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8/6/2019 CMNS Nanoscale Measurements 20070227
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Jason Chang
Institute of Physics, Academia Sinicajasonc@phys.sinica.edu.tw
http://http://www.phys.sinica.edu.tw/~nanowww.phys.sinica.edu.tw/~nano//
Nanoscale measurementsNanoscale measurements
NanoNanoSciSciLabLab
http://www.phys.sinica.edu.tw/TIGP-NANO/Course/2007_Spring.htm
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A. Introduction
B. Operational Principles:a.Electron b.X-ray c.Scanning Probe
C. From measuring to sensing
D. From measuring to manipulatingE. From measuring to fabricating
F. Considerations for making nanoscale
toolsG. Future development of nanoscale
measurements
H. Conclusions
OutlineOutlineNanoNanoSci
SciLabLab
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Optical lithography and planarOptical lithography and planarfabrication of VLICfabrication of VLIC
Intel Corp.
NanoNanoSciSciLabLab
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Numbers of transistors in an ICNumbers of transistors in an IC
Intel Corp.
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Evolution of IC industry
Jean Hoerni
Nano
NanoSciSciLabLab
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Electronic properties ofElectronic properties ofa carbon nanotubea carbon nanotube
NanoNanoSciSciLabLab
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SingleSingle-- walled CNT transistorwalled CNT transistor
S.J. Tans et al., Nature393, 49 (1998).
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1 100
/
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mev
Compton Scattering
Photon as a particlePhoton as a particle
E=h P=h/Einsteins proposal:
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Electron as a waveElectron as a wave
= h/E= h/Pde Broglies proposal:
LEED
e-Gun
Grids
Crystal20 200 eV
For electrons: (nm) = 1.22/E1/2(eV)
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Fundamentals of Quantum MechanicsFundamentals of Quantum Mechanics
NanoNanoSciSciLabLab
1. Quantization
2. Tunneling
3. Statistics1
kT
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Size effectSize effect
Size
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Measurement of electronic statesMeasurement of electronic states
S. H. Pan et al., Rev. Sci.Instru. 40, 1459 (1999).
YBCOBaO CuO
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Properties of a nanostructureProperties of a nanostructure
SizeStructure
ShapeSymmetryDomainsDefects
.
.
.
MicroscopicAnalytical
CompositionStoichiometry
ElectronicMagneticThermalMechanical
.
.
.
NanoNanoSciSciLabLab
photons, electron, ion, neutron, proximal nanoobjects
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Semiconducting quantum dots
(Reproduced from Quantum Dot Co.)
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Critical lengthsCritical lengths
C. Joachim et al., Nature408, 541 (2000).
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Characteristics ofCharacteristics ofelectron transportelectron transport
BallisticW,L < l
Diffusive
l< W,L < l
Classical
W
L
l
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MinituralizationMinituralization of length scaleof length scale
MacroMacro MicroMicro NanoNano
continualcontinual discretediscrete
scalablescalable nonscalablenonscalable
evolutionaryevolutionary revolutionaryrevolutionary
classicalclassical quantum mechanicalquantum mechanical
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Simulation ofSimulation of DNA dynamicsDNA dynamics
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Alternating and complementaryAlternating and complementarycontrastcontrast
3
1 3
4
5
II6
5I
1
34
5 6
W.B. Jian et al. PRL 90, 196603 (2003)
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0 1 2
L3 Ag / Type I (fcc)
(dI/dV)/(I/V)
Sample bias (V)
A=3.0 nm2
A=2.5 nm2
A=1.6 nm2
A=1.1 nm2
NanoNanoSciSciLabLab
SizeSize-- dependent I/V spectra by STSdependent I/V spectra by STS
5 nm
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NanoNanoSciSciLabLab
Shapes of Ag nanopucksShapes of Ag nanopucks
10 nm
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NanoNanoSciSciLabLab
Triangular : Ag21
Hexagonal : Ag61
0 1 2
Triangular Ag21
dI/
dV
Sample bias (V)0 1 2
0
(dI/dV
)/(I/V)
Sample bias (V)
Hexagonal Ag61
SizeSize-- and shapeand shape-- dependent I/V spectradependent I/V spectra
10 nm
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Interaction betweenInteraction betweenee-- beam and samplebeam and sample
Direct beam
Incident high kV beam
Visible light
CharacteristicX-raysAuger
electrons
Backscatteredelectrons
Secondary electrons
Bremsstrahlung
X-raysInelastically
scattered electronsElastically
scattered electrons
Specimen
Electron-hole pairsAbsorbed electrons
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Energy (eV)
Inte
nsity
E0E0-5050
400 500
dN/dE
Secondaryelectrons
Augerelectrons
Primaryelectrons
Plasma
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NanoNanoSciSciLabLab
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Cross section view of HRTEMCross section view of HRTEM
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(TEM)(TEM)NanoNanoSci
SciLabLab
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TEMTEM NanoNanoSci
SciLabLab
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QuickQuickBeamBeam SelectSelect SystemSystem
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Information from TEMInformation from TEM
Lattice imageLattice image
GaAs/AlAsGaAs/AlAs CBEDCBED
Electron DiffractionElectron DiffractionEDSEDS
EELS or GIFEELS or GIF
STEM+BF, HAADFSTEM+BF, HAADFMapping and ZMapping and Z--contrast imagecontrast image
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EDS wi t h spat i al r esol ut i onDS wi t h spat i al r esol ut i on
EDS mapping
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EDS mapping
STEM
Ti Al
Hi h l i EELSHi h l i EELS
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High resolution EELSHigh resolution EELS
Energy Filtered images of insulating layerEnergy Filtered images of insulating layer
10nm
Zero-Loss imageN
OSi
Quantitative profiles
Hi h l i STEM iHi h l ti STEM i
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WW--plug.plug.
Si
High resolution STEM imageHigh resolution STEM image
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Semiconducting quantum dotsand carbon nanotubes
(Reproduced from Quantum Dot Co.)
Peapod CNT
NanoNanoSciSciLabLab
Multiwall CNT
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Scanning electron microscopyScanning electron microscopy(SEM)(SEM)NanoNanoSciSciLabLab
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SEM contrastSEM contrast
Scanning e beam
Secondaryelectrons
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XX--Ray MicroscopyRay MicroscopyNano
NanoSciSciLabLab
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3D X3D X--Ray ImageRay Image
J. Miao et al., PRL 89, 088303 (2002).
Nano
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Scanning Tunneling Microscopy (STM)
--- G. Binnig, H. Rohrer et al, (1982)
Near-Field Scanning Optical Microscopy (NSOM)
--- D. W. Pohl (1982)
Atomic Force Microscopy (AFM)
--- G. Binnig, C. F. Quate, C. Gerber (1986)
Scanning Thermal Microscopy (SThM)
--- C. C. Williams, H. Wickramasinghe (1986))
Magnetic Force Microscopy (MFM)
--- Y. Martin, H. K. Wickramasinghe (1987)Friction Force Microscopy (FFM or LFM)
--- C. M. Mate et al (1987)
Electrostatic Force Microscopy (EFM)
--- Y. Martin, D. W. Abraham et al (1988)
Scanning Capacitance Microscopy (SCM)
--- C. C. Williams, J. Slinkman et al (1989)
Force Modulation Microscopy (FMM)
--- P. Maivald et al (1991)
HistoricalHistorical
development ofdevelopment of SPMsSPMs
Nano
NanoSciSciLabLab
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(Scanning(Scanning
TunnelingTunneling
Microscopy)Microscopy)
Nano
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From one-dimensional tunnelingproblem tunneling current (eV
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UHV STMUHV STM
Nano
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Empty-state image Filled-state image
STM Images of Si(111)STM Images of Si(111)--(7(77)7)
Nano
NanoSciSciLabLab
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SiSiN4
20100nm
(DC)(AC)
(Atomic Force Microscopy, AFM)
Nano
NanoSciSciLabLab
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CD pits Integrated Circuit
Bacteria Chromosomes DNA
DVD pitsAFM imagesAFM images
Nano
NanoSciSciLabLab
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Probe/sample interactionProbe/sample interactionas function of distanceas function of distance
Lennard-Jones potential (r) = - A/r6 + B/r12
1) 2)
1) 2) 3) 4)
Nano
NanoSciSciLabLab
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1) Pauli 2)
Nano
NanoSciSciLabLab
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Nan
o
NanoSciSciLabLab
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Reaction of probe to the forceReaction of probe to the force
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Detection
mechanism Display
Local probe
X-Y-Z Piezo transducer
(Fine positioning)
Sample
Coarse approach
and positioning
Vibration isolation
Feedback
mechanism
Basic configuration of AFMBasic configuration of AFM
Cantilever
NanoNanoSciSciLabLab
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Tip andcantilever
Laser
Detector
PiezoelectricTube Scanner
Sample
Core components of an AFMCore components of an AFMNanoNano
SciSciLabLab
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Probes for the tapping modeProbes for the tapping mode
Typical Tip Dimension:150m x 30m x 3mfr ~ 100 kHzMaterials: Si
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100 nm(0.2 ~ 0.3 nm)ScanningProbe MicroscopeSPM80
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(OM)
(SEM)
(TEM)
(SPM)
300 1
20 10
1 1 0.1 0.1
NanoNano
SciSciLabLab
Molecular ScaleMolecular Scale NanomechanicsNanomechanics
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Mechanical Sensing in Nature
Molecular ScaleMolecular Scale NanomechanicsNanomechanics
Driving Force in BioDriving Force in Bio--systemssystems
At the fundamentallevel, all interactions
in biology andchemistry aremechanical innature
Hair bundle:frogs inner ear
Micro and Nano cantilever arraysMicro and Nano cantilever arrays --
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Micro and Nano cantilever arraysc o a d a o ca t e e a ays
Emulating natureEmulating nature
Ideal displacement sensor
Sub nm sensitivity Displacement ~ force
Surface stress, temperature
Mass loading
Sesitivity:
Function of dimensions
Selectivity:Function of coatings
Mass production
Microcantilevers:Microcantilevers:
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Microcantilevers:Microcantilevers:
Getting the signal outGetting the signal out
Optical
Piezoresistivity
Piezoelectricity
Capacitance
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Microcantilevers To NanocantileversMicrocantilevers To Nanocantilevers Increased Sensitivity High Resonance
Frequency Small Spring
Constants
Single MoleculeDetection
Challenges:Signal TransductionMass production
(Craig Prater, DI)
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NanoelectromechanicalNanoelectromechanicaloscillatoroscillator
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Molecular sensingMolecular sensing
NanoNano
SciSciLabLab
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S. S. Wong et al., Nature394, 52 (1998).
ChemicalChemical nanoprobenanoprobeNanoNano
SciSciLabLab
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Manipulation methodManipulation methodNanoNano
SciSciLabLab
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Ultimate goal of nanotechnologyUltimate goal of nanotechnology
M.F. Crommie et al.,Science262, 218 (1993).
5 nm
NanoNano
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Quantum MirageQuantum Mirage
H. C. Manoharan et al.,Nature403, 512 (2000).
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Molecular unfoldingMolecular unfoldingNanoNanoS
ciSciLabLab
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TEM
2.5 mm
3 mm
Tip Sample
Pb/Si(111)
1200nm
Tip with a nanotube Mesa structure for holding
the nano-object
STM
UHV HRTEM/STMUHV HRTEM/STMNanoNanoS
ciSciLabLab
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Point contact of Au wirePoint contact of Au wire
H. Ohnishi et al.Nature 395, 780 (1998).
NanoNanoSci
SciLabLab
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Periodic nanostructuresPeriodic nanostructuresby eby e-- beam lithographybeam lithography
~30 kV
~30 kV
NanoNanoSci
SciLabLab
Procedures of eProcedures of e-- beam lithographybeam lithography
NN
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e-beam(a) (b)
(c) (d)
deposition
After development
After lift-off
Procedures of eProcedures of e beam lithographybeam lithographyNanoNanoSci
SciLabLab
NN
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NanoNano--Lithography with an AFM tipLithography with an AFM tip
NanoNanoSci
SciLabLab
NaNa
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Electrical LithographyElectrical Lithography
F.S.-S. Chien et al.APL 75, 2429 (1999)
NanoNanoSci
S
ciLabLab
NanNano
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C.A. Mirkin et al.Science 288, 1808 (2000)
NanoplotterNanoplotterNanoNanoS
ci
S
ciLabLab
NanoNano
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Image of polycarbonate film on silicon surface
(1.2m 1.2m) (2.5m 2.5m)
Nanolithography of TappingNanolithography of Tapping--Mode AFMMode AFM
NanoNanoS
ci
SciLabLab
NanoNanoSS
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NanodriveNanodriveNanoNanoSc
i
SciLabLab
NanoNanoSS
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The Millipede concept: foroperation of the device,
the storage medium - a thin filmof organic material
(yellow) deposited on a silicon"table" - is brought intocontact with the array of silicon
tips (green) andmoved in x- and y-direction forreading and writing.Multiplex drivers (red) allowaddressing of each tip
individually.
IBM-Zurich
MillipedeMillipedeanoanoSc
i
SciLabLab
Cantilever arrayCantilever arrayNanoNanoSS
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Millipede cantilevers and tips: electron microscope views ofthe 3 mm by 3 mm cantilever array (top), of an array sectionof 64 cantilevers (upper center), an individual cantilever
(lower center), and an individual tip (bottom) positioned at thefree end of the cantilever which is 70 micrometers (thousandsof a millimeter) long, 10 micrometers wide, and 0.5micrometers thick. The tip is less than 2 micrometers highand the radius at its apex smaller than 20 nanometers(millionths of a millimeter).
14 mm
7 mm
yynooSci
SciLabLab
Considerations forConsiderations forNanoNanoScSc
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1. Size compatibility2. Force compatibility
3. Mechanical Properties
4. Chemical Properties
5. Precision movement
6. Integratible coarse movement
7. Environment interferences
making nanoscale toolsmaking nanoscale toolsSc
i
SciLabLab
NanoNanoScSc
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Maneuvering toolsManeuvering tools
250m
10 mm
Sci
SciLabLab
NanoNanoScSc
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Operation ofOperation of nanonano tweezerstweezers
P. Kim and C.M. Lieber,Science286, 2148 (1999).
Sci
SciLabLab
NanoNanoScSc
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Nano Lett. 2, 101 (2002)
Science292, 1897 (2001)
ZnO Nanobelts
Science281, 973 (1998)
GaN NanowireFET
Science291, 1947 (2001)
ZnO Nanowires
SiC/SiO2 Nanocable
Nano wires and beltsNano wires and beltsci
ciLabLab
NanoNanoScSci
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Precision stepperPrecision stepper
x100 x1000
10x15x2 mm3
ci
ciLabLab
Considerations forConsiderations forNanoNanoScSci
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environmental factorsenvironmental factors
EMIshield
Acoustic
isolation
Temp.,humidity &
ventilation control Dust filtering
iLabLab
Vibrationdamping
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Goals for next 5Goals for next 5--10 years10 years
Instruments for analysis of supramolecules,biomolecules, and polymers.
3-D structure determination.
Nanostructure chemical identification.
In situfunctional measurements.
Functional parallel probe arrays.
Standardization and metrology.
New nano-manipulators.
LabLab
NanoNanoSciSci
L bL b
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LabLab
NanoNanoSciSci
LabLab
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ReferencesReferences
http://www.di.com/
http://www.topometric.com/
1. Scanning Tunneling Microscopy II,
eds. R. Wiesendanger and H.-J.Guntherodt (Springer-Verlag, Berlin,1992).
2. M. Stark and R. Guckenberger, Rev.
Sci. Instru. 70, 3614 (1999).
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