole).
+
MOUNTING FOOT KIT
4/8/05
JHA
2:3
+ -
1
--
S22100K001
43
2
43
ABCD
21
ABCD
1
EWO.
NO.
DWG.
NO.
REV.
HEAT TREAT:
MATERIAL:
FINISH:
DATE:
SHT.
DATE:
DRAWN:
USED ON:
TITLE:
CHECKED:
SCALE:
1/2°
.010
.005
1/64
63
.005-.020
BREAK ALL SHARP EDGES
1/2°
TOLERANCES UNLESS
OTHERWISE SPECIFIED
DECIMALS .XX
DECIMALS .XXX
SURFACE ROUGHNESS
RMS MAX.
63
FRACTIONS
ANGLES+ - .010
.005
1/64
-+ -
1 OF
A.02
MAY
OTH
ERW
ISE
AGRE
E TO
IN W
RITI
NG. A
LL R
IGH
TS
PRO
PRIE
TARY
ITEM
: TH
IS D
RAW
ING
CO
NTAI
NS IN
FORM
ATIO
N PR
OPR
IETA
RY T
O
NEW
WAY
MAC
HIN
E CO
MPO
NENT
S, IN
C. A
NY R
EPRO
DUCT
ION,
DI
SCLO
SURE
, OR
USE
OF
THIS
DRA
WIN
G O
R TH
E IN
FORM
ATIO
N CO
NTAI
NED
HER
EIN
IS E
XPRE
SSLY
PRO
HIB
ITED
EXC
EPT
AS N
EW W
AY
RESE
RVED
BY
NEW
WAY
MAC
HIN
E CO
MPO
NENT
S, IN
C.
REV
ISIO
NS
ECN
#RE
V.
DES
CRI
PTIO
ND
ATE
APP
ROV
ED
0010
24A
AD
DED
M6
NUT
S-C
HA
NG
ED B
OM
FO
RMA
T5/
27/2
005
JHA
ITEM
NO.
QTY.
NAME
DESCRIPTION
VENDOR
10REF.
-FLAT PANEL CONVEYOR
-9
468024207
SS NUT M6
MSC
88
68025121
SS WASHER M6
MSC
78
68016047
SS SHCS M6 X 1.0 X 25
MSC
64
68016005
SS SCHS M6 X 1.0 X 20
MSC
58
68017003
SS FHCS M4 X 0.7 X 16
MSC
41
09262239
O-RING - #223
MSC
32
09262213
O-RING - #221
MSC
21
S8063X02
MOUNTING FOOT
NEW WAY
11
S8063X01
MOUNTING FOOT
NEW WAY
10
7
8
62
4
3
5
8
7
1
6
5
9
9
50
Mc
Do
na
ld B
lvd
., A
sto
n,
PA
19
01
4
US
AP
ho
ne
: 6
10
-49
4-6
70
0
F
ax
: 6
10
-49
4-0
91
1
w
ww
.ne
ww
ay
air
be
ari
ng
s.c
om
50 McDonald Blvd., Aston, PA 19014 USA Phone: 610-494-6700 Fax: 610-494-0911
www.newwayairbearings.com info@newwayairbearings.com
POROUS MEDIA AIR BEARING SOLUTIONS™
Recommended