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Prepublication Data March-August 2008 ©UC Regents
Berkeley Sensor and Actuator Center
Kris Pister
Prepublication Data March-August 2008 ©UC Regents
Berkeley Sensor & Actuator Center (BSAC)
The NSF Industry/University Cooperative Research Center on MEMS
22nd Year of Operation
“BSAC conducts industry-relevant, interdisciplinary research on
micro- and nano-scale sensors, moving mechanical elements,
microfluidics, materials, and processes that take advantage of progress
made in integrated circuit, bio, and polymer technologies”
Top US MEMS Center in Peer Rankings (Small Times Mag)
Prepublication Data March-August 2008 ©UC Regents
BSAC Center Statistics
• 29 Post-Doc & Research Leads151 Researchers
• +Michel Maharbiz +Ali Javey13 Faculty co-
Directors
• 7 Departments + 3 Campuses9 Affiliate Faculty
• Three with 20+ years in BSAC 40+ Industrial
Members
• 9 Research Areas 122 Reported
Projects
Generates 7% of all IP licensing deals on campus
Prepublication Data March-August 2008 ©UC Regents
J. HugginsExecutive Director
co-DIRECTORS
B. BoserEECS
D. HorsleyUC Davis Mechanical
L. LeeBioEngineering
D. LiepmannBioEngineering
Mechanical
A. JaveyEECS
L. LinMechanical
M. MaharbizEECS
R. MullerEECS
C. NguyenEECS
A. PisanoMechanical/EECS
K. PisterEECS
R. WhiteEECS
M. WuEECS
Prepublication Data March-August 2008 ©UC Regents
Analog Devices
BioVitesse
Brechtel Manufacturing
Bridgewave Communications
Chevron
Draper Laboratories
Eastman Kodak
FormFactor
Freescale Semiconductor
Honeywell
HP
IBM
Intel
JPL/NASA
Lockheed Martin
Marvell
Medtronic
National Semiconductor
ON Semiconductor
Qualcomm
Raytheon
Sandia National Labs
Starkey Laboratories
Textron
Vegrandis
Fujitsu
Honda
NDK
NGK Sparkplug
OKI
Omron
Panasonic
Rohm
Samsung
Sanyo
Sharp
Toshiba
TSMC
Toyota
Yamatake
Bosch
Suss MicroTec
Siemens
British Petroleum
North America 25
Europe 4 Asia 15
44 BSAC Industrial Members
Prepublication Data March-August 2008 ©UC Regents
•CAD & Modeling
0 Projects
•Photonics &
MicroOptics
9 projects •Power &
Energy
9 projects
•Sensors &
Actuators
16 projects
•BioMEMS
23projects
• Microfluidics
7 projects
•Wireless & RF
Components & Systems
20 projects
•Packaging, Processes
& Materials 16 projects
•NanoStructures &
Devices (+Plasmonics)
12 Projects
-90
-80
-70
-60
-50
-40
157.75 157.85 157.95 158.05
(a)
Tra
nsm
issio
n (
dB
)
Frequency (MHz)
Data
R = 17 μm
h = 3 μm
do = 70 nm
VP = 7 V
fo = 157.89 MHz
Q = 20,500
(b)
Disk Resonator
Electrode Electrode
Anchor
R = 17 µm
Prepublication Data March-August 2008 ©UC Regents
Photoresist
ChitosanSilicon
Uncooled IR Material,
Process, & Detector
MEMS on finished CMOS Process
Ge
Xenon Difluoride etchingPolysilicon comb drive
Materials and Processes: Blue Sky to Business Impact
Prepublication Data March-August 2008 ©UC Regents
Micro Air Vehicles
• Michel Maharbiz
Content warning: PG13
Prepublication Data March-August 2008 ©UC Regents
v1.0, cotinis, no radio
Microbattery
Panasonic, ML614, 3 V, 160 mg,
Ø6.8 mm x 1.4 mm, 3.4 mAh
Microcontroller
Texas Instruments, MSP430F2012IPWR,
63 mg, 5.0 mm x 4.5 mm x 1.0 mm
Silver wires were soldered as electrodes.
Electrode
at flight muscle
Electrode at brain
Electrode at dorsal thorax
MicrobatteryMicrocontroller5 mm
Prepublication Data March-August 2008 ©UC Regents
On / Off (N > 20)
+3.0
- 3.0
0
1 sec
1 sec
Nor
mal
ized
am
plitu
de /
-
0
-0.5
-1.0
1.0
0.5
Off OnOn
On/Off movie
Positive pulse: Stop
Negative pulse: Start
Prepublication Data March-August 2008 ©UC Regents
Turning
Muscular Stimulation
2sec
100Hz
2sec
100Hz
2sec
100Hz
2sec
100Hz
2-sec
pause
LEFT Muscle Stimulation
2sec
100Hz
2-sec
pause
2-sec
pause
2-sec
pause
The microcontroller was
programmed to execute an
alternating pulse trains at right and
left flight muscles.
Prepublication Data March-August 2008 ©UC Regents
2 sec RIGHT
2 sec Pause
2 sec LEFT
Repeat
Turning (N>20)
Prepublication Data March-August 2008 ©UC Regents
v2.0: Mecynorrhina and radio
Chipcon TI CC2431
microcontroller
4 V, 8.5 mAh, 350 mg
microbattery
Dipole antenna
Prepublication Data March-August 2008 ©UC Regents
Turning
T1
T0
T2
T3
T4
Operator
T5
command
a left turnswitched the
stimulated side
Command a left turn
switched the
stimulated side
START
END
T1
T0
T2
T3
T4
Operator
T5
T1
T0
T2
T3
T4
Operator
T5
T1
T0
T2
T3
T4
Operator
T5
command
a left turnswitched the
stimulated side
Command a left turn
switched the
stimulated side
START
END
Prepublication Data March-August 2008 ©UC Regents
Turning
Prepublication Data March-August 2008 ©UC Regents
Wireless Power Monitoring
• Richard White
Prepublication Data March-August 2008 ©UC Regents
• Suite of miniature wireless electrical sensors for use in
residential/commercial buildings and high-voltage power systems
• Improving energy efficiency through sub-metering of Cory Hall
WIRELESS ELECTRICAL SENSORSProfs. White and Pister (EECS) and Wright (ME)
120 – 660 V
Residential/Commercial Distribution Circuits Transmission Circuits
4 – 35 kV 66 kV and up
Campus: 18 to 30 MW,
Cory Hall: 1 MW
Where does it all go?
Cory Hall
Prepublication Data March-August 2008 ©UC Regents
Sub-metering for loads >10 kW in part using “hardened” wirelessly enabled
versions of our experimental sensors and energy scavenging to power the
radios.
Meso-scale current sensor
MEMS prototype - 1mm
480-V feed to UCB Microlab
Exploratory Wireless Sub-Metering of Cory Hall
0
0.05
0.1
0.15
0.2
0.25
0.3
0 10 20 30 40 50
Current in cable, Amps AC
Sen
sor
ou
tpu
t, V
olt
s A
C
19 mm from center
22.2 mm from center
25.4 mm from center
Distance
Current Sensing on Residential Circuit
Prepublication Data March-August 2008 ©UC Regents
Nanowires for the Masses
• Ali Javey
Prepublication Data March-August 2008 ©UC Regents
Metal printing roll
Nanowireprinting roll
UV exposure
Final devices
Plastic substrate roll
Nanowirearrays
Shadow mask
Exposed pattern
All Printable Nanowire Electronics
Advantages:• Crystalline nanowires with tunable composition: high performance• Inorganic: air stable• Quasi-1D: mechanically flexible• Easy processing
Prepublication Data March-August 2008 ©UC Regents
rR
rW
Roll Printing of NWs
Yerushalmi, et al. Applied Physics Letters, 2007.
Printed, aligned
nanowire arrays
on glass (L) and
paper (R).
Nanowires are first grown on a roller and are thentransferred to the desired receiver substrate by a rollprinting process. The transferred nanowires are aligned inthe direction of rolling.A shear motion is applied in conjunction with the rollingmotion.Applicable for a wide range of NW materials.
roller
Receiver substrate
Printed nanowires
Prepublication Data March-August 2008 ©UC Regents
2 µm
10 µm
100 µm20 µm
Assembly of Nanowire Superstructures
Nanowire superstructures can be readily assembled on the receiver substrate by contact /roll printing.
10
8
6
4
2
0
De
nsity (
NW
/µm
)
F SiO2 N+ NH2 poly-L
Surface Functionalization
•The assembled nanowire length isgoverned by the growth nanowire length.
•The average density of printed nanowiresis tuned by the surface functional groupsof the receiver substrate.
Prepublication Data March-August 2008 ©UC Regents
Pd
Al
10-4
10-3
10-2
10-1
100
I DS (
nA
)-10 0 10
VGS (V)
VDS = 2V
Parallel Array Nanowire Device IntegrationSi NWs
S
DCdSe NWs
dark
light (4.4 mW/cm2)
S
DInAs NWs
G
7
6
5
4
3
2
1
0
ID
S (
mA
)
3210VDS (V)
-10 V
-6 V
-2 V
2 V
10 V
Pd
PdSi NWs
Vds = 1mV 250 ppm H2
10-12
10-10
10-8
10-6
Id
s (
A)
-2 -1 0 1 2Vds (V)
FETs Diodes
Gas Sensors Optoelectronics
The printed nanowire arrays can be configured into various device elements with defined functionalities.
Prepublication Data March-August 2008 ©UC Regents
Ordered Arrays of Crystalline Nanowires for Photovoltaics
2 µm 1 µm
Highly regular AAO template used for nanomaterial synthesis
0.5 µm
Vertical nanowire structures
Highly regular nanowire arrays
Nanomaterial synthesis
Ordered and regular arrays of crystalline nanomaterials with tunable diameter and atomic composition can be readily achieved on amorphous (and cheap) aluminum substrates, without the use of any lithography.
Z. Fan, et al, submitted, 2008.
Prepublication Data March-August 2008 ©UC Regents
NW
Ordered Arrays of Crystalline Nanowires for Photovoltaics
Prepublication Data March-August 2008 ©UC Regents
RF MEMS
• Clark Nguyen
Prepublication Data March-August 2008 ©UC Regents
RF BPF
RF BPF
RF BPF
Multi-Band Wireless Handsets
Duplexer
90o
0o
A/D
A/D
RXRF Channel
Select PLL
I
Q
LPF
LPF
RXRF LO
I
Q
AGC
AGC
LNA
Duplexer RF BPF
LNA
From TX
LNA
LNA
RF BPF
WCDMA
CDMA-2000
DCS 1800
PCS 1900
LNA
Duplexer
LNA RF BPF
GSM 900
CDMA
From TX
From TX90o
0o
I
Q
Tank
÷ (N+1)/N Xstal
Osc
Antenna
UCB
UCB
UCB
UCB
UCB
UCB
UCB
UCB
Prepublication Data March-August 2008 ©UC Regents
All High-Q Passives on a Single Chip
WCDMA
RF Filters
(2110-2170 MHz)
CDMA-2000
RF Filters
(1850-1990 MHz)
DCS 1800 RF Filter
(1805-1880 MHz)
PCS 1900 RF Filter
(1930-1990 MHz)
GSM 900 RF Filter
(935-960 MHz)
CDMA RF Filters
(869-894 MHz)
0.25 mm
Low Freq.
Reference
Oscillator
Ultra-High Q
Tank
Optional RF
Oscillator Ultra-
High Q Tanks
Vibrating Resonator
62-MHz, Q~161,000
Vibrating Resonator
1.5-GHz, Q~12,000
Prepublication Data March-August 2008 ©UC Regents
Wine Glass Disk Array Oscillator
VDD = 1.65 V
VSS = -1.65V
M3M4
M1 M2
MRf
Vbias2
Vbias1
M11 M12 M13 M14
Vcm
M17
M18
M16M15
Output
Input
M5
Shunt-Shunt Feedback Tranresistance Amplifier
Common Mode Feedback Bias Circuit
VP
vi
Bond Wire
MOS Resistor
io
Wine-Glass Disk Array-Composite Resonator
VP=7V Rx=2.5kW
Q = 118,900
Prepublication Data March-August 2008 ©UC Regents
GSM-Compliant Disk-Array Oscillator• Below: measured phase noise for
oscillators with varying disk #’s
-160
-140
-120
-100
-80
-60
-40
-20
1.E+01 1.E+02 1.E+03 1.E+04 1.E+05
Divide Down to 13 MHz
Makes GSM L{f } specs!
Pha
se N
oise
, L{
f} [d
Bc/
Hz]
Offset Frequency [kHz]
Output
Input
[Y.-W. Lin, Nguyen, IEDM’05]
Single WG Disk @ 62 MHz
9-WG Disk Array @ 62 MHz
All made possible by mechanical circuit design!
Prepublication Data March-August 2008 ©UC Regents
vi+
vi-
vo+
vo-
VP
VP
l
l/2
l/4
l/2
l/4
Port1
Port2
Port3
Port4
l
l/2
l/2
Filter CouplerCom. Array Couplers
Diff. Array Couplers
[Li, Nguyen Trans’07]
163-MHz Differential Disk-Array Filter
Prepublication Data March-August 2008 ©UC Regents
Performance
r=17m
h=3m
do=80nm
VP=14V
P=-15dBm
fo=163.126MHz
Qres=10,500
Rx=977W
BW=98.477kHz
PBW=0.06%
I.L.=2.43dB
20dB S.F.=2.85
RQ1=RQ2=1.6kW
RQ3=RQ4=1.4kW
Frequency [MHz]
Tra
nsm
issio
n [
dB
]
RQ ~ 1.5kW
Measured Filter Freq. CharacteristicsI.L. = 2.43 dB for 0.06% BW
RF Channel Selection
Becomes Possible!
Prepublication Data March-August 2008 ©UC Regents
RF Channel-Select Filter BankA1
A2
An
Filter 1
Filter 2
Filter n
Channel-Select
Mechanical FilterControl
Inputs n x m Decoder
1 21 2 m m
vivo
VP
Tra
nsm
issi
on
Freq.
RX
Pow
er
Freq.
Pow
er O
ut
Freq.
1 2 n3 4 5 6 7RF Channels
m = 2n
Switch filters on/off
via application and
removal of dc-bias
VP, controlled by a
decoder
Prepublication Data March-August 2008 ©UC Regents
Microfluidic manipulation
• Ming Wu
Prepublication Data March-August 2008 ©UC Regents
Optoelectronic Tweezers: Trapping Cells Using Digital Microprojector
P.Y. Chiou, A.T. Ohta, M.C. Wu, Nature, 2005
Digital
Projector
Virtual Electrode
By Illumination on
Photoconductor
Light-Induced
Dielectrophoretic (DEP)
Force
Prepublication Data March-August 2008 ©UC Regents
Optoelectronic Tweezers: Trapping Cells Using Digital Microprojector
P.Y. Chiou, A.T. Ohta, M.C. Wu, Nature, 2005
Optical Conveyor Belt
Digital
Projector
Virtual Electrode
By Illumination on
Photoconductor
Light-Induced
Dielectrophoretic (DEP)
Force
Prepublication Data March-August 2008 ©UC Regents
Progenitor
Neurons
Differentiated
Neurons
Dopaminergic
NeuronImplant
Culturing
Sorting
Neural Cell Replacement Therapy
for Parkinson’s DiseaseIn collaboration with E. Isocaff, H. Lee, S. Pautot
Prepublication Data March-August 2008 ©UC Regents
5s
Digital
Projector
Fluorescent
Excitation
Bright Field
Illumination
CCD
20x
Fluorescenc
e Detection
&
Actuation
Pattern
Generation
Automatic Sorting of Neural Beads
45μm 45μm
• Neuron stained with Calcein
AM dye
• Applied Voltage: 16Vpp, 2MHz
Prepublication Data March-August 2008 ©UC Regents
5s
Digital
Projector
Fluorescent
Excitation
Bright Field
Illumination
CCD
20x
Fluorescenc
e Detection
&
Actuation
Pattern
Generation
Automatic Sorting of Neural Beads
45μm 45μm
• Neuron stained with Calcein
AM dye
• Applied Voltage: 16Vpp, 2MHz
Prepublication Data March-August 2008 ©UC Regents
COTS DustGOAL:
• Get our feet wet
RESULT:
• Cheap, easy, off-the-shelf RF systems
• Fantastic interest in cheap, easy, RF:
– Industry
– Berkeley Wireless Research Center
– Center for the Built Environment (IUCRC)
– PC Enabled Toys (Intel)
• Fantastic RF problems
• Optical proof of concept
BSAC IAB Spring 2000
Prepublication Data March-August 2008 ©UC Regents
Dave Farr, CEO, Emerson, Investor Conference Feb. 2008
Prepublication Data March-August 2008 ©UC Regents
Prepublication Data March-August 2008 ©UC Regents
Pharmaceutical Process Monitoring - GE
Prepublication Data March-August 2008 ©UC Regents
Reliable Performance in Harsh Environments• Steel mills
• Breweries!
• Chemical processing
• Food production
• Urban Pavement
• Rail cars
• Power plants
• Pharmaceutical manufacturing
• Desert fences
• Northern coal facilities
• Oil and gas production & refining
• …
These and other factors conspire to define
the difference between what works in the lab
and what works in the real world!
Successful deployments in over 30 countries on 6 continents.
Prepublication Data March-August 2008 ©UC Regents
Classic BSAC/Berkeley Success Story
• Blue sky research
• Long-term vision
• Interdisciplinary teams
• A little competition, a lot of collaboration
• Industrial involvement at every stage
• Broad impact
– >10 Berkeley startups
– International standards
– Industrial consortia
– Academic progeny
Prepublication Data March-August 2008 ©UC Regents
BSAC Recent/ Upcoming Research Reviews
Tokyo Dec 10-11 2008
Member Meeting + Open Symposium
Berkeley March 11-13 2009
Spring 2009 IAB (members)+ Workshops
Munich May 27-29, 2009
Summer 2009 (members)+ Open Symposium
http://bsac.berkeley.edu (no “www”)
Berkeley September 2009
Fall 2009 IAB (members)+ Workshops
Recommended