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AGILENT TURBO PUMPS
2-5 Introduction6-7 Molecular Drag Technology8-9 Agilent Floating Suspension10-11 Turbo Pump Technology12-13 Turbo Pump Technology for Instrumentation14-17 Typical Applications18-45 Turbo Pump Models46 Accessories47-49 Technical Notes50-52 Service and Support Plans
2
INTRODUCTION
The Agilent AdvantageA complete family of Turbo Pumps including the innovative break-through TwisTorr FS pumps.● Agilent turbo pumps are designed for reliability and optimum performance in real world applications to meet
highest quality standard
● Our pump range also includes integrated pumping systems, multiflow pump solutions for scientific instruments, and dedicated solutions for vibration-sensitive applications in nanotechnologies
2015 ●Agilent expands the TwisTorr family with the new 84 FS
2013 ●AgilentlaunchestheTwisTorr304FSwithFloatingSuspension,thepatentedinnovative,mostreliableandhighperforming300l/spumpinthemarket
2010●AgilentTechnologies,havingacquiredVarian,presentsthenewTwisTorrmoleculardragtechnologybased
onitswell-knownhybridTurboMolecularPumpdesign,introducingaspiraldragsectionthatachievesunmatchedperformanceinbothpumpingspeedandcompressionratiointhemostcompactspaceavailable.Newstate-of-the-artelectronicscompletethisindustryleadingTurbomolecularPumpinnovation
2004 ●VariandevelopsadedicatedrangeofSEMproductsthatmeetsthemoststringentrequirementsoftheindustry
2003 ●WiththeTurbo-V2K-GVarian,nowAgilent,introducesafullyintegratedTurbopumpingsystem
1996 ●IntroductionbyVarianofmicroprocessor-basedon-boardcontrollerunits:Navigatorline,forcomputerdrivenplug-and-pumpoperation
1991●VarianintroducesanewhybridtypeTurboMolecularPump:onemonolythicrotorprovidesboth
highspeed(Turbostages)andhighforelinetolerance(MacroTorrstages)●Useofceramicballbearingswithlife-timelubricationusingaproprietarydrysolidlubricant
1986 ●VarianbeginscollaborationwithElettroravaforturbomolecularpumptechnologyandknow-howtransfer
Turbopump Operating PrinciplesTurbomolecularpumpsconsistofaseriesofbladedimpellersrotatingathighspeedandfixedbladedstators.Theseimpellersandstatorsarealternatelyspacedandareinclinedinoppositedirections.Thepumpingactionisbasedonmomentumtransferfromthefastmovingimpellersurfacetothegasmolecules.Thespeedofthemovingsurfacemustbeashighaspossibletoachieveoptimumpumpingefficiencyintermsofpumpingspeedandcompressionratio.Whenthismechanismtakesplaceseveraltimesinapumpapumpingactioniscreated.Thesequenceofalternatingrotorsandstatorstypicalofaconventional
turbomolecularpumpdevelopsthecompressionratio.Turbomoleculardragpumpsoperateaccordingtothesameprinciple,butwithadifferentgeometryinthepumpingstages.Gasmoleculescollideagainstafastmovingwallandaredraggedintoachanneltowardthehighpressureregion.Conventionalturbomolecularpumpshavehighpumpingspeedbutlowcompressionratioatforelinepressureshigherthan10-1mbar.Moleculardragpumpshavelowpumpingspeedbuthighcompressionratiosuptoforelinepressuresofmorethan20mbar.Whenthetwotypesofstagesarecombinedtogetherinonepump,extendedoperationalpressurerangescanbeachieved.
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TURBO PUMPS
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Turbomolecular Pump Parameters and DefinitionsThroughput“Throughput”istheflowrateofpumpedgasthroughtheturbomolecularpump(andforelinepump).Throughput(Q)ismeasuredinmbarl/s1/60standardcm3/min.Themaximumthroughputapumpingsystemcanhandleis,ingeneral,dependentuponthesizeofitsforelinepumpratherthantheturbomolecularpump.Pumping Speed“Pumpingspeed”(S)(volumetricflowrate)ofaturbomolecularpumpistheratiobetweenthroughputandinletpressure(forelinepumpsizemustbetherecommendedoneasaminimum).
S=Q/p
Thepumpingspeedofaturbomolecularpumpisconstantoverawidepressurerangeanddependsupongeometricfactorssuchasdiameterandrotationalspeed.Formostturbomolecularpumps,pumpingspeedisnearlyindependentfromgasspecies(molecularweight).Compression Ratio“CompressionRatio”istheratiobetweenforeline(partial)pressureandinlet(partial)pressureforagivenprocessgas,measuredin“zeroflow”conditions(performedbyinjectingtheprocessgasinthepumpforelinewhilethehighvacuumportisblankedoff).Compressionratioisgenerallyindicatedwiththeletter“K”.Intechnicalspecificationsofturbomolecularpumps,itisthemaximumattainablevalueofK(atlowforelinepressure).Compressionratiois,infact,afunctionoftheforelinepressureasshowninFigure1.Compressionratiodecaysathighpressuredependingonturbomolecularpumpconfiguration(thenumberofmolecularstages)and/orpowerlimitationsthatslowdowntherotor(gasfrictionincreaseswithpressure).
4
INTRODUCTION
Themaximumcompressionratioisstronglyinfluencedbygasspecies:itisanexponentialfunctionofthemolecularweightofthepumpedgas(compressionratioisconsiderablylowerforlightgases).Pumping Speed and Pressure RatioThepressureratiobetweenforelineandinletpressuresineachoperationalsituationisindicatedby“Rp”.Thisis,ingeneral,equaltopumpingspeedratio
Rp=pforeline/pinlet=Seff/Sforeline
whereSeffistheeffectivepumpingspeed,andSforelineisthepumpingspeedoftheforelinepump.
Infact
Q=Seffpinlet=Sforelinepforeline
therefore
Seff/Sforeline=pforeline/pinlet
Thepumpingspeedofaturbomolecularpumpisminimallyaffectedbypressureratio(andforelinepumpsize)inmostcommonoperationalconditions(whenpressureratioismuchsmallerthanK).Generally,however,theeffectivepumpingspeed“Seff”isalinearfunctionofthepressureratio“Rp”asshowninFigure2(andthereforeisalsodependentuponthesizeofthebackingpump).Seffreachesitsmaximunvalue“S”(nominalpumpingspeed)when“Rp”equalsunity,anditiszerowhenthepressureratioRphasreacheditsmaximumvalue“K”.Thislineardependencecanbeexpressedbythefollowingrelationship:
Seff=S/(1-1/K+S/SforelineK) (1)
Asitcanbeseen:when K>>S/Sforelineand K>>1then Seff≅Swhen K≅1then Seff=Sforeline
Theaboveformula(1)mustbeusedtoevaluatepumpingspeedwhenoperatingathighpressure,especiallywithlightgases(lowK).Base PressureThebasepressureofaturbomolecularpumpistheequilibriumpressurebetweenoutgassingofpumpsurfacesexposedtohighvacuum,includingtestdome,andthepumpingspeedofthepump.
pbase=Qoutgas/Seff
Inthecaseofultimateoperationalpressure,asspecifiedbynorms,thepressureismeasuredafter48hoursbakeoutofpumpanddome(providedwithmetalgasket);thereforetheprevailingoutgassingproductisH2andequilibriumisreachedwithhydrogenpumpingspeed.
pbase=QH2/SeffH2
Whenforelinepumpswithrelativelyhighbasepressuresareused,basepressureissometimeslimitedbythecompressionratioforH2O(orN2).
pbase=pforelineH2O/KH2O
10010
1010
108
106
104
Com
pres
sion
ratio
102
10-2 10-1 1
Foreline pressure (mbar)
1
Figure 1 - Compression Ratio vs Foreline Pressure
Nitrogen Helium Hydrogen
Inlet pressure (mbar)
200
010-10
Pum
ping
spee
d (l/
s)
10-5 10-4 10-3 10-2 10-1
50
250
150100
1
300350
10-6
Figure 2 - Pumping Speed vs Inlet Pressure
Nitrogen Helium Hydrogen
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TURBO PUMPS
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Pump SelectionHow to Select a Turbo-V PumpTherightchoiceofaturbomolecularpumpdependsontheapplication;asageneralrulewecanreducethechoicetotwotypesofuse:UHV(nogasflow)operationsandProcessGasflowoperations.
–UHV(nogasflow)operations.Theformercaseincludesmostcasesinwhichtheturbomolecularpumpisemployedtocreatevacuuminsystemswherethegasloadismainlyproducedbyoutgassing.Inthisapplicationthechoiceistypicallybasedonthedesiredbasepressurewithinadesiredtimeasafunctionoftheforeseenoutgassingrate,i.e.
Seff=Q/p
where: p isthedesiredbasepressure(mbar) Q isthetotaloutgassingrateatthedesiredtime(mbarl/s) Seff istheeffectivepumpingspeed
–ProcessGasflowoperations.Thesecondcaserelatestoalloperationswhereprocessgasesmustbeused.Themainparametersarethereforethedesiredoperationpressureandtheprocessgasflow
Seff=Q’/p’
whereQ’isthetotalgasflowandp’istheoperatingpressure.
How to Select the Backing Pump of a Turbomolecular PumpTheselectionofabackingpumpshouldbebasedanalyzingtworequirementsofthevacuumsystem:a.theroughingtimeb.theminimumrecommendedbackingpumpoftheturboa.Roughing:oncethedesiredroughingtimeisestablished,
thesizeoftheforepumpcanbedeterminedthroughthefollowingformula:
Sforeline=(V/t)ln(p0/p1)
where Sforeline isthepumpingspeedoftheroughingpump(l/min) V isthevolumeofthechambertobeevacuated(l) t isthedesiredroughingtime(min) p0 isthestartingpressure(mbar) p1 istheendpressure(mbar) Whenusingaforelinepumpmuchlargerthanthe
recommendedsize,aby-passlinemightbenecessarytoachievecalculatedroughingtime.
b.Backing:thebackingpumpmustbebigenoughtoachieveaneffectivepumpingspeedascloseaspossibletothenominalspeed.
pforeline=Q/Sforeline
where Sforeline isthepumpingspeedoftheforelinepump Q isthegasload p istheoperatingforelinepressure ItshouldbenotedthatQisthetotalgasloadonthepumpand
includesprocessgasesandturbopurgegaseswhenused. Thesizeofthebackingpumpcanbecalculatedaccording
tothefollowingrule:
Sforeline≥20S/K
where S isthepumpingspeedoftheturbopump Sforeline isthepumpingspeedofthebackingpump K isthemaximumcompressionratioofthe
turbopumpforagivengas(i.e.:processgas)attheoperatingforelinepressure.
Thepumpingspeedofthebackingpumpshouldbethehigherofthetwovaluescalculatedasabove(roughingandbacking).Finally,itispossibletouseadrypump(scrollordiaphragm)forhydrocarbon-freeoperationwhenpumpsoftheMacroTorrtypeareused.
6
MOLECULAR-DRAG TECHNOLOGY
Drag Technology allows higher foreline pressure, higher efficiency and smaller backing pump in a very compact design. Agilent solutions are designed using state of the art, proprietary numerical modeling. We offer optimized solutions for:
● Pumps with high compression ratio for UHV applications requiring lowest base pressure
● Pumps with high pressure differential for high throughput
● Pumps with high discharge pressure allowing downsizing of the complete vacuum system
AGILENT TWISTORR TECHNOLOGY*● Pumping effect is created by a spinning rotor disk which
transfers momentum to gas molecules● Gas molecules are forced to follow spiral groove design
on the stator. The specific design of the channel ensures constant local pumping speed and avoids reverse pressure gradients, minimizing power consumption
(*) US Patents applications 12/343961 and 12/343980, 24 Dec. 2008.
Agilent developed two innovative molecular drag stages technological platforms: TwisTorr and MacroTorr.
Loading Edge Performance● The TwisTorr Pumps offer the highest pumping speed in
their category for all gases● The state of the art TwisTorr technology also achieves the
highest compression ratios for light gases in a commercially available Turbo Molecular Pump
● Besides offering the highest performance, average power consumption results particularly low
Space Saving Design● Our rotor is based on the proven Agilent monolithic rotor
design which positions the TwisTorr Stator between two smooth spinning disks and therefore exploits the pumping action by both disk surfaces in series
● The double-sided spiral groove design on the TwisTorr stators combines centripetal and centrifugal pumping action in series, greatly compacting the size of the drag section
Compression Ratio● Compression ratio for N2 of a single TwisTorr stage
can increase up to a factor of 100 with respect to a conventional stage of the same space and rotor speed, providing exceptional foreline tolerance and pumping speed
k
1,0E+00
1,0E+01
1,0E+02
1,0E+03
1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02
K
P foreline (mbar)
TwisTorr stage
Macrotorr stage
1,0E+00
1,0E+01
1,0E+02
1,0E+03
1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02
K
P foreline (mbar)
TwisTorr stage
Macrotorr stage
P foreline (mbar)
Gas flow in centripetal and centrifugal direction through TwisTorr channels
Centripetal pumping action Lowersurfaceareaofrotatingdisktransfersmomentumtogasmolecules.SpiralgroovedesignontheuppersectionoftheTwisTorrstatorcausesacentripetalpumpingaction).
Centrifugal pumping action Upper surface area of rotating disk transfers momentum to gas molecules.Spiral groove design on the lower section of the TwisTorr stator causes a centrifugal pumping action.
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TURBO PUMPS
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TwisTorr Technology in Agilent Turbo Pumps
AGILENT MACROTORR TECHNOLOGYThe MacroTorr ConceptAgilent patented MacroTorr design is based on the idea of replacing (rather than adding) molecular impeller disks to some turbo bladed stages.The molecular impellers consist of a disk rotating in a channel in which the inlet and outlet are divided by a wall.The cross section of the channels decreases from the top to the bottom of the pump (from high vacuum to low vacuum or from the low pressure to the high pressure zone).Gas molecules gain momentum after each collision with the moving surface of the impeller. The gas is then forced to pass through a hole to the next stage due to the wall.The result is a product that, with the same dimensions as a conventional turbopump, provides: high compression ratios for light gases and high compression ratios at high foreline pressure. This allows the use of a very small mechanical pump while maintaining a low inlet pressure, or the use of a dry pump, for an oil free environment, and high throughput capacity at inlet pressures greater than 10-3 mbar.
Turbo section: turbo stators
Turbo section: aluminum rotor with turbo stages designed to optimize pumping speed for light gases
Drag section: New TwisTorr technologyTwisTorr drag stages (spiral channels) designed for high compression ratio performances
8
Upper cover-plate
Thermistor
Lower bearing
Lower AFS
Upper AFS
Upper AFS
Mechanical DesignSST shaft screwed on AI rotor to provide rotor stability (bending effect, behaviour under external shock loads)Agilent Floating Suspensions (AFS)● AFS geometrical precision to guarantee bearing alignment● Designed radial stillness to op timize rotor dynamic behaviour and acoustic noise● Lower AFS acts as an axial spring to provide bearing’s constant perload and rotor axial positioning● Thermal stability● Vibration stability over time
Upper bearing
Lower cover-plate
FLOATING SUSPENSION
Agilent designed a patented innovative suspension technology that gives to Agilent Turbo Pumps the best dynamic behaviour, resulting in low noise, low vibration, longer bearings’ life, and exceptional stability over time.
AGILENT FLOATING SUSPENSIONThe Turbomolecular pumps’ rotor rotates at very high speed to provide the necessary pumping effect.In that operative mode there are several crucial parameters to be rigourosly controlled and managed:
● radial positioning
● axial alignment
● bearings axial pre-load
9
TURBO PUMPS
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Lower AFS
Radial press fitting to keep the best working condition for bearings over time
● AFS geometrical precision guarantees perfect bearings alignment
● Designed radial and axial stiffness, optimized rotor dynamic behaviour and acoustic noise
● Lower AFS acts as an axial spring providing bearing’s preload and rotor axial positioning
● Thermal stability
High performance elastomer for
vibration damping
Perfect bearing alignment
Vibration damping
Thermal stability Optimized rotor dynamic
behaviour
TwisTorr 304 FS TwisTorr 84 FS
To ensure● Low vibration and acoustical noise● Optimal working conditions for the bearings,
extended operating life● Exceptional stability for the very demanding
SEM application
TwisTorr 84 FS
10
Wide Pumping Speed Range: 80 to 2,200 l/sAgilent offers a complete range of turbomolecular pumps, to cover all applications and market segments. Controllers
• Various configurations available to match each application’s requirements
• Rack type display controllers, to match your existing system architecture
• Low voltage - PCB units, to fully integrate turbopump electronics into your system’s electronics
• Navigator on board controllers, for plug-and-pump operation driven by the computer of your system
• Truly integrated electronics, completely embedded in the pump body
Molecular Drag Technology& Pumping Efficiency• MacroTorr and TwisTorr technologies
allow higher foreline pressure, higher efficiency and smaller backing pump, in a very compact design
• Agilent R&D Team has the capability to optimize the pump performances for different applications
TURBO PUMP TECHNOLOGY
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TURBO PUMPS
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Controller and T-plus SW• T-plus Software runs on a PC or laptop
and is an effective operation and trouble shooting interface
• It enables complete remote control of the pump
• It is available for all controllers, when equipped with serial port, for data logging and displaying
Oil Free - Permanent Lubrication• Permanent lubrication is possible thanks
to the extremely low vapor pressure of the solid lubricant
• This solution allows pump operation in any position
• No maintenance, no oil, no refill and most important no contamination
Thermal Efficiency & Temperature Control• The correct design of pumping stages,
motor and electronics allows low heat dissipation and low power consumption
• Total temperature control within the pump is important for reliable long- term operation. All our pumps are equipped with at least one temperature sensor
• Controllers manage temperature information related to other operational parameters, for an evenly distributed and controlled temperature within the pump
• These, in combination with efficient air and water cooling systems, are key factors for reliability, in any application
Rotor• Suspension axial/radial
perfect positioning• Vibration damping• Correct bearing pre-load
Ceramic Ball Bearings• Agilent was the first to introduce
permanently lubricated ceramic ball bearings in turbomolecular pumps in 1992
• From there, bearings’ quality and reliability have dramatically improved
• Now typical MTTF well exceeds 200,000 hours
Application Specific Solutions for SEMA complete line of turbo pumps dedicated to Electron Microscopy.(See page 12-13)
12
TURBO PUMP TECHNOLOGY FOR INSTRUMENTATION
The Agilent Advantage: Masters in Mass Spec and NanotechnologyAs the leading Ultra-High Vacuum products supplier, Agilent Technologies has long been working with all MS, SEM and TEM manufacturers, providing application specific solutions.
Today Agilent is the only company able to offer a complete and dedicated range of MS and SEM products, including primary pumps, turbomolecular pumps, ion getter pumps, and vacuum measurement, that meet the most stringent requirements of the industry.
Turbo-V SEM versions are available on request; please ask Agilent for technical details.
● Vacuum in the gun and sample chamber must be particle-free and oil-free● No Vibrations● No Resonances● No Magnetic stray fields from both IGP and TMPs ● No Electric noise from power supplies● Fastest Pumpdown cycles● Pressure levels stable and controlled● Maximum Uptime● Fast, worldwide Service Support
Vacuum for SEM: basic requirements
Superior Vibration Isolation System• Lower vibrations than Mag-Lev!• Certified Computer Aided Balancing,
thanks to suspended benches with special high sensitivity accelerometers
Foreline Pressure up to 15 mbar• Ideal to minimize forepump size
(i.e. IDP-3 Dry Scroll Pump, DS 42 Rotary Vane Pump), resulting in the lowest cost of ownership
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Improved Roto Dynamics• Designed to avoid internal mechanical
resonances• Agilent SEM turbopumps are designed to
minimize vibration sources, and have a very stable vibration profile
Enhanced Electronic Controllers• Universal voltages• Integrated Vent valve command,
adjustable valve delay and opening time• Pressure gauge reading• Integrated Profibus
Monolithic RotorMounting in any position, with no limitations.• Rugged design• Light weight• Air inrush proof• Earthquake proof
Magnets Free Design• Lowest Magnetic Signature in the
industry• Best to work very close to ebeams• No need for magnetic shields
Integrated Double Dampers• Agilent developed special Integrated
Double Dampers for the most demanding SEM applications
• Damping factor up to 1400X (Radial, at unbalance level, with IDD100 ISOK): better than Mag-Lev!
• Best SEM image resolution
14
AGILENT TURBO PUMPS TYPICAL APPLICATIONS
Research and Development Particle Accelerators• Turbomolecular pumps are widely used in High Energy
Physics, Fusion Technology and general UHV research. Synchrotron Light Sources, Particle Accelerator Rings, UHV Laboratory research, and Fusion reactors need extremely clean, reliable and cost effective HV and UHV.F Maintenance-free pumps are specifically required, because most pumps are not easily accessible.
• Agilent turbomolecular pumps are designed to offer unmatched reliability, performance and cleanliness for these applications. Ceramic bearing pumps, thanks to their reduced rolling friction, low stress and high thermal stability compared to conventional bearings, deliver longer operating life. Ultra low vapor pressure solid lubricant eliminates the need for maintenance and assures clean operation under any operating conditions.
• Furthermore, in contrast to most of the other pumps, all Agilent turbopumps have both the upper and the lower bearing in the rough vacuum side and not exposed to UHV, further reducing the possibility of contamination - even in case of misuse.
• The patented TwisTorr stages provide the highest speed and compression ratio in the smallest footprint; furthermore all Agilent turbopumps can truly be mounted in any orientation, from vertical to horizontal to upside down, aiding system design in the most stringent space requirements.
• Agilent turbopumps can operate at higher foreline pressures, allowing the use of dry roughing pumps, thus providing a completely clean, oil-free compact and cost effective pumping package.
• Whenever a large amount of gas has to be pumped and higher throughput is needed, the combination of TwisTorr pumps and TriScroll dry pumps is the state-of-the-art solution.
All Agilent turbopumps have integrated or on board controller versions allowing easy plug and pump operation, or a rack-mounted controller for applications where the electronics need to be remotely placed (i.e. radioactive environments).
15
TURBO PUMPS
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InstrumentationElectron Microscopy (SEM, TEM), Focused Ion-beam Systems (FIB) and Surface Analysis• Modern focused-beam systems such as SEM’s, TEM’s and
FIB’s utilize columns that project electrons or ions onto microscopic samples for detailed analysis. End users analyze all types of substances from organic compounds to semiconductor wafers. In the Semiconductor industry, in particular, they require more sensitivity for better sample resolution. Another key requirement is high sample throughput in order to lower the cost of ownership of these instruments.
• Based on these requirements, the demand for high performance vacuum pumps is greater than ever. Agilent offers a full range of high and ultra-high vacuum pumps designed especially for the demanding requirements of SEM’s, TEM’s and surface analysis systems (Agilent has a full range of ion pumps, which are key products for this application; please see ion pump section).
• Turbo molecular pumps are also a key component in modern focused-beam systems because they offer fast, oil-free air evacuation of large sample chambers (oil-free operation is a key requirement of many modern analysis applications such as semiconductor manufacturing). From Agilent’s full range of turbo pumps, the focused-beam system designer can choose a pump size that offers the best chamber evacuation time with the best cost of ownership and compact size for use in limited space situations.
• Agilent has a full line of customized, low vibration turbo pumps for the most sensitive microscopy applications. Finally, Agilent has a full range of integrated pump controllers that offer the highest control flexibility with near zero electromagnetic noise generation.
• Agilent offers a full range of application specific designed SEM turbo pumps including 80 l/s, 300 l/s, 550 l/s, 700 l/s and 1000 l/s speeds.
All of Agilent’s SEM turbo pumps designs can be verified in Agilent’s application lab. Finally, each SEM turbo pump is tested in production before being shipped to the customer.
Mass SpectrometryMSisourcorebusinessandhasbecomeafundamentalanalyticaltoolinmanyindustries.Thankstoadvancesinelectronics,instrumentdesignerscanimplementcost-effective,high-performanceanalyticalpowerinacost-effective,easy-to-usesystem.Thesedevelopmentsrequireadvancedvacuumsystemsthatarecharacterizedbymulti-chamber,highthroughputdesignsonthehighqualityinstruments.Theserequirements,inturn,demandcost-effective,highperformancevacuumpumps.Agilentoffersafulllineofpumpsandcontrollersthatmeetthemostchallengingvacuumrequirementsandareoptimizedforthespecificrequirementsofmodernmassspectrometrysystems.
Courtesy TRIUMF-ISAC.
Agilent Split Flow Turbo Pumps
16
AGILENT TURBO PUMPS TYPICAL APPLICATIONS
Agilentcanfurthercustomizeitspumpsbyprovidingmulti-inletpumpingsystemsthatarecompactandreliable.Afewcommonapplicationexamplesformassspectrometryarelistedbelow:• GC-MS
GasChromatographMassSpectrometerstypicallyuseonevacuumchamberinrelativelylowgasloadenvironmentsandanintermediatevacuuminterfacetoanalyzeinorganicsamples.TheAgilentTurbo-V81withprintedcircuitboardcontroller(PCB)isaverycost-effectivesolutionforthiscommonanalyticaltechnique.TheV301Navigatoroffersacompact,cost-effectivesolutionforlargerinstrumentdesigns.
• LC-MSLiquidChromatographMassSpectrometerstypicallyincludemulti-chamber,highthroughputvacuumsystems.Agilent’sturbomolecularpumpsaredesignedforhighthroughputoperationwithaircooling–animportantbenefitformaintainingacompactsystem.Theyarealsoavailableinseveralsplitflowversionstoincreasetheirutilityandperformanceinthisapplication.Theintegratedcontrollerprovidesahighlevelofcontrolfunctioninasmallpackage.
• ICP-MSInductivelyCoupledPlasma-MSsystemshaveawiderangeofvacuumrequirements.Manysystemscanuseheavycarriergasessuchasargon,whilecollisioncelldesignsusehelium.AgilentturbopumpshaveahighefficiencymotorandTwisTorrorMacroTorrdragstagestoreduceheatproductionundergasload.Thesefeaturesallowtopumphighlevelsofargon.Integratedoronboardcontrollersassurecompactpackage.
• TOFTimeOfFlightsystemsarebecomingveryimportantanalyticaltoolsindrugdiscoveryandproteomics.Vacuumrequirementsvary,althoughsmallsizeisoftenanimportantconsideration.AgilentturbopumpandcontrollerpackageprovidestheTOFdesignerwithahighdegreeofflexibilitywithregardtohighthroughput,efficientheatdissipationandcompactsize.
• Inawiderangeofindustries,fromglasscoatingtomedicalequipment,manufacturersshareaneedforrobust,reliable,production-friendlyvacuumtechnologies.
• Focusingonthetotalcostofownership,Agilentcontinuestodeliverinnovativevacuumsolutionsthatmaximizethroughput,toleratevaryingoperatingconditions,andsimplifymaintenance,helpingtoassuremaximumuptimeandefficiency.
• Turbo-Vpumps,designedtowithstandheavyindustrialuse,canhandlehighgasloadsandwillrecoverquicklyfromaccidentalairin-rushes.
• Agilentoffersacomprehensiverangeofvacuumpumpsandsystemsforindustrialuses,includingthenewTurbo-VK-GSeries,withtrulyintegratedelectronicsembeddedinthepumpbody.
Thin Film Deposition• Glasscoatingequipment(architecturalglass,
automotiveglass,flatpaneldisplaysubstrates)
Industrial Vacuum Processing
Agilent Turbo-V 2K-G in Thin Film Deposition application.
17
TURBO PUMPS
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• Thinfilmsolarcellsproduction(photo-voltaic)• Opticaldatamedia(CompactDiscs,DigitalVersatileDiscs,
MagnetoOpticalDiscs)• Magneticstoragemedia(harddiscs,readheads)• SurfacetreatmentsusedforTribologicalandWearcoatings• FunctionalandDecorativecoatings,includingMetallization• Opticalcoating(ophthalmic,precisionopto-electronics)• Roll/Webcoatingonfilmsorfoils• PVDandotherPlasmaProcesssystemsrequiringhighgasloadDevice Processing: • TV&Monitorpicturetubemanufacture• Evacuationoflamps(motorwaylighting,beamers)• X-Raytubes&electrondevices• Medicalacceleratortubes• LasersGeneral Industrial Processes:• Vacuumfurnaces/Brazing• Electronbeamwelding
Dedicated Solutions for Thin Film Deposition• Insinglechamberbatchsystems,multiplechambersystems,
withloadlocks,orlargeinlinecontinuoussystems,Agilenthastherightturbopumpforyourprocessrequirements.WhatreallydifferentiatesAgilentistheexpertiseofitsapplications,supportandcustomsystemdesignstafftointegratevacuumpumpsintooptimizedvacuumsolutions.
The Turbo-V K-G Series Systems• Application-specific
pumpingsolutionsdesignedforthinfilmdepositionequipment:thefirstfullyintegratedapproachformaximumsystemproductivityanduptime.
-highpumpingspeedandhighgasthroughput -trulyintegratedpowersupply(ProtectionClassIP54),
resultingincompactsizeandeaseofsystemintegration
-capabilitytocreatedifferentiatedpartialpressureswhereneeded
-maximumthroughputcapacityatstableoperationpressure -ceramicballbearings,oil-free,contamination-free,no
preventivemaintenance,makethepumpmountableinanyposition
-extremelylowvibrationandnoiseforsensitiveapplications -watercooling(watercompatibilityupto35°C)allowslong
servicelifeofelectroniccomponents -permanentmonitoringsystemintegratedintheelectronic
device,andbuilt-inself-diagnosticscapability,incombinationwithourtailoredservice&supportplansoffersauniquesolutionforTFDapplications.
Courtesy Centorr. Courtesy Optovac Vacuum Coating Systems.
18
AGILENT TURBO PUMPS MODELS
TwisTorr 84 FS TwisTorr 304 FS Turbo-V 551 Navigator
Turbo-V 701 Navigator
Turbo-V 1001 Navigator
Turbo-V 2300 TwisTorr Turbo-V 1K-G Turbo-V 2K-G
SystemTurbo-V 3K-G
System
Pump specification DN40 DN63 DN100 DN160 DN100 DN160 DN200 DN160 DN200 DN250 DN250 DN160 DN200 DN250 DN250
Pumping speed, l/s
NitrogenHeliumHydrogenArgon
49383644
67635366
250255220250
250255220250
350450450
550600510
690620510
790820860
950870900
1,050900920
2,0501,8001,500
810950680750
1,0801,150730
1,040
1,600 2,200
Compression ratio
NitrogenHeliumHydrogenArgon
≥1 x 1011
2 x 106
5 x 104
>1 x 1011
>1 x 1011
>1 x 108
1.5 x 106
>1 x 1011
>1 x 109
1 x 107
1 x 106
1 x 109
1 x 107
1 x 106
1 x 109
1 x 107
1 x 106
>8 x 108
8 x 105
4 x 104
>5 x 107
>4 x 104
1.5 x 104
>5 x 108
3 x 105 >1 x 107
Base pressure, mbar
With recommended mechanical pump
<5 x 10-10 <1 x 10-10<1 x 10-10 <1 x 10-10 <1 x 10-10
10-10<1 x 10-10 <1 x 10-8 <1 x 10-9
With recommended dry pump <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-8 <1 x 10-9
Startup time, min < 2 < 3 < 5 < 5 < 4 < 6 < 5 < 7 < 6
Rotational speed, rpm 81,000 60,000 42,000 42,000 38,000 33,300 45,660 33,000 31,800
Recommended forepump MechanicalpumpDrypump
DS 42, DS 102SH-110, IDP-3
DS 102SH-110
DS 302IDP-15
DS 302IDP-15
DS 402IDP-15
DS 602TS600
>20 m3/h >36 m3/h >40 m3/h >60 m3/h
Inlet flange, nominal diameter
Klamp flange, mmConFlat, mm (inches OD)ISO clamp style, mmISO-F bolted, mm
4035 (2.75)
––
–63 (4.5)
63–
–100 (6)
100–
–160 (8)
160–
–100 (6)
––
–160 (8)
160160-F bolted
–200 (10)
200200-F bolted
––
160–
–200 (10)
200200-F bolted
––
250250-F bolted
–250 (12)
–250-F bolted
–––
160-F
–––
200-F
–––
250-F bolted
–––
250-F bolted
Foreline flange, nominal diameter Klamp flange NW16 NW16
(NW25 optional) NW25 NW25 NW40 NW40 NW25 NW40 NW40 NW40
SEM version available on request – – ● ● ● – – – –
ControllersRack controllerNavigator on board contr.Integrated electronicsPCB controller
●●–●
●●––
●●––
●●––
●●––
●–––
●●––
––●–
––●–
19
TURBO PUMPS
Turb
o Pu
mps
TwisTorr 84 FS TwisTorr 304 FS Turbo-V 551 Navigator
Turbo-V 701 Navigator
Turbo-V 1001 Navigator
Turbo-V 2300 TwisTorr Turbo-V 1K-G Turbo-V 2K-G
SystemTurbo-V 3K-G
System
Pump specification DN40 DN63 DN100 DN160 DN100 DN160 DN200 DN160 DN200 DN250 DN250 DN160 DN200 DN250 DN250
Pumping speed, l/s
NitrogenHeliumHydrogenArgon
49383644
67635366
250255220250
250255220250
350450450
550600510
690620510
790820860
950870900
1,050900920
2,0501,8001,500
810950680750
1,0801,150730
1,040
1,600 2,200
Compression ratio
NitrogenHeliumHydrogenArgon
≥1 x 1011
2 x 106
5 x 104
>1 x 1011
>1 x 1011
>1 x 108
1.5 x 106
>1 x 1011
>1 x 109
1 x 107
1 x 106
1 x 109
1 x 107
1 x 106
1 x 109
1 x 107
1 x 106
>8 x 108
8 x 105
4 x 104
>5 x 107
>4 x 104
1.5 x 104
>5 x 108
3 x 105 >1 x 107
Base pressure, mbar
With recommended mechanical pump
<5 x 10-10 <1 x 10-10<1 x 10-10 <1 x 10-10 <1 x 10-10
10-10<1 x 10-10 <1 x 10-8 <1 x 10-9
With recommended dry pump <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-8 <1 x 10-9
Startup time, min < 2 < 3 < 5 < 5 < 4 < 6 < 5 < 7 < 6
Rotational speed, rpm 81,000 60,000 42,000 42,000 38,000 33,300 45,660 33,000 31,800
Recommended forepump MechanicalpumpDrypump
DS 42, DS 102SH-110, IDP-3
DS 102SH-110
DS 302IDP-15
DS 302IDP-15
DS 402IDP-15
DS 602TS600
>20 m3/h >36 m3/h >40 m3/h >60 m3/h
Inlet flange, nominal diameter
Klamp flange, mmConFlat, mm (inches OD)ISO clamp style, mmISO-F bolted, mm
4035 (2.75)
––
–63 (4.5)
63–
–100 (6)
100–
–160 (8)
160–
–100 (6)
––
–160 (8)
160160-F bolted
–200 (10)
200200-F bolted
––
160–
–200 (10)
200200-F bolted
––
250250-F bolted
–250 (12)
–250-F bolted
–––
160-F
–––
200-F
–––
250-F bolted
–––
250-F bolted
Foreline flange, nominal diameter Klamp flange NW16 NW16
(NW25 optional) NW25 NW25 NW40 NW40 NW25 NW40 NW40 NW40
SEM version available on request – – ● ● ● – – – –
ControllersRack controllerNavigator on board contr.Integrated electronicsPCB controller
●●–●
●●––
●●––
●●––
●●––
●–––
●●––
––●–
––●–
20
Technical SpecificationsPumping speed(l/s)WithCFF4½”orISO63: N2:67l/s He:63l/s H2:53l/s Ar:66l/sWithCFF2¾”: N2:56l/s He:46l/s H2:40l/s Ar:57l/sWithKF40: N2:49l/s He:38l/s H2:36l/s Ar:44l/sGas throughput at full rotational speed(withrecommendedforepump)Aircooling(35°C) N2:100sccm Ar:70sccmWatercooling(25°C,65l/h) N2:100sccm Ar:70sccmCompression ratio N2:≥1x1011 He:2x106 H2:5x104 Ar:>1x1011
Base pressurewith recommended forepump (5m3/h) <5-10mbar(<3.75x10-10Torr)Inlet flange CFF4½”O.D. ISO63 CFF2¾”O.D. KF40Foreline flange KF16NWRotational speed 81000rpm(1350Hzdrivingfrequency)Start-up time <2minutesRecommended forepump Mechanical:AgilentDS42–DS102 Drypump:AgilentIDP-3,SH110Operating position AnyOperating ambient temperature +5°Cto+35°CRelative humidity of air 0-90%(notcondensing)Bakeout temperature 80°Catinletflangemax.(ISOflange) 120°Catinletflangemax.(CFFflange)Lubricant PermanentlubricationCooling requirements AirCooling: Airflowtemperature+5°Cto+35°C WaterCooling: Coolingwatertemperature:+15°Cto+25°C Minimumflow:65l/h(0.30GPM) Pressure:2to4bar(45to75psi)Bakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Noise pressure level (at 1 mt at full speed) 40dB(A)*Storage temperature -40°Cto+70°CMax altitude 3000mCertifications CE,C-CSA-US,RoHScompliantasper2011/65/UEWeight kg(lbs) PumpISO63: PumpCFF4½”: PumpCFF2¾”: PumpKF40: 2.5(5.5) 3.5(7.7) 3.34(7.35) 2.37(5.22)* Average value ± 4 dB(A) std deviation
Dimensions: millimeters (inches)
AGILENT TURBO PUMP MODELS
► Agilent TwisTorr 84 FS
61.6
(2.4
3)20
°25
°11
5.7
(4.5
6)
Ø 97.0 (3.82)
111.
4 (4
.39)
105.
4 (4
.15)
148.
3 (5
.84)
FORELINE FLANGE
ELECTRICALCONNECTOR
VENTSCREW
62.5 (2.46)59.3 (2.33)
67.7
(2.6
7)20
°25
°12
2.0
(4.8
0)
Ø 97.0 (3.82)
117.
7 (4
.63)
111.
7 (4
.40)
154.
6 (6
.09)
FORELINE FLANGE
ELECTRICALCONNECTOR
VENTSCREW
62.5 (2.46)59.3 (2.33)
21
TURBO PUMPS
Turb
o Pu
mps
Pumps Part NumberTwisTorr84FSISO63 X3502-64000TwisTorr84FSKF40 X3502-64001TwisTorr84FSCFF4½” X3502-64002TwisTorr84FSCFF2¾” X3502-64003Controllers Part NumberTwisTorr84FSAGRackcontrollerRS232/485 X3508-64001TwisTorr84FSAGRackcontrollerProfibus X3508-64002TwisTorr84FSon-boardcontroller110/220V X3509-64000TwisTorr84FSon-boardcontroller24V X3509-64001TwisTorr84FSPCBController X3510-64000Accessories Part NumberCablesMainscableNEMAplug,3mlong 969-9958MainscableEuropeanplug,3mlong 969-9957SerialcableandT-plussoftware 969-9883PCBcable 969-9869Pumpextensioncable(3m) 969-9942Extensioncable5m 969-9942M007Extensioncable10m 969-9942M006Extensioncable15m 969-9942M005Extensioncable20m 969-9942M004Inlet screenInletscreenISO63 X3502-68001InletscreenCFF4½” X3502-68000Inletscreen,KF40 969-9309InletscreenCFF2¾” 969-9328CoolingMetalWaterCoolingKit X3502-68002PlasticWatercoolingkit X3502-68003Aircoolingkit(0,5mcable) 969-9290Aircoolingkitextensioncable(5m) 969-9940
Accessories Part NumberVibration isolatorVibrationisolatorISO63 969-9375VibrationisolatorCFF4½” 969-9376VentingVentValveN.O.0,5mmorifice(0,5mcable) 969-9844VentValveextensioncable(5m) 969-9941VentValveextensioncable(10m) 969-9941M003VentValveextensioncable(15m) 969-9941M001VentValveextensioncable(20m) 969-9941M005VentScrewM5 X3502-68005VentAdapterkitM5-M8 X1699-64039PurgePurgeScrew X3502-68004Purgevalve10SCCMNW16KF-M12 969-9239Purgevalve10SCCM¼Swagelok-M12 969-9240Purgevalve20SCCMNW16KF-M12 969-9241Purgevalve20SCCM¼Swagelok-M12 969-9242Purgevalve10SCCM¼Swagelok-¼Swagelok 969-9232Purgevalve20SCCM¼Swagelok-¼Swagelok 969-9236MountingControllersidemountingbracket X3502-68006CFF4½”mountingkit X3502-68007Metricscrewskit X3502-68008Americanscrewskit X3502-68009Active GaugesFRG700FullRangeGauge AskAgilentfordetailsPVG500PiraniVacuumGauge AskAgilentfordetailsPCG750PiraniCapacitanceGauge AskAgilentfordetailsCDG-500CapacitanceDiaphragmGauge AskAgilentfordetails
Ordering Information
Foreline pressure (mbar)
110-3 10-1
Com
pres
sion
ratio
110-2 103102
1012
108
1010
106
104
102
Inlet pressure (mbar)
80
010-9 10-7 10-6 10-2
Pum
ping
spee
d (l/
s)
110-8 10-5 10-4 10-3 10-1
70
5060
3040
2010
Pumping Speed vs Inlet Pressure Compression Ratio vs Foreline Pressure
Argon Nitrogen Helium Hydrogen Argon Nitrogen Helium Hydrogen
22
59.0
(2.3
)91
.0 (3
.6)
72.7
(2.9
)17
.9 (0
.7)
4.5
(0.2
)
107.0 (4.2) 107.0 (4.2)
91.0 (3.6)
68.5 (2.7)21.4 (0.8) 4x3MA LMAX=8mm
3x5MA LMAX=8mm
Dimensions: millimeters (inches)
TheTwisTorr84FSAGNavigatorOn-boardcontrollerisasolid-statefrequencyconverterwiththefollowingfeatures:• DrivestheTwisTorr84FSpumps• Powersthepumpcoolingfan• Drivestheventvalve• Providesandacquiresthepressureofthewiderangegauge.• RemoteI/Oscompatiblewiththepreviousversion• NavigatordefaultserialcompatiblewiththepreviousRS232
and485version• AbletooperatewithActiveGauges(FullRangeGauge
FRG-700andFRG-702)Thededicatedcontrollerisasolid-statefrequencyconverterwhichisdrivenbyasinglechipmicrocomputerandconsistsoftwoPCBswhichincludepowersupplyand3-phaseoutput,analogandinput/outputsection,microprocessoranddigital
section.Thepowersupply,togetherwiththe3-phaseoutput,convertsthesinglephaseACmainssupplyor24Vdcsupplyintoa3-phase,lowvoltage,mediumfrequencyoutputwhichisrequiredtopowerthepump.Thecontrollercanbeoperatedbyaremotehostcomputerviatheserialconnection.AWindows-basedsoftwareisavailable(optional).TheTwisTorr84FSAGNavigatorcontrollercanbemountedonboard,onthebottomoftheTwisTorr84FSpumps.
Technical SpecificationsInput voltages: Navigatorcontroller,24Vdc 24Vdc±10%Navigatorcontroller,100/240Vac 100÷240Vac±10%Input power: Navigatorcontroller,24Vdc 80WNavigatorcontroller,100/240Vac 180VAInput frequency: Navigatorcontroller,100/240Vac 50to60Hz±5%Fuse 2xT4A250VOutput voltage 60VacOutput frequency 1350HzOutput power: Navigatorcontroller,24Vdc 50WNavigatorcontroller,100/240Vac 70W(ramp), 50W(NormalandAutotuning)Operating temperature +5÷+45°C 0–90%(Notcondensing)Storage temperature -20°Cto+70°C 0–95%
Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTwisTorr84FSon-boardcontroller*110/220V 0.3(0.66) X3509-64000TwisTorr84FSon-boardcontroller*24V 0.3(0.66) X3509-64001* Order power cable separately
CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883Active GaugesFRG-700Pirani/IMGCombinationGauge,KF25 FRG700KF25FRG-700Pirani/IMGCombinationGauge,DN40CF FRG700CF35FRG-702Pirani/IMGCombinationGauge,KF25Allmetal-bakeable FRG702KF25FRG-702Pirani/IMGCombinationGauge,DN40CFAllmetal-bakeable FRG702CF35GaugeconnectioncabletoAGrackcontroller-3m 9699960GaugeconnectioncabletoAGrackcontroller-5m 9699961NOTE • For other Active Gauges models please ask Agilent for details
AGILENT TURBO PUMP CONTROLLERS
► Agilent TwisTorr 84 FS AG Navigator On-board Controller
23
TURBO PUMPS
Turb
o Pu
mps
244 (9.61)
106.4 (4.19)
91.4 (3.60)= =
1.5 (0.06)
8.7
(0.3
4)9.
3 (0
.36)
128.
5 (5
.06)
110.
5 (4
.35)
96.1
(3.7
8)
122.
5 (4
.82)
==
Measures
Start/Stop
Counters
Next
Previous
Vacuum Products
Low Speed
Decrease
Increase
Menu
Dimensions: millimeters (inches)
TheTwisTorr84FS-AGRackcontrollerisamicroprocessor-controlledfrequencyconverterwithnew,enhancedfeaturesthatallowgreatercontrolandcommunicationcapabilities.Thiscompact,¼rackunitisdesignedforfullworldwidecompatibility,forventvalvecontrol,activegaugepressurereadingandpumpoperationparameterscontrol,aswellasforselfdiagnosticandprotectionfeatures.• Universal Voltage
Controllerabletoautosetaccordingtotheinputvoltage,providingflexibilityforeasyinstallationworldwide
• RS-232/485 Communication Protocols and Profibus (Options)
- Allowsthepumptobeinterfacedwiththesystemcontrols- EnablesthepumptobeoperatedviaPCwithT-Plussoftware- Helpsdevelopmentofowncustomersoftware• Stop Speed Reading (SSR)- Continuespumpspeedreadingafterthestopcommand- Allowsmonitoringthepumpinslowdownrampandshut
downtime• N.O. and N.C. Vent Valve Drive- Valvedelayandopeningtimeadjustable- Ventvalvedrivenbycontrollerautomaticallyorbyserialline- OpeningtimecontrolthroughSSRfunction
• Active Gauge Pressure Reading Capability- AbletooperatewithActiveGauges(FullRangeGauge
FRG-700andFRG-702)- Providesaccuratepressuremeasurementsfromatmdown
to10-9mbar- Rackmountedcontrolelectronicsnolongernecessary,
withsimple+24Vdcpowerconnector- Proveninvertedmagnetrondesign- Rapidstarteveninhigh-vacuumconditions
Technical SpecificationsInput 100÷240Vac 50/60HzMaximum input power 210VAOutput voltage 76VacOutput frequency 1,350HzNominal output power 100WOperating temperature +5°Cto+45°CStorage temperature –20°Cto+70°C
Ordering InformationDescription Weight Part kg(Ibs) NumberControllerTwisTorr84FSAGRackcontroller*RS232/485 1.7(3.2) X3508-64001TwisTorr84FSAGRackcontroller*Profibus 1.7(3.2) X3508-64002* Order power cable separately
CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883Active GaugesFRG-700Pirani/IMGCombinationGauge,KF25 FRG700KF25FRG-700Pirani/IMGCombinationGauge,DN40CF FRG700CF35FRG-702Pirani/IMGCombinationGauge,KF25Allmetal-bakeable FRG702KF25FRG-702Pirani/IMGCombinationGauge,DN40CFAllmetal-bakeable FRG702CF35GaugeconnectioncabletoAGrackcontroller-3m 9699960GaugeconnectioncabletoAGrackcontroller-5m 9699961NOTE • For other Active Gauges models please ask Agilent for details
► Agilent TwisTorr 84 FS-AG Rack Controller
24
Dimensions: millimeters (inches)
Technical SpecificationsPumping speed(l/s)WithCFF6”orISO100: N2:250l/s He:255l/s H2:220l/s Ar:250l/sWithCFF8”orISO160: N2:250l/s He:255l/s H2:220l/s Ar:250l/sGas throughput at full rotational speed(withrecommendedforepump)AmbientTemp.(25°C) N2:170sccm Ar:110sccmWaterTemp.(25°C,50l/h) N2:170sccm Ar:110sccmCompression ratio & Foreline tolerance N2:>1x1011 He:>1x108 H2:1.5x106 Ar:>1x1011 N2:>10mbar He:>10mbar H2:>4mbar Ar:>10mbarBase pressurewith recommended forepump (5m3/h) <1x10-10mbar (<1x10-10Torr)Inlet flange CFF8”O.D. ISO160 CFF6”O.D. ISO100Foreline flange KF16NW(KF25-optional)Rotational speed 60000rpm(1010Hzdrivingfrequency)Start-up time <3minutesRecommended forepump Mechanical:AgilentDS102 Drypump:AgilentSH-110Operating position AnyOperating ambient temperature +5°Cto+35°CRelative humidity of air 0-90%(notcondensing)Bakeout temperature 80°Catinletflangemax.(ISOflange) 120°Catinletflangemax.(CFFflange)Lubricant PermanentlubricationCooling requirements Forcedair(5-35°Cambienttemperature) Water(mandatoryifambienttemperature>35°C)Coolant water Minimumflow: Temperature: Pressure: 50l/h(0.89GPM) +15°Cto+30°C 3to5bar(45to75psi)Noise pressure level <50dB(A)at1meterStorage temperature -40°Cto+70°CMax altitude 3000mWeight kg(lbs) PumpISO100: PumpCFF6”: PumpISO160: PumpCFF8”: 5.5kg(12.3) 7.5kg(16.5) 5.7kg(12.6) 9.7kg(20.9)
AGILENT TURBO PUMP MODELS
► Agilent TwisTorr 304 FS
99.2
(3.9
1)
134.
6 (5
.30)
ISO 100
134.
6 (5
.30)
179.
2 (7
.05)
Ø144 (5.67)
106.
6 (4
.19)
142.
0 (5
.59)
CFF 6”
142.
0 (5
.59)
186.
5 (7
.34)
Ø144 (5.67)
86.5 (3.41)
39°0'27°0'
27°0'
36°0'
144.0 (5.67)
86.3 (3.40)
38.0 (1.50)
ELECTRICALCONNECTOR
FORELINEFLANGE
VENT SREW
86.5 (3.41)
39°0'27°0'
27°0'
36°0'
144.0 (5.67)
86.3 (3.40)
38.0 (1.50)
WATERCOOLING
WATERCOOLING
ELECTRICALCONNECTOR
FORELINEFLANGE
VENT SREW
25
TURBO PUMPS
Turb
o Pu
mps
Foreline pressure (mbar)
110-10 10-8 10-8
Com
pres
sion
ratio
10-1 10-1 1021
102
104
106
1010
108
1012
Inlet pressure (mbar)
300
010-910-10 10-7 10-6 10-2
Pum
ping
spee
d (l/
s)
110-8 10-5 10-4 10-3 10-1
250
200
150
100
50
Ordering InformationPumps Part NumberTwisTorr304FSISO100watercooling X3500-64000TwisTorr304FSCFF6”watercooling X3500-64001TwisTorr304FSISO160watercooling X3500-64002TwisTorr304FSCFF8”watercooling X3500-64003TwisTorr304FSISO100aircooling X3500-64004TwisTorr304FSCFF6”aircooling X3500-64005TwisTorr304FSISO160aircooling X3500-64006TwisTorr304FSCFF8”aircooling X3500-64007TwisTorr304FSISO100SFwatercooling X3500-64010
Controllers Part NumberTwisTorr304FSAGRackcontrollerwithRS232/485 X3506-64002TwisTorr304FSAGRackcontrollerwithProfibus X3506-64003TwisTorr304FSonboardcontroller24Vdc X3507-64002TwisTorr304FSonboardcontroller100-240Vac X3507-64003
Accessories Part NumberCablesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883Extensioncable5m 969-9942M007Extensioncable10m 969-9942M006Extensioncable15m 969-9942M005Extensioncable20m 969-9942M004Inlet screenInletScreenISO100 X3500-68000InletScreenCFF6” 9699302InletScreenISO160 X3500-68001InletScreenCFF8” 9699304
Accessories Part NumberCoolingWatercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforOnboardcontroller X3500-68010FanextensioncableforOnboardcontroller 9699949AircoolingkitforrackAGcontroller X3500-68011FanextensioncableforrackAGcontroller 9699940Vibration isolatorVibrationisolatorISO100 9699344VibrationisolatorCF6” 9699334VibrationisolatorISO160 9699345VibrationisolatorCF8” 9699335VibrationisolatorISO100IDX 9699396Ventflange,NW10KF/M8 9699108VentingDelayventvalve1.2mmorifice X3505-68000Delayventvalve0.5mmorifice X3505-68001VentvalveN.O.forrackAGcontroller(0.5mm) 9699844Ventvalveforon-boardcontroller(1.2mm) 9699834Ventvalveforon-boardcontroller(0.5mm) 9699834M006PurgePurgevalve10SCCMNW16KF-M12 9699239Purgevalve10SCCM¼Swagelok-M12 9699240Purgevalve20SCCMNW16KF-M12 9699241Purgevalve20SCCM¼Swagelok-M12 9699242Purgevalve10SCCM¼Swagelok-¼Swagelok 9699232Purgevalve20SCCM¼Swagelok-¼Swagelok 9699236MountingBracketforOnboardcontrollersidemounting X3500-68012ForelineflangeKF25 X3500-68002Active GaugesFRG700FullRangeGauge AskAgilentfordetailsPVG500PiraniVacuumGauge AskAgilentfordetailsPCG750PiraniCapacitanceGauge AskAgilentfordetailsCDG-500CapacitanceDiaphragmGauge AskAgilentfordetails
Pumping Speed vs Inlet Pressure Compression Ratio vs Foreline Pressure
Argon Nitrogen Helium Hydrogen Argon Nitrogen Helium Hydrogen
26
24 V controller front panel
FUSE TYPE
T 8A
MAINS
T 3A
FUSE TYPE
MAINS
VENTP3
J6 SERIALFANP5
STATUSLD1
J5 IN-OUTP5
FANP3
VENT
LD1STATUS
J6 SERIAL J5 IN-OUT
120/220 V controller front panel
107.0 (4.2)= =
==
107.
0 (4
.2)
TheTwisTorr304FSonboardcontrollersaremicroprocessor-controlledfrequencyconverters,fullycontrollablethroughPCsoftware,withself-diagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.
Theycanbemountedonboard,eitheronthebottomoronthesideofthepump,offeringoutstandingflexibilityandsimplicity.
Dimensions: millimeters (inches)
AGILENT TURBO PUMP CONTROLLERS
► Agilent TwisTorr 304 FS on board Controller
Technical SpecificationsInput voltages: Onboardcontroller,24Vdc 24Vdc±10%Onboardcontroller,120/220Vac 100/120/220/240Volt, 1phase,50/60HzMaximum input power: 100-240controller,24Vdc 200W100-240controller,120/220Vac 300VAOutput voltage 75Vac,3phaseOutput frequency 963HzNominal power 150WStart-up power 150WOperating temperature 0°Cto+40°CStorage temperature 20°Cto+70°C
Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTwisTorr304FSonboardcontroller*24Vdc 0.3(0.66) X3507-64002TwisTorr304FSonboardcontroller*100-240Vac 0.3(0.66) X3507-64003* Order power cable separately
CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883
27
TURBO PUMPS
Turb
o Pu
mps
244 (9.61)
106.4 (4.19)
91.4 (3.60)= =
1.5 (0.06)
128.
5 (5
.06)
122.
5 (4
.82)
==
8.7
(0.3
4)9.
3 (0
.36)
110.
5 (4
.35)
96.1
(3.7
8)
Measures
Start/Stop
Counters
Next
Previous
Vacuum Products
Low Speed
Decrease
Increase
Menu
TwisTorr 304 FS AG
TheTwisTorr304FSAGRackcontrollerisamicroprocessor-controlledfrequencyconverterwithnew,enhancedfeaturesthatallowgreatercontrolandcommunicationcapabilities.Thiscompact,¼rackunitisdesignedforfullworldwidecompatibility,forventvalvecontrol,activegaugepressurereadingandpumpoperationparameterscontrol,aswellasforselfdiagnosticandprotectionfeatures.• Universal Voltage
Controllerabletoautosetaccordingtotheinputvoltage,providingflexibilityforeasyinstallationworldwide
• RS-232/485 Communication Protocols and Profibus (Options)
- Allowsthepumptobeinterfacedwiththesystemcontrols- EnablesthepumptobeoperatedviaPCwithT-Plussoftware- Helpsdevelopmentofowncustomersoftware• Stop Speed Reading (SSR)- Continuespumpspeedreadingafterthestopcommand.- Allowsmonitoringthepumpinslowdownrampandshut
downtime• N.O. and N.C. Vent Valve Drive- Valvedelayandopeningtimeadjustable- Ventvalvedrivenbycontrollerautomaticallyorbyserialline- OpeningtimecontrolthroughSSRfunction
Technical SpecificationsInput 100÷240Vac 50/60HzMaximum input power 300VAOutput voltage 75VacOutput frequency 963HzNominal output power 150WOperating temperature +5°Cto+45°CStorage temperature –20°Cto+70°C
Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTwisTorr304FSAGRackcontroller*withRS232/485 1.7(3.2) X3506-64002TwisTorr304FSAGRackcontroller*withProfibus 1.7(3.2) X3506-64003* Order power cable separately
CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883Active GaugesPVG-500Pirani,KF16 PVG500KF16PVG-500PiraniTungstenfilament,KF16 PVG500KF16SFRG-700Pirani/IMGCombinationGauge,KF25 FRG700KF25FRG-700Pirani/IMGCombinationGauge,DN40CF FRG700CF35FRG-702Pirani/IMGCombinationGauge,KF25Allmetal-bakeable FRG702KF25FRG-702Pirani/IMGCombinationGauge,DN40CFAllmetal-bakeable FRG702CF35PCG-750Pirani/CDGCombinationGauge(Tungsten),KF16 PCG750KF16GaugeconnectioncabletoAGrackcontroller-3m 9699960GaugeconnectioncabletoAGrackcontroller-5m 9699961NOTE • For other Active Gauges models please ask Agilent for details
Dimensions: millimeters (inches)
► Agilent TwisTorr 304 FS AG Rack Controller
• Active Gauge Pressure Reading Capability- AbletooperatewithActiveGauges(IM-500,FullRange
GaugeFRG-700andFRG-702)- Providesaccuratepressuremeasurementsfromatmdown
to10-9mbar- Rackmountedcontrolelectronicsnolongernecessary,
withsimple+24Vdcpowerconnector- Proveninvertedmagnetrondesign- Rapidstarteveninhigh-vacuumconditions
28
332.
8 (1
3.1)
ISO 160-FØ225.0 (8.8)
229.
1 (9
.0)
A
CFF 6"Ø151.6 (6.0)
==157.1 (6.2)
120'
VIEW FROM "A"
109.8 (4.3)166.0 (6.5)
MoniTorrPORT
13.2
(0.5
)
343.
8 (1
3.5)
130.
8 (5
.1)
70.0
(2.8
)
200.6 (7.9)
Ø202.4 (8.0)Ø180.0 (7.1)ISO 160 CFF 8"
11.3
(0.4
)12
6.0
(5.0
)14
6.5
(5.8
)33
4.3
(13.
2)PURGEPORT
11.6
(0.5
)
325.
8 (1
2.8)
VIEW FROM ""
VETPORT
Ø114.0 (4.5)
Ø115.0 (4.5)
Ø164.0 (6.5)
203.7 (8.0)
Ø163.4 (6.4)
(WATER COOIG )
(WATER COOIG )
EOW 90EECT.COECTOR
FOREIEF 25
WATERCOOIG 18 G
WATERCOOIG 18 G
Ø203.7 (8.0)
AGILENT TURBO PUMP MODELS
► Agilent Turbo-V 551 Navigator
Dimensions: millimeters (inches)
Technical SpecificationsPumping speed(withinletscreen)CFF6”: N2:350l/s He:450l/s H2:450l/sCFF8”orISO160: N2:550l/s He:600l/s H2:510l/sCompression ratio N2:1x109 He:1x107 H2:1x106
Base pressure*(withminimumrecommendedforepump) <1x10-10mbar(<1x10-10Torr)Inlet flange CFF6” ISO160 CFF8” ISO160-FboltedForeline flange KF25Rotational speed 42,000rpmStart-up time <5minutesRecommended forepump Mechanical:AgilentDS302 Dryscroll:AgilentTS300,IDP-15Operating position AnyCooling requirements Naturalairconvection Wateroptional(usewaterwithelectrical conductivity≤500µS/cm)Bakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Vibration level(displacement) <0.01µmatinletflangeWeight kg(lbs) ISOflange19.4(43.0) CFflange23.4(51.6) CFandISOboltedflange23.4(51.6)* According to PNEUROP 5608.
SEMversionavailableonrequest
29
TURBO PUMPS
Turb
o Pu
mps
Ordering InformationDescription Weight Part kg(Ibs) Number
Complete Systems Turbo-V551Navigatorcompletesystem,ISO160flange 19.4(43.0) 9698832Turbo-V551Navigatorcompletesystem,ISO160-Fboltedflange 23.4(51.6) 9698842Turbo-V551Navigatorcompletesystem,6”CFflange 23.4(51.6) 9698835Turbo-V551Navigatorcompletesystem,8”CFflange 23.4(51.6) 9698833Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug).
PumpsTurbo-V551Navigatorpump,ISO160flange 16.0(35.0) 9698922Turbo-V551Navigatorpump,ISO160-Fboltedflange 22.0(49.0) 9698944Turbo-V551Navigatorpump,6”CFflange 22.0(49.0) 9698925Turbo-V551Navigatorpump,8”CFflange 22.0(49.0) 9698923
ControllersTurbo-V551Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698976Turbo-V551Rackcontroller,100-240V 15.7(35.0) X3501-64001
Description Weight Part kg(Ibs) Number
AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883(previous release Navigator 2.2 included in the CD) InletscreenDN100 9699302InletscreenDN160 9699304Watercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforusewithNavigatorcontroller 9699339Aircoolingkitforusewithstandardrackcontroller,24V X3501-68001BracketforNavigatorcontrollersidemouting 9699349VibrationdamperCFF6” 3.0(7.0) 9699334VibrationdamperISO160 4.0(9.0) 9699345VibrationdamperCFF8” 4.0(9.0) 9699335Ventflange,NW10KF/M8 9699108Ventvalvekitforstandardrackcontroller,24V X3501-68002VentvalveforNavigatorcontroller 9699834Purgevalve10SCCMNW16KF-M12 9699239Purgevalve10SCCM¼Swagelok-M12 9699240
010 -5
Inlet pressure (mbar)
Pum
ping
spee
d (l/
s)
10 -10
100
200
400
500
700
10 -4 10 -3 10 -2 10 -1 1 10
300
600
110 -1 1 10 100
Foreline pressure (mbar)
Com
pres
sion
ratio
10 -2
102
104
106
108
1010
Pumping Speed vs Inlet Pressure (DN 160 only) Compression Ratio vs Foreline Pressure
Nitrogen Helium HydrogenNitrogen Helium Hydrogen
30
130.
8 (5
.1)
229.
1(9.
0)
314.
8 (1
2.4)
A
196.1 (7.7)253.2 (10.0)
(WATER COOLING)
(WATER COOLING)
CFF 10"
VIEW FROM "B"
109.7 (4.3)
Ø224.0 (8.8)Ø240.0 (9.5)
324.
9 (1
2.8)
146.
5 (5
.8)
126.
0 (5
.0)
46.0
(1.8
)70
.0 (2
.8)
200.6 (7.9)
115.1 (4.5)
ISO 200
B
Ø203.7 (8.0)
VENT PORT
ISO 200-F
120'
==157.1 (6.2)VIEW FROM "A"
166.0 (6.5)
FORELINEKF 25
324.
7 (1
2.8)
PURGE PORT
ELBOW 90ELECT.CONNECTOR
WATERCOOLING 18 G
WATERCOOLING 18 G
Ø285.0 (11.2)
Ø203.7 (8.0)
AGILENT TURBO PUMP MODELS
► Agilent Turbo-V 701 Navigator
Dimensions: millimeters (inches)
Technical SpecificationsPumping speed(withinletscreen)CFF10”orISO200: N2:690l/s He:620l/s H2:510l/sCompression ratio N2:1x109 He:1x107 H2:1x106
Base pressure*(withminimumrecommendedforepump) <1x10-10mbar(<1x10-10Torr)Inlet flange CFF10” ISO200 ISO200-FboltedForeline flange KF25Rotational speed 42,000rpmStart-up time <5minutesRecommended forepump Mechanical:AgilentDS402 Dryscroll:AgilentTS300,IDP-15Operating position AnyCooling requirements Naturalairconvection Wateroptional(usewaterwithelectrical conductivity≤500µS/cm)Bakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Vibration level(displacement) <0.01µmatinletflangeWeight kg(lbs) ISOflange19.4(43.0) CFflange25.5(54.2) CFandISOboltedflange25.5(54.2)* According to PNEUROP 5608.
SEMversionavailableonrequest
31
TURBO PUMPS
Turb
o Pu
mps
010 -5
Inlet pressure (mbar)
Pum
ping
spee
d (l/
s)
10 -10
100
200
400
500
700
10 -4 10-3 10 -2 10 -1 1 10
300
600
110-1 1 10 100
Foreline pressure (mbar)
Com
pres
sion
ratio
10 -2
102
104
106
108
1010
Pumping Speed vs Inlet Pressure (DN 200 only) Compression Ratio vs Foreline Pressure
Nitrogen Helium HydrogenNitrogen Helium Hydrogen
Ordering InformationDescription Weight kg(Ibs) Part NumberComplete SystemsTurbo-V701Navigatorcompletesystem,ISO200flange 19.0(43.0) 9698836Turbo-V701Navigatorcompletesystem,ISO200-Fboltedflange 25.0(56.0) 9698843Turbo-V701Navigatorcompletesystem,10”CFflange 25.0(56.0) 9698837Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug).
PumpsTurbo-V701Navigatorpump,ISO200 16.0(35.0) 9698926Turbo-V701Navigatorpump,ISO200-Fbolted 22.0(49.0) 9698945Turbo-V701Navigatorpump,10”CFF 22.0(49.0) 9698927ControllersTurbo-V701Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698977Turbo-V701Rackcontroller,100-240V 16.0(35.0) X3501-64002AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware(previous release Navigator 2.2 included in the CD) 9699883InletscreenDN200 9699316Watercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforusewithNavigatorcontroller 9699339Aircoolingkitforusewithstandardrackcontroller,24V X3501-68001BracketforNavigatorcontrollersidemounting 9699349Vibrationdamper,ISO200 5.0(10.0) 9699346Vibrationdamper,CFF10” 5.0(10.0) 9699336Ventflange,NW10KF/M8 9699108Ventvalvekitforstandardrackcontroller X3501-68002VentvalveforNavigatorcontroller 9699834Purgevalve10SCCMNW16KF–M12 9699239Purgevalve10SCCM¼Swagelok–M12 9699240
32
LD1
J1 IN-OUTJ2 SERIAL
STATUS
P4P3VENT FAN
FUSE TYPE T XXA
MP
Ø 200.6 (7.88)70.0 (2.76)
201.
7 (7
.94)
AGILENT TURBO PUMP CONTROLLERS
► Agilent Turbo-V 551 and 701 Navigator Controllers
TheTurbo-V551and701Navigatorcontrollersaremicroprocessor-controlledfrequencyconverters,fullycontrollablethroughPCsoftware,withself-diagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Theycanbemountedonboard,eitheronthebottomoronthesideofthepump,offeringoutstandingflexibilityandsimplicity.
Technical SpecificationsInput voltages 100/120/220/240VAC 50/60Hz,1phMaximum input power 640VAOutput voltage 54VAC,3phOutput frequency 714HzOperating temperature 0°Cto+40°CStorage temperature –20°Cto+70°C
Ordering InformationDescription Weight Part kg(Ibs) Number
ControllersTurbo-V551Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698976Turbo-V701Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698977
AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883(previous release Navigator 2.2 included in the CD) External“TMPProfibusgateway” 9699261
Dimensions: millimeters (inches)
33
TURBO PUMPS
Turb
o Pu
mps
► Agilent Turbo-V 551 and 701 Rack Controllers
Technical SpecificationsInput voltages 100-240V 1ph,50/60HzMaximum input power 800VAOutput frequency 700HzMaximum output power*V501: 320WV701: 350WStartup power 430WOperating temperature +5°Cto+45°CStorage temperature –20°Cto+70°C* Data valid for nitrogen.
Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTurbo-V551RackcontrollerwithRS232/485,120-220V 15.7(35.0) X3501-64001Turbo-V701RackcontrollerwithRS232/485,120-220V 15.7(35.0) X3501-64002AccessoriesJ1inputmatingconnector 9699853P6andP7matingplug 9699854Mainscable(Europeanplug,3mlong) 9699957Mainscable(Americanplug,120V,3mlong) 9699958OptionsP2outputmatingconnector 9699852Rackadapterforcontroller 9699191Controllertopumpextensioncable(3mextension)forTurbo-V551,701 1.0(2.0) 9699948Controllertopumpextensioncable(5mextension)forTurbo-V551,701 2.0(4.0) 9699948M001Controllertopumpextensioncable(20mextension)forTurbo-V551,701 4.0(8.0) 9699948M002
Thesecontrollersaremicroprocessor-controlledfrequencyconverterswithselfdiagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Thecompact,½rackunithasamultifunctionalphanumericdisplayforpumpstatusanderrorcodediagnostics.Thefrontpanelhasatwo-linedotmatrixLCDdisplaywithbacklighting.Itdisplaysrotationalspeedasthepumpstartsupandindicateswhenfullspeedisreached.Atanytimeduringtheoperationofthepump,thespeed,current,power,andbearingtemperaturecanbedisplayed.Additionally,themicroprocessoractsasapump
cyclelog,andcandisplaythenumberofvacuumcycles,thecycletimeforthecurrentcycle,andthetotaloperatinghoursonthepump.Remoteoperationcanbeaccomplishedwithlogiclevelcontactclosuresandwithoptionalcomputerinterfaces.PCBcontrollersareavailable.PleasecontactAgilentfordetails.
Dimensions: millimeters (inches)
295 (11.61)
128.
5 (5
.06)
198 (7.8)
213 (8.38)
122.
5 (4
.82)
110.
5 (4
.35)
Measures
Start/Stop
PDHSLS
PurgeVent
Counters
Vacuum Products
Turbo-V 551 HT
Low Speed
Menu
34
Ø285.0 (11.22) Ø335.0 (13.19)
Ø232.0 (9.13) Ø232.0 (9.13)
294.
3 (1
1.48
)
158.
1 (6
.17)
ISO 160
ISO 200
ISO 250
ISO 200-F ISO 250-F15
8.1
(6.1
7)
252.
8 (9
.86)
279.
4 (1
0.90
)
52.0
(2.0
3)
CFF 10"
322.
7 (1
2.58
)
228.
5 (8
.91)
122.
8 (4
.79)
200.6 (7.82)
70.0
(2.7
3)
52.0
(2.0
3)
ELEC. CONNECTOR
WATER COOLING
WATER COOLING
VENT1020'
WATER COOLING
ELEC. CONNECTOR WATER
COOLING
VENT1020'
1020'
323.
5 (1
2.74
)
350.
6 (1
3.80
)
Ø232.0 (9.13)
Dimensions: millimeters (inches)Technical SpecificationsPumping speed: ISO160: N2:790l/s He:820l/s H2:860l/s CFF10”orISO200: N2:950l/s He:870l/s H2:900l/s ISO250: N2:1,050l/s He:900l/s H2:920l/sCompression ratio: ISO160 N2:1x109 He:1x107 H2:1x106 CFF10”/ISO200-ISO250 N2:1x109 He:1x107 H2:1x106
Base pressure*(withrecommendedforepump) <1x10-10mbar(<1x10-10Torr)Inlet flange ISO160 ISO200 ISO200-Fbolted CFF10” ISO250 ISO250-FboltedForeline flange KF40Rotational speed 38,000rpmStart-up time <4minutesRecommended forepump Mechanical:AgilentDS402 Dryscroll:AgilentTS300,IDP-15Operating position AnyCooling requirements ForcedairorwaterBakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Vibration level(displacement) <0.01µmatinletflangeWeight kg(lbs): ISO160flange 19(41.8) ISO200flange 19.4(43.0) CF10”flange 25.5(54.2) ISO250flange 21.2(46.6) ISO200-Fand250-Fboltedflange,CF10”flange 25.5(54.2)* According to standard DIN 28 428. ailable with On-board Navigator controller, ½ Rack controller or PCB controller;
for information on controllers see also following pages.
AGILENT TURBO PUMP MODELS
► Agilent Turbo-V 1001 Navigator
SEMversionavailableonrequest
35
TURBO PUMPS
Turb
o Pu
mps
Ordering InformationDescription Weight Part kg(Ibs) Number
Complete Systems Turbo-V1001Navigatorcompletesystem,ISO160flange 24.4(53.8) 9698840Turbo-V1001Navigatorcompletesystem,ISO200flange 24.8(55.0) 9698838Turbo-V1001Navigatorcompletesystem,ISO200-Fboltedflange 30.9(66.2) 9698844Turbo-V1001Navigatorcompletesystem,10”CFflange 30.9(66.2) 9698839Turbo-V1001Navigatorcompletesystem,ISO250flange 26.6(58.6) 9698841Turbo-V1001Navigatorcompletesystem,ISO250-Fboltedflange 30.9(66.2) 9698845Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug).
PumpsTurbo-V1001Navigatorpump,ISO160flange 19.0(41.8) 9698933Turbo-V1001Navigatorpump,ISO200flange 19.4(43.0) 9698931Turbo-V1001Navigatorpump,ISO200-Fboltedflange 25.5(54.2) 9698946Turbo-V1001Navigatorpump,8’’CFflange 25.5(54.2) 9698932M003Turbo-V1001Navigatorpump,10”CFflange 25.5(54.2) 9698932Turbo-V1001Navigatorpump,ISO250flange 21.2(46.6) 9698934Turbo-V1001Navigatorpump,ISO250-Fboltedflange 25.5(54.2) 9698947
Controllers(See following pagesforspecifications)Turbo-V1001Navigatorcontroller120/220V-50/60Hz 5.4(12.0) 9698978Turbo-V1001Rackcontroller,100-240V 15.7(35.0) X3501-64003
Description Weight Part kg(Ibs) Number
Pump AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883(previous release Navigator 2.2 included in the CD) InletscreenDN160 9699304InletscreenDN200 9699316InletscreenDN250 9699350Watercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforusewithNavigatorcontroller 9699297Aircoolingkitforusewithstandardrackcontroller X3501-68001BracketforNavigatorcontrollersidemouting 9699298VibrationdamperISO160 4.0(9.0) 9699345Vibrationdamper,ISO200 5.0(10.0) 9699346Vibrationdamper,CFF10” 5.0(10.0) 9699336Ventflange,NW10KF/M8 9699108Ventdevicewithadjustabledelaytimeforstandardrackcontroller 9699831Ventvalveforstandardrackcontroller X3501-68002VentvalveforNavigatorcontroller 9699834Purgevalve10SCCMNW16KF–M12 9699239Purgevalve10SCCM¼Swagelok–M12 9699240Purgevalve20SCCMNW16KF-M12 9699241Purgevalve20SCCM¼Swagelok–M12 9699242Purgevalve10SCCM¼Swagelok¼Swagelok 9699232PurgeValve20SCCM¼Swagelok¼Swagelok 9699236
010-5
Inlet pressure (mbar)
Pum
ping
spee
d (l/
s)
10-10
200
400
800
1000
1200
10-4 10-3 10-2 10-1 1 10
600
110-1 1 10 100
Foreline pressure (mbar)
Com
pres
sion
ratio
10-2
102
104
106
108
1010
Pumping Speed vs Inlet Pressure (DN 250 only) Compression Ratio vs Foreline Pressure
Nitrogen Helium HydrogenNitrogen Helium Hydrogen
36
LD1
J1 IN-OUTJ2 SERIAL
STATUS
P4P3VENT FAN
FUSE TYPE T XXA
MP
Ø 200.6 (7.88)70.0 (2.76)
201.
7 (7
.94)
TheTurbo-V1001Navigatorcontrollersaremicroprocessor-controlledfrequencyconverters,fullycontrollablethroughPCsoftware,withself-diagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Theycanbemountedonboard,eitheronthebottomoronthesideofthepump,offeringoutstandingflexibilityandsimplicity.
Technical SpecificationsInput voltages 100/120/220/240VAC 50/60Hz,1phMaximum input power 850VAOutput voltage 54VAC,3phOutput frequency 640HzOperating temperature 0°Cto+40°CStorage temperature -20°Cto+70°C
Ordering InformationDescription Weight Part kg(Ibs) Number
ControllersTurbo-V1001Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698978
AccessoriesMainscableNEMAplug,3mlong 0.5(1.0) 9699958MainscableEuropeanplug,3mlong 0.5(1.0) 9699957SerialcableandT-plusSoftware 0.5(1.0) 9699883(previous release Navigator 2.2 included in the CD) External“TMPProfibusgateway” 0.4(0.8) 9699261
Dimensions: millimeters (inches)
AGILENT TURBO PUMP CONTROLLERS
► Agilent Turbo-V 1001 Navigator Controller
37
TURBO PUMPS
Turb
o Pu
mps
Thesecontrollersaremicroprocessor-controlledfrequencyconverterswithselfdiagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Thecompact,½rackunithasamultifunctionalphanumericdisplayforpumpstatusanderrorcodediagnostics.Thefrontpanelhasatwo-linedotmatrixLCDdisplaywithbacklighting.Itdisplaysrotationalspeedasthepumpstartsupandindicateswhenfullspeedisreached.Atanytimeduringtheoperationofthepump,thespeed,current,power,andbearingtemperaturecanbedisplayed.Additionally,themicroprocessoractsasapump
cyclelog,andcandisplaythenumberofvacuumcycles,thecycletimeforthecurrentcycle,andthetotaloperatinghoursonthepump.Remoteoperationcanbeaccomplishedwithlogiclevelcontactclosuresandwithoptionalcomputerinterfaces.PCBcontrollersareavailable.PleasecontactAgilentfordetails.
Technical SpecificationsInput voltages 100-240V 1ph,50/60HzMaximum input power 800VAOutput voltage 56VAC,3phOutput frequency 633HzMaximum output power* 450WStartup power 450WOperating temperature +5°Cto+45°CStorage temperature -20°Cto+70°C* Data valid for nitrogen.
Ordering InformationDescription Weight Part kg(Ibs) Number
ControllerTurbo-V1001Rackcontroller,100-240V 15.7(35.0) X3501-64003
AccessoriesMainscable(Europeanplug,3mlong) 9699957Mainscable(Americanplug,120V,3mlong) 9699958
OptionsRackadapterforcontroller 2.0(4.0) 9699191Controllertopumpextensioncable(5mextension)forTurbo-V1001 1.0(2.0) 9699948M001Controllertopumpextensioncable(12mextension)forTurbo-V1001 2.0(4.0) 9699951S029Controllertopumpextensioncable(20mextension)forTurbo-V1001 4.0(8.0) 9699948M002External“TMPProfibusgateway” 0.4(0.8) 9699261
Dimensions: millimeters (inches)
► Agilent Turbo-V 1001 Rack Controller
295 (11.61)
128.
5 (5
.06)
198 (7.8)
213 (8.38)
122.
5 (4
.82)
110.
5 (4
.35)
Measures
Start/Stop
PDHSLS
PurgeVent
Counters
Vacuum Products
Turbo-V 1001 HT
Low Speed
Menu
38
Technical SpecificationsVacuum PerformancesPumpingspeedforN2(*) 2050l/sPumpingspeedforHe(*) 1800l/sPumpingspeedforH2(*) 1500l/sCompressionratioforN2 >8x108
CompressionratioforHe 8x105
CompressionratioforH2 4x104
Basepressure* 10-10mbar(7.5x10-11Torr)(**)(with recommended forepump)MaxforelinepressureforN2 4mbarInletFlange ISO250F,CFF12”O.D.Forelineflange KF40NWOtherNominalrotationalspeed 33300rpmStart-uptimewithoutgasload <6minutesandwiththerecommendedforepumpMinimumrecommendedforepump TriScroll600Operationalposition Vertical/UpsidedownOperatingambienttemperature +5°Cto+35°CBakeouttemperature 120°C(CFF),80°C(ISO)Maxrotortemperature 120°CVibrationlevel(displacement) <0.01µmatinletflangeLubricant PermanentlubricationCoolingrequirements WaterCoolantwater Recommendedflow:200l/h Temperature:+15°Cto+30°C Pressure:3to5bar(45to75psi)Noiselevel <60dB(A)at1meterStoragetemperature -20°Cto+70°CEnvironmentprotection IP54Weight ISO250:54.2kg(119.5lbs) CFF12”:55.3kg(121.9lbs)(*): WITHOUT INLET SCREEN(*): According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a CFF flange and using the recommended pre-vacuum pump
Controller SpecificationsInputvoltages 100-120VAC,220-240Vac,1-phaseInputfrequency 50-60HzMaximuminputpower 1300VAOutputvoltage 64VacOutputfrequency 555HzOutputPowerstarting 560WmaximumOutputPowernormal 450WmaximumWeight(bothmodels) 12.5kg(28lbs)Installationcategory IIPollutiondegree 2
Ø306.00 [12.05]
181.00 [7.13]
303.
80 [1
1.96
]
36.5
0 [1
.44]
54.5
0 [2
.15]
32.5
0 [1
.28]
275.
80 [1
0.86
]
Ø334.90 [13.19]
71.6
3 [2
.82]
CONTROLLERCONNECTORS FLANGE
CFF 12"FLANGE ISO 250F
WATER COOLING FOR RUBBER TUBE Ø 9.0
45°60°
PURGE/VENTVALVES PORT
VENT HOLE ON ENVELOPE
FORELINE KF 40
BOTTOM VIEW ISO250F AND CFF 12"
40.00 [1.57]
16.0
0 [0
.63]
WATER COOLING FOR RUBBER TUBE Ø 9.0
PURGE/VENTVALVES PORT
Ø329.00 [12.95] Ø329.00 [12.95]
VENT
167.
00 [6
.57]
30°0'
PURGE
VENT
GND HOLE
Dimensions: millimeters (inches)
AGILENT TURBO PUMP MODELS
► Agilent Turbo-V 2300 TwisTorr Rack
295.00 (11.62)198.00 (7.80)
213.00 (8.39)
213.00 (8.39)
122.
5 (4
.82)
128.
5 (5
.06)
110.
5 (4
.35)
Measures
Start/Stop
PDHSLS
PurgeVent
Counters
Vacuum Products
Turbo-V 2300
Low Speed
Menu
Agilent S.p.A. Via F.lli Varian 54 10040 Leini Torino ItalyModel
InputSerial Italy
Made in
39
TURBO PUMPS
Turb
o Pu
mps
Ordering InformationPump Part NumberAgilentTurbo-V2300TwisTorrISO250FRack 9696000AgilentTurbo-V2300TwisTorrCFF12”ODRack 9696001
Controllers*AgilentTurbo-V2300Rackcontroller,100-240V X3501-64004AgilentTurbo-V2300Pump-ControllerCablekit,5m,forpumpandventvalveoperation X3501-68003(*): Please note that rack controllers do not include the Pump-Controller Cable Kit
AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957Center-ringISO250 9699144InletscreenDINISO250//CFF12”AISI 9699350Watercoolingkitfor6x8(IDxOD)flexibletube 9699348Watercoolingkitfor3/8in.IDflexibletube 9699338
Inlet pressure (mbar)10
0
500
1000
1500
2000
2500
-10 10-8 1
Pum
ping
spee
d (l/
s)
10-9 10-7 10-6 10-210-310-5 10-4 10-1 10Foreline pressure (mbar)
10
103
102
104
105
106
107
108
109
-5 10-3 1
Com
pres
sion
ratio
10-4 10-2 10-1 10
Pumping Speed vs Inlet Pressure Compression Ratio vs Foreline Pressure
Nitrogen Helium HydrogenNitrogen Helium Hydrogen
40
Ø284.86 [11.2]
51.0
0 [2
.0]
133.
67 [5
.3]
133.
67 [5
.3]
ELECTRICAL CONNECTOR
135.30 [5.3]
VENTIN-OUT WATER CIRCUIT
GAS PURGE
138.
00 [5
.4]
FORELINE KF40
ELECTRICAL CONNECTOR
290.
00 [1
1.4]
65.0
0 [2
.6]
90.0
0 [3
.5]
145.
50 [5
.7]
65.0
0 [2
.6]
135.30 [5.3]
VENTIN-OUT WATER CIRCUIT
GAS PURGE
138.
00 [5
.4]
FORELINE KF25
Ø225.00 [8.9]
22.0
3 [0
.9]
Turbo-V 1K-GFORELINE KF25
263.
60 [1
0.4]
ELECTRICALCONNECTOR
GAS PURGE
IN-OUT WATER CIRCUIT
VENT
UPPER VIEW ISO 200F
UPPER VIEW ISO 160F
ISO 160F
Water Cooling 1/4"G
ISO 200F
Dimensions: millimeters (inches)
Technical SpecificationsPumping speed: ISO160: Ar:750l/s N2:810l/s He:950l/s H2:680l/s ISO200: Ar:1,040l/s N2:1,080l/s He:1,150l/s H2:730l/sCompression ratio: Ar:>5x108 N2:>5x107 He:>4x104 H2:1.5x104
Base pressure*(withrecommendedforepump) <1x10-10mbarInlet flange ISO160F,ISO200FForeline flange ISO160: KF25NW ISO200: KF40NWNominal rotational speed 45,500rpmStart-up time <5minutesMinimum recommended forepump >20m3/h(TriScroll600,DS602)Operating position AnyOperating ambient temperature +5°Cto+35°CBakeout temperature 80°Catinletflangemax.(ISOflange)Vibration level (displacement) <0.01µmatinletflangeCooling requirements WaterPower supply Inputvoltage:100-240VacInputfreq.:50-60HzMaxinputpower:600VAStand-bypower:30to35W Maxoperatingpower: 400WusingNitrogenandlightergases(watercoolingsetting) 260WusingArgon(aircoolingsetting)Protection fuse(Navigatorcontroller) 1x6.3ASerial communication(NavigatorKit) RS232cablewitha9-pinDtype maleconnectoranda9-pinDtypefemaleconnector,andNavigatorsoftware(optional)Storage temperature -20°Cto+70°CWeight 26.8kg(59.1lbs)*According to standard DIN 28 428.
Advanced Electronics•RacktypeorNavigatoronboardcontrollers•Versatileelectronicsinterfacewitheasytousecontrol
Software•AnalogI/OsignalsandRS232/RS485interfaceas
standardAgilentProfibusinterfaceasoption
Turbo-V 1K-G•Application-specificpumpingsolutiondesignedforthinfilm
depositionequipment•Highpumpingspeedandhighgasthroughput•Ruggeddesignandhighlyefficientcoolingsystemfor
continuousoperation•GasPurgeforbearingsprotection
AGILENT TURBO PUMP MODELS
► Agilent Turbo-V 1K-G
41
TURBO PUMPS
Turb
o Pu
mps
Description Part Number
Pumping SystemsTurbo-V1K-GISO160F 8698961R002Turbo-V1K-GISO200F 8698962R001
ControllersTurbo-V1K-GNavigatorcontroller,120-220V 9698978M005Turbo-V1K-GRackcontroller,100-240V X3501-64005
AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957SerialcableandNavigatorSoftware 9699883InletscreenISO160 9699304InletscreenISO200 9699316Watercoolingkit(hosetailG¼) 9699825Watercoolingkit(InoxG¼) 9699826Ventflange,NW10KF/M8 9699108Ventdevicewithadjustabledelaytimeforstandardrackcontroller 9699831Ventvalveforstandardrackcontroller X3501-68002VentvalveforNavigatorcontroller 9699834PurgevalveKF16-M1220SCCM 9699241Purgevalve7/16-M1220SCCM 9699242
Recommended ForepumpRotaryVanepumpDS602,with1ph,worldwidemotor 9499335RotaryVanepumpDS602,with3ph,worldwidemotor 9499336RotaryVanepumpHS452,with1ph,worldwidemotor 9499360RotaryVanepumpHS652,with1ph,worldwidemotor 9499365DrypumpTriScroll600,with1ph,worldwidemotor PTS06001UNIVDrypumpTriScroll600,with3ph,worldwidemotor PTS06003UNIVDrypumpTriScroll600inverter,with1ph,worldwidemotor PTS06001INV
Ordering Information
Inlet pressure (mbar)
010-8 10-7 10-6 10-2 1
Pum
ping
spee
d (l/
s)
10-5 10-4 10-3 10-1
1200
1000
600
800
400
200
Foreline pressure (mbar)
1010-1
Com
pres
sion
ratio
1 10
102
104
106
108
1010
100
109
103
105
107
Pumping Speed vs Inlet Pressure Compression Ratio vs Foreline Pressure
Argon Nitrogen Helium HydrogenArgon Nitrogen Helium Hydrogen
42
188,2 (7.34)
INLET SCREEN WITH CENTER-RING
FLANGE ISO 250F
EYEBOLT
PURGE & VENTSWAGELOCK PIPE 1/8
CONTROLLERFRONT PANEL
Ø 310 (12.09)
Ø 335 (13.07)
Ø 11 (0.43) N 12
FORELINE KF 40
WATER COOLING FORRUBBER TUBE DIA 9.0
40 (1.56)
30
45
298 (11.62)
162.8 (6.35)
95 (3
.71)
124.
1 (4
.84)
146
(5.6
9)
245
(9.5
6)
335
(13.
07)
Dimensions: millimeters (inches)
Technical SpecificationsPumping speed N2:1600l/sCompression ratio N2:3x105
Base pressure*(withrecommendedforepump) <1x10-8mbarInlet flange ISO250FForeline flange KF40NWNominal rotational speed 33,000rpmStart-up time <7minutesRecommended forepump >40m3/hOperating position AnyOperating ambient temperature +5°Cto+40°CPower supply Inputvoltage 100-240Vac Inputfreq. 50-60HzCommunication Interface AnalogueI/O Standard RS232/RS485 Standard Profibus OptionalDimensions Height 335mm(13.18in.) Diameter 335mm(13.18in.) Weight 35kg(77lbs)*According to standard DIN 28 428.
The System Interface• IntegratedpackageincludesTurboMolecularPump,
DriveElectronics,PowerSupply,PurgeGasandCommunication
• VersatileelectronicsinterfacewitheasytousecontrolSoftware
• AnalogI/OsignalsandRS232/RS485interfaceasstandardAgilentProfibusinterfaceasoption
Turbo-V 2K-G System• Thefirstapplication-specificpumpingsolutiondesignedfor
thinfilmdepositionequipment• Thehighestperforming,mostcompactunitavailable• Thefirstfullyintegratedapproachformaximumsystem
productivityanduptime
AGILENT TURBO PUMP MODELS
► Agilent Turbo-V 2K-G System
43
TURBO PUMPS
Turb
o Pu
mps
Description Part Number
Pumping Systems (*)Turbo-V2K-GsystemwithMoniTorr 9698871Turbo-V2K-GsystemwithProfibusandMoniTorr 9698873(*) Pumping Systems include Pump with 230 V Integrated Electronics, water hose connection, Inlet Screen with center-ring
and pre-installed IP54 Mating Connectors. Both standard models can be equipped with Agilent’s MoniTorr device on request. Also 120 Vac units available on request.
AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957T-PlusSoftwareandserialcable 9699883Watercoolingkitfor6x8(IDxOD)flexibletube 9699348Watercoolingkitfor⅜in.IDflexibletube 9699338Turbo-Vremotecable 9699945Turbo-Vremotepanel 9698850
Spare PartsIP54proofmatingconnectors 9699958InletscreenISO250withcenterring 9699138Waterhoses 9699825
Ordering Information
Inlet pressure (mbar)
010-6
Pum
ping
spee
d (l/
s)
200
10-5 10-4 10-3 10-2 10-1 1
600
1000
14001600
400
800
1200
1800
Outlet pressure (mbar)
110-3
Com
pres
sion
ratio
10
10-2 10 10 10-1
100
1000
100000
10000
1000000
Pumping Speed vs Inlet Pressure Compression Ratio vs Foreline Pressure
ArgonNitrogen ArgonNitrogen
44
PURGE/VENTVALVES PORT
VENT HOLE ONENVELOPE
EYEBOLT
CENTER-RING (ISO 250F)
Ø 334.90 [Ø 13.19]
FLANGEISO 250F
WATER COOLINGFOR RUBBERTUBE Ø 9.0
VENT
GND HOLE
CONTROLLERFRONT PANEL
UPPER VIEW
BOTTOM VIEW
PURGE/VENTVALVES PORT
FORELINE KF 40
WATER COOLINGFOR RUBBERTUBE Ø 9.0
Dimensions: millimeters (inches)
Technical SpecificationsPumping speed N2:2200l/s He:1900l/s Ar:2050l/sCompression ratio N2:>1x107 He:6x103 Ar:>1x108
Base pressure*(withrecommendedforepump) <1x10-8mbarInlet flange ISO250FForeline flange KF40NWNominal rotational speed 31,800rpmStart-up time without gas load and with the recommended forepump <6minutesForeline pressure <0.5mbarMinimum recommended forepump >60m3/h(dependingongasflowrequirements)Operating position AnyCooling requirements WaterWeight(ISO250) 52kg(114.63lbs)*According to standard DIN 28 428.
Best Footprint to Performance Ratio• ThehighestArgonpumpingspeed(2050l/s)foritssize
allowsuniformdepositionratesathighsubstratethroughput• Highestpumpingspeedinitsclass:2200l/sforNitrogen• Throughput:over1400sccmforNitrogen• Theall-turbo,morecompactrotordesigndelivershighest
performancewiththesmallestfootprint
The Only Truly “Integrated” System in the Market TheTurbo-V3K-G:anadvancedsolutionforThinFilmapplications• Fullyintegratedsystemwithonboardwaterproofpowersupply• Vent/purgevalvescontrolcapability• Integrateddiagnostics• Multipleinterfacedcapability• Lowestpowerabsorption
AGILENT TURBO PUMP MODELS
► Agilent Turbo-V 3K-G System
45
TURBO PUMPS
Turb
o Pu
mps
Description Part Number
Pumping Systems(*)Turbo-V3K-GISO250FSystemwithintegratedpurge/ventdevice 9698888Turbo-V3K-GISO250FSystemwithProfibusandintegratedpurge/ventdevice 9698889(*) Pumping Systems include Pump with 230 V Integrated Electronics, Inlet Screen installed on the pump, separate center-ring
and pre-installed IP54 Mating Connectors. Both standard models can be equipped with Agilent’s MoniTorr device on request. Also 120 Vac units available on request.
AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957T-PlusSoftwareandserialcable 9699883Watercoolingkitfor6x8(IDxOD)flexibletube 9699348Watercoolingkitfor⅜in.IDflexibletube 9699338
Spare PartsIP54proofmatingconnectors 9699960InletscreenISO250 9699350O-ringandcenterringISO250 9699144
Ordering Information
(*) Measured with a 60 m3/h forepump.
10-8 10-7 10-6 10-5 10-4 10-3 10-20
500
1000
1500
2000
2500
Inlet pressure (mbar)
Pum
ping
spee
d (l/
s)
10-1
Com
pres
sion
ratio
Foreline pressure (mbar)10-3
0
10 2
10 1
10 3
10 4
10 5
10 7
10 6
10 8
10 9
10-2 10 0 10-1 1
Pumping Speed vs Inlet Pressure (*) Compression Ratio vs Foreline Pressure
Nitrogen Helium ArgonNitrogen Helium Argon
46
Inlet ScreensTopreventanypossibledamagetothepumpbladescausedbyparticlesfallingintothepump,aninletscreenisavailableasanaccessory.Theinletscreenisacurvedstainlesssteelmesh.Itprovidesprotectionagainstdebrislargerthan0.7to3mm(dependingonthemodel),whilereducingthepumpingspeedbyonlyabout10%.Fororderinginformation,seeindividualpumps.Air Cooling KitsAfanisprovidedasanoptionforapplicationsrequiringforcedairflow.Thefaniseasilyinstalledusingtheincludedinstallationkit.TheaircoolingkitfortheTurbo-V81’scanbemountedbesideorunderneaththepumpbody.Thefansforalltheotherpumpmodelscanbeinstalledinasidelocationonly.Themaximumallowableambienttemperatureforaneffectivecoolingactionis30°C.Tomeettheairflowratespecifications,caremustbetakennottorestrictorcoverthespacearoundthefansothataircanflowfreely.TheoperationofthecoolingfaniscontrolledbytheTurbocontroller.Fororderinginformation,seeindividualcontrollers.Water Cooling KitsAwatercoolingkitisprovidedtocoolthepumpwhenoperatingathighinletorhighexhaustpressures.Thecoolingwatercanbesuppliedbyanopencircuitwithdrainageoraclosed-looprefrigeratedsystem.Caremustbetakentosecurethetubestoensurethattheydonotdetachduringoperation.Fourdifferentkitswithvarioustubesizesareavailable(refertothefollowingtable).
Tube Size Material Screw Thread Part Number4x6mm(IDxOD) Plastic ⅛BSP 96993476x8mm(IDxOD) Plastic ¼BSP 9699348¼”ID SST ⅛BSP 9699337⅜”ID SST ¼BSP 9699338For ordering information, see individual pumps.
Vibration DampersHighlysensitiveequipmentsuchasanelectronmicroscopeandcertainanalyticalinstrumentsrequireextremelylowvibrationamplitudes.Thedampersreduceturbopumpvibration
amplitudebyatleastafactorof10attheirmainfrequencies.Theyareavailableuptoasizeof200mm(ISO200orCFF10”O.D.).Toeffectivelydecoupletheequipmentfromthepump,thevibrationdampermustbeinstalledbetweentheconnectingflanges.Fororderinginformation,seeindividualpumps. H (mm) H (inches) VibrationDamper4½”CF 96.5 3.80VibrationDamper6”CF 101 3.97VibrationDamper8”CF 110 4.33VibrationDamper10”CF 113 4.45VibrationDamper63ISO 84 3.31VibrationDamper100ISO 84 3.31VibrationDamper160ISO 88 3.46VibrationDamper200ISO 88 3.46
Turbo Vent ValveTheTurboVentValve,consistingofacontrolunitandavalve,isacompleteunitforautomaticventingoftheTurbopumpwhenitisswitchedofforduringapowerfailure.Thevalveisanormallyopen,electromagnetically-actuatedvalvewithafilterontheairinlet.ThecontrolunitispoweredbytheTurbocontrollerandisprovidedwithafixeddelaytimeofabout5secondstoavoidundesiredventingduringatemporarypowerfailureandtoallowclosureofthesystemvalvesbeforeventing.Fororderinginformation,seeindividualcontrollers.Turbo Vent DeviceTocontroltheventingoftheTurbopumpswhentheyareswitchedofforduringapowerfailure,aventdeviceisoffered.TheTurboventdeviceconsistsofanormallyclosedvalveandacontrolunit.Thevalveiselectromagnetically-actuatedandhasafilterontheair-inlet.ThecontrolunitispoweredbytheTurbocontrollerandhasabuilt-inbatterybackup.Delayandventingtimesareadjustableupto36minutestooptimizetheventingconditionsforeachapplication.Fororderinginformation,seeindividualcontrollers.Handheld TerminalThehandheldterminalisaremotecontroldisplayforusewithV81seriesTurbopumpswhenconnectedtoacontrollerwithoutafrontpanel.ItconsistsofanLCDalphanumericdisplayandkeyboardwhichprovideusefulrealtimeindicationsoftheoperatingconditionsandparametersoftheturbopump.Moreover,itallowsthereprogrammingofthecontrollerparametersandtroubleshootingofthepumpandcontroller.ThehandheldterminalisconnectedtoandpoweredfromtheTurbo-Vcontrollerthrougha1.5metercable.Fororderinginformation,pleasecallyourlocalAgilentOffice.Purge ValveToprotectthebearingsofaturbomolecularpumpusedwithaggressiveprocessgases,ameasuredsupplyofinertgas(N2,Ar)mustflowintothepumpbodyaroundtheupperbearingtowardthefore-vacuumline.TheAgilentfixedorificepurgevalveiscalibratedfornitrogentoprovidethecorrectgasflowtosafelyoperateTurbopumps.Fororderinginformation,seeindividualpumps.
H
AGILENT TURBO PUMP ACCESSORIES
Vibrator Damper Drawing
47
TURBO PUMPS
Turb
o Pu
mps
AGILENT TURBO PUMP TECHNICAL NOTES
Vibration LevelThankstolowvibration,focuseddesign,andcomputerassistedbalancingtools,todayturbomolecularpumpsgenerateverylowlevelsofmechanicalvibration.Thisismainlyaresultofthenumericalmodelingofthepumprotodynamics(seeFigure1)andaspecificvibrationdampingsystemalreadybuiltintothepumpstructure.Thankstobothdesignfeatures,todayceramicballbearingspumpsarestandardeveninveryhighvibrationapplicationslikeSEMandMetrologyTools.
AtypicalvibrationspectrumofaturbomolecularpumpcanbeseeninFigure2:Possiblesourcesofvibrationinaturbomolecularpumpareunbalancedrotor,highfrequencymotororbearings.Rotorunbalancecanbereducedtoaverylowlevelthroughdynamicbalancing,whichminimizesforcescausedbyanonsymmetricdistributionofmassesinrelationtotherotationalaxis.Asanorderofmagnitude,theradialdisplacementonthepumpHVflangeafterbalancingcanbeaslowas0.001µm.
Thevibrationsfromahighfrequencymotorarecausedbyelectromagneticinteractionsbetweenthemotorstatorandrotor:theircharacteristicfrequenciesaremultiplesofthemotordrivingfrequency.Also,therotorsupportsgeneratebothwhitenoiseandvibrationsatspecificfrequenciesofthebearings’movingparts(cage,ballsandrotatingring,usuallytheinnerone).Ingeneral,thevibrationscausedbyanelectricmotororbearingareevenlowerthanthosecausedbyunbalance.Theymayberelevantinthecaseofbearingdamageorbecauseofexcitationofanaturalresonantfrequencyofthesystemconnectedtothepump.Inthesecondcase,thesystemstructureshouldbemodifiedbyaddingmass,changingthestiffnessand/orinsertingavibrationdamperbetweenpumpandsystem.
Operation in Presence of Magnetic FieldsMagneticfieldsinduceeddycurrentsintheturbomolecularpumprotorthattendtoopposeitsrotation.Asaconsequencethepowerdeliveredtotheelectricalmotorisincreased.Sincethepumprotorisnotincontactwiththestator,alltheheatgeneratedbytheeddycurrentsmustbedissipatedbyradiation,sotherotorcanbeoverheatedevenifthestaticpartsremaincool.Accordingtoourtests,themaximummagneticfieldthatourpumpscantolerateis:• 50Gaussinthetransversaldirection• 100GaussintheaxialdirectionInthesecases,apowerincreasetothemotorcanbeexpected.Ifthemagneticfieldisgreaterthantheabovevaluesashieldmustbeusedinordertohavearesidualmagneticfieldaroundthepumpbelowthevaluespecified.PleasecontactAgilentformoredetails.
Turbomolecular Pump Bearings and Lubrication SystemTheTurbo-VpumpsincorporateAgilent’sinnovativeceramicbearingdesignwithaproprietaryultra-lowvaporpressuresolidlubricant,whichenablesthesepumpstoprovidealongservicelifeandahighdegreeofcleanlinessundermostoperatingconditions.ThislubricationsystemisasuperiorfeatureofAgilentTechnologyandguaranteesnocontaminationofthevacuumsystem,especiallywhencomparedtootheroil-lubricatedturbomolecularpumps(Seefigures3-4).Theceramicbearingsutilizeballsmadeofsiliconnitride,apolycrystallinematerialwithanamorphousintergranularbinderbasethatoffersthefollowingadvantages:Hardness Thisisacriticalaspectofbearingdesign,anditcloselyrelatestobearingperformanceandreliability.ThesiliconnitridematerialusedinAgilent’sTurbo-Vbearingsystemistwiceashardasconventionalsteelprovidingdramaticimprovementinwearresistancewhileminimizingtheeffectsofsurfacecontactandstress.
Figure 1
Figure 2
48
Weight Siliconnitrideis40%lessdensethanconventionalsteels,whichhelpstoreducecentrifugalloadingandstresslevelsathighrotationalspeeds,especiallyinthebearingracearea.Friction Siliconnitride’slowcoefficientoffrictionenhanceswearresistanceandaddstothebearing’soperationallife.Thermal Stability Withitslowthermalexpansioncoefficient,thesiliconnitridebearingmaterialensuresthattighttolerancesandmatingcomponentfitwillbemaintainedoveranextremelywidetemperaturerange.Inaddition,siliconnitridehasanoutstandingresistancetofracturebythermalshock.Chemical Stability Siliconnitrideisvirtuallyinert.AnotherfeatureoftheTurbo-Vbearingsystemisitsproprietarylubricantwhichhasanextremelylowvaporpressureandisvirtuallyhydrocarbonfree.Theuseofthislubricantinthepermanentlysealedbearingsystemensuresclean,reliableoperationwithouttheneedforanymaintenancewhatsoever.
Agilent T-plusAgilentT-plus(TurboPumpsLinkedUserSoftware)isthenewcommunication,controlandmonitoringsoftwareforAgilentTurbomolecularPumpsandallotherAgilentproductsfeaturingtheAgilentWindowSerialProtocol.WithT-plus,youcansimultaneouslydriveandcontroloneormoreTurboPumps,connectedtoaPCthroughanRS232oranRS485serialcommunication.AutomaticidentificationoftheconnectedPumps,descriptionofeachcommandalwaysonscreen,andUserInterfaceadaptabletothePumpStatusareonlysomeofthenewfeaturesdevelopedtomaketheapproachtopumpsettingseasyandtoreducethenumberofstepsduringpumpconfiguration.Moreover,specialcareisgiventotheGUI(GraphicalUserInterface),toreproducetheenvironmentofwell-knownUserInterfaces(suchasMicrosoftWindowsapplications),toobtainarealUserFriendlytool,andtoreducetheuserlearningtime.T-plussoftwarefeaturesseveraloptionslikeDataLogging,ChartRepresentationandNetworkConfiguration,tohelpyouconfigureyourVacuumdevicesquickly,andtocheckyourvacuumsystemstatusatanytime.ExhaustiveonlineHelpisalsoincluded,providingtheuserwithacomplete,easytolearnsystem,tailoredtocustomerrequirements.The previous software release Navigator 2.2 is included in the T-plus CD.
1
H2
10-8
10-9
10-10
10-11
10-1216116
H2O
21 26 31 36 41 46 51 56 61 66 71 76 81 86a.m.u.
N2
O2
CO2
CF2C3F CF3
C5F
P (To
rr)
1 11
H2
10-9
10-10
10-11
10-12166
H2O
21 26 31 36 41 46 51 56 61 66 71 76 81 86a.m.u.
N2
O2 CO2
P (T
orr)
AGILENT TURBO PUMP TECHNICAL NOTES
Figure 3 - Typical Competitor Pump
Figure 4 - Typical Agilent Pump
Figure 5
49
TURBO PUMPS
Turb
o Pu
mps
CE/CSA, EMC Electrical Specifications ComplianceCompliancetothesenormsguaranteesthattherearenolimitsontheuseofthecontrollersandturbopumpsineverytypeofambient,andthattheirusedoesn’tcreateanykindofdisturbancetoelectronicunitsconnectedtothesameline.Agilent’snewgenerationofTurbocontrollerscomplywiththelimitsgivenbythefollowingnorms:EN55011ClassAgroup1EN61000/3/2EN61000/3/3EN61000/4/2EN61000/4/3EN61000/4/4EN61010-1UNIEN291-1UNIEN292-2EN1012-2
50
AgilentVacuumProductsoffersoneofthemostcomprehensiveserviceandsupportplansintheindustry.Asaworldwide,firstclasscompanywestrivetoofferaddedvaluetoourCustomerswherevertheymaybelocated.ExcellenceinServiceandSupportisakeyfactorinaddedvalue.SupportcanbeaccomplishedwithqualifiedEngineersandanappropriatelogisticinfrastructure.Technicalskillsandinfrastructurearetwoareaswherewearecontinuouslymakingmediumandlong-terminvestments.Ourdailycustomersupportphilosophyisfocusedontwoimportantfactors:fastresponseandnohassle.ThisphilosophytranslatestothefollowingsectionsofourTurboPumpServiceandSupportPlan:• Worldwide Parts Sourcing Plan:
ThreeProgressiveLevelsofSupport• Technical Assistance:CustomerSupport,Application
Support,ApplicationTrainingAgilentVacuumProducts is committedtoprovidingourCustomerswiththemostcomprehensiveserviceplanspossible.ThefollowingpagesdetailthestandardsectionsofourTurboPumpServiceandSupportPlan.Formoreinformation,orifyouhaveaneedforcustomizedsolutions,pleasecontactyourAgilentrepresentative.Often,excellentproductsarenotenough:Agilent’sconstantpresencewithCustomerServiceasaresponsivepartneriswhatreallymakesadifference.
Worldwide Parts Sourcing Plan• Repair Program Agilentproductsofferunmatchedreliability,performance
andcleanliness.Productionrequirements,however,inevitablycreate,overtime,theneedformaintenanceandrepair.TimelyrepairatAgilentwillkeepyourproductsperformingatanoutstandinglevelallthetime.
• Advanced Exchange Program Tomaximizeuptime,andforthoseoccasionswheretimeisessential,Agilentoffersexchangeunitsforadvanceshipment.
Exchangeunitsarefullyremanufacturedtothesamestrictstandardsasnewproducts.TheyarekeptinstockinNorthAmerica,Europe,China,Japan,Korea,Singapore,TaiwanandIndia.
Assoonasrequested,yourExchangeunitcanbeshippedforovernightdelivery.ThisefficiencyisduetoourlogisticinfrastructureandistheresultofexcellentteamworkamongourServiceandCustomerServiceTeams!
TheExchangeandRepairProgramsareavailableworldwideandallowglobalOEMsandEnd-Usersconsistentdeliverytime,valuepricing,consistentpartnumbers,andsimpleorderprocessingprocedures.
• Upgrade Program TheUpgradeProgramisdesignedforcustomerswhoneedtoreplaceanAgilent(formerlyVarian)productattheendofitslife,orofoldtechnology,withanewesttechnologyproduct.
AGILENT TURBO PUMP SERVICE AND SUPPORT PLANS
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TURBO PUMPS
Turb
o Pu
mps
TheUpgradeProgramincludesproactivetechnicalinstallationsupport,bytelephoneandfull12-monthwarranty.
Agilent’sTurbopumpUpgradeProgramprovidesacustomerwiththesameoutstandingsupportdeliveredwithourserviceprograms,including:
-RMA#tracking -Replacementwithremanufacturedpumpofthenewest
technology -Advancereplacement -24-hourexpeditedordermanagement -WEBon-lineorderstatus&shipmenttracking• End User Extended Warranty TheEndUserExtendedWarrantyisaServiceAgreement
thatprovidescoverageextensionbeyondthestandard12monthswarrantyofaproduct.Itextendsforadditional12monthsthecoveragefromfailuresduetodefectsinmaterialandworkmanship.
Byextendingthewarrantyofpurchasedproducts,post-salessatisfactionisguaranteed.Thisistheresultoftherelevantcostdecreasewhilecostpredictabilityisincreased.TheEndUserExtendedWarrantyhasbeendesignedtocovertheneedsoftheEndUserMarket:
-GeneralPurposeVacuumapplications. -HighEnergyPhysicsUltraHighVacuumapplications.
Ordering Information for End User Extended Warranty
General Purpose Vacuum Applications Part NumberExtd.Warranty12MTurbo80l/sclass EW81Extd.Warranty12MTurbo300l/sclass EW300Extd.Warranty12MTurbo700l/sclass EW700Extd.Warranty12MTurbo1000l/sclass EW1000Extd.Warranty12MTurboTV1KG EWTV1KGExtd.Warranty12MTurboTV2KG EWTV2KGExtd.Warranty12MTurboTV3KG EWTV3KGExtd.Warranty12MTurbo(otherconfig.) EW969TMPHigh Energy Physics UHV Applications Part NumberExtd.WarrantyHEP12MTurbo80l/sclass EW969TV81Extd.WarrantyHEP12MTurbo300l/sclass EW969TV301Extd.WarrantyHEP12MTurbo700l/sclass EW969TV701Extd.WarrantyHEP12MTurbo1000l/sclass EW969TV1001Extd.WarrantyHEP12MTurboV2300 EW969TV2300Extd.Warranty12MTurbo(otherconfig.) EW969TMP
• Cleaning Service Agilentoffersacleaningserviceincaseswhereaturbopumpmayhavebeenexposedtochemicallyhazardousmaterials.ThisserviceisavailableworldwideandallowsglobalOEMsandEnd-Usersconsistentdeliverytime,pricing,partnumbers,andorderprocessingprocedures.
OrderingInformationforAgilent’sCleaningService
Turbo-V Pump Size Part NumberFromV60toTwisTorr304FS TURBOCLEAN1FromV450toV701Navigator TURBOCLEAN2FromV1000to3K-G/2300TwisTorr TURBOCLEAN3
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Technical AssistanceAsanAgilentCustomer,youcanrelyonanattentiveandprofessionalsupportstaff,dedicatedtoprovidingyouwiththeeasiestandmostpersonalizedservicesolutionpossible.
Customer Support• Ourtoll-freelines,withmothertongueTechnicalSupport
Engineersatworldwidelocations,allowustoprovideyouwithquickresponsestoyourneeds.
• Allissuesareenteredintoourdata-base,andbecomeavailabletoallAgilent’sTechnicalSupportCentersandtoourR&DDepartmentsforpossibleproductimprovements.
AmericasNorthAmerica: Toll-Free+1800-882-7426 Fax+1781-860-5437CentralandSouthAmerica: Tel.+1781-861-7200 Fax+1781-860-5437AsiaJapan: Toll-Free+81120-477-111 Fax+81120-565-154Korea: Toll-Free0802222452 Fax+82(0)234523947China: BeijingOffice Toll-Free8008203278 Fax+86(0)1064392765 ShanghaiOffice Toll-Free8008203278 Fax+86(0)2166285169 GuangzhouOffice Toll-Free8008203278 Fax+86(0)2086695861 ShenzhenOffice Toll-Free8008203278 Fax+86(0)75582763182Taiwan: Toll-Free0800-018-768Singapore: Toll-Free18002762622 Fax+6567540574Malaysia: Toll-Free1800880805 Fax+60367338121
India North&EastZone Toll-Free18001801517 Fax+911146237105 WestZone Toll-Free:18001801517 Fax+912230648250 SouthZone Toll-Free:18001801517 Fax+918040148991
Europe and IsraelAustria,Belgium,Finland,France,Germany,Holland,Ireland,Israel(*),Italy,Portugal,Spain,Switzerland,UK: Toll-Free00-800-234-234-00 Toll-Free-Fax00-800-345-345-00(*)From Israel dial 012 instead of initial 00
Other Countries Tel.+39011-9979-369 Fax+39011-9979-330
Application Support - Application Training• OurApplicationEngineerscanbringAgilent’sexpertisein
vacuumtechnologytoourcustomers• ApplicationSupportisaproject-basedactivitywhereour
expertsassistyousolvingtheapplicationissuesthatmightarisepre-salesorpost-sales
• Bydesigningsolutionsthatmeetcustomerneeds,Agilentaimsatcreatingapositiveandsynergeticrelationshipwithcustomers
• Ourexpertskeepyouup-to-dateonindustrialandscientificvacuumapplicationswiththegoalofoptimizingtheuseofourproductsonyoursystem
AGILENT TURBO PUMP SERVICE AND SUPPORT PLANS
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