AL Parts Introduction · 2006. 2. 2. · rainbow 4528 dome electrode 715-011986-018 al 6061 40...

AL Parts IntroductionAL Parts Introduction

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LAM PARTS LISTLAM PARTS LIST

TEL PARTS LISTTEL PARTS LIST

AME PARTS LISTAME PARTS LIST

LCD PARTS LISTLCD PARTS LISTN0 PROCESS EQUIPMENT DESCRIPTION VENDOR NO. MATERIAL REMARK

1 CVD AKT1600 L1 DIFFUSER 0020-66635 AL ANODIZING SAMSUMG,HYDIS

2 CVD AKT3500 L2 DIFFUSER 0020-71967 AL ANODIZING SAMSUMG,HYDIS

3 CVD AKT4300 L3 DIFFUSER 0020-74691 AL ANODIZING SAMSUMG,HYDIS

4 CVD AKT4300 L3 SHADOW FRAME - AL ANODIZING SAMSUMG,HYDIS

5 CVD AKT5500 L4 DIFFUSER - AL ANODIZING SAMSUMG,HYDIS

6 CVD AKT5500 L4 SHADOW FRAME - AL ANODIZING SAMSUMG,HYDIS

7 CVD AKT 15K L5 DIFFUSER - AL ANODIZING SAMSUMG,HYDIS

8 CVD EUREKA P5 SHOWER HEAD 373-66-004 AL ANODIZING JUSUNG,LG PHILIPS

9 CVD AKT 15K P5 SUSCEPTER - AL ANODIZING JUSUNG,LG PHILIPS

10 CVD EUREKA P6 SHOWER HEAD 373-66-008 AL ANODIZING JUSUNG,LG PHILIPS

11 DRY ETCH PSC L3 BOTTOM ELECTRODE SP2-60824(A) AL ANODIZING SAMSUMG,HYDIS

12 DRY ETCH PSC L3 CATHODE (EMBOSS) - AL ANODIZING SAMSUMG,HYDIS

13 DRY ETCH TEL L3 BOTTOM ELECTRODE(RIE) 1A10-102253-11 AL ANODIZING SAMSUMG,HYDIS

14 DRY ETCH TEL L3 BOTTOM ELECTRODE(PE) 1A10-102023-11 AL ANODIZING SAMSUMG,HYDIS

15 DRY ETCH TEL L3TEL UPPER CATHODE 1A10-201720-13 AL ANODIZING SAMSUMG,HYDIS

16 DRY ETCH TEL L4 TEL UPPER CATHODE - AL ANODIZING SAMSUMG,HYDIS

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

TEL DRM2 UNITY 85DD

ELECTRODE UPPER 1D10-201429-15 AL 6061 40 ∼ 60 ㎛ MANUFACTURE

TEL DRM2 UNITY 85 DD PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

MXP CENTURA 5200

CHAMBER WALL LINER

0020-34694 AL 6061 40 ∼ 60 ㎛ PRODUCT & REPAIR

MXP CENTURA 5200 PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

TEL 8500 PC UEL BODY UNITY 1810-120660-13 AL 6061 15 ∼ 30 ㎛ MANUFACTURE

TEL UNIT 8500 PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

RAINBOW 4528 DOME ELECTRODE 715-011986-018 AL 6061 40 ∼ 60 ㎛ MANUFACTURE

LAM RAINBOW 4528 PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

TCP 9608SECHAMBER LINER

RINGHDL96-5070L(R1) AL 6061 40 ∼ 60 ㎛ MANUFACTURE

LAM TCP 9608SE PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

AME P-5000 SHOWER HEAD - AL 6061 15 ∼ 30 ㎛ MANUFACTURE

AME P - 5000 (CVD) PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

AME P- 5000CHAMBER STD 200MM

0040-09094 AL 6061 - MANUFACTURE

AME P - 5000 (CVD) PART

AME DPS UPPER CHAMBER (MEATAL) PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

CENTURA 5200 DPS UPPER CHAMBER(M) 0021-09601 AL 6061 60 ∼ 70 ㎛ MANUFACTURE

AME DPS UPPER CHAMBER(POLY) PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

CENTURA 5200 DPS UPPER CHAMBER(P) 0020-33806 AL 6061 60 ∼ 70 ㎛ MANUFACTURE

AME E-MAX WALL LINER PART

APPLICATION

EQUIPMENTD E S C R I P T I O N

ORIGNAL

VENDOR NO.MATERIAL ANODIZING REMARKS

AME E-MAXCHAMBER WALL LINER

0040-03265 AL 6061 60 ∼ 70 ㎛ MANUFACTURE