Applied!Materials!Centura™!II! eMAX · PDF file · 2013-07-12Title: Microsoft...

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For$more$information$please$contact$SSS$CO$at$+15512526757087$or$systemsales@semiconservice.com.$$Equipment$is$generally$available$immediately$but$are$subject$to$customer$modification.$$$Sales$subject$to$partial$or$complete$prior$sale.$!

Chambers  Position   TYPE  

A   eMAX  CT+  B   eMAX  CT+  C   eMAX  CT+  D   Empty  E   Empty-­‐(Orienter/Multi-­‐

Slot/Cooldown)  F   Empty  

 

Mainframe  Wafer  Size   200mm  Vintage   2005  Robotics   VHP+  Electrical   208V,  50/60  Hz  MFC  Type   Mykrolis™  IntelliFlow®  II  

Gas  Panel  Type   VME2  Generator  Rack   Centura  II,  66”  Load  Locks   Narrow  Body,  Tilt,  Rotating  

SMIF  Interface   No  Umbilical  Length   50  Ft  

Chiller  Type   No  Condition   Excellent  

 

4715  Steiner  Ranch  Blvd  Austin,  TX  78732  +1-­‐512-­‐267-­‐7087  

Applied  Materials  Centura™  II  eMAX  CT+  Dielectric  Etch    

Serial  #  408206  SSS  Co.  #  C1015  

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